Vacuum cooling circulating water pump for semiconductor equipment

Abstract

The utility model discloses a vacuum cooling circulating water pump for semiconductor equipment, which comprises a circulating water pump body and a preposed pipe, the circulating water pump body is provided with a water inlet and a water outlet, the water inlet is fixedly connected with the preposed pipe, the preposed pipe is provided with a first valve and a second valve, a preposed filter screen is fixed in the preposed pipe through a screw, and the preposed filter screen is fixedly connected with the preposed pipe through a screw. A backwashing pipe communicated with the front-mounted pipe is mounted on the side surface of the front-mounted pipe, a third valve is mounted on the backwashing pipe, an ultrasonic vibrator inserted into the backwashing pipe is mounted on the backwashing pipe, the front-mounted filter screen is positioned between the first valve and the second valve, and a blow-off pipe is mounted on the front-mounted pipe on the left side of the front-mounted filter screen. Impurities in water are filtered conveniently, abrasion of the impurities to the interior of the pump body is reduced, the filter screen is cleaned conveniently, and manpower is saved.

Description

Technical Field

[0001] This utility model relates to the field of circulating water pump technology, and in particular to a vacuum cooling circulating water pump for semiconductor equipment. Background Technology

[0002] Semiconductor manufacturing equipment generates significant heat during operation, requiring circulating water pumps to deliver large quantities of tap water for cooling. However, tap water often contains particulate impurities. These impurities enter the pump body and rub against the impeller, causing wear and affecting its lifespan. Therefore, circulating water pumps typically require a pre-filter to remove these particles. However, after a period of use, impurities clog the filter mesh, necessitating manual disassembly and cleaning, which is inconvenient. Therefore, there is an urgent need to develop a vacuum cooling circulating water pump for semiconductor equipment that facilitates water impurity filtration, reduces wear on the pump body, and allows for easy filter cleaning, saving manpower. This would overcome the shortcomings of current applications and meet current needs. Utility Model Content

[0003] The purpose of this invention is to provide a vacuum cooling circulating water pump for semiconductor equipment to solve the problems mentioned in the background art.

[0004] To achieve the above objectives, the present invention adopts the following technical solution:

[0005] A vacuum cooling circulating water pump for semiconductor equipment includes a circulating water pump body and a pre-filter. The circulating water pump body is provided with an inlet and an outlet. The inlet is fixedly connected to the pre-filter. A first valve and a second valve are installed on the pre-filter. A pre-filter screen is fixed inside the pre-filter by screws. A backwash pipe is installed on the side of the pre-filter and communicates with it. A third valve is installed on the backwash pipe. An ultrasonic vibrator inserted into the backwash pipe is installed inside the backwash pipe. The pre-filter screen is located between the first valve and the second valve. A drain pipe is installed on the left side of the pre-filter screen on the pre-filter.

[0006] Preferably, the pre-filter is made of stainless steel.

[0007] Preferably, the connection point between the left end of the backwash pipe and the pre-filter is located to the left of the first valve, and the connection point between the right end of the backwash pipe and the pre-filter is located to the right of the pre-filter.

[0008] Preferably, the bottom of the sewage pipe is detachably connected to a plug via a thread.

[0009] The beneficial effects of this utility model are as follows: This vacuum cooling circulating water pump for semiconductor equipment, during operation, draws tap water and delivers it to the cooling water tank of the semiconductor equipment to remove heat. Tap water enters through the pre-filter pipe. At this time, the first and second valves are open, and the third valve is closed. Impurities in the water are filtered out through the pre-filter, reducing the amount of impurities entering the circulating water pump body. After a period of use, the first and second valves are closed, the third valve is opened, and the ultrasonic vibrator is activated. The plug is removed, and water flows from the backwash pipe to the back side of the pre-filter. The water then flows in the opposite direction, passing through the pre-filter and exiting through the drain pipe. This backwashing of the pre-filter is achieved through the water flow, while the ultrasonic vibrator vibrates the water flow. Under the dual action of vibration and backwashing, impurities clogging the pre-filter mesh are removed. In summary, this utility model facilitates the filtration of impurities in water, reduces wear on the pump body, and makes filter cleaning convenient, saving manpower. Attached Figure Description

[0010] Figure 1 This is a three-dimensional structural diagram of the present invention.

[0011] Figure 2 This is a partial structural diagram of the present invention. Figure 1 .

[0012] Figure 3 This is a partial structural diagram of the present invention. Figure 2 .

[0013] Figure 4 This is an internal view of the pre-emitter tube in this utility model.

[0014] Legend:

[0015] 1. Circulating water pump body; 101. Inlet; 102. Outlet; 2. Pre-filter; 3. First valve; 4. Second valve; 5. Backwash pipe; 6. Third valve; 7. Ultrasonic vibrator; 8. Drain pipe; 801. Plug; 9. Pre-filter. Detailed Implementation

[0016] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of the present utility model.

[0017] Specific implementation examples are given below.

[0018] See Figures 1-4In this embodiment of the present invention, a vacuum cooling circulating water pump for semiconductor equipment includes a circulating water pump body 1 and a pre-filter pipe 2. The circulating water pump body 1 is provided with an inlet 101 and an outlet 102. The inlet 101 is fixedly connected to the pre-filter pipe 2, which is connected to an external tap water source. The outlet 102 is connected to the cooling water tank of the external semiconductor equipment. A first valve 3 and a second valve 4 are installed on the pre-filter pipe 2. A pre-filter screen 9 is fixed inside the pre-filter pipe 2 by screws. The pre-filter screen 9 is made of stainless steel, giving it good corrosion resistance. A backwash pipe 5 is installed on the side of the pre-filter pipe 2 and is connected to it. A third valve 6 is installed on the backwash pipe 5. An ultrasonic vibrator 7 is installed inside the backwash pipe 5. The left end of the backwash pipe 5 is connected to the pre-filter pipe 2 at the left side of the first valve 3. The right end of the backwash pipe 5 is connected to the pre-filter pipe 2 at the right side of the pre-filter screen 9. The pre-filter screen 9 is located between the first valve 3 and the second valve 4. A drain pipe 8 is installed on the left side of the pre-filter screen 9 on the pre-filter pipe 2. A plug 801 is detachably connected to the bottom of the drain pipe 8 by a thread.

[0019] Working Principle: This vacuum cooling circulating water pump for semiconductor equipment draws tap water through the pump body 1 and delivers it to the cooling water tank of the semiconductor equipment to remove heat. Tap water enters through the pre-filter pipe 2. At this time, the first valve 3 and the second valve 4 are open, and the third valve 6 is closed. Impurities in the water are filtered out through the pre-filter screen 9, reducing the amount of impurities entering the circulating water pump body 1. After a period of use, the first valve 3 and the second valve 4 are closed, the third valve 6 is opened, and the ultrasonic vibrator 7 is activated. The plug 801 is removed, and the water flows from the backwash pipe 5 to the back side of the pre-filter screen 9. The water flows in the opposite direction, passing through the pre-filter screen 9 and being discharged from the drain pipe 8. The water flow backwashes the pre-filter screen 9, and at the same time, the ultrasonic vibrator 7 vibrates the water flow. Under the dual action of vibration and backwashing, the impurities clogging the mesh of the pre-filter screen 9 are cleaned.

[0020] Furthermore, it should be noted that, in the description of this utility model, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0021] The above description is only a preferred embodiment of the present utility model, but the protection scope of the present utility model is not limited thereto. Any equivalent substitutions or changes made by those skilled in the art within the technical scope disclosed in the present utility model, based on the technical solution and the inventive concept of the present utility model, should be included within the protection scope of the present utility model.

Claims

1. A vacuum cooling circulating water pump for semiconductor equipment, characterized in that, The system includes a circulating water pump body (1) and a pre-pipe (2). The circulating water pump body (1) is provided with an inlet (101) and an outlet (102). The inlet (101) is fixedly connected to the pre-pipe (2). The pre-pipe (2) is equipped with a first valve (3) and a second valve (4). A pre-filter (9) is fixed inside the pre-pipe (2) by screws. A backwash pipe (5) is installed on the side of the pre-pipe (2) and communicates with it. A third valve (6) is installed on the backwash pipe (5). An ultrasonic vibrator (7) is installed inside the backwash pipe (5). The pre-filter (9) is located between the first valve (3) and the second valve (4). A drain pipe (8) is installed on the left side of the pre-filter (9) on the pre-pipe (2).

2. The vacuum cooling circulating water pump for semiconductor equipment according to claim 1, characterized in that, The pre-filter (9) is made of stainless steel.

3. The vacuum cooling circulating water pump for semiconductor equipment according to claim 1, characterized in that, The connection between the left end of the backwash pipe (5) and the pre-filter pipe (2) is located to the left of the first valve (3), and the connection between the right end of the backwash pipe (5) and the pre-filter pipe (2) is located to the right of the pre-filter screen (9).

4. The vacuum cooling circulating water pump for semiconductor equipment according to claim 1, characterized in that, The bottom of the drain pipe (8) is detachably connected to a plug (801) via a thread.

Images