Solid precursor container

Abstract

The utility model provides a solid precursor container, and relates to the technical field of semiconductor equipment. Comprising a bottle body, a charging hole is formed in the bottle body, a filter plate suitable for bearing a solid precursor is arranged in the bottle body, and a discharging hole is formed in the position, below the filter plate, of the bottle body; a bottle bottom is detachably installed at the bottom of the bottle body, and the bottle bottom and the discharging hole are sealed through a first copper gasket. The bottle body is provided with an air inlet channel and an air outlet channel which penetrate into the lower portion of the filter plate, a detachable blind flange is arranged on the charging hole, and the charging hole is sealed by the blind flange through a second copper gasket. Through the scheme, the process effect is improved, and the cost is reduced.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor equipment technology, and more specifically, to a solid-state precursor container. Background Technology

[0002] In existing thermal ALD processes, the precursor is generally a liquid, which is easily transported to the reaction chamber after being vaporized at high temperatures. In addition, many precursors exist in solid or solid powder form, such as bis(hexafluoroacetylacetone)copper, tris(methylcyclopentadiene)yttrium(III), and aluminum trichloride, which are generally referred to as solid sources. These sources generally need to be sublimated into gas before being used in the reaction.

[0003] Existing ALD processes utilize solid precursor containers that vaporize solid powder precursors through heating. Vapor is formed within the container, and a carrier gas inlet is located at the top. The carrier gas flows through a complex multi-layered plate perforated structure to the bottom of the container, and then directly into the process chamber via a carrier gas outlet pipe. However, the multi-layered tray structure requires effective sealing between layers, necessitating the use of sealing rings or high-precision machining to achieve metal seals. This complicates the installation and replacement of precursors. Furthermore, the multi-layered trays are prone to wear during use, causing changes in the carrier gas flow direction and affecting the process, necessitating frequent replacement. This results in high manufacturing and operating costs for the precursor container. Utility Model Content

[0004] This utility model discloses a solid precursor container, which aims to solve the problems mentioned above.

[0005] The present invention adopts the following solution:

[0006] A solid precursor container includes: a bottle body with a filling hole formed thereon; a filter plate suitable for carrying a solid precursor disposed inside the bottle body; a discharge hole formed below the filter plate in the bottle body; a bottle bottom detachably mounted on the bottom of the bottle body, and the bottle bottom and the discharge hole are sealed by a first copper gasket; an air inlet channel and an air outlet channel extending below the filter plate are provided on the bottle body; and a detachable blind flange is provided on the filling hole, the blind flange sealing the filling hole by a second copper gasket.

[0007] Furthermore, the air intake pipe passes through the filter plate, and the distance between the lower end of the air intake pipe and the bottom surface of the filter plate is 1cm to 10cm.

[0008] Furthermore, the connection between the air intake pipe and the filter plate is welded and sealed.

[0009] Furthermore, the connection between the air outlet pipe and the filter plate is welded and sealed.

[0010] Furthermore, the filter plate is welded to the inner wall of the bottle body.

[0011] Furthermore, the air inlet pipe and the air outlet pipe are welded to the bottle body, and control valve bodies are welded to the air inlet pipe and the air outlet pipe.

[0012] Furthermore, the control valve body is a manual valve or a pneumatic valve.

[0013] Furthermore, the air inlet pipe and the air outlet pipe are welded to VCR connectors at the ends of the bottle body, and the VCR connectors are equipped with VCR plugs.

[0014] Beneficial effects:

[0015] This design, by incorporating a detachable blind flange and bottle body, facilitates easier cleaning and reuse of the bottle's interior. Sealing through a first and second copper gasket improves sealing performance. Furthermore, manual or pneumatic valves are welded to the inlet and outlet pipes, offering higher safety and reliability compared to using detachable valves, and reducing the likelihood of external leakage. Maintaining a certain distance between the inlet pipe and the bottom of the filter plate ensures more uniform carrier gas diffusion. The entire precursor container has a simple internal structure and a short carrier gas flow path, facilitating rapid entry of the precursor into the outlet pipe. Attached Figure Description

[0016] Figure 1 This is a schematic diagram of the structure of a solid precursor container according to an embodiment of the present invention;

[0017] Figure 2 This is a cross-sectional structural diagram of a solid precursor container according to an embodiment of the present invention;

[0018] Figure reference numerals: 1. Inlet pipe; 2. Inlet hand valve; 3. Outlet pipe; 4. Outlet hand valve; 5. Bottle body; 6. Filter plate; 7. Filling hole; 8. Bottle bottom; 9. Second copper gasket; 10. First copper gasket; 11. Blind flange. Detailed Implementation

[0019] Combination Figure 1 and Figure 2 As shown, this embodiment provides a solid precursor container, including: a bottle body 5, a filling hole 7 formed on the bottle body 5, a filter plate 6 suitable for carrying solid precursors disposed inside the bottle body 5, and a discharge hole formed below the filter plate 6 on the bottle body 5; a bottle bottom 8 is detachably installed at the bottom of the bottle body 5, and the bottle bottom 8 and the discharge hole are sealed by a first copper gasket 10; an air inlet channel and an air outlet channel are provided on the bottle body 5, extending below the filter plate 6, and a detachable blind flange 11 is provided on the filling hole 7, the blind flange 11 being sealed by a second copper gasket 9.

[0020] In this embodiment, the inner wall of the bottle and the filter plate 6 are mechanically polished, cleaned and passivated, and EP treated to ensure cleanliness and avoid contamination of the precursor. The filling hole 7 is located at the top of the bottle 5, and the unloading hole is located at the bottom of the bottle 5. The bottle bottom 8 is detachably connected to the bottle 5 via a threaded connection or other means, making it easy to remove the bottle bottom 8 from the bottle 5. The bottle bottom 8 and the unloading hole are sealed together by a first copper gasket 10. Compared with a general sealing ring, the copper gasket has a wider range of applications and a longer service life.

[0021] The filter plate 6 is fixed to the inner wall of the bottle body 5 by welding. The filter plate 6 can be a sintered metal filter plate or a stainless steel wire woven filter plate, with a gas filtration pore size of 1~100μm. It is welded and sealed to the bottle body 5 and the air inlet pipe 1. The air inlet pipe 1 passes through the filter plate 6, and the distance between the lower end of the air inlet pipe 1 and the bottom surface of the filter plate 6 is 1cm~10cm, which allows for more uniform diffusion of the carrier gas after it enters. Here, the connections between the air inlet pipe 1, the air outlet pipe 3, and the filter plate 6 are all sealed by welding. The air inlet pipe 1 is suitable for introducing carrier gas and carrying the precursor gas that passes through the filter plate 6 out of the air outlet pipe 3. It should be noted that during the process, the entire bottle body 5 needs to be heated using external heating equipment to sublimate the solid precursor and allow it to pass through the filter plate 6 and be carried by the carrier gas to the air outlet pipe 3.

[0022] In this embodiment, the inlet pipe 1 and the outlet pipe 3 are welded to the top of the bottle body 5, and control valve bodies are welded to the inlet pipe 1 and the outlet pipe 3. The control valve bodies are manual valves or pneumatic valves. For example, in this embodiment, an inlet manual valve 2 is provided on the inlet pipe 1, and an outlet manual valve 4 is provided on the outlet pipe 3. Welding the connection improves the safety and reliability of the valves and reduces the possibility of external leakage. VCR connectors are welded to the ends of the inlet pipe 1 and the outlet pipe 3 located on the bottle body 5, and the VCR connectors are equipped with VCR plugs. Welding the VCR connectors to the inlet pipe 1 or the outlet pipe 3 provides better sealing. By configuring VCR plugs, the cleanliness of the connectors and the inside of the bottle body 5 can be maintained during use.

[0023] In this embodiment, the precursor container has a simple internal structure and a short carrier gas flow path, which is conducive to the rapid response of the precursor into the outlet pipe 3.

[0024] It should be understood that the above are only preferred embodiments of the present utility model, and the protection scope of the present utility model is not limited to the above embodiments. All technical solutions that fall within the scope of the present utility model are protected by the present utility model.

[0025] The accompanying drawings used in the above description of the embodiments only show some embodiments of the present invention and should not be regarded as a limitation of the scope. For those skilled in the art, other related drawings can be obtained from these drawings without creative effort.

Claims

1. A solid precursor container, comprising: A bottle body having a filling hole, characterized in that a filter plate suitable for carrying a solid precursor is provided inside the bottle body, and a discharge hole is formed below the filter plate; a bottle bottom is detachably installed at the bottom of the bottle body, and the bottle bottom and the discharge hole are sealed by a first copper gasket; an air inlet pipe and an air outlet pipe are provided on the bottle body extending below the filter plate, and a detachable blind flange is provided on the filling hole, the blind flange being sealed by a second copper gasket.

2. The solid precursor container according to claim 1, characterized in that, The air intake pipe passes through the filter plate, and the distance between the lower end of the air intake pipe and the bottom surface of the filter plate is 1cm to 10cm.

3. The solid precursor container according to claim 1, characterized in that, The connection between the air intake pipe and the filter plate is welded and sealed.

4. The solid precursor container according to claim 1, characterized in that, The connection between the air outlet pipe and the filter plate is welded and sealed.

5. The solid precursor container according to claim 1, characterized in that, The filter plate is welded to the inner wall of the bottle.

6. The solid precursor container according to claim 1, characterized in that, The air inlet pipe and the air outlet pipe are welded to the bottle body, and control valve bodies are welded to the air inlet pipe and the air outlet pipe.

7. The solid precursor container according to claim 6, characterized in that, The control valve body is a manual valve or a pneumatic valve.

8. The solid precursor container according to claim 6, characterized in that, The air inlet pipe and air outlet pipe are welded to VCR connectors at the ends of the bottle body, and the VCR connectors are equipped with VCR plugs.

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