Electrode device for high-frequency power supply of polycrystalline reduction furnace

Abstract

The utility model discloses an electrode device for a high-frequency power supply of a polycrystalline reduction furnace, which relates to the technical field of photovoltaic production equipment, and comprises a water inlet pipe, the water inlet pipe is arranged on a connecting row in a penetrating manner, the connecting row is electrically connected with the high-frequency power supply, a water outlet pipe and an electrode pipe are arranged on the periphery of the water inlet pipe, and the water outlet pipe is in threaded connection with the electrode pipe. One end, deviating from the connecting row, of the water inlet pipe is electrically connected with the electrode pipe, the water inlet pipe is used for conveying cooling liquid, and when the cooling liquid reaches one end, deviating from the connecting row, of the electrode pipe, the cooling liquid overflows between the water inlet pipe and the electrode pipe and between the water inlet pipe and the water outlet pipe, so that the cooling liquid is discharged from the water outlet pipe; according to the electrode device for the high-frequency power supply of the polycrystalline reduction furnace, the technical problems that in the process that an existing electrode tube produces reduction silicon through high-frequency current, due to the fact that the temperature distribution of the electrode tube is not uniform, the silicon rod fusing risk is caused, and high loss exists in the high-frequency current transmission process are solved.

Description

Technical Field

[0001] This utility model relates to the field of photovoltaic production equipment technology, and in particular to an electrode device for a high-frequency power supply in a polycrystalline reduction furnace. Background Technology

[0002] Applying high-frequency current to the reduction growth of polycrystalline silicon can effectively improve its production efficiency. High-frequency current increases the current density on the surface of the silicon rod, thereby improving temperature uniformity and increasing the maximum growth diameter, thus enhancing growth efficiency. However, in actual production, high-frequency current exhibits skin effect, radiation loss, parasitic capacitance and inductance, and dielectric loss during transmission. These characteristics lead to energy loss and reduced transmission efficiency. Furthermore, prolonged conduction of high-frequency current causes the silicon rod's temperature to gradually rise, affecting its conductivity and further reducing polycrystalline silicon production efficiency.

[0003] In summary, developing an electrode device that reduces high-frequency current transmission loss is a problem that urgently needs to be solved by those skilled in the art. Utility Model Content

[0004] The purpose of this invention is to provide an electrode device for a high-frequency power supply in a polycrystalline reduction furnace, which solves the technical problem of high loss of high-frequency current during the production of polycrystalline silicon by conducting high-frequency current through the electrode tube.

[0005] To achieve the above objectives, this utility model provides an electrode device for a high-frequency power supply in a polycrystalline reduction furnace, comprising:

[0006] The water inlet pipe passes through the connecting busbar, which is electrically connected to the high-frequency power supply. The water inlet pipe has an outlet pipe and an electrode pipe on its outer periphery. The outlet pipe and the electrode pipe are threaded together and are spaced apart from the water inlet pipe. The end of the water inlet pipe away from the connecting busbar is electrically connected to the electrode pipe. The water inlet pipe is used to transport coolant. When the coolant reaches the end of the electrode pipe away from the connecting busbar, the coolant overflows between the water inlet pipe and the electrode pipe, and between the water inlet pipe and the outlet pipe, so that the coolant is discharged from the outlet pipe.

[0007] Preferably, the end of the inlet pipe opposite to the connecting bar is provided with a connecting stud, which is threaded to the inner cavity of the electrode tube; the end of the outlet pipe opposite to the connecting bar is provided with a connecting nut, which is sleeved on the outer periphery of the electrode tube; a branch pipe extends from the side wall of the outlet pipe, and the branch pipe is provided with an outlet.

[0008] Preferably, the connecting stud has a plurality of spline slots along its axial direction on its outer periphery, and the spline slots are evenly arranged around the axis of the connecting stud.

[0009] Preferably, the inner cavity of the electrode tube is provided with a guide groove at one end near the connecting stud. The port of the guide groove is smaller than the diameter of the connecting stud. The end of the connecting stud abuts against the port of the guide groove. The guide groove and spline slot connect the inner cavity of the water inlet pipe with the chamber between the electrode tube and the water inlet pipe.

[0010] Preferably, the connecting nut has a sealing gasket inside, so that when the electrode tube abuts against the connecting nut, the end of the electrode tube abuts against the sealing gasket.

[0011] Preferably, the end of the outlet pipe away from the guide channel is provided with a fixed flange, and the outer periphery of the inlet pipe is provided with a locking component. The locking component and the fixed flange are located on both sides of the connecting row, and the fixed flange and the locking component are used to clamp and fix the connecting row.

[0012] Preferably, an insulating gasket is provided between the fixed flange and the connecting bar, and a conductive sheet is provided between the locking element and the connecting bar.

[0013] Preferably, the inner and outer walls of the water inlet pipe are provided with an insulating coating.

[0014] Compared to the aforementioned background technology, the electrode device for a high-frequency power supply in a polycrystalline reduction furnace provided by this utility model includes: a water inlet pipe passing through a connecting busbar, the connecting busbar being electrically connected to the high-frequency power supply; a water outlet pipe and an electrode pipe located around the outer periphery of the water inlet pipe, the electrode pipe being threadedly connected to the water outlet pipe; furthermore, the electrode pipe and the water outlet pipe are spaced apart from the water inlet pipe; the end of the water inlet pipe facing away from the connecting busbar is electrically connected to the electrode pipe; coolant flows through the inner cavity of the water inlet pipe, the coolant flowing in the direction facing away from the connecting busbar; when the coolant flows to the end of the electrode pipe facing away from the connecting busbar, the coolant overflows into the chamber between the water inlet pipe and the electrode pipe, and the coolant is discharged through the water outlet pipe. In the process of producing polycrystalline silicon using this invention, current is input through the inlet pipe, which transmits high-frequency current to the electrode tube. Simultaneously, coolant overflows from the inner cavity of the inlet pipe to the space between the electrode tube and the inlet pipe. The coolant carries away the heat generated by the electrode tube from the electrode device, further reducing the risk of silicon rod melting and increasing the maximum production diameter of the silicon rod. The electrode tube and inlet pipe, which have lower temperatures, have lower resistance, resulting in less loss during the transmission of high-frequency current. Furthermore, by designing the inlet pipe and electrode tube used to transmit high-frequency current as tubular, the skin effect on the electrode device is reduced, thereby improving the production efficiency of the electrode device. Attached Figure Description

[0015] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on the provided drawings without creative effort.

[0016] Figure 1 A cross-sectional view of the electrode device for a high-frequency power supply in a polycrystalline reduction furnace provided in an embodiment of this utility model;

[0017] Figure 2 This is a top view of the electrode device for a high-frequency power supply in a polycrystalline reduction furnace provided in an embodiment of the present invention.

[0018] Among them, 1-inlet pipe; 11-connecting stud; 12-spline groove hole; 2-connecting row; 3-electrode tube; 31-guide groove; 4-outlet pipe; 41-branch pipe; 5-connecting nut; 6-locking part; 7-fixed flange; 8-sealing gasket; 9-insulating gasket. Detailed Implementation

[0019] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0020] To enable those skilled in the art to better understand the present invention, the present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments.

[0021] This invention provides an electrode device for a high-frequency power supply in a polycrystalline reduction furnace. Please refer to the appendix of the instruction manual. Figure 1 With appendix Figure 2The aforementioned device includes a connecting strip 2, which is electrically connected to a high-frequency power supply. An inlet pipe 1 is threaded through the connecting strip 2. An outlet pipe 4 and an electrode pipe 3 are arranged around the outer periphery of the inlet pipe 1, with the outlet pipe 4 and electrode pipe 3 arranged sequentially along the side opposite to the connecting strip 2. The outlet pipe 4 and electrode pipe 3 are threadedly connected. It should be noted that the inner walls of the outlet pipe 4 and electrode pipe 3 are spaced apart from the outer wall of the inlet pipe 1. The end of the inlet pipe 1 opposite to the connecting strip 2 is electrically connected to the electrode pipe 3. The inlet pipe 1 supplies high-frequency current to the electrode pipe 3, enabling the electrode pipe 3 to produce polycrystalline silicon. The inlet is located near the end of the connecting pipe 2. The coolant enters the inner cavity of the inlet pipe 1 through the inlet. When the coolant reaches the end of the electrode tube 3 away from the connecting pipe 2, the coolant overflows from the inner cavity of the inlet pipe 1 to the space between the inlet pipe 1 and the electrode tube 3, and between the inlet pipe 1 and the outlet pipe 4. Preferably, the flow direction of the coolant in the inlet pipe 1 is opposite to the flow direction outside the inlet pipe 1. The coolant absorbs the heat generated by the electrode tube 3 and the inlet pipe 1, ensuring that the electrode tube 3 and the inlet pipe 1 are in a suitable working environment, reducing the resistance of the electrode tube 3 and the inlet pipe 1, and reducing the loss of high-frequency current. Furthermore, after high-frequency current is conducted in electrode tube 3 and water inlet tube 1, the alternating magnetic field coexisting with the high-frequency current will generate an induced electromotive force in electrode tube 3 and water inlet tube 1 in the opposite direction of the current. This causes the electrons in electrode tube 3 and water inlet tube 1 to be affected by the Lorentz force and move towards the surface of electrode tube 3 and water inlet tube 1. That is, the current density on the surface of electrode tube 3 and water inlet tube 1 is large, the effective cross-sectional area is small, and the resistance increases. In this invention, water inlet tube 1 and electrode tube 3 are designed as interlocking tubes, so that water inlet tube 1 and electrode tube 3 can transport coolant while reducing the distance between their inner and outer walls. This makes the effective conduction cross-sectional area after electron deflection approximately the cross-sectional area of ​​water inlet tube 1 and electrode tube 3, reducing the impact of the skin effect on the high-frequency current transmission efficiency.

[0022] Please continue to refer to the instruction manual appendix. Figure 1A connecting stud 11 is provided on the outer periphery of the end of the water inlet pipe 1 away from the water inlet. It should be noted that the ports on both sides of the water inlet pipe 1 are interconnected. The end of the electrode tube 3 away from the connecting tube 2 is closed. A guide groove 31 is provided on the inner side of the closed end of the electrode tube 3. The connecting stud 11 is provided on the outer periphery of the end of the water inlet pipe 1 away from the water inlet. The water inlet pipe 1 is screwed into the electrode tube 3 to fix the water inlet pipe 1 and the electrode tube 3. Preferably, a plurality of spline slot holes 12 are provided on the outer periphery of the connecting stud 11 along its axial direction. Each spline slot hole 12 is evenly distributed around the axis of the connecting stud 11. The spline slot holes 12 penetrate the upper and lower end faces of the connecting stud 11. Furthermore, the port diameter of the guide groove 31 is smaller than the diameter of the connecting stud 11. After the connecting stud 11 and the electrode tube 3 are connected, the upper end face of the connecting stud 11 abuts against the port of the guide groove 31, and the spline slot hole 12 is connected to the guide groove 31. The coolant enters the guide groove 31 through the interconnected port of the inlet pipe 1. When the coolant completely fills the guide groove 31, the coolant overflows through the spline slot holes 12 on the edge of the connecting stud 11 into the cavity between the inlet pipe 1 and the electrode tube 3. The coolant flows outside the inlet pipe 1 and fully absorbs the heat generated by the electrode tube 3. In addition, both the inner and outer sides of the inlet pipe 1 are filled with coolant. The coolant on both sides absorbs the heat generated by the inlet pipe 1 at the same time, preventing the temperature of the inlet pipe 1 from rising and the resistance from increasing, which would affect the transmission efficiency of the high-frequency current.

[0023] Preferably, a fixing ring extends from the end of the outlet pipe 4 opposite to the electrode pipe 3 in a direction away from its axis. A connecting nut 5 is provided on the outer periphery of the outlet pipe 4. A retaining ring extends from the end of the connecting nut 5 near the water inlet to the side near the axis of the outlet pipe 4. A sealing gasket 8 is sandwiched between the retaining ring and the fixing ring. In addition, a sealing gasket 8 is also provided on the upper end face of the fixing ring. A threaded section is provided on the outer periphery of the end of the electrode pipe 3 away from the guide groove 31. The threaded section cooperates with the connecting nut 5. As the threaded section gradually approaches the retaining ring, the end of the electrode pipe 3 presses against the sealing gasket 8. The retaining ring and the fixing ring fit tightly together, connecting the electrode pipe 3 to the outlet pipe 4. Each sealing gasket 8 is used to prevent coolant from flowing out of the electrode pipe 3.

[0024] A branch pipe 41, which communicates with the inner cavity of the outlet pipe 4, extends from the side wall of the outlet pipe 4. The branch pipe 41 extends to one end near the outlet, and the branch pipe 41 has an outlet at the extended end. The coolant overflowing between the electrode tube 3 and the inlet pipe 1 is discharged from the outlet.

[0025] In addition, a fixing flange 7 is provided at the end of the water outlet pipe 4 away from the fixing ring. The fixing flange 7 is used to fix the water outlet pipe 4 to the connecting strip 2, and an insulating gasket 9 is clamped between the fixing flange 7 and the connecting strip 2. A locking member 6 is provided on the other side of the connecting strip 2 away from the fixing flange 7. The locking member 6 is threaded to the outer periphery of the water inlet pipe 1. A conductive plate is provided between the locking member 6 and the connecting strip 2. The conductive plate is used to buffer the stress generated between the connecting strip 2 and the locking member 6. The locking member 6 is screwed towards the end closer to the fixing flange 7. The conductive sheet supports the connecting strip 2, at which time the connecting strip 2, the inlet pipe 1, and the outlet pipe 4 are fixedly connected. Preferably, the insulating pad 9 and the sealing pad 8 are both ring-shaped rubber pads. The connecting strip 2, the conductive sheet, the locking member 6, and the inlet pipe 1 are all made of copper. When the high-frequency power supply delivers high-frequency current to the connecting strip 2, the connecting strip 2 delivers high-frequency current to the inlet pipe 1 through the conductive sheet and the locking member 6. The sealing pad 8, which is located between the connecting strip 2 and the outlet pipe 4, and between the electrode tube 3 and the connecting nut, prevents the high-frequency current from being conducted into the outlet pipe 4.

[0026] Furthermore, an insulating coating is applied to both the inner and outer walls of the water inlet pipe 1. No insulating coating is applied to the threaded section of the connecting stud 11. When the high-frequency current flows in the water inlet pipe 1, the insulating coating prevents the current from contacting the coolant, causing the high-frequency current to be diverted into the coolant, resulting in high-frequency current loss. When the high-frequency current flows to the connecting stud 11, the current is conducted to the electrode tube 3 through the threaded section. Similarly, an insulating coating is also applied to the section of the electrode tube 3 that does not contact the threaded stud, to prevent the high-frequency current in the electrode tube 3 from leaking into the coolant and causing high-frequency current loss.

[0027] In the process of producing polycrystalline silicon according to this application, coolant is pre-filled into the inner cavity of the water inlet pipe 1. After the coolant fills the water inlet pipe 1, it overflows into the cavity between the water inlet pipe 1 and the electrode tube 3. When the cavity is filled with coolant, the high-frequency power supply is started. The high-frequency power supply supplies high-frequency current to the connecting pin 2. The connecting pin 2 conducts the high-frequency current to the water inlet pipe 1 through the conductive sheet and the locking member 6. The high-frequency current is conducted to the electrode tube 3 through the connecting stud 11. Polycrystalline silicon is generated on the surface of the electrode tube 3 through the high-frequency current. After the tubular water inlet pipe 1 and electrode tube 3 are subjected to the skin effect, the effective cross section for transmitting the high-frequency current is approximately the cross-sectional area of ​​the water inlet pipe 1 and the electrode tube 3. The electrode device with this structure is less affected by the skin effect. In addition, the coolant is transported in the water inlet pipe 1 and the electrode tube 3. The coolant absorbs the heat generated by the water inlet pipe 1 and the electrode tube 3, so that the resistance of the water inlet pipe 1 and the electrode tube 3 is maintained at a low level, reducing the loss generated during the transmission of high-frequency current.

[0028] It should be noted that in this specification, relational terms such as first and second are used only to distinguish one entity from several other entities, and do not necessarily require or imply any such actual relationship or order between these entities.

[0029] This article uses specific examples to illustrate the principles and implementation methods of this utility model. The descriptions of the above embodiments are only for the purpose of helping to understand the method and core ideas of this utility model. It should be noted that for those skilled in the art, several improvements and modifications can be made to this utility model without departing from the principles of this utility model, and these improvements and modifications also fall within the protection scope of this utility model.

Claims

1. An electrode device for a high-frequency power supply in a polycrystalline reduction furnace, characterized in that, include: The water inlet pipe (1) is installed on the connecting bar (2). The connecting bar (2) is electrically connected to the high-frequency power supply. The water inlet pipe (1) is provided with an outlet pipe (4) and an electrode pipe (3) on its outer periphery. The outlet pipe (4) and the electrode pipe (3) are threaded together and are spaced apart from the water inlet pipe (1). The end of the water inlet pipe (1) away from the connecting bar (2) is electrically connected to the electrode pipe (3). The water inlet pipe (1) is used to transport coolant. When the coolant reaches the end of the electrode pipe (3) away from the connecting bar (2), the coolant overflows between the water inlet pipe (1) and the electrode pipe (3) and between the water inlet pipe (1) and the outlet pipe (4), so that the coolant is discharged from the outlet pipe (4).

2. The electrode device for a high-frequency power supply in a polycrystalline reduction furnace according to claim 1, characterized in that, The water inlet pipe (1) is provided with a connecting stud (11) on the outer periphery of the end opposite to the connecting bar (2), and the connecting stud (11) is threadedly connected to the inner cavity of the electrode tube (3); the water outlet pipe (4) is provided with a connecting nut (5) on the end opposite to the connecting bar (2), and the connecting nut (5) is sleeved on the outer periphery of the electrode tube (3); a branch pipe (41) extends from the side wall of the water outlet pipe (4), and the branch pipe (41) is provided with a water outlet.

3. The electrode device for a high-frequency power supply in a polycrystalline reduction furnace according to claim 2, characterized in that, The connecting stud (11) has a plurality of spline slots (12) on its outer periphery along its axial direction, and each spline slot (12) is evenly arranged around the axis of the connecting stud (11).

4. The electrode device for a high-frequency power supply in a polycrystalline reduction furnace according to claim 3, characterized in that, The inner cavity of the electrode tube (3) is provided with a flow guide groove (31) at one end near the connecting stud (11). The port of the flow guide groove (31) is smaller than the diameter of the connecting stud (11). The end of the connecting stud (11) abuts against the port of the flow guide groove (31). The flow guide groove (31) and the spline slot hole (12) connect the inner cavity of the water inlet pipe (1) with the chamber between the electrode tube (3) and the water inlet pipe (1).

5. The electrode device for a high-frequency power supply in a polycrystalline reduction furnace according to claim 4, characterized in that, The connecting nut (5) is provided with a sealing gasket (8). When the electrode tube (3) abuts against the connecting nut (5), the port of the electrode tube (3) abuts against the sealing gasket (8).

6. The electrode device for a high-frequency power supply in a polycrystalline reduction furnace according to claim 5, characterized in that, The outlet pipe (4) is provided with a fixed flange (7) at one end away from the guide groove (31), and the inlet pipe (1) is provided with a locking member (6) on its outer periphery. The locking member (6) and the fixed flange (7) are located on both sides of the connecting row (2). The fixed flange (7) and the locking member (6) are used to clamp and fix the connecting row (2).

7. The electrode device for a high-frequency power supply in a polycrystalline reduction furnace according to claim 6, characterized in that, Insulating pads (9) are provided between the fixed flange (7) and the connecting row (2), and conductive sheets are provided between the locking member (6) and the connecting row (2).

8. The electrode device for a high-frequency power supply in a polycrystalline reduction furnace according to claim 7, characterized in that, The inner and outer walls of the water inlet pipe (1) are provided with an insulating coating.

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