Rotary multi-angle etching spraying device
By designing a rotating multi-angle etching spray device, the spray angle can be flexibly adjusted using components such as limiting balls and push blocks, which solves the problem of the single spray angle in existing devices and improves etching uniformity and the practicality of the device.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- ALLFAVOR CIRCUITS SHENZHEN CO LTD
- Filing Date
- 2025-04-25
- Publication Date
- 2026-05-12
AI Technical Summary
The existing etching spraying device can only tilt in the left and right directions, and the spraying angle adjustment is not flexible, which affects the device's performance.
A rotating multi-angle etching spray device was designed, which adjusts the spray angle forward and backward and left and right through an adjustment mechanism, including the cooperation of a limit ball, a push block, a telescopic motor assembly and a locking block, to ensure the flexible movement of the spray pipe and nozzle.
It improves the flexibility and practicality of the spraying device, allowing the spraying angle to be adjusted as needed, avoiding motion interference, and enhancing etching uniformity.
Smart Images
Figure CN224227219U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of semiconductor devices; specifically, to a rotating multi-angle etching spray device. Background Technology
[0002] An etching spraying device is an automated equipment that uses pressure to drive an etching solution to form a uniform spray, selectively corroding the surface of a metal or substrate. It is mainly used to remove copper layers or specific materials from unprotected areas to form precision lines or patterns.
[0003] Chinese patent document CN221379311U discloses an etching device. This utility model uses a first driving component and a second driving component to adjust the angle of the conveyor table and the spray pipe, so that the conveyor table can be tilted to quickly replace the etching liquid on the conveyor table and tilt the spray pipe. This further adapts to the tilted conveyor table to improve etching differences and enhance etching uniformity. Moreover, according to the process conditions of different products, the angles of the first and second driving components can be adaptively adjusted to make the etching device more widely applicable.
[0004] When the above-mentioned utility model is in operation, the spray angle of the device can be adjusted by the movement of the second driving component. However, the spray angle can only be tilted in the left and right directions, and cannot be tilted in all directions, which reduces the flexibility of the spray when the device is in use. Utility Model Content
[0005] The purpose of this utility model is to at least solve one of the technical problems existing in the prior art, and to provide a rotating multi-angle etching spraying device with the function of adjusting the spraying angle in the front-back and left-right directions as needed, thereby improving the flexibility of the spraying and the practicality of the device.
[0006] To achieve the above objectives, the present invention provides the following technical solution: a rotating multi-angle etching spray device, comprising a housing, a connection port on the front side of the housing, and the rear side of the connection port extending out of the rear side of the housing;
[0007] The housing contains a conveying assembly, and a fixing block with a U-shaped structure is fixedly connected to the top wall of the housing.
[0008] Five limiting grooves are provided on the bottom wall of the fixing block, and the fixing block extends from the lower side of each of the five limiting grooves. The five limiting grooves are arranged in a left-right arrangement.
[0009] The fixed block has five spray pipes installed inside. The lower ends of the five spray pipes extend to the lower side of the fixed block through five limiting grooves. The lower ends of the five spray pipes are all fixedly connected to nozzles. The fixed block is equipped with an adjustment mechanism, which can adjust the spray angle of the five nozzles.
[0010] The adjustment mechanism includes five limit balls, six first push blocks, second push blocks, third push blocks, a sliding groove, a first slot, a first telescopic motor assembly, a first slot, a second slot, a second telescopic motor assembly, and a second slot.
[0011] Preferably, a liquid storage tank is fixedly connected to the upper side of the outer shell, and a water supply pipe is fixedly connected to the upper end of each of the five spray pipes;
[0012] The upper ends of the five water supply pipes all extend into the interior of the liquid storage tank, and all five water supply pipes are flexible hoses that can be elastically deformed.
[0013] Preferably, all five limiting balls are fixedly sleeved on the outer surfaces of the five first telescopic motor assemblies, and the five limiting balls are rotatably connected to the interiors of the five limiting grooves respectively.
[0014] All six first push blocks are set inside the fixed block, and the six first push blocks are respectively set on the left and right sides of the five spray pipes;
[0015] The second push block is fixedly connected to the front side of the six first push blocks, and the third push block is fixedly connected to the rear side of the six first push blocks. The sliding groove is opened on the rear wall of the fixed block.
[0016] Preferably, a fixing block extends from the rear side of the sliding groove, and the third push block is slidably connected inside the sliding groove;
[0017] The first card slot is located to the left of the first push block, the second push block, and the third push block on the left side;
[0018] The first slot is a convex slot structure, and the first telescopic motor assembly is fixedly connected to the left side of the outer shell.
[0019] Preferably, the output end of the first telescopic motor assembly is fixedly connected to a first telescopic rod, and the right end of the first telescopic rod slides into the interior of the housing;
[0020] The right end of the first telescopic rod slides into the interior of the fixed block, and the right end of the first telescopic rod contacts the first push block. The first locking block slides into the interior of the first locking groove.
[0021] Preferably, the left side of the first locking block is fixedly connected to the right end of the first telescopic rod, and the first locking block has a convex block structure;
[0022] The second slot is located on the front side of the second push block, and the second slot is a convex groove structure;
[0023] The second telescopic motor assembly is fixedly connected to the front side of the fixed block, and the output end of the second telescopic motor assembly is fixedly connected to the second telescopic rod.
[0024] Preferably, the rear end of the second telescopic rod slides into the interior of the fixed block, and the rear end of the second telescopic rod contacts the front side of the second push block;
[0025] The second locking block is slidably connected inside the second locking slot. The second locking block has a convex block structure, and the front side of the second locking block is fixedly connected to the rear end of the second telescopic rod.
[0026] Compared with the prior art, the beneficial effects of this utility model are:
[0027] (1) The rotating multi-angle etching spray device can adjust the spray angle in the front-back and left-right directions as needed, thereby improving the flexibility of the device spray and enhancing its practicality.
[0028] (2) In this rotating multi-angle etching spray device, the first card block can slide back and forth inside the first card slot, and the second card block can slide left and right inside the second card slot, so that when the angle of the five nozzles is adjusted back and forth and left and right, there will be no motion interference. Attached Figure Description
[0029] The present invention will be further described below with reference to the accompanying drawings and embodiments:
[0030] Figure 1 This is a schematic diagram of the structure of a rotating multi-angle etching spray device according to the present invention;
[0031] Figure 2 This is a schematic diagram of the cross-sectional connection structure of the outer shell of this utility model;
[0032] Figure 3 This is a schematic diagram of the upper cross-sectional connection structure of the fixing block of this utility model;
[0033] Figure 4 This is a schematic diagram of the left cross-sectional connection structure of the fixing block of this utility model;
[0034] Figure 5 for Figure 3 Enlarged view of point A;
[0035] Figure 6 for Figure 3 Enlarged diagram of point B.
[0036] Reference numerals: 1. Outer shell; 2. Connection port; 3. Conveying assembly; 4. Fixing block; 5. Limiting groove; 6. Spray pipe; 7. Nozzle; 8. Limiting ball; 9. Water supply pipe; 10. Storage tank; 11. First push block; 12. Second push block; 13. Third push block; 14. Sliding groove; 15. First slot; 16. First telescopic motor assembly; 17. First telescopic rod; 18. First locking block; 19. Second slot; 20. Second telescopic motor assembly; 21. Second telescopic rod; 22. Second locking block. Detailed Implementation
[0037] This section will describe in detail the specific embodiments of the present utility model. The preferred embodiments of the present utility model are shown in the accompanying drawings. The purpose of the drawings is to supplement the textual description with graphics, so that people can intuitively and vividly understand each technical feature and the overall technical solution of the present utility model, but they should not be construed as limiting the scope of protection of the present utility model.
[0038] In the description of this utility model, it should be understood that the directional descriptions, such as up, down, front, back, left, right, etc., indicate the directional or positional relationship based on the directional or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.
[0039] In the description of this utility model, terms such as greater than, less than, and exceeding are understood to exclude the stated number, while terms such as above, below, and within are understood to include the stated number. The use of terms like "first" and "second" is merely for distinguishing technical features and should not be construed as indicating or implying relative importance, or implicitly indicating the quantity or sequence of the indicated technical features.
[0040] In the description of this utility model, unless otherwise explicitly defined, terms such as "setting," "installation," and "connection" should be interpreted broadly, and those skilled in the art can reasonably determine the specific meaning of the above terms in this utility model in conjunction with the specific content of the technical solution.
[0041] Please see Figure 1-6This utility model provides a new technical solution: a rotating multi-angle etching spraying device, including a housing 1, a connection port 2 on the front side of the housing 1, the rear side of the connection port 2 extending out of the rear side of the housing 1, a conveying assembly 3 installed inside the housing 1, which can convey objects, a fixing block 4 fixedly connected to the top wall of the housing 1, the fixing block 4 having a U-shaped block structure, five limiting grooves 5 opened on the bottom wall of the fixing block 4, the lower side of each of the five limiting grooves 5 extending out of the fixing block 4, the five limiting grooves 5 arranged left and right, five spray pipes 6 installed inside the fixing block 4, the lower ends of the five spray pipes 6 extending through the five limiting grooves 5 to the lower side of the fixing block 4, the five The lower end of each spray pipe 6 is fixedly connected to a nozzle 7, and the upper side of the outer shell 1 is fixedly connected to a liquid storage tank 10. The upper end of each of the five spray pipes 6 is fixedly connected to a water supply pipe 9, and the upper end of each of the five water supply pipes 9 extends into the interior of the liquid storage tank 10. Each of the five water supply pipes 9 is a flexible hose that can be elastically deformed. An adjustment mechanism is provided on the fixing block 4. The spray angle of the five nozzles 7 can be adjusted by the adjustment mechanism. The adjustment mechanism includes five limit balls 8, six first push blocks 11, second push blocks 12, third push blocks 13, sliding groove 14, first slot 15, first telescopic motor assembly 16, first locking block 18, second slot 19, second telescopic motor assembly 20, and second locking block 22.
[0042] Furthermore, five limiting balls 8 are fixedly sleeved on the outer surfaces of five first telescopic motor assemblies 16, and the five limiting balls 8 are rotatably connected to the interiors of five limiting grooves 5. Six first push blocks 11 are all disposed inside the fixed block 4, and the six first push blocks 11 are respectively disposed on the left and right sides of the five spray pipes 6. Second push blocks 12 are fixedly connected to the front side of the six first push blocks 11, and third push blocks 13 are fixedly connected to the rear side of the six first push blocks 11. A sliding groove 14 is opened on the rear wall of the fixed block 4, and the rear side of the sliding groove 14 extends out of the fixed block 4. The third push block 13 is slidably connected inside the sliding groove 14. A first slot 15 is opened on the left side of the left first push block 11, second push block 12 and third push block 13. The first slot 15 has a convex groove structure. The first telescopic motor assembly 16 is fixedly connected to the left side of the outer shell 1. The output end of the first telescopic motor assembly 16 is fixedly connected to a first telescopic rod 17. The right end of the first telescopic rod 17 slides into the interior of the outer casing 1. The right end of the first telescopic rod 17 slides into the interior of the fixing block 4. The right end of the first telescopic rod 17 contacts the first push block 11. The first locking block 18 is slidably connected to the interior of the first locking groove 15. The left side of the first locking block 18 is fixedly connected to the right end of the first telescopic rod 17. The first locking block 18 has a convex block structure. The second locking groove 19 is opened on the front side of the second push block 12. The second locking groove 19 has a convex groove structure. The second telescopic motor assembly 20 is fixedly connected to the front side of the fixing block 4. The output end of the second telescopic motor assembly 20 is fixedly connected to the second telescopic rod 21. The rear end of the second telescopic rod 21 slides into the interior of the fixing block 4. The rear end of the second telescopic rod 21 contacts the front side of the second push block 12. The second locking block 22 is slidably connected to the interior of the second locking groove 19. The second locking block 22 has a convex block structure. The front side of the second locking block 22 is fixedly connected to the rear end of the second telescopic rod 21.
[0043] Furthermore, at the start of operation, the substrate is fed into the interior of the outer casing 1 through the connection port 2, and the conveying component 3 will then convey the substrate backward. At the same time, the five nozzles 7 are activated, and the etching solution inside the liquid storage tank 10 will enter the interior of the five water supply pipes 9. Then, the etching solution will reach the interior of the five spray pipes 6 through the five water supply pipes 9. Finally, the etching solution will be sprayed downward through the five nozzles 7 to spray the substrate on the lower side. When it is necessary to adjust the spray angle, the first telescopic motor component 16 is activated first. The first telescopic motor component 16 drives the first telescopic rod 17 to extend and retract. Then, the first telescopic rod 17 will drive the first locking block 18 to slide left and right. Then, the first locking block 18 will drive the six first push blocks 11, second push blocks 12 and third push blocks 13 to slide left and right simultaneously. Then, the six first push blocks 11 will contact the five spray pipes 6, thereby pushing the five spray pipes 6 to move left and right. The five spray pipes 6 will move around the five limiting balls 8 as the center, thereby driving the five nozzles 7 to adjust the angle left and right.
[0044] Furthermore, when it is necessary to adjust the spray angle of the five nozzles 7 forward and backward, the second telescopic motor assembly 20 is activated. The second telescopic motor assembly 20 transmits power from the output end, driving the second telescopic rod 21 to extend and retract, thereby driving the second locking block 22 to slide forward and backward. The second locking block 22 then drives the second push block 12, the six first push blocks 11, and the third push block 13 to slide forward and backward. The second push block 12 and the third push block 13 will then contact the five spray pipes 6, thereby pushing the five spray pipes 6 to move forward and backward. The five spray pipes 6 will move around the five limiting balls 8 as their centers, thereby driving the five nozzles 7 to adjust their forward and backward angles. At the same time, because the first locking block 18 can slide forward and backward inside the first locking slot 15, and the second locking block 22 can slide left and right inside the second locking slot 19, there will be no movement interference when adjusting the forward and backward and left and right angles of the five nozzles 7.
[0045] Furthermore, this method allows for adjustment of the spray angle in both forward and backward and left and right directions as needed, thereby improving the flexibility of the spraying device and enhancing its practicality.
[0046] Structural Description: Outer Shell 1: The overall external frame of the device, which protects the internal components and supports other parts, and provides installation space for the internal components.
[0047] Connection port 2: It is located on the front side of the outer casing 1 and extends out of the rear side of the outer casing 1. It is used to feed the substrate into the device and is the channel for the substrate to enter the device.
[0048] Conveying component 3: Installed inside the housing 1, its function is to convey the substrate into the feeding device and convey it backward for subsequent spraying treatment. This structure is the same as the conveying component in the prior art document with publication number CN221379311 U. Since it does not fall within the scope of innovation of this application, it is not described in detail in the specification.
[0049] Fixed block 4: It is fixedly connected to the top wall of the outer shell 1 and has a U-shaped block structure, providing a base for installation and positioning of components such as the spray pipe 6.
[0050] Limiting groove 5: It is formed on the bottom wall of the fixing block 4. There are five limiting grooves in total. The fixing block 4 extends from the lower side and is arranged in a left-right arrangement. It is used to limit the spray pipe 6 so that the spray pipe 6 can move around the limiting ball 8 as the center.
[0051] Spray pipe 6: Installed inside the fixed block 4, there are five spray pipes in total. The lower end extends through the limiting groove 5 to the lower side of the fixed block 4, and is used to transport the etching liquid to the nozzle 7.
[0052] Nozzle 7: There are five nozzles in total, which are fixedly connected to the lower end of the five spray pipes 6. Their function is to spray the etching solution in the spray pipes 6 downwards to perform spray etching on the substrate.
[0053] Limiting balls 8: There are five limiting balls 8 in total, all of which are fixedly sleeved on the outer surface of the five first telescopic motor assemblies 16 and rotatably connected to the inside of the five limiting grooves 5, serving as the rotation center of the spray pipe 6, so that the spray pipe 6 can move around the limiting balls 8 as the center, thereby realizing the adjustment of the spray angle.
[0054] Water supply pipes 9: There are five water supply pipes 9 in total. The upper end of each pipe is fixedly connected to the upper end of the five spray pipes 6. The upper end extends into the interior of the liquid storage tank 10. The pipes are flexible and deformable, and are used to transport the etching solution in the liquid storage tank 10 to the spray pipes 6.
[0055] Storage tank 10: Fixedly connected to the upper side of the outer shell 1, used to store etching solution and provide etching solution source for spraying operation.
[0056] First push block 11: There are six first push blocks 11 in total, all of which are set inside the fixed block 4 and respectively set on the left and right sides of the five spray pipes 6. Under the action of the adjustment mechanism, they contact the spray pipes 6 and push the spray pipes 6 to move left and right, so as to realize the left and right adjustment of the spray angle.
[0057] The second push block 12 is fixedly connected to the front side of the six first push blocks 11 and cooperates with the third push block 13. Under the action of the adjustment mechanism, it pushes the spray pipe 6 to move back and forth, thereby realizing the adjustment of the spray angle.
[0058] The third pusher block 13 is fixedly connected to the rear side of the six first pushers 11 and slidably connected inside the sliding groove 14, and is used to push the spray pipe 6 when adjusting back and forth.
[0059] Sliding groove 14: It is formed on the rear wall of the fixed block 4, and the fixed block 4 extends out from the rear side to provide a track for the sliding of the third push block 13.
[0060] First slot 15: Located on the left side of the first push block 11, the second push block 12 and the third push block 13, it is a convex slot structure used to accommodate the first slot 18 and realize the left and right sliding of the first push block 11, the second push block 12 and the third push block 13.
[0061] First telescopic motor assembly 16: fixedly connected to the left side of housing 1, with a first telescopic rod 17 fixedly connected to the output end, used to drive the first telescopic rod 17 to extend and retract.
[0062] First telescopic rod 17: The right end slides into the housing 1 and the fixed block 4, and contacts the first push block 11. Under the drive of the first telescopic motor assembly 16, it pushes the first push block 11 to slide left and right.
[0063] First locking block 18: It is slidably connected inside the first locking slot 15, and its left side is fixedly connected to the right end of the first telescopic rod 17. It is a convex block structure used to transmit the power of the first telescopic rod 17 and drive the first push block 11 and other components to slide left and right.
[0064] Second slot 19: It is formed on the front side of the second push block 12 and is a convex groove structure. It is used to accommodate the second slot 22 and realize the back-and-forth sliding of the second push block 12 and other components.
[0065] The second telescopic motor assembly 20 is fixedly connected to the front side of the fixed block 4, and its output end is fixedly connected to the second telescopic rod 21, which is used to drive the second telescopic rod 21 to extend and retract.
[0066] The second telescopic rod 21 extends slidably into the interior of the fixed block 4 at its rear end, and contacts the front side of the second push block 12. It is used to transmit power and push the second push block 12 and other components to slide back and forth.
[0067] The second locking block 22 is slidably connected inside the second locking groove 19. Its front side is fixedly connected to the rear end of the second telescopic rod 21. It has a convex block structure and is used to transmit the power of the second telescopic rod 21 to drive the second push block 12 and other components to slide back and forth.
[0068] The embodiments of the present utility model have been described in detail above with reference to the accompanying drawings. However, the present utility model is not limited to the above embodiments. Within the scope of knowledge possessed by those skilled in the art, various changes can be made without departing from the spirit of the present utility model.
Claims
1. A rotating multi-angle etching spray device, comprising a housing (1), a connection port (2) being provided on the front side of the housing (1), and the rear side of the connection port (2) extending out of the rear side of the housing (1); The housing (1) is equipped with a conveying assembly (3), and a fixing block (4) is fixedly connected to the top wall of the housing (1). The fixing block (4) is a U-shaped block structure. Five limiting grooves (5) are provided on the bottom wall of the fixing block (4), and the fixing block (4) extends from the lower side of each of the five limiting grooves (5). The five limiting grooves (5) are arranged in a left-right arrangement. The fixed block (4) is equipped with five spray pipes (6), the lower ends of the five spray pipes (6) extend to the lower side of the fixed block (4) through five limiting grooves (5), and each of the five spray pipes (6) is fixedly connected to a nozzle (7). The feature is that: The fixing block (4) is provided with an adjustment mechanism, which can adjust the spray angle of the five nozzles (7); The adjustment mechanism includes five limit balls (8), six first push blocks (11), second push blocks (12), third push blocks (13), sliding groove (14), first slot (15), first telescopic motor assembly (16), first slot (18), second slot (19), second telescopic motor assembly (20), and second slot (22).
2. The rotating multi-angle etching spray device according to claim 1, characterized in that: A liquid storage tank (10) is fixedly connected to the upper side of the outer shell (1), and a water supply pipe (9) is fixedly connected to the upper end of each of the five spray pipes (6). The upper ends of the five water supply pipes (9) extend into the interior of the liquid storage tank (10), and the five water supply pipes (9) are all flexible hoses that can be elastically deformed.
3. The rotating multi-angle etching spray device according to claim 1, characterized in that: The five limiting balls (8) are all fixedly sleeved on the outer surface of the five first telescopic motor assemblies (16), and the five limiting balls (8) are respectively rotatably connected to the inside of the five limiting grooves (5); All six first push blocks (11) are set inside the fixed block (4), and the six first push blocks (11) are respectively set on the left and right sides of the five spray pipes (6); The second push block (12) is fixedly connected to the front side of the six first push blocks (11), the third push block (13) is fixedly connected to the rear side of the six first push blocks (11), and the sliding groove (14) is opened on the rear wall of the fixed block (4).
4. The rotating multi-angle etching spray device according to claim 3, characterized in that: A fixing block (4) extends from the rear side of the sliding groove (14), and a third push block (13) is slidably connected inside the sliding groove (14). The first card slot (15) is located on the left side of the first push block (11), the second push block (12) and the third push block (13); The first slot (15) is a convex slot structure, and the first telescopic motor assembly (16) is fixedly connected to the left side of the outer shell (1).
5. The rotating multi-angle etching spray device according to claim 4, characterized in that: The output end of the first telescopic motor assembly (16) is fixedly connected to the first telescopic rod (17), and the right end of the first telescopic rod (17) slides into the interior of the outer shell (1); The right end of the first telescopic rod (17) slides into the interior of the fixed block (4), and the right end of the first telescopic rod (17) contacts the first push block (11). The first locking block (18) slides into the interior of the first locking groove (15).
6. The rotating multi-angle etching spray device according to claim 5, characterized in that: The left side of the first locking block (18) is fixedly connected to the right end of the first telescopic rod (17), and the first locking block (18) is a convex block structure; The second slot (19) is located on the front side of the second push block (12), and the second slot (19) is a convex slot structure; The second telescopic motor assembly (20) is fixedly connected to the front side of the fixed block (4), and the output end of the second telescopic motor assembly (20) is fixedly connected to the second telescopic rod (21).
7. The rotating multi-angle etching spray device according to claim 6, characterized in that: The rear end of the second telescopic rod (21) slides into the interior of the fixed block (4), and the rear end of the second telescopic rod (21) contacts the front side of the second push block (12); The second locking block (22) is slidably connected inside the second locking slot (19). The second locking block (22) is a convex block structure. The front side of the second locking block (22) is fixedly connected to the rear end of the second telescopic rod (21).