Vacuum suction mechanism

Abstract

The utility model discloses a vacuum material suction mechanism, and relates to the technical field of vacuum adsorption. The vacuum suction mechanism comprises a shell, a vacuum generator, an air inlet assembly, an air duct and a vacuum chuck, wherein the vacuum generator, the air inlet assembly, the air duct and the vacuum chuck are installed on the shell. One end of the ventilation pipeline is connected with the vacuum suction cup, the other end of the ventilation pipeline is connected with the vacuum generator and the air inlet assembly, the vacuum generator is used for extracting air in the ventilation pipeline so that materials can be adsorbed to the vacuum suction cup, and the air inlet assembly is used for introducing air into the ventilation pipeline so that the materials can be separated from the vacuum suction cup. Compared with the prior art, the vacuum suction mechanism provided by the utility model has the advantages that the vacuum suction cup mounted on the shell, and the vacuum generator and the air inlet assembly which are connected with the air duct are adopted, so that vacuum suction and quick discharging of materials can be realized, and the stability of negative pressure in a material moving process is ensured; and the situation that materials fall off accidentally is prevented, and the production efficiency is improved.

Description

Technical Field

[0001] This utility model relates to the field of vacuum adsorption technology, and more specifically, to a vacuum material suction mechanism. Background Technology

[0002] Currently, in the routine production of monitoring films in the PVD process, after coating, the glass slide needs to be removed. In existing technology, to prevent sweat and dirt from contaminating the glass slide surface, a vacuum suction pen is typically used. Modern vacuum suction pens are generally made of elastic air bladders; pressing them deforms and releases air, while releasing the pressure resets them to draw in air and create negative pressure, thus lifting the glass slide. However, this suction method struggles to maintain stable negative pressure, easily leading to insufficient suction causing the glass slide to slip and break, or the glass slide becoming difficult to detach from the suction pen during unloading, resulting in slide isolation, unnecessary losses, and reduced production efficiency.

[0003] Therefore, designing and manufacturing a vacuum material feeding mechanism that is highly stable and easy to feed and discharge is particularly important in semiconductor manufacturing. Utility Model Content

[0004] The purpose of this invention is to provide a vacuum suction mechanism that can achieve vacuum suction and rapid discharge of materials, ensure the stability of negative pressure during material transfer, prevent accidental material drop, and improve production efficiency.

[0005] This utility model is achieved by the following technical solution.

[0006] A vacuum suction mechanism includes a housing and a vacuum generator, an air inlet assembly, an air duct, and a vacuum suction cup mounted on the housing. One end of the air duct is connected to the vacuum suction cup, and the other end is connected to the vacuum generator and the air inlet assembly. The vacuum generator is used to extract air from the air duct to adsorb material onto the vacuum suction cup, and the air inlet assembly is used to introduce air into the air duct to detach the material from the vacuum suction cup.

[0007] Optionally, the ventilation duct is a three-way pipe, which includes a first pipe section, a second pipe section, and a third pipe section that are interconnected. The first pipe section is connected to the vacuum generator, the second pipe section is connected to the air intake assembly, and the third pipe section is connected to the vacuum suction cup.

[0008] Optionally, the vacuum generator includes a vacuum pump and a connecting pipe, the vacuum pump being connected to a ventilation pipe via the connecting pipe, and the connecting pipe being equipped with a first switching valve.

[0009] Optionally, the air intake assembly includes an air tank, an air pump, and an air intake pipe. The air pump is installed in the air tank and connected to the ventilation pipe through the air intake pipe. The air intake pipe is equipped with a second switch valve. The air pump is used to input the air stored in the air tank into the ventilation pipe.

[0010] Optionally, the vacuum suction cup has an adsorption surface and a connecting surface opposite to each other. The connecting surface has a vent hole that is connected to a ventilation pipe, and the adsorption surface has a suction hole that is connected to the vent hole.

[0011] Optionally, there are multiple suction holes, which are spaced apart, and the vent is connected to multiple suction holes simultaneously through the air intake channel.

[0012] Optionally, a sealing groove is provided on the connecting surface, a vent is provided on the bottom wall of the sealing groove, a sealing ring is provided inside the sealing groove, and the sealing ring is fitted outside the vent pipe.

[0013] Optionally, the adsorption surface is provided with a wear-resistant coating.

[0014] Optionally, the vacuum feeding mechanism also includes a vacuum detector, which is installed in the ventilation duct and is used to detect the real-time vacuum level in the ventilation duct.

[0015] Optionally, the vacuum suction mechanism also includes a controller, which is electrically connected to a vacuum detector, a vacuum generator, and an air intake assembly. The controller is used to adjust the suction rate of the vacuum generator according to the real-time vacuum level when adsorbing materials so that the real-time vacuum level is maintained within a preset range. The controller is also used to control the air flow rate of the air intake assembly according to the real-time vacuum level when the materials are detached.

[0016] The vacuum suction mechanism provided by this utility model has the following beneficial effects:

[0017] The vacuum material suction mechanism provided by this utility model has one end of an air duct connected to a vacuum suction cup, and the other end connected to a vacuum generator and an air intake assembly. The vacuum generator is used to extract air from the air duct to adsorb material onto the vacuum suction cup, and the air intake assembly is used to introduce air into the air duct to allow the material to detach from the vacuum suction cup. Compared with the prior art, the vacuum material suction mechanism provided by this utility model, due to the use of a vacuum suction cup installed in the housing and a vacuum generator and air intake assembly connected to the air duct, can achieve vacuum suction and rapid discharge of material, ensure the stability of negative pressure during material transfer, prevent accidental material drop, and improve production efficiency. Attached Figure Description

[0018] To more clearly illustrate the technical solutions of the embodiments of this utility model, the drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this utility model and should not be regarded as a limitation on the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0019] Figure 1This is a schematic diagram of the vacuum suction mechanism provided in an embodiment of the present utility model;

[0020] Figure 2 A schematic diagram of the structure in which the vacuum generator and the air intake assembly are connected to the vacuum suction cup via an air pipe in the vacuum suction mechanism provided in this embodiment of the utility model;

[0021] Figure 3 A cross-sectional view of the vacuum suction cup in the vacuum suction mechanism provided in an embodiment of this utility model;

[0022] Figure 4 A structural block diagram of the vacuum suction mechanism provided in the embodiment of this utility model.

[0023] Icons: 100-Vacuum suction mechanism; 110-Housing; 120-Vacuum generator; 121-Vacuum pump; 122-Connecting pipe; 123-First switching valve; 130-Inlet assembly; 131-Air tank; 132-Air pump; 133-Inlet pipe; 134-Second switching valve; 140-Ventilation pipe; 141-First pipe section; 142-Second pipe section; 143-Third pipe section; 150-Vacuum suction cup; 151-Adsorption surface; 152-Connecting surface; 153-Ventilation hole; 154-Suction hole; 155-Inlet channel; 156-Sealing groove; 157-Sealing ring; 160-Vacuum degree detector; 170-Controller. Detailed Implementation

[0024] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, and not all embodiments. The components of the embodiments of this utility model described and shown in the accompanying drawings can generally be arranged and designed in various different configurations.

[0025] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the claimed invention, but merely to illustrate selected embodiments of the invention. All other embodiments obtained by those skilled in the art based on the embodiments of the present invention without inventive effort are within the scope of protection of the present invention.

[0026] It should be noted that similar labels and letters in the following figures indicate similar items. Therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.

[0027] In the description of this utility model, it should be noted that the terms "inner," "outer," "upper," "lower," "horizontal," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship commonly used when the utility model product is in use. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model. In addition, the terms "first," "second," "third," etc., are only used to distinguish descriptions and should not be construed as indicating or implying relative importance.

[0028] In the description of this utility model, it should also be noted that, unless otherwise explicitly specified and limited, the terms "set," "connected," "installed," and "connected" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0029] The following detailed description of some embodiments of the present invention is provided in conjunction with the accompanying drawings. Unless otherwise specified, the features in the following embodiments can be combined with each other.

[0030] Please refer to the reference. Figures 1 to 4 This utility model provides a vacuum suction mechanism 100 for transferring materials. It can realize vacuum suction and rapid discharge of materials, ensure the stability of negative pressure during the material transfer process, prevent accidental material drop, and improve production efficiency.

[0031] In this embodiment, the vacuum suction mechanism 100 is applied in the field of semiconductor technology, and the material is a glass sheet. The vacuum suction mechanism 100 is used to pick up the glass sheet and transfer its position. However, it is not limited to this. In other embodiments, the vacuum suction mechanism 100 can also be applied in other technical fields, and the material can also be other materials. There are no specific limitations on the application field of the vacuum suction mechanism 100 or the material of the material.

[0032] The vacuum material suction mechanism 100 includes a housing 110 and a vacuum generator 120, an air inlet assembly 130, an air duct 140, and a vacuum suction cup 150 mounted on the housing 110. One end of the air duct 140 is connected to the vacuum suction cup 150, and the other end is connected to the vacuum generator 120 and the air inlet assembly 130. The air duct 140 connects the vacuum generator 120 and the air inlet assembly 130 to the vacuum suction cup 150. Specifically, the vacuum generator 120 extracts air from the air duct 140 to create a negative pressure inside the vacuum suction cup 150, thereby adsorbing the material onto the vacuum suction cup 150. The air inlet assembly 130 introduces air into the air duct 140 to break the vacuum state of the vacuum suction cup 150, thereby allowing the material to detach from the vacuum suction cup 150. In this way, the vacuum material suction mechanism 100 can achieve vacuum suction and rapid discharge of materials, ensure the stability of the negative pressure during material transfer, prevent accidental material drop, and improve production efficiency.

[0033] Furthermore, during the material transfer process of the vacuum suction mechanism 100, the air inlet component 130 is first closed, and the vacuum generator 120 is turned on to extract air from the vacuum suction cup 150 through the ventilation pipe 140. Then, the vacuum suction cup 150 is placed on the material and made to fit tightly against it. During this process, a vacuum state is formed inside the vacuum suction cup 150 to vacuum-adhere the material to the vacuum suction cup 150, thus achieving the vacuum suction function. Next, the vacuum suction mechanism 100 is used to move the material. When the material is in place, the vacuum generator 120 is turned off. At this time, due to the sealing effect, a vacuum degree still remains in the vacuum suction cup 150 and the ventilation pipe 140, so the material is still adsorbed on the vacuum suction cup 150 and cannot be removed from it. Therefore, the air inlet component 130 needs to be turned on to introduce air into the ventilation pipe 140 to break the vacuum state of the vacuum suction cup 150, thereby allowing the material to quickly detach from the vacuum suction cup 150, achieving the rapid material release function, and thus improving production efficiency.

[0034] Preferably, the ventilation pipe 140 is a tee pipe, comprising a first pipe section 141, a second pipe section 142, and a third pipe section 143 that are interconnected. The first pipe section 141 is connected to the vacuum generator 120, the second pipe section 142 is connected to the air intake assembly 130, and the third pipe section 143 is connected to the vacuum suction cup 150, so that both the vacuum generator 120 and the air intake assembly 130 can communicate with the vacuum suction cup 150, thereby achieving vacuum suction and rapid material discharge functions.

[0035] The vacuum generator 120 includes a vacuum pump 121 and a connecting pipe 122. The vacuum pump 121 is connected to the ventilation pipe 140 via the connecting pipe 122. The vacuum pump 121 can draw air from the ventilation pipe 140 through the connecting pipe 122, thereby drawing air from the vacuum suction cup 150 to achieve the vacuum adsorption function. Specifically, the connecting pipe 122 is equipped with a first switching valve 123. The first switching valve 123 is used to open during the vacuum suction process to ensure the unobstructed flow of the connecting pipe 122. The first switching valve 123 is also used to close during the rapid material discharge process to ensure that the air introduced by the air intake component 130 completely enters the vacuum suction cup 150 through the ventilation pipe 140, which facilitates precise control of the air intake rate of the air intake component 130.

[0036] The air intake assembly 130 includes an air storage tank 131, an air pump 132, and an air intake pipe 133. The air pump 132 is installed in the air storage tank 131 and connected to the ventilation pipe 140 via the air intake pipe 133. The air pump 132 is used to input the air stored in the air storage tank 131 into the ventilation pipe 140, and then into the vacuum suction cup 150, to achieve the vacuum breaking function of the vacuum suction cup 150, allowing the material to quickly detach from the vacuum suction cup 150. Specifically, the air intake pipe 133 is equipped with a second switching valve 134. The second switching valve 134 is used to close during vacuum suction to avoid affecting the negative pressure generated by the vacuum generator 120. The second switching valve 134 is also used to open during rapid material discharge to ensure the unobstructed flow of the air intake pipe 133, facilitating the rapid material discharge function.

[0037] In this embodiment, to avoid affecting the glass slide, an inert gas (such as nitrogen) is stored in the gas storage tank 131 to allow the material to quickly detach from the vacuum suction cup 150. However, this is not the only option; in other embodiments, other gases can be used to break the vacuum, and the type of gas is not specifically limited.

[0038] Preferably, the vacuum suction cup 150 has an adsorption surface 151 and a connecting surface 152 arranged opposite to each other. The connecting surface 152 has a vent hole 153, which is connected to the ventilation pipe 140. The adsorption surface 151 has a suction hole 154, which is connected to the vent hole 153. Under the action of the vacuum generator 120, outside air can enter the ventilation pipe 140 through the suction hole 154 and the vent hole 153 in sequence, thereby realizing the vacuum adsorption function. The adsorption surface 151 is used to adhere to the material to ensure the vacuum adsorption effect.

[0039] Furthermore, there are multiple suction holes 154, which are spaced apart. The vent 153 is connected to the multiple suction holes 154 simultaneously through the air inlet channel 155. The multiple suction holes 154 work together to increase the vacuum adsorption area of ​​the material, improve the vacuum adsorption effect, and prevent the material from accidentally falling off.

[0040] In this embodiment, the connecting surface 152 is provided with a sealing groove 156, and the vent hole 153 is provided on the bottom wall of the sealing groove 156. A sealing ring 157 is provided in the sealing groove 156. The sealing ring 157 is sleeved on the outside of the vent pipe 140 to seal the gap between the third pipe section 143 of the vent pipe 140 and the vent hole 153, so as to prevent air leakage and ensure airtightness.

[0041] In this embodiment, the adsorption surface 151 is provided with a wear-resistant coating (not shown). The wear-resistant coating is used to directly contact the material and can protect the vacuum suction cup 150 to extend the service life of the vacuum suction cup 150.

[0042] Preferably, the vacuum suction mechanism 100 further includes a vacuum detector 160, which is installed in the ventilation pipe 140. The vacuum detector 160 is used to detect the real-time vacuum level in the ventilation pipe 140 so that the user can monitor the real-time vacuum level and ensure the stability of the negative pressure during the material transfer process.

[0043] Furthermore, the vacuum suction mechanism 100 also includes a controller 170. The controller 170 is electrically connected to the vacuum detector 160, the vacuum generator 120, and the air intake assembly 130. The controller 170 is used to adjust the suction rate of the vacuum generator 120 according to the real-time vacuum level when adsorbing materials, so that the real-time vacuum level is maintained within a preset range, thereby ensuring the stability of the negative pressure during the material transfer process and preventing the accidental drop of materials. The controller 170 is also used to control the air flow rate of the air intake assembly 130 according to the real-time vacuum level when the material is released, so as to break the vacuum state of the vacuum suction cup 150 at a certain speed and ensure the stability of the material release process.

[0044] The vacuum suction mechanism 100 provided in this embodiment of the invention has an air duct 140, one end of which is connected to a vacuum suction cup 150, and the other end connected to a vacuum generator 120 and an air intake assembly 130. The vacuum generator 120 is used to extract air from the air duct 140 to adsorb material onto the vacuum suction cup 150, and the air intake assembly 130 is used to introduce air into the air duct 140 to allow the material to detach from the vacuum suction cup 150. Compared with the prior art, the vacuum suction mechanism 100 provided in this invention, due to the use of a vacuum suction cup 150 installed in the housing 110 and a vacuum generator 120 and an air intake assembly 130 connected to the air duct 140, can achieve vacuum suction and rapid discharge of material, ensure the stability of negative pressure during material transfer, prevent accidental material detachment, and improve production efficiency.

[0045] The above are merely preferred embodiments of this utility model and are not intended to limit the scope of this utility model. Various modifications and variations can be made to this utility model by those skilled in the art. Any modifications, equivalent substitutions, or improvements made within the spirit and principles of this utility model should be included within the protection scope of this utility model.

Claims

1. A vacuum suction mechanism, characterized in that, The device includes a housing and a vacuum generator, an air intake assembly, an air duct, and a vacuum suction cup mounted on the housing. One end of the air duct is connected to the vacuum suction cup, and the other end is connected to the vacuum generator and the air intake assembly. The vacuum generator is used to extract air from the air duct to adsorb material onto the vacuum suction cup. The air intake assembly is used to introduce air into the air duct to detach the material from the vacuum suction cup.

2. The vacuum suction mechanism according to claim 1, characterized in that, The ventilation pipe is a three-way pipe, which includes a first pipe section, a second pipe section, and a third pipe section that are interconnected. The first pipe section is connected to the vacuum generator, the second pipe section is connected to the air intake assembly, and the third pipe section is connected to the vacuum suction cup.

3. The vacuum suction mechanism according to claim 1, characterized in that, The vacuum generator includes a vacuum pump and a connecting pipe. The vacuum pump is connected to the ventilation pipe through the connecting pipe, and the connecting pipe is equipped with a first switching valve.

4. The vacuum suction mechanism according to claim 1, characterized in that, The air intake assembly includes an air tank, an air pump, and an air intake pipe. The air pump is installed in the air tank and connected to the ventilation pipe through the air intake pipe. The air intake pipe is equipped with a second switch valve. The air pump is used to input the air stored in the air tank into the ventilation pipe.

5. The vacuum suction mechanism according to claim 1, characterized in that, The vacuum suction cup has an adsorption surface and a connecting surface arranged opposite to each other. The connecting surface has a vent hole that is connected to the ventilation pipe. The adsorption surface has a suction hole that is connected to the vent hole.

6. The vacuum suction mechanism according to claim 5, characterized in that, The number of suction holes is multiple, and the multiple suction holes are arranged at intervals. The vent hole is connected to the multiple suction holes simultaneously through the air intake channel.

7. The vacuum suction mechanism according to claim 5, characterized in that, The connecting surface has a sealing groove, the vent is opened on the bottom wall of the sealing groove, a sealing ring is provided in the sealing groove, and the sealing ring is fitted outside the vent pipe.

8. The vacuum suction mechanism according to claim 5, characterized in that, The adsorption surface is provided with a wear-resistant coating.

9. The vacuum suction mechanism according to claim 1, characterized in that, The vacuum suction mechanism also includes a vacuum detector, which is installed in the ventilation pipe and is used to detect the real-time vacuum level in the ventilation pipe.

10. The vacuum suction mechanism according to claim 9, characterized in that, The vacuum suction mechanism also includes a controller, which is electrically connected to the vacuum detector, the vacuum generator and the air intake assembly. The controller is used to adjust the suction rate of the vacuum generator according to the real-time vacuum level when adsorbing materials, so that the real-time vacuum level is maintained within a preset range. The controller is also used to control the air flow rate of the air intake assembly according to the real-time vacuum level when the materials are detached.

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