Blocking piece adjusting assembly and exhaust system
By setting up a sleeve-structured baffle adjustment component, the problem of the baffle being difficult to adjust in the exhaust pipe is solved, achieving stable adjustment of the baffle angle and convenient operation.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- 捷捷微电(南通)科技有限公司
- Filing Date
- 2025-07-02
- Publication Date
- 2026-05-15
AI Technical Summary
In existing technologies, the baffle plate is not easy to adjust in the exhaust pipe, especially the adjustable wrench is easy to loosen and the force is difficult to control, resulting in inconvenience in operation.
A baffle adjustment assembly consisting of a first sleeve and a second sleeve is adopted. The first sleeve is fitted outside the fixing nut, and the second sleeve is fitted outside the adjustment knob. The adjustment knob is rotated by a rotating part. The anti-slip surface and connecting rod are combined to ensure stability and convenient operation.
This design ensures that the baffle plate is not easily loosened during adjustment, the force is easy to control, the adjustment is more convenient, and the operating efficiency is improved.
Smart Images
Figure CN224248033U_ABST
Abstract
Description
Technical Field
[0001] This application relates to the field of semiconductor technology, and more specifically, to a baffle adjustment assembly and an exhaust system. Background Technology
[0002] In coating and developing equipment, air needs to be vented when the hot plate heats the wafer to ensure uniform heating temperature.
[0003] Currently, baffles are typically installed in the exhaust pipe to regulate exhaust pressure. The baffle adjustment module needs to be manually adjusted based on data from a digital display to achieve the required exhaust pressure. The adjustment tool currently uses two adjustable wrenches: one to hold the fixing nut, and the other to clamp the adjustment knob. Loosening the fixing nut and rotating the adjustment knob adjusts the opening angle of the baffle.
[0004] However, in actual operation, the adjustable wrench may come loose when it is stuck, especially when there is insufficient space, which may cause damage such as stripping of the nut; at the same time, the force required to turn the adjustment knob of the adjustable wrench is difficult to control, requiring repeated adjustments, making it difficult to operate.
[0005] In summary, the existing technology has the problem that the baffles in the exhaust pipe are not easy to adjust. Utility Model Content
[0006] The purpose of this application is to provide a baffle adjustment assembly and an exhaust system to solve the problem that the baffles in the exhaust pipe are not easy to adjust in the prior art.
[0007] To achieve the above objectives, the technical solutions adopted in the embodiments of this application are as follows:
[0008] On one hand, this application provides a baffle adjustment assembly for adjusting the baffle angle in an exhaust device. The exhaust device further includes a fixing nut and an adjustment knob. The baffle adjustment assembly includes a first sleeve and a second sleeve, wherein the diameter of the first sleeve is larger than the diameter of the second sleeve, and the first sleeve is sleeved outside the second sleeve.
[0009] The second end of the second sleeve is provided with a rotating part. When the baffle adjustment assembly is working, the first end of the first sleeve is sleeved on the fixing nut, the first end of the second sleeve is sleeved on the adjustment knob, and the rotating part is used to drive the adjustment knob to rotate when force is applied.
[0010] Optionally, the rotating part includes a rod that passes through the second sleeve, and the rod is fixedly connected to the second sleeve.
[0011] Optionally, the two ends of the rod extending out are of equal length.
[0012] Optionally, the inner wall of the first end of the first sleeve is provided with a shape that matches the fixing nut.
[0013] Optionally, the first sleeve includes a cylindrical body and a retaining part, the cylindrical body being connected to the retaining part, the retaining part being located at the first end of the first sleeve, and the retaining part being provided with a notch.
[0014] Optionally, the surface of the first sleeve is configured as an anti-slip surface.
[0015] Optionally, the surface of the first sleeve is provided with a dotted structure, which constitutes the anti-slip surface.
[0016] Optionally, the inner wall of the first sleeve is provided with a rotating groove, and the baffle adjustment assembly further includes at least two connecting rods, one end of each connecting rod being fixedly connected to the outer wall of the first sleeve, and the other end of each connecting rod being located in the rotating groove.
[0017] Optionally, the baffle adjustment assembly includes four connecting rods, with the angle between any two adjacent connecting rods being 90°.
[0018] On the other hand, embodiments of this application also provide an exhaust system, which includes an exhaust device and the aforementioned baffle adjustment assembly.
[0019] Compared with the prior art, this application has the following advantages:
[0020] This application provides a baffle adjustment assembly and an exhaust system. The baffle adjustment assembly is used to adjust the baffle angle in an exhaust device, which also includes a fixing nut and an adjustment knob. The baffle adjustment assembly includes a first sleeve and a second sleeve, the diameter of the first sleeve being larger than the diameter of the second sleeve, and the first sleeve is fitted over the second sleeve. A rotating part is provided at the second end of the second sleeve. When the baffle adjustment assembly is working, the first end of the first sleeve is fitted over the fixing nut, and the first end of the second sleeve is fitted over the adjustment knob. The rotating part is used to drive the adjustment knob to rotate when force is applied. Because the baffle adjustment assembly of this application includes a first sleeve and a second sleeve, and during baffle adjustment, the first sleeve and the second sleeve are respectively fitted over the fixing nut and the adjustment knob, it is less likely to loosen during adjustment. At the same time, the force is easier to control by rotating the adjustment knob, thus making adjustment more convenient.
[0021] To make the above-mentioned objectives, features and advantages of this application more apparent and understandable, preferred embodiments are described below in detail with reference to the accompanying drawings. Attached Figure Description
[0022] To more clearly illustrate the technical solutions of the embodiments of this application, the accompanying drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this application and should not be regarded as a limitation of the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.
[0023] Figure 1 This is a schematic diagram of the exhaust pipe structure of a coating and developing equipment in the prior art.
[0024] Figure 2 This is a schematic diagram of the structure of a baffle adjustment module in the prior art.
[0025] Figure 3 This is a schematic diagram of the baffle adjustment assembly provided in an embodiment of this application.
[0026] Figure 4 This is a schematic diagram illustrating an application scenario of the baffle adjustment assembly provided in an embodiment of this application.
[0027] Figure 5 This is a schematic diagram of the structure of the first end of the first sleeve provided in an embodiment of this application.
[0028] Figure 6 This is a schematic diagram of another structure of the first end of the first sleeve provided in an embodiment of this application.
[0029] Figure 7 This is a cross-sectional schematic diagram of the baffle adjustment assembly provided in an embodiment of this application.
[0030] In the picture:
[0031] 1-Exhaust pipe; 2-Baffle; 3-Baffle adjustment module; 4-Adjusting rod; 5-Exhaust detection hole; 110-First sleeve; 120-Second sleeve; 121-Rod body; 130-Connecting rod. Detailed Implementation
[0032] To make the objectives, technical solutions, and advantages of the embodiments of this application clearer, the technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. The components of the embodiments of this application described and shown in the accompanying drawings can generally be arranged and designed in various different configurations.
[0033] Therefore, the following detailed description of the embodiments of this application provided in the accompanying drawings is not intended to limit the scope of the claimed application, but merely to illustrate selected embodiments of the application. All other embodiments obtained by those skilled in the art based on the embodiments of this application without inventive effort are within the scope of protection of this application.
[0034] It should be noted that similar reference numerals and letters in the following figures indicate similar items; therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures. Furthermore, in the description of this application, terms such as "first," "second," etc., are used only to distinguish descriptions and should not be construed as indicating or implying relative importance.
[0035] It should be noted that in this paper, relational terms such as first and second are used only to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations.
[0036] The following detailed description of some embodiments of this application is provided in conjunction with the accompanying drawings. Unless otherwise specified, the following embodiments and features can be combined with each other.
[0037] As described in the background section, during the use of coating and developing equipment, it is necessary to adjust the angle of the baffle to regulate the exhaust pressure of the machine.
[0038] like Figure 1 The diagram shows the structure of the exhaust pipe in a prior art coating and developing equipment. The exhaust pipe 1 has a baffle 2 inside, and a baffle adjustment module 3 on its outer wall. An adjustment rod 4 passes through the exhaust pipe 1 and is connected to the baffle 2. When the operator rotates the baffle adjustment module 3, the adjustment rod 4 rotates accordingly, thereby causing the baffle 2 to rotate. Furthermore, the gas flow rate in the exhaust pipe 1 is minimum when the baffle 2 is parallel to the horizontal direction, and maximum when the baffle 2 is parallel to the vertical direction.
[0039] Furthermore, an exhaust detection port 5 is provided on the exhaust pipe 1. This exhaust detection port 5 is used to connect a pressure monitoring instrument to monitor the pressure inside the exhaust pipe 1.
[0040] In actual use, after observing the pressure in the exhaust pipe 1 through the pressure monitoring instrument, the staff can rotate the baffle 2 through the baffle adjustment module 3 according to the actual needs, so as to increase or decrease the angle between the baffle 2 and the horizontal plane, thereby adjusting the exhaust pressure required by the machine.
[0041] The structure of the baffle adjustment module 3 is as follows: Figure 2 As shown, it generally includes an adapter body, a fixing nut, and an adjusting knob. During operation, the fixing nut needs to be loosened by rotating it counterclockwise before the adjusting knob can be used to adjust the baffle. For example, when the adjusting knob is rotated counterclockwise, the baffle also rotates counterclockwise; and when the adjusting knob is rotated clockwise, the baffle rotates clockwise. For easier adjustment, the current adjustment tool generally uses two adjustable wrenches, one to hold the fixing nut and the other to clamp the adjusting knob. After loosening the fixing nut, the adjusting knob is rotated to adjust the opening angle of the baffle.
[0042] However, the applicant found in actual operation that the adjustable wrench would come loose when stuck, especially when there was insufficient space, which could cause damage such as stripped nuts; at the same time, the force of turning the adjustment knob of the adjustable wrench was difficult to control, requiring repeated adjustments and making it difficult to operate.
[0043] In view of this, in order to solve the above problems, this application provides a baffle adjustment assembly, which makes it easier to operate during baffle adjustment by setting a sleeve.
[0044] The baffle adjustment assembly provided in this application is described below by way of example:
[0045] As an optional implementation, please refer to Figure 3 and Figure 4 The baffle adjustment assembly is used to adjust the baffle angle in the exhaust device, which also includes a fixing nut and an adjustment knob. The baffle adjustment assembly includes a first sleeve 110 and a second sleeve 120. The diameter of the first sleeve 110 is larger than the diameter of the second sleeve 120, and the first sleeve 110 is sleeved outside the second sleeve 120. The second end of the second sleeve 120 is provided with a rotating part. When the baffle adjustment assembly is working, the first end of the first sleeve 110 is sleeved outside the fixing nut, and the first end of the second sleeve 120 is sleeved outside the adjustment knob. The rotating part is used to drive the adjustment knob to rotate when force is applied.
[0046] Understandably, since the baffle adjustment assembly provided in this application includes a first sleeve 110 and a second sleeve 120, and during baffle adjustment, the first sleeve 110 and the second sleeve 120 are respectively fitted onto the fixing nut and the adjusting knob, making it less likely for them to loosen during the adjustment process. At the same time, the force is easier to control by rotating the adjusting knob via the rotating part, thus making adjustment more convenient.
[0047] It should be noted that, in order to ensure that the first end of the first sleeve 110 can be securely fitted onto the fixing nut and the first end of the second sleeve 120 can be securely fitted onto the adjusting knob during rotation, the shape of the first end of the first sleeve 110 must match the fixing nut and the shape of the first end of the second sleeve 120 must match the adjusting knob.
[0048] Taking the first sleeve 110 as an example, as one implementation, the inner wall of the first end of the first sleeve 110 is provided with a shape that matches the fixing nut. For example, when the fixing nut is set as a regular hexagon, the inner wall of the first sleeve 110 can also be set as a regular hexagon, such as... Figure 5 As shown, when the first sleeve 110 is fitted over the fixing nut, the two can be locked together, and the operator can rotate the fixing nut clockwise or counterclockwise using the first sleeve 110. Furthermore, it should be noted that in actual installations, when the inner wall of the first end of the first sleeve 110 needs to be set as a regular hexagon, the entire inner wall of the sleeve can be set as a regular hexagon; alternatively, only the first end of the first sleeve 110 can be set as a regular hexagon, while the remaining area is set as a circle; no limitation is made here.
[0049] In another implementation, the first sleeve 110 includes a cylindrical body and a retaining part. The cylindrical body is connected to the retaining part, which is located at the first end of the first sleeve 110 and has a notch. The structure of the retaining part is as follows: Figure 6 As shown. In this implementation, the first sleeve 110 can be divided into two parts: a cylindrical body and a retaining part. The cylindrical body and the retaining part are connected and integrally formed. The cylindrical body is sleeved on the second sleeve 120, and the first sleeve 110 and the second sleeve 120 can rotate relative to each other. The retaining part is used to retain and fix the nut.
[0050] In this application, the notch refers to a first part and a second part that are relatively parallel on the holding part, with a hollow section between the first part and the second part, and the distance between the first part and the second part is greater than the width of the adjustment knob. When the first end of the first sleeve 110 is fitted over the fixing nut, the first part and the second part are clamped in the fixing nut, and thus, when the first sleeve 110 is rotated, the fixing nut also rotates.
[0051] Of course, the structure of the first end of the second sleeve 120 can be the same as that of the first end of the first sleeve 110, which will not be elaborated here.
[0052] Furthermore, since the operator needs to hold the first sleeve 110 with one hand and the second end of the second sleeve 120 with the other hand during use, the surface of the first sleeve 110 is designed as an anti-slip surface to prevent the operator's hand from slipping when holding the first sleeve 110. Compared to a smooth surface, the anti-slip surface has a higher coefficient of friction, thus reducing the likelihood of the operator's hand slipping when holding the first sleeve 110.
[0053] In one implementation, the surface of the first sleeve 110 is provided with a dotted structure, which constitutes an anti-slip surface. Of course, in other implementations, the anti-slip surface can also be achieved through other structures. For example, corresponding patterns can be provided on the surface of the first sleeve 110 to form an anti-slip surface, such as threads, meander patterns, diamond patterns, etc., which are not limited here.
[0054] Furthermore, to make it easier for staff to adjust the baffle structure, a rotating part is provided at the second end of the second sleeve 120, which allows staff to control the opening and closing angle of the baffle.
[0055] In one implementation, the rotating part includes a rod 121 that passes through the second sleeve 120, and the rod 121 is fixedly connected to the second sleeve 120. By providing a rotating part with the rod 121 structure, the operator can more easily apply force when rotating the first sleeve 110. Furthermore, to ensure uniform force distribution, the two ends of the rod 121 are of equal length.
[0056] Of course, in other implementations, the rotating part can also be set to other structures, for example, the rotating part can be set to a ring structure, which is not limited here.
[0057] Understandably, the steps for adjusting the baffle angle using the baffle adjustment assembly are as follows:
[0058] First, the baffle adjustment assembly is fitted onto the exhaust device. The first end of the first sleeve 110 is fitted over the fixing nut, and the first end of the second sleeve 120 is fitted over the adjustment knob. At this point, the operator can hold the first sleeve 110 with their left hand and the rotating part of the second sleeve 120 with their right hand. Next, the operator can rotate the first sleeve 110 counterclockwise with their left hand to loosen the fixing nut. After loosening the fixing nut, the operator can control the rotating part to rotate clockwise or counterclockwise with their right hand, thereby rotating the baffle. After adjusting the baffle to the desired angle, the operator can rotate the first sleeve 110 clockwise with their left hand to tighten the fixing nut, completing the baffle angle adjustment.
[0059] Furthermore, to enhance the stability of the first sleeve 110 and the second sleeve 120 during use, please refer to [link / reference needed]. Figure 7 The inner wall of the first sleeve 110 is provided with a rotating groove. The baffle adjustment assembly also includes at least two connecting rods 130. One end of each connecting rod 130 is fixedly connected to the outer wall of the first sleeve 110, and the other end of each connecting rod 130 is located in the rotating groove. By setting the connecting rods 130, the first sleeve 110 and the second sleeve 120 cannot be separated during use, but can rotate relative to each other. Therefore, during use, the second sleeve 120 is not easy to disengage from the adjustment knob and is not easy to wobble, resulting in stronger overall stability.
[0060] In this application, the baffle adjustment assembly includes four connecting rods 130, and the angle between any two adjacent connecting rods 130 is 90°. By setting four connecting rods 130, the connection between the first sleeve 110 and the second sleeve 120 is made more stable.
[0061] Based on the above implementation, this application embodiment also provides an exhaust system, which includes an exhaust device and the above-mentioned baffle adjustment assembly.
[0062] In summary, this application provides a baffle adjustment assembly and an exhaust system. The baffle adjustment assembly is used to adjust the baffle angle in an exhaust device, which also includes a fixing nut and an adjustment knob. The baffle adjustment assembly includes a first sleeve and a second sleeve, the diameter of which is larger than that of the second sleeve, and the first sleeve is fitted over the second sleeve. A rotating part is provided at the second end of the second sleeve. When the baffle adjustment assembly is working, the first end of the first sleeve is fitted over the fixing nut, and the first end of the second sleeve is fitted over the adjustment knob. The rotating part is used to drive the adjustment knob to rotate when force is applied. Because the baffle adjustment assembly provided in this application includes a first sleeve and a second sleeve, and during baffle adjustment, the first sleeve and the second sleeve are respectively fitted over the fixing nut and the adjustment knob, it is less likely to loosen during adjustment. Furthermore, the force is easier to control by rotating the adjustment knob, making adjustment more convenient.
[0063] The above description is merely a preferred embodiment of this application and is not intended to limit this application. Various modifications and variations can be made to this application by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this application should be included within the protection scope of this application.
[0064] It will be apparent to those skilled in the art that this application is not limited to the details of the exemplary embodiments described above, and that this application can be implemented in other specific forms without departing from the spirit or essential characteristics of this application. Therefore, the embodiments should be considered illustrative and non-limiting in all respects, and the scope of this application is defined by the appended claims rather than the foregoing description. Thus, all variations falling within the meaning and scope of equivalents of the claims are intended to be included within this application. No reference numerals in the claims should be construed as limiting the scope of the claims.
Claims
1. A baffle adjustment assembly, characterized in that, The baffle adjustment assembly is used to adjust the angle of the baffle in the exhaust device. The exhaust device also includes a fixing nut and an adjustment knob. The baffle adjustment assembly includes a first sleeve and a second sleeve. The diameter of the first sleeve is larger than the diameter of the second sleeve, and the first sleeve is sleeved outside the second sleeve. The second end of the second sleeve is provided with a rotating part. When the baffle adjustment assembly is working, the first end of the first sleeve is sleeved on the fixing nut, the first end of the second sleeve is sleeved on the adjustment knob, and the rotating part is used to drive the adjustment knob to rotate when force is applied.
2. The baffle adjustment assembly as described in claim 1, characterized in that, The rotating part includes a rod that passes through the second sleeve, and the rod is fixedly connected to the second sleeve.
3. The baffle adjustment assembly as described in claim 2, characterized in that, The two ends of the rod are of equal length.
4. The baffle adjustment assembly as described in claim 1, characterized in that, The inner wall of the first end of the first sleeve is provided with a shape that matches the fixing nut.
5. The baffle adjustment assembly as described in claim 1, characterized in that, The first sleeve includes a cylindrical body and a retaining part. The cylindrical body is connected to the retaining part, which is located at the first end of the first sleeve and has a notch.
6. The baffle adjustment assembly as described in claim 1, characterized in that, The surface of the first sleeve is designed to be non-slip.
7. The baffle adjustment assembly as described in claim 6, characterized in that, The surface of the first sleeve is provided with a dotted structure, which constitutes the anti-slip surface.
8. The baffle adjustment assembly as described in claim 1, characterized in that, The inner wall of the first sleeve is provided with a rotating groove, and the baffle adjustment assembly further includes at least two connecting rods. One end of each connecting rod is fixedly connected to the outer wall of the first sleeve, and the other end of each connecting rod is located in the rotating groove.
9. The baffle adjustment assembly as described in claim 8, characterized in that, The baffle adjustment assembly includes four connecting rods, with the angle between any two adjacent connecting rods being 90°.
10. An exhaust system, characterized in that, The exhaust system includes an exhaust device and a baffle adjustment assembly as described in any one of claims 1 to 9.