Thermocompression bonding bearing table device

Abstract

The utility model relates to the technical field of semiconductor production technology and equipment, and provides a thermocompression bonding bearing table device which comprises a plane base, a protruding base, a table top assembly and a plurality of metal vertical plates, the plane base is provided with fixing holes, the protruding base is arranged on the plane base, the table top assembly is arranged on the protruding base, and the metal vertical plates are arranged on the table top assembly. The table board assembly is provided with a polishing surface, the table board assembly is provided with a vacuum groove at the polishing surface, the vacuum groove is internally provided with a first vacuum suction hole, the first vacuum suction hole is used for sucking the flexible circuit board, the plurality of metal vertical plates are arranged around the convex base and the table board assembly in a screw locking manner, and each metal vertical plate is connected with the convex base and the table board assembly. By means of the arrangement, the problem that the thermocompression bonding bearing table device is prone to being broken at the screw holes can be effectively solved, and the protruding base and the table top assembly are prevented from being separated and falling off.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor manufacturing process and equipment technology, and in particular to a hot pressing carrier platform device for semiconductor flip chip packaging process. Background Technology

[0002] Currently, the COF process is mainly used to fabricate hot-pressing carriers for flexible circuit boards and chips in the following ways: After processing aluminum nitride or silicon carbide ceramic sintered bodies into components for hot-pressing carrier surfaces, they are bonded to a metal base using high-temperature resistant adhesive, and the working surface of the pressing head is polished to obtain the hot-pressing carrier.

[0003] However, due to the significant difference in thermal expansion coefficients between aluminum nitride or silicon carbide and the metal substrate, the processing temperature is typically 120–180 degrees Celsius. Upon heating, this difference in expansion causes the adhesive bonding surface to peel off, further leading to the detachment or displacement of the silicon carbide support platform assembly. Some have attempted to use screws to assist in securing the bonded metal substrate and support platform assembly, but the screws can crack the aluminum nitride or silicon carbide ceramic upon heating, causing vacuum leakage between them and preventing the support platform from effectively securing the flexible circuit board.

[0004] It should be noted that the information disclosed in this background section is intended only to enhance the understanding of the overall background of this utility model, and should not be construed as an admission or in any way implying that the information constitutes prior art known to those skilled in the art. Utility Model Content

[0005] The present invention provides a hot pressing support platform device, which includes a flat base, a raised base, a platform assembly and multiple metal uprights.

[0006] A raised base is disposed on the flat base, and the flat base has fixing holes located on the upper surface of the flat base not covered by the raised base. A platform assembly is disposed on the raised base, and the platform assembly has a polished surface with vacuum grooves on the polished surface. Each vacuum groove has a first vacuum suction hole for holding the flexible circuit board. Multiple metal uprights are screwed together around the raised base and the platform assembly, and each metal upright connects the raised base and the platform assembly.

[0007] Furthermore, a first through hole is provided around the perimeter of the tabletop assembly, a second through hole is provided around the perimeter of the raised base, and a third and a fourth through hole are provided on the metal upright plate. The third through hole corresponds to the first through hole, and the fourth through hole corresponds to the second through hole. A first screw passes through the third through hole and the first through hole, and a second screw passes through the fourth through hole and the second through hole, so that the metal upright plate connects the raised base and the tabletop assembly simultaneously.

[0008] Furthermore, the upper surface of the raised base is provided with a first through hole, and the lower surface of the tabletop assembly is provided with a second through hole. Screws are used to pass through the first through hole and the second through hole to fix the raised base and the tabletop assembly.

[0009] Furthermore, the surface of the raised base is provided with a second vacuum suction hole, which is connected to the first vacuum suction hole to form a vacuum channel.

[0010] Furthermore, the sidewall of the tabletop assembly is provided with a first cooling through hole, and the surface of the raised base is provided with a second cooling through hole. The first cooling through hole communicates with the second cooling through hole to form a cooling channel.

[0011] Furthermore, the raised base is provided with a temperature sensing hole for placing the temperature sensing rod.

[0012] Furthermore, the countertop assembly is made of aluminum nitride or silicon carbide.

[0013] Furthermore, the material of the metal upright includes steel or tungsten carbide steel.

[0014] Furthermore, the materials of the planar base and the raised base include steel or tungsten carbide steel.

[0015] Furthermore, the hot-pressing support platform device also includes a liner located between the platform assembly and the raised base.

[0016] Based on the above, the hot pressing support platform device provided by this utility model can effectively solve the problem that the hot pressing support platform device is prone to breakage at the screw holes by combining the raised base, the platform component and multiple metal uprights, and avoid the raised base and the platform component from separating and falling off.

[0017] Other features and beneficial effects of this invention will be set forth in the following description, and will be apparent in part from the description, or may be learned by practicing the invention. The objectives and other beneficial effects of this invention can be realized and obtained through the structures particularly pointed out in the description, claims, etc. Attached Figure Description

[0018] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort. Unless otherwise specified, the positional relationships shown in the drawings in the following description are based on the direction in which the components are drawn in the figure.

[0019] Figure 1 This is an exploded structural diagram of a hot-pressing support platform device provided in an embodiment of this utility model.

[0020] Figure label:

[0021] 10-Tabletop assembly; 11-Polished surface; 12-Groove; 13-First vacuum suction hole; 15-First through hole; 16-First cooling through hole; 20-Flat base; 21-Raised base; 22-Temperature sensing hole; 23-First through hole; 24-Second vacuum suction hole; 25-Second cooling through hole; 26-Second through hole; 28-Fixing hole; 30-Metal upright plate; 31-Third through hole; 32-Fourth through hole; 40-Gasket; 51-First screw; 52-Second screw; 60-Flexible circuit board. Detailed Implementation

[0022] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, not all embodiments. The technical features designed in the different embodiments of this utility model described below can be combined with each other as long as they do not conflict with each other. All other embodiments obtained by those skilled in the art based on the embodiments of this utility model without creative effort are within the protection scope of this utility model.

[0023] In the description of this utility model, it should be understood that the terms "center," "lateral," "upper," "lower," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," and "outer," etc., indicating orientation or positional relationships based on the orientation or positional relationships shown in the accompanying drawings, are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or component referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model. Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this utility model, unless otherwise stated, "a plurality of" means two or more. Additionally, the term "comprising" and any variations thereof mean "at least comprising."

[0024] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integrally formed connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection between two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0025] The terminology used herein is for the purpose of describing particular embodiments only and is not intended to limit the exemplary embodiments. Unless the context clearly indicates otherwise, the singular forms “a” and “an” as used herein are also intended to include the plural. It should also be understood that the terms “comprising” and / or “including” as used herein specify the presence of the stated features, integers, steps, operations, units, and / or components, without excluding the presence or addition of one or more other features, integers, steps, operations, units, components, and / or combinations thereof.

[0026] Please see Figure 1 , Figure 1 This is an exploded structural diagram of a hot-pressing support platform device according to an embodiment of the present invention. To achieve at least one or more of the aforementioned advantages, an embodiment of the present invention provides a hot-pressing support platform device, which includes a planar base 20, a raised base 21, a platform assembly 10, and a plurality of metal uprights 30.

[0027] The raised base 21 is disposed on the flat base 20. The flat base 20 and the raised base 21 can be made of metal.

[0028] The tabletop assembly 10 is disposed on the raised base 21. The tabletop assembly 10 has a polished surface 11. A vacuum groove 12 is provided on the polished surface 11 of the tabletop assembly 10. A first vacuum suction hole 13 is provided in the vacuum groove 12. The first vacuum suction hole 13 is used to hold the flexible circuit board 60.

[0029] Multiple metal uprights 30 are screwed together and mounted around the raised base 21 and the tabletop assembly 10. Each metal upright 30 connects the raised base 21 and the tabletop assembly 10, thus assisting in securing the raised base 21 and the tabletop assembly 10. Using multiple metal uprights 30 as auxiliary fixation on all four sides effectively increases the mechanical rigidity and fixing strength of the assembled hot-pressing support platform.

[0030] Regarding the screw fastening method, taking one side of the raised base 21 and the tabletop assembly 10 as an example, as shown in the figure, the tabletop assembly 10 has a first through hole 15 around its perimeter, the raised base 21 has a second through hole 26 around its perimeter, and the metal upright plate 30 has a third through hole 31 and a fourth through hole 32. The third through hole 31 corresponds to the first through hole 15, and the fourth through hole 32 corresponds to the second through hole 26. The first screw 51 passes through the third through hole 31 and the first through hole 15, and the second screw 52 passes through the fourth through hole 32 and the second through hole 26, so that the metal upright plate 30 simultaneously connects the raised base 21 and the tabletop assembly 10, thereby fixing the raised base 21 and the tabletop assembly 10. Similarly, the other three sides can also use the same through holes and screws.

[0031] In some embodiments, the upper surface of the raised base 21 is provided with a first through hole 23, and the lower surface of the tabletop assembly 10 is provided with a second through hole (not shown in the figure). Screws are used to pass through the first through hole 23 and the second through hole to fix the raised base 21 and the tabletop assembly 10.

[0032] In some embodiments, the surface of the raised base 21 is provided with a second vacuum suction hole 24, which is connected to a vacuum suction hole to form a vacuum channel for easy vacuum adsorption.

[0033] In some embodiments, the sidewall of the tabletop assembly 10 is provided with a first cooling through hole 16, and the surface of the raised base 21 is provided with a second cooling through hole 25. The first cooling through hole 16 communicates with the second cooling through hole 25 to form a cooling channel for rapid cooling after heating during production.

[0034] In some embodiments, the raised base 21 is provided with a temperature sensing hole 22 for placing a temperature sensing rod to monitor the temperature of the hot-pressed joint.

[0035] In some embodiments, the material of the tabletop assembly 10 includes aluminum nitride or silicon carbide. The tabletop assembly 10 made of aluminum nitride or silicon carbide ceramic sintered material has high hardness (approaching the hardness of diamond), therefore, the surface supporting the flexible circuit board 60 for chip lamination can withstand long-term wear, impact, and pressure, and is not easily deformed. Aluminum nitride or silicon carbide ceramics have stable chemical and physical properties, do not generate static electricity due to friction, and are excellent electrical insulators, thus solving the problem of static electricity accumulation and its effects. The tabletop assembly 10 made of aluminum nitride or silicon carbide ceramic sintered material can be mirror-polished using its polishable properties, and has excellent wear resistance. The polished surface 11 can maintain a mirror-like state for a long time, and impurities or residual adhesive from the manufacturing process are not easily adhered to the tabletop assembly 10. If the countertop assembly 10, made of aluminum nitride or silicon carbide ceramic sintered material, is scratched or worn on the polished surface 11, it can be quickly removed from the raised base 21 and repolished multiple times. The service life after repolishing is the same as that of a new product, effectively reducing production costs. The countertop assembly 10 can be processed from a single material, thus preventing uneven expansion during heating. After assembly, the polished surface 11 maintains the same flatness and evenness within a temperature range (e.g., room temperature to 800℃). Therefore, the same hot-pressing support platform can be used for production processes at different temperatures.

[0036] In some embodiments, the planar base 20 and the raised base 21 are made of steel or tungsten carbide steel. Using ultra-hard mold steel or tungsten carbide steel to produce the planar base 20 and the raised base 21 allows for rapid machining processes typically used with metals, such as electrical discharge machining (EDM) and wire cutting. This effectively reduces the machining difficulty and time required for complex details such as deep hole drilling, threading, and micro-hole fabrication on the ceramic sintered body. The all-ceramic hot-pressing support platform has multiple threaded holes for locking and fixing with the equipment base. These holes often crack due to over-tightening or thermal expansion. By replacing the easily cracked parts with metal, and placing the threaded holes on the metal base, the problem of the fragile holes made of ceramic material is solved.

[0037] In some embodiments, the metal plate 30 is made of steel or tungsten carbide steel and is manufactured by machining.

[0038] In some embodiments, the hot-pressing support platform device further includes a gasket 40. The gasket 40 is located between the platform assembly 10 and the raised base 21. The gasket 40 may be a vacuum-proof gasket 40 made of a metal film through processing. Using a soft metal film as a sealing material for the contact surfaces of the raised base 21 and the platform assembly 10 can maintain an airtight seal between the contact surfaces of the raised base 21 and the platform assembly 10, and can also maintain the overall accuracy of the two components after assembly.

[0039] As shown in the figure, a fixing hole 28 is also provided on the planar base 20. The fixing hole 28 is located on the upper surface of the planar base 20 that is not covered by the protruding base 21, and is used to fix the assembled hot pressing carrier device on the fixed base of the packaging equipment to improve the overall structural stability.

[0040] In summary, the hot-pressing support platform device provided by this utility model, through the combination of the raised base 21, the tabletop assembly 10, and multiple metal uprights 30, can effectively solve the problem of the hot-pressing support platform device easily breaking at the screw holes, and prevent the raised base 21 and the tabletop assembly 10 from separating and falling off. Furthermore, this utility model does not use traditional adhesive bonding to fix the raised base 21 and the tabletop assembly 10; instead, it uses screws for locking and fixing the two together. This allows for quick removal of damaged tabletop assembly 10 or replacement of a tabletop assembly 10 of a different size without the need for adhesive, and facilitates rapid replacement with a new tabletop assembly 10.

[0041] Those skilled in the art should understand that, despite the many problems existing in the prior art, each embodiment or technical solution of this utility model can be improved in only one or a few aspects, without necessarily solving all the technical problems listed in the prior art or the background art simultaneously. Those skilled in the art should understand that any content not mentioned in a claim should not be construed as a limitation on that claim.

[0042] Furthermore, the range of values ​​for "~" in the above-mentioned terminology includes the values ​​at both endpoints themselves, all of which fall within the protection scope of this utility model. Although terms such as chip tray, chip placement slot, chip, pressing plate, and cutout slot are frequently used herein, the possibility of using other terms is not excluded. The use of these terms is merely for the convenience of describing and explaining the essence of this utility model; interpreting them as any additional limitation would contradict the spirit of this utility model.

[0043] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of this utility model, and are not intended to limit it. Although the utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some or all of the technical features therein. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of this utility model.

Claims

1. A hot-pressing support platform device, characterized in that: The hot pressing support platform device includes: A planar base, wherein a fixing hole is provided on the planar base; A raised base is disposed on the flat base, and the fixing hole is located on the upper surface of the flat base that is not covered by the raised base; A tabletop assembly is disposed on the raised base. The tabletop assembly has a polished surface and a vacuum groove is provided on the polished surface. The vacuum groove has a first vacuum suction hole for adhering to the flexible circuit board. Multiple metal uprights are installed around the raised base and the tabletop assembly by means of screws, and each metal upright is connected to the raised base and the tabletop assembly.

2. The hot-pressing support platform device according to claim 1, characterized in that: The tabletop assembly has a first through hole around its perimeter, the raised base has a second through hole around its perimeter, and the metal upright plate has a third through hole and a fourth through hole. The third through hole corresponds to the first through hole, and the fourth through hole corresponds to the second through hole. A first screw passes through the third through hole and the first through hole, and a second screw passes through the fourth through hole and the second through hole, so that the metal upright plate simultaneously connects the raised base and the tabletop assembly.

3. The hot-pressing support platform device according to claim 1, characterized in that: The upper surface of the raised base is provided with a first through hole, and the lower surface of the tabletop assembly is provided with a second through hole. Screws are used to pass through the first through hole and the second through hole to fix the raised base and the tabletop assembly.

4. The hot-pressing support platform device according to claim 1, characterized in that: The surface of the raised base is provided with a second vacuum suction hole, which is connected to the first vacuum suction hole to form a vacuum channel.

5. The hot-pressing bearing platform device according to claim 1, characterized in that: The sidewall of the tabletop assembly is provided with a first cooling through hole, and the surface of the raised base is provided with a second cooling through hole. The first cooling through hole is connected to the second cooling through hole to form a cooling channel.

6. The hot-pressing bearing platform device according to claim 1, characterized in that: The raised base is provided with a temperature sensing hole for placing a temperature sensing rod.

7. The hot-pressing support platform device according to claim 1, characterized in that: The countertop assembly is made of aluminum nitride or silicon carbide.

8. The hot-pressing support platform device according to claim 1, characterized in that: The metal uprights are made of steel or tungsten carbide steel.

9. The hot-pressing support platform device according to claim 1, characterized in that: The materials of the planar base and the raised base include steel or tungsten carbide steel.

10. The hot-pressing bearing platform device according to claim 1, characterized in that: The hot-pressing support platform device also includes a liner located between the platform assembly and the raised base.

Images