Vacuum coating chamber door adsorption structure

Abstract

The utility model relates to the technical field of sealing structures, and discloses a vacuum coating chamber door adsorption structure which comprises a vacuum coating chamber body, a vacuum groove and a sealing groove A are formed in the front face of the vacuum coating chamber body, and a vacuum mounting hole is formed in the inner side wall of the vacuum groove. A vacuum suction pipe is fixedly mounted in the vacuum mounting hole, a connecting assembly is fixedly connected to the bottom end of the vacuum suction pipe, and a vacuum connecting pipe is fixedly connected to the bottom end of the connecting assembly. According to the vacuum coating chamber door adsorption structure, through the arrangement of the sealing groove A, the sealing groove B, the sealing assembly and the vacuum groove, double sealing is conducted on the vacuum coating chamber door adsorption structure, and the situation that as the service time of a sealing ring is prolonged, the sealing ring can be aged, the sealing performance is insufficient, external air enters a vacuum coating chamber, and the service life of the vacuum coating chamber is prolonged is avoided. The sealing performance of the vacuum coating chamber and the door body is provided, higher safety is provided for the vacuum coating chamber and the door body, and the vacuum stability of a system is guaranteed.

Description

Technical Field

[0001] This utility model relates to the field of sealing structure technology, and in particular to an adsorption structure for a vacuum-coated chamber door. Background Technology

[0002] The vacuum coating chamber door is a key component of vacuum coating equipment. It is mainly used to seal the coating chamber and ensure that the coating process is carried out in a vacuum environment.

[0003] The vacuum coating chamber door adsorption structure disclosed in announcement number CN214782129U has the following advantages: the door surface is subjected to uniform force and no local deformation occurs; the hinge structure connecting the door and the vacuum coating chamber is very simple and does not have high strength or precision requirements; the operation is simple and the degree of automation is high.

[0004] However, the vacuum coating chamber door adsorption structure has the following disadvantages: the sealing ring may age over time, resulting in insufficient sealing performance and affecting the sealing between the vacuum coating chamber and the door. Utility Model Content

[0005] The purpose of this invention is to provide an adsorption structure for a vacuum coating chamber door, which solves the problem mentioned in the background art that the sealing ring may age with the increase of usage time, resulting in insufficient sealing performance and affecting the sealing performance between the vacuum coating chamber and the door.

[0006] To achieve the above objectives, this utility model provides the following technical solution: a vacuum coating chamber door adsorption structure, comprising a vacuum coating chamber body, a vacuum groove and a sealing groove A on the front side of the vacuum coating chamber body, a vacuum mounting hole on the inner side wall of the vacuum groove, a vacuum suction tube fixedly installed inside the vacuum mounting hole, a connecting assembly fixedly connected to the bottom end of the vacuum suction tube, a vacuum connecting pipe fixedly connected to the bottom end of the connecting assembly, a vacuum component fixedly connected to one end of the vacuum connecting pipe, a sealing door hinged to one side of the vacuum coating chamber body, a sealing groove B on one side of the sealing door, and a sealing component fixedly connected to the inner wall of the sealing groove B.

[0007] The connecting assembly includes an installation tube fixedly connected to the bottom end of the vacuum suction tube. Grooves are provided on both sides of the surface of the installation tube. An elastic limiting member is fixedly connected to the inner top wall of the groove. A connecting tube is sleeved on the surface of the installation tube.

[0008] The sealing assembly includes an airbag component fixedly connected to the inner wall of the sealing groove B. An inflation tube is fixedly connected to the bottom end of the airbag component, and one end of the inflation tube is connected to an air pump.

[0009] As a further embodiment of this utility model, a sealing groove C is provided at the top of the connecting pipe, and a sealing gasket is snapped into the inside of the sealing groove C. The sealing gasket facilitates the increase of the sealing between the vacuum connecting pipe and the vacuum suction pipe.

[0010] As a further embodiment of this utility model, limit holes are provided on both sides of the surface of the connecting pipe fitting. The limit holes are adapted to the elastic limit member, and the elastic limit member facilitates the limiting.

[0011] As a further embodiment of this utility model, the vacuum assembly includes a control valve tube fixedly connected to one end of the vacuum connection tube, and one end of the control valve tube is connected to a vacuum pump, which facilitates evacuating the vacuum tank.

[0012] As a further embodiment of this utility model, the sealing groove A and the sealing groove B have the same size, the sealing groove A is adapted to the airbag component, and the airbag component can easily increase the sealing performance.

[0013] As a further embodiment of this utility model, a dustproof net is fixedly installed at one end of the vacuum mounting hole. The dustproof net is made of corrosion-resistant metal, which helps to reduce dust from entering the vacuum suction tube.

[0014] As a further embodiment of this utility model, a protruding frame is fixedly connected to the middle of one side of the sealing door. The outer periphery of the protruding frame is adapted to the cavity wall on the front of the vacuum coating chamber body, and the protruding frame facilitates enhanced sealing.

[0015] This invention provides a vacuum coating chamber door adsorption structure, which has the following beneficial effects:

[0016] 1. This vacuum coating chamber door adsorption structure, through the arrangement of sealing groove A, sealing groove B, sealing components, and a vacuum groove, allows the airbag component to be locked in sealing groove A when the sealed door is closed during use. When needed, the air pump is activated to inflate the airbag component, causing it to expand rapidly and form a stronger seal, enhancing the reliability of the system. Then, the vacuum pump is activated to expel the air from the vacuum groove, forming a vacuum adsorption seal, thus providing a double seal. This avoids the possibility of the sealing ring aging over time and becoming insufficiently sealing, allowing external air to enter the vacuum coating chamber. It helps to improve the sealing between the vacuum coating chamber and the door, providing higher safety and ensuring the vacuum stability of the system.

[0017] 2. This vacuum coating chamber door adsorption structure, through the setting of the connecting components, allows for quick connection between the vacuum connecting tube and the vacuum suction tube. By pressing the elastic limiting pieces on both sides of the mounting fitting on the vacuum suction tube and aligning them with the inside of the connecting fitting on the vacuum connecting tube, the elastic limiting pieces move into the limiting holes and protrude from the limiting holes, thus securing them. This facilitates quick connection between the vacuum connecting tube and the vacuum suction tube, avoiding increased installation and disassembly difficulties when maintaining the vacuum components, and providing convenience for the maintenance of the vacuum coating chamber door adsorption structure. Attached Figure Description

[0018] Figure 1 This is a schematic diagram of the overall structure of this utility model;

[0019] Figure 2 This is a schematic diagram of the vacuum tank and sealing tank A of this utility model;

[0020] Figure 3 This is a schematic diagram of the vacuum component structure of this utility model;

[0021] Figure 4 This is a schematic diagram of the sealing component and sealing groove B of this utility model;

[0022] Figure 5 This utility model Figure 3 Enlarged structural diagram at point A.

[0023] In the diagram: 1. Vacuum coating chamber main body; 2. Vacuum tank; 3. Sealing tank A; 4. Vacuum suction tube; 5. Connecting assembly; 501. Installation fitting; 502. Elastic limiting component; 503. Connecting fitting; 6. Vacuum connecting pipe; 7. Vacuum assembly; 701. Control valve pipe; 702. Vacuum pump; 8. Sealing door; 9. Sealing tank B; 10. Sealing assembly; 1001. Airbag component; 1002. Inflation pipe; 1003. Air pump; 11. Sealing gasket; 12. Protruding frame. Detailed Implementation

[0024] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. All other embodiments obtained by those skilled in the art based on the embodiments of the present utility model without creative effort are within the scope of protection of the present utility model.

[0025] Please see Figures 1 to 5This utility model provides a technical solution: a vacuum coating chamber door adsorption structure, including a vacuum coating chamber body 1. A vacuum groove 2 and a sealing groove A3 are formed on the front of the vacuum coating chamber body 1. A vacuum mounting hole is formed on the inner side wall of the vacuum groove 2. A vacuum suction tube 4 is fixedly installed inside the vacuum mounting hole. A connecting component 5 is fixedly connected to the bottom end of the vacuum suction tube 4. A vacuum connecting pipe 6 is fixedly connected to the bottom end of the connecting component 5. A vacuum component 7 is fixedly connected to one end of the vacuum connecting pipe 6. A sealing door 8 is hinged to one side of the vacuum coating chamber body 1. A sealing groove B9 is formed on one side of the sealing door 8. A sealing component 10 is fixedly connected to the inner wall of the sealing groove B9.

[0026] The connecting component 5 includes an installation tube 501 fixedly connected to the bottom end of the vacuum suction tube 4. Grooves are provided on both sides of the surface of the installation tube 501. An elastic limiting member 502 is fixedly connected to the inner top wall of the groove. A connecting tube 503 is sleeved on the surface of the installation tube 501. With the setting of the connecting component 5, when in use, the elastic limiting members 502 on both sides of the installation tube 501 on the vacuum suction tube 4 are pressed and aligned with the inside of the connecting tube 503 on the vacuum connecting tube 6. The elastic limiting member 502 moves into the limiting hole and protrudes from the limiting hole to fix it. This achieves the purpose of facilitating the quick connection between the vacuum connecting tube 6 and the vacuum suction tube 4, avoiding the increased difficulty of installation and disassembly when the vacuum component 7 needs maintenance, and helping to provide convenience for the maintenance of the vacuum coating chamber door adsorption structure.

[0027] The sealing assembly 10 includes an airbag 1001 fixedly connected to the inner wall of the sealing groove B9. An inflation tube 1002 is fixedly connected to the bottom end of the airbag 1001, and one end of the inflation tube 1002 is connected to an air pump 1003. Through the arrangement of the sealing groove A3, sealing groove B9, sealing assembly 10, and vacuum groove 2, when in use, the sealing door 8 is closed, and the airbag 1001 is locked in the sealing groove A3. When needed, the air pump 1003 is started to inflate the airbag 1001, causing it to expand rapidly and form a stronger seal, enhancing the reliability of the system. Then, the vacuum pump 702 is started to expel the air in the vacuum groove 2, forming a vacuum adsorption seal, thereby providing a double seal. This avoids the possibility that the sealing ring may age and become insufficiently sealed as the usage time increases, allowing external air to enter the vacuum coating chamber. It helps to provide a seal between the vacuum coating chamber and the door, providing higher safety and ensuring the vacuum stability of the system.

[0028] The top end of the connecting pipe 503 is provided with a sealing groove C, and a sealing gasket 11 is snapped into the inside of the sealing groove C. The sealing gasket 11 serves to increase the seal between the vacuum connecting pipe 6 and the vacuum suction pipe 4.

[0029] Limiting holes are provided on both sides of the surface of the connecting pipe fitting 503. The limiting holes are adapted to the elastic limiting member 502. The setting of the elastic limiting member 502 plays a limiting role.

[0030] The vacuum assembly 7 includes a control valve pipe 701 fixedly connected to one end of the vacuum connection pipe 6. One end of the control valve pipe 701 is connected to a vacuum pump 702. The vacuum assembly 7 is used to evacuate the vacuum tank 2.

[0031] The sealing groove A3 and the sealing groove B9 have the same size. The sealing groove A3 is compatible with the airbag component 1001. The sealing groove A3 enhances the sealing effect.

[0032] A dustproof net is fixedly installed at one end of the vacuum mounting hole. The dustproof net is made of corrosion-resistant metal. The dustproof net helps to reduce the amount of dust entering the vacuum suction tube 4.

[0033] A protruding frame 12 is fixedly connected to the middle of one side of the sealing door 8. The outer periphery of the protruding frame 12 is adapted to the cavity wall on the front of the vacuum coating chamber body 1. The protruding frame 12 enhances the sealing effect.

[0034] In this invention, the working steps of the device are as follows:

[0035] First step: When using, press the elastic limiting members 502 on both sides of the mounting fitting 501 on the vacuum suction tube 4, align them with the inside of the connecting fitting 503 on the vacuum connecting tube 6, the elastic limiting member 502 moves into the limiting hole, the elastic limiting member 502 protrudes from the limiting hole, and fixes it.

[0036] Second step: When in use, close the sealing door 8, and the airbag component 1001 is locked in the sealing groove A3. When needed, start the air pump 1003 to inflate the airbag component 1001, so that it expands rapidly to form a stronger seal and enhance the reliability of the system. Then start the vacuum pump 702 to expel the air in the vacuum groove 2 to form a vacuum adsorption seal.

[0037] It should be noted that the device structure and accompanying drawings of this utility model mainly describe the principle of this utility model. In terms of the technical aspects of this design principle, the setting of the power mechanism, power supply system and control system of the device is not fully described. However, under the premise that those skilled in the art understand the principle of the above utility model, the specific details of its power mechanism, power supply system and control system can be clearly understood. The control method in the application document is automatic control through a controller. The control circuit of the controller can be implemented by those skilled in the art through simple programming.

[0038] All standard parts used can be purchased from the market, and can be customized according to the instructions and drawings. The specific connection methods of each part adopt conventional methods such as bolts, rivets, and welding that are mature in the existing technology. The machinery, parts and equipment adopt conventional models in the existing technology, and the structure and principle of the components known to those skilled in the art can be known by those skilled in the art through technical manuals or conventional experimental methods.

[0039] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A vacuum coating chamber door adsorption structure, comprising a vacuum coating chamber body (1), characterized in that: The vacuum coating chamber body (1) has a vacuum groove (2) and a sealing groove A (3) on its front side. The inner side wall of the vacuum groove (2) has a vacuum mounting hole. A vacuum suction tube (4) is fixedly installed inside the vacuum mounting hole. A connecting component (5) is fixedly connected to the bottom end of the vacuum suction tube (4). A vacuum connecting pipe (6) is fixedly connected to the bottom end of the connecting component (5). A vacuum component (7) is fixedly connected to one end of the vacuum connecting pipe (6). A sealing door (8) is hinged to one side of the vacuum coating chamber body (1). A sealing groove B (9) is opened on one side of the sealing door (8). A sealing component (10) is fixedly connected to the inner wall of the sealing groove B (9). The connecting component (5) includes an installation tube (501) fixedly connected to the bottom end of the vacuum suction tube (4). Grooves are provided on both sides of the surface of the installation tube (501). An elastic limiting member (502) is fixedly connected to the inner top wall of the groove. A connecting tube (503) is sleeved on the surface of the installation tube (501). The sealing assembly (10) includes an airbag component (1001) fixedly connected to the inner wall of the sealing groove B (9). An inflation tube (1002) is fixedly connected to the bottom end of the airbag component (1001), and one end of the inflation tube (1002) is connected to an air pump (1003).

2. The vacuum coating chamber door adsorption structure according to claim 1, characterized in that: The top end of the connecting pipe (503) is provided with a sealing groove C, and a sealing gasket (11) is snapped into the inside of the sealing groove C.

3. The vacuum coating chamber door adsorption structure according to claim 1, characterized in that: Limiting holes are provided on both sides of the surface of the connecting pipe (503), and the limiting holes are adapted to the elastic limiting member (502).

4. The vacuum coating chamber door adsorption structure according to claim 1, characterized in that: The vacuum assembly (7) includes a control valve tube (701) fixedly connected to one end of the vacuum connection tube (6), and one end of the control valve tube (701) is connected to a vacuum pump (702).

5. The vacuum coating chamber door adsorption structure according to claim 1, characterized in that: The sealing groove A (3) and the sealing groove B (9) have the same size, and the sealing groove A (3) is adapted to the airbag component (1001).

6. The vacuum coating chamber door adsorption structure according to claim 1, characterized in that: A dustproof net is fixedly installed at one end of the vacuum mounting hole. The dustproof net is made of corrosion-resistant metal.

7. The vacuum coating chamber door adsorption structure according to claim 1, characterized in that: A protruding frame (12) is fixedly connected to the middle of one side of the sealing door (8), and the outer periphery of the protruding frame (12) is adapted to the cavity wall on the front of the vacuum coating chamber body (1).

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