Etching structure

Abstract

The utility model relates to the technical field of etching equipment, and discloses an etching structure which comprises a tank body, a first motor is fixedly assembled at the bottom of the tank body, a sliding groove is formed in the outer wall of the tank body, a lead screw is fixedly assembled on an output shaft of the first motor, a lifting block is connected to the outer wall of the lead screw in a threaded mode, and the lifting block is fixedly connected with the bottom of the tank body. A fixing rod is fixedly assembled at the top of the lifting block, and a top cover is fixedly assembled at the tail end of the fixing rod. According to the etching structure, through the arrangement of the tank body, the first motor, the sliding groove, the lead screw, the lifting block, the fixing rod, the top cover and the storage tank, in the operation process of the equipment, a user can lift a filter screen through operation of the first motor, so that the user can conveniently place a sample; and silicon dioxide and potassium iodide are utilized to soak the sample in the operation process, so that the condition of excessive etching is avoided, the etching precision of a user on the sample is further guaranteed, and the practicability of the equipment is also improved.

Description

Technical Field

[0001] This utility model relates to the field of etching equipment technology, specifically to an etching structure. Background Technology

[0002] MOS integrated circuits are integrated circuits composed primarily of metal, oxide, and semiconductor field-effect transistors.

[0003] Integrated circuits often need to be tested through crater testing. Since the barrier metal layer in the sample has varying thicknesses, it is easy for the barrier metal layer to be over-etched or damaged during the etching process, which reduces the practicality of existing equipment and the etching accuracy of the sample for users. To address this, we propose an etching structure. Utility Model Content

[0004] To address the shortcomings of existing technologies, this invention provides an etching structure that solves the problems mentioned in the background.

[0005] This utility model provides the following technical solution: an etching structure, including a tank body, a motor fixedly mounted at the bottom of the tank body, a groove formed on the outer wall of the tank body, a lead screw fixedly mounted on the output shaft of the motor, a lifting block threadedly connected to the outer wall of the lead screw, a fixing rod fixedly mounted on the top of the lifting block, a top cover fixedly mounted at the end of the fixing rod, a storage tank fixedly mounted on the top of the top cover, a power supply and a controller fixedly mounted on the top of the storage tank, a liquid pump fixedly mounted on the outer wall of the storage tank, a feeding pipe fixedly mounted at the output port of the liquid pump, and a groove formed on the inner wall of the storage tank. A liquid level sensor is fixedly mounted at the bottom. A round rod is fixedly mounted at the bottom of the top cover. A movable groove is formed on the outer wall of the round rod. A lifting plate is slidably connected to the inner wall of the movable groove. A second motor is fixedly mounted at the top of the lifting plate. A gear is fixedly mounted on the output shaft of the second motor. A turntable is rotatably connected to the bottom of the lifting plate. A toothed groove is formed on the outer wall of the turntable. A scraper is fixedly mounted on the outer wall of the turntable. A filter screen is fixedly mounted at the bottom of the movable groove. A vibrator is provided on the inner wall of the tank. A connecting rod is fixedly mounted on the top of the vibrator. An electric telescopic rod is also fixedly mounted at the bottom of the top cover.

[0006] As a preferred embodiment of this utility model, there are two feeding pipes, and both feeding pipes are symmetrically distributed along the inner wall of the tank. The top end of the connecting rod is fixedly assembled with the outer wall of the feeding pipe, and the outer wall of the vibrator is slidably connected with the outer wall of the lifting plate.

[0007] As a preferred technical solution of this utility model, the inner wall of the tooth groove meshes with the outer wall of the gear, and after the lifting plate descends by 5cm, the bottom of the scraper overlaps with the top of the filter screen.

[0008] As a preferred embodiment of this utility model, the outer wall of the filter screen is slidably connected to the inner wall of the tank, and the interior of the storage tank is connected to the interior of the tank through a feeding pipe.

[0009] As a preferred embodiment of the present invention, the number of storage tanks is two, one of which is filled with silicon dioxide etching solution and the other is filled with potassium iodide etching solution.

[0010] As a preferred embodiment of this utility model, a warning light is fixedly mounted on the outer wall of the storage tank, and the warning light is electrically connected to the power supply, the controller and the liquid level sensor respectively.

[0011] As a preferred embodiment of this utility model, the output shaft of the electric telescopic rod is fixedly assembled with the top of the lifting plate, and the inner wall of the lifting plate is slidably connected with the inner wall of the movable groove.

[0012] As a preferred embodiment of this utility model, the gears and scrapers are symmetrically distributed along the outer wall of the turntable, and there is a 1cm gap between them.

[0013] Compared with the prior art, the present invention has the following beneficial effects:

[0014] 1. This etching structure, through the configuration of a tank, motor 1, slide rail, lead screw, lifting block, fixing rod, top cover, and storage tank, allows the user to raise the filter screen during operation via motor 1, facilitating sample placement. Furthermore, the sample is immersed in silicon dioxide and potassium iodide during operation to prevent over-etching, thus ensuring the etching accuracy and improving the equipment's practicality.

[0015] 2. This etching structure, through the setting of motor 2, turntable, toothed groove, gear, scraper, lifting plate, and electric telescopic rod, enables the equipment to scrape the filter screen by rotating the scraper during operation, thereby achieving the effect of self-cleaning the filter screen and improving the user's maintenance efficiency and automation. Attached Figure Description

[0016] Figure 1 This is a three-dimensional structural diagram of the present invention;

[0017] Figure 2 This is a side view of the structure of this utility model;

[0018] Figure 3 This is a side sectional view of the present invention.

[0019] Figure 4This is a schematic diagram of the movable groove structure of this utility model;

[0020] Figure 5 This is a schematic diagram of the electric telescopic pole structure of this utility model.

[0021] In the diagram: 1. Tank body; 2. Motor 1; 3. Slide groove; 4. Lead screw; 5. Lifting block; 6. Fixed rod; 7. Top cover; 8. Storage tank; 9. Power supply; 10. Controller; 11. Feeding pipe; 12. Round rod; 13. Movable groove; 14. Lifting plate; 15. Motor 2; 16. Turntable; 17. Gear groove; 18. Gear; 19. Electric telescopic rod; 20. Liquid level sensor; 21. Scraper; 22. Filter screen; 23. Liquid pump; 24. Vibrator; 25. Connecting rod. Detailed Implementation

[0022] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0023] Please see Figure 1-5 An etched structure includes a tank body 1. A motor 2 is fixedly mounted at the bottom of the tank body 1. A groove 3 is formed on the outer wall of the tank body 1. A lead screw 4 is fixedly mounted on the output shaft of the motor 2. A lifting block 5 is threadedly connected to the outer wall of the lead screw 4. A fixing rod 6 is fixedly mounted on the top of the lifting block 5. A top cover 7 is fixedly mounted at the end of the fixing rod 6. A storage tank 8 is fixedly mounted on the top of the top cover 7. A power supply 9 and a controller 10 are fixedly mounted on the top of the storage tank 8. A liquid pump 23 is fixedly mounted on the outer wall of the storage tank 8. A feeding pipe 11 is fixedly mounted at the output port of the liquid pump 23. A liquid level sensor 20 is fixedly mounted on the bottom of the inner wall of the storage tank 8. A round rod 12 is fixedly mounted on the bottom of the top cover 7. A movable groove 13 is opened on the outer wall of the round rod 12. A lifting plate 14 is slidably connected to the inner wall of the movable groove 13. A motor 15 is fixedly mounted on the top of the lifting plate 14. A gear 18 is fixedly mounted on the output shaft of the motor 15. A turntable 16 is rotatably connected to the bottom of the lifting plate 14. A toothed groove 17 is opened on the outer wall of the turntable 16. A scraper 21 is fixedly mounted on the outer wall of the turntable 16. A filter screen 22 is fixedly mounted at the bottom of the movable groove 13. A vibrator 24 is provided on the inner wall of the tank body 1. A connecting rod 25 is fixedly mounted on the top of the vibrator 24. An electric telescopic rod 19 is also fixedly mounted on the bottom of the top cover 7.

[0024] In the above structure, the setup of tank 1, motor 2, slide 3, lead screw 4, lifting block 5, fixing rod 6, top cover 7, storage tank 8, power supply 9, and controller 10 allows the user to raise the top cover 7 to expose the filter 22 during use. This facilitates placing the integrated circuit board on the filter 22, and then lowering the filter 22 to seal the tank 1. The pump 23 then draws silicon dioxide etching solution into the tank 1, immersing the integrated circuit board for two to three minutes. After immersion, the user can raise the filter 22 again to remove the sample from the etching solution, making it easy to retrieve. Simultaneously, the scraper 21 removes any residue from the filter 22, thus improving the automation of the equipment and the user's maintenance efficiency.

[0025] In a preferred embodiment, there are two feeding pipes 11, and both feeding pipes 11 are symmetrically distributed along the inner wall of the tank 1. The top end of the connecting rod 25 is fixedly assembled with the outer wall of the feeding pipe 11, and the outer wall of the vibrator 24 is slidably connected with the outer wall of the lifting plate 14.

[0026] In the above structure, through the connecting rod 25 and the oscillator 24, after the user extracts the sample, the user can directly place the sample in the connecting rod 25. The operation of another liquid pump 23 is used to allow potassium iodide etching solution to enter the connecting rod 25. After soaking for three minutes, the sample can be further deburred and passivated. Thus, potassium iodide etching solution is used to replace hot phosphoric acid etching of the aluminum metal layer, thereby avoiding the etching of the barrier metal layer during the crater test.

[0027] In a preferred embodiment, the inner wall of the tooth groove 17 meshes with the outer wall of the gear 18, and after the lifting plate 14 descends by 5cm, the bottom of the scraper 21 overlaps with the top of the filter screen 22.

[0028] In the above structure, through the setting of the lifting plate 14 and scraper 21, the user can clean the filter screen 22 by lifting the lifting plate 14 to clean the impurities adhering to the inner wall of the movable groove 13 while cleaning the filter screen 22 with the scraper 21. This ensures the cleaning effect of the internal components of the equipment and further improves the automation of the equipment.

[0029] In a preferred embodiment, the outer wall of the filter screen 22 is slidably connected to the inner wall of the tank 1, and the interior of the storage tank 8 is connected to the interior of the tank 1 through the feeding pipe 11.

[0030] In the above structure, the tank 1 and filter 22 are designed to isolate the sample during operation, ensuring that the sample is immersed in the etching solution while also facilitating the user to extract the sample after the operation is completed. This makes the operation easier for the user and improves the user's work efficiency.

[0031] In a preferred embodiment, there are two storage tanks 8, one of which is filled with silicon dioxide etching solution and the other is filled with potassium iodide etching solution.

[0032] In the above structure, the two storage tanks 8 allow the device to use silicon dioxide and potassium iodide etching solutions instead of traditional etching solutions when the thickness of the barrier metal layer of the sample varies during use. This avoids over-etching of the barrier metal layer and improves the etching accuracy of the sample.

[0033] In a preferred embodiment, a warning light is fixedly mounted on the outer wall of the storage tank 8, and the warning light is electrically connected to the power supply 9, the controller 10 and the liquid level sensor 20 respectively.

[0034] In the above structure, the storage tank 8, power supply 9, controller 10 and liquid level sensor 20 are configured so that the equipment can monitor the etching solution during operation by using the liquid level sensor 20. This ensures that the user is alerted by a warning light when the liquid level drops, thereby ensuring a sufficient supply of etching solution and further improving the practicality of the equipment.

[0035] In a preferred embodiment, the output shaft of the electric telescopic rod 19 is fixedly assembled to the top of the lifting plate 14, and the inner wall of the lifting plate 14 is slidably connected to the inner wall of the movable groove 13.

[0036] In the above structure, the movable groove 13 and the lifting plate 14 structure enable the lifting plate 14 to clean the impurities stuck to the movable groove 13 by extending the output shaft of the electric telescopic rod 19 during operation, thereby ensuring that the self-cleaning function of the equipment can operate normally and improving the maintenance efficiency of the equipment for the user.

[0037] In a preferred embodiment, both the gear 18 and the scraper 21 are symmetrically distributed along the outer wall of the turntable 16, and there is a 1cm gap between them.

[0038] In the above structure, the gear 18 and scraper 21 are designed so that when the equipment is running, the rotation of the gear 18 causes the turntable 16 to rotate, so that the scraper 21 can descend and scrape the top of the filter screen 22. The arrangement of the two can avoid the scraper 21 being blocked by the gear 18 when rotating, thus ensuring the normal operation of the equipment.

[0039] Working principle: After assembling the device, the user first raises the lifting block 5 using motor 2, causing the filter screen 22 to rise along with the fixed rod 6, thus exposing the filter screen 22. The user can then place the sample on the filter screen 22. The filter screen 22 is then lowered to return to its original position. Simultaneously, the liquid pump 23 pumps silicon dioxide etching solution into the tank 1 through the feed pipe 11, thus immersing the sample. Impurities will be generated during the immersion process, causing them to adhere to the inner wall of the movable tank 13. After immersion, the user can raise the filter screen 22 again to remove the sample from the etching solution, allowing the user to directly apply the sample to the etching solution. The sample is extracted, and then the scraper 21 is rotated by the operation of motor 25, thereby achieving the self-cleaning effect of filter screen 22. After self-cleaning, the user can directly place the sample in shaker 24, and then the operation of another liquid pump 23 will bring potassium iodide etching solution into shaker 24 to soak the sample. The operation is completed after soaking for three minutes, which improves the automation of the equipment. Microscopic observation is used to confirm whether the aluminum metal layer has been removed cleanly. If it has not been removed cleanly, the removal operation can be repeated by shaking. After replacing the etching solution, it can be ensured that the barrier metal layer of various samples can be etched evenly, ensuring the etching accuracy of the sample by the user.

[0040] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. An etched structure, characterized in that, The container includes a tank body (1), a motor (2) fixedly mounted at the bottom of the tank body (1), a groove (3) provided on the outer wall of the tank body (1), a lead screw (4) fixedly mounted on the output shaft of the motor (2), a lifting block (5) threadedly connected to the outer wall of the lead screw (4), a fixing rod (6) fixedly mounted on the top of the lifting block (5), a top cover (7) fixedly mounted on the end of the fixing rod (6), a storage tank (8) fixedly mounted on the top of the top cover (7), a power supply (9) and a controller (10) fixedly mounted on the top of the storage tank (8), a liquid pump (23) fixedly mounted on the outer wall of the storage tank (8), a feeding pipe (11) fixedly mounted on the output port of the liquid pump (23), a liquid level sensor (20) fixedly mounted on the bottom of the inner wall of the storage tank (8), and the top cover ( 7) is fixedly fitted with a round rod (12), the outer wall of the round rod (12) is provided with a movable groove (13), the inner wall of the movable groove (13) is slidably connected with a lifting plate (14), the top of the lifting plate (14) is fixedly fitted with a motor (15), the output shaft of the motor (15) is fixedly fitted with a gear (18), the bottom of the lifting plate (14) is rotatably connected with a turntable (16), the outer wall of the turntable (16) is provided with a toothed groove (17), the outer wall of the turntable (16) is fixedly fitted with a scraper (21), the bottom end of the movable groove (13) is fixedly fitted with a filter screen (22), the inner wall of the tank (1) is provided with a vibrator (24), the top of the vibrator (24) is fixedly fitted with a connecting rod (25), and the bottom of the top cover (7) is also fixedly fitted with an electric telescopic rod (19).

2. The etching structure according to claim 1, characterized in that, There are two feeding pipes (11), and both feeding pipes (11) are symmetrically distributed along the inner wall of the tank (1). The top of the connecting rod (25) is fixedly assembled with the outer wall of the feeding pipe (11), and the outer wall of the vibrator (24) is slidably connected with the outer wall of the lifting plate (14).

3. The etching structure according to claim 1, characterized in that, The inner wall of the tooth groove (17) meshes with the outer wall of the gear (18), and after the lifting plate (14) descends by 5cm, the bottom of the scraper (21) overlaps with the top of the filter screen (22).

4. The etching structure according to claim 1, characterized in that, The outer wall of the filter screen (22) is slidably connected to the inner wall of the tank (1), and the interior of the storage tank (8) is connected to the interior of the tank (1) through the feeding pipe (11).

5. An etching structure according to claim 1, characterized in that, The number of storage tanks (8) is two, one of which is filled with silicon dioxide etching solution and the other is filled with potassium iodide etching solution.

6. The etching structure according to claim 1, characterized in that, The outer wall of the storage tank (8) is fixedly equipped with a warning light, and the warning light is electrically connected to the power supply (9), the controller (10) and the liquid level sensor (20).

7. An etching structure according to claim 1, characterized in that, The output shaft of the electric telescopic rod (19) is fixedly assembled with the top of the lifting plate (14), and the inner wall of the lifting plate (14) is slidably connected with the inner wall of the movable groove (13).

8. An etching structure according to claim 1, characterized in that, The gear (18) and scraper (21) are symmetrically distributed along the outer wall of the turntable (16), and there is a 1cm gap between them.

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