Flower basket adaptive to silicon wafers with different widths

By designing a basket that can accommodate silicon wafers of different widths, and using a three-point support structure and adjustable limit blocks, the problem of existing silicon wafer baskets being unable to adapt to different sizes and thicknesses has been solved. This achieves efficient support and low-cost replacement, improving the durability and operational efficiency of the equipment.

CN224250134UActive Publication Date: 2026-05-15WUXI SHITONG MOULD & PLASTIC CO LTD
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
WUXI SHITONG MOULD & PLASTIC CO LTD
Filing Date
2025-06-13
Publication Date
2026-05-15

AI Technical Summary

Technical Problem

Existing silicon wafer baskets cannot accommodate silicon wafers of different sizes and thicknesses, making the wafers prone to damage during operation and resulting in high costs for replacing baskets.

Method used

A basket-like structure adapted to silicon wafers of different widths was designed. It adopts a three-point support structure and achieves stepless adjustment of the spacing between the limiting blocks through adjusting and limiting components. Combined with the triangular layout of the limiting rod and the chamfered guidance of the limiting blocks, it provides flexible locking force and labyrinth sealing to adapt to different silicon wafer specifications.

Benefits of technology

It effectively supports silicon wafers of different sizes and thicknesses, reduces wafer deformation and damage, lowers the cost of replacing baskets, improves operational efficiency and equipment corrosion resistance, and extends service life.

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Abstract

The utility model relates to a flower basket adaptive to silicon wafers with different widths. Comprising a first plate, a second plate arranged on the other side of the first plate, a limiting rod arranged between the first plate and the second plate, a first limiting block for limiting a silicon wafer, a second limiting block sliding on the limiting rod, an adjusting piece for adjusting the position of the second limiting block and a limiting piece for limiting the position of the second limiting block, three groups of limiting rod arrays are arranged; the limiting rods support the silicon wafer in a three-point mode. The first limiting block array is arranged on the limiting rod; the adjusting piece is located in the limiting rod; the number of the second limiting blocks corresponds to that of the first limiting blocks; the adjusting piece drives the second limiting block to be close to or away from the first limiting block. The problem that silicon wafers with different sizes and thicknesses need to be switched and used, and a flower basket of an original version cannot meet the requirements (thickness, size and the like) and cannot be continuously used is solved.
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Description

Technical Field

[0001] This utility model relates to the field of silicon wafer flower baskets, and more particularly to a flower basket adapted to silicon wafers of different widths. Background Technology

[0002] In existing technologies, the material handling and loading / unloading structure of automated photovoltaic cell production lines consists of: baskets, basket straightening mechanisms, stepping and unloading mechanisms, and conveyor belts. Existing baskets employ an integral end face, fixed tooth spacing, and fixed basket rod positions.

[0003] Currently used wafer trays are fixed trays with a single-pitch, one-piece end face. The limited internal space necessitates the use of a step-type wafer-removing mechanism with a tongue that extends into the tray to handle the silicon wafers. When a wafer is placed in the tray, its center sinks due to gravity. Thicker wafers experience less sinking at the center, while larger, thinner wafers show more significant sinking. This results in a small gap between wafers within the tray, making it easy to damage them when the tongue is inserted into the confined space. Future trends favor thinner, larger wafers, requiring a switch to wafers of different sizes and thicknesses. The existing trays no longer meet these requirements and must be redesigned and purchased, increasing costs and operational expenses. Utility Model Content

[0004] This application provides a basket that adapts to silicon wafers of different widths, solving the problem in the prior art where it is necessary to switch to silicon wafers of different sizes and thicknesses, and the original version of the basket cannot meet the requirements (thickness, size, etc.) and cannot continue to be used.

[0005] The technical solutions adopted in the embodiments of this application are as follows.

[0006] A basket for adapting to silicon wafers of different widths includes a first plate, a second plate disposed on the other side of the first plate, a limiting rod disposed between the first plate and the second plate, a first limiting block for restricting the silicon wafer, a second limiting block that slides on the limiting rod, an adjusting member for adjusting the position of the second limiting block, and a limiting member for restricting the position of the second limiting block; the limiting rod array is provided in three sets; the limiting rods support the silicon wafer at three points; the first limiting block array is disposed on the limiting rod; the adjusting member is located inside the limiting rod; the number of second limiting blocks corresponds to the number of first limiting blocks; the adjusting member moves the second limiting blocks closer to or further away from the first limiting blocks.

[0007] As a further improvement to the above technical solution: both the end faces of the first limiting block and the second limiting block are chamfered; the chamfer facilitates the insertion of the silicon wafer.

[0008] As a further improvement to the above technical solution: a first groove is provided on the limiting rod; the adjusting component includes a slider and a moving component that drives the slider to slide in the first groove; the slider corresponds to the first groove; a second groove is provided on the side wall of the first groove; the second limiting block slides in the second groove; the moving component rotates on the second plate and the moving component is threadedly connected to the slider.

[0009] As a further improvement to the above technical solution: a third groove is provided on the side wall of the second groove; a baffle is provided on the side wall of the second limiting block; the baffle is inserted into the third groove and the second limiting block moves synchronously with the baffle; the baffle isolates the liquid to prevent the liquid from entering the first groove.

[0010] As a further improvement to the above technical solution: the limiting component includes a connecting plate, a limiting block, and a resetting elastic component; the connecting plate is disposed on the moving component; rotating the moving component drives the connecting plate to rotate synchronously; the elastic component is disposed on the connecting plate; the blocking block is disposed on the elastic component; a plurality of slots are formed on the second plate; a plurality of slots are arranged in an array with the moving component as the center; the blocking block corresponds to the position of the slot; when the blocking block is inserted into any of the slots, the position of the moving component is fixed; when one group of the moving components is rotated until the blocking block is inserted into one group of the slots and the second limiting block and the first limiting block limit the silicon wafer, the other groups of the adjusting components are rotated so that the angle of each group of blocking blocks is consistent, so that the distance between each group of the first limiting block and the second limiting block corresponds.

[0011] One or more technical solutions provided in the embodiments of this application have at least the following technical effects or advantages:

[0012] 1. By employing an adjusting component that drives a slider via a thread to slide the second limiting block along the limiting rod, and cooperating with the locking block and slot of the limiting component, the distance between the first and second limiting blocks can be infinitely adjusted, covering the needs of large-size and ultra-thin silicon wafers. The triangular layout of the three sets of limiting rods, combined with the chamfered guidance of the limiting blocks, forms a uniformly distributed support. The center weight of the silicon wafer is distributed and supported by three points, reducing the center sagging deformation caused by the weight of the thin wafer. The support spacing dynamically matches the silicon wafer thickness, avoiding interference between the wafer removal mechanism and the silicon wafer. The elastic element of the limiting component provides flexible locking force when the locking block is embedded in the slot, eliminating mechanical hard impact. The synchronous rotation design of the adjusting component ensures that the spacing of multiple sets of limiting blocks is consistent, avoiding micro-cracks at the edge of the silicon wafer caused by unilateral overpressure. The baffle of the second limiting block is embedded in the third slot to form a labyrinth seal, preventing cleaning fluid or etching gas from entering the interior of the limiting rod. The surface coating treatment of the limiting rod enhances corrosion resistance, adapts to wet process environments, and extends service life. When rotating the moving parts, the scaled matching of the card block and the card slot (e.g., the spacing changes by 0.5mm for every 15° rotation) combined with the visual markings of the limit rod allows operators to quickly switch silicon wafer specifications, reducing the changeover time to within 1 minute; the slider, limit block and elastic parts adopt a plug-in structure, and can be replaced without disassembling the entire basket after wear; the limit rod is independently detachable, adapting to the production line cleaning or upgrade needs. Attached Figure Description

[0013] Figure 1 This is a schematic diagram of the structure of the flower basket adapted to silicon wafers of different widths in this utility model.

[0014] Figure 2 This is a cross-sectional view of the flower basket adapted to silicon wafers of different widths in this utility model.

[0015] Figure 3 This is a schematic diagram of the structure of the flower basket adapted to silicon wafers of different widths in this utility model.

[0016] Figure 4 for Figure 2 A magnified view of part A in the image.

[0017] In the diagram: 1. First plate; 2. Second plate; 21. Slot; 3. Limiting rod; 31. First slot; 32. Second slot; 33. Third slot; 4. First limiting block; 5. Second limiting block; 51. Baffle; 6. Adjusting component; 61. Slider; 62. Moving component; 7. Limiting component; 71. Connecting plate; 72. Slot; 73. Elastic component; 8. Chamfer. Detailed Implementation

[0018] This application provides a basket that adapts to silicon wafers of different widths, solving the problem in the prior art where it is necessary to switch to silicon wafers of different sizes and thicknesses, and the original version of the basket cannot meet the requirements (thickness, size, etc.) and cannot continue to be used.

[0019] The technical solution in this application embodiment is to solve the above problems, and the overall idea is as follows:

[0020] To better understand the above technical solutions, the following will provide a detailed explanation of the technical solutions in conjunction with the accompanying drawings and specific implementation methods.

[0021] A basket for adapting to silicon wafers of different widths includes a first plate 1, a second plate 2 disposed on the other side of the first plate 1, a limiting rod 3 disposed between the first plate 1 and the second plate 2, a first limiting block 4 that restricts the silicon wafer, a second limiting block 5 that slides on the limiting rod 3, an adjusting member 6 that adjusts the position of the second limiting block 5, and a limiting member 7 that restricts the position of the second limiting block 5; the limiting rod 3 is arranged in three arrays; the limiting rod 3 provides three-point support for the silicon wafer; the first limiting block 4 is arranged in an array on the limiting rod 3; the adjusting member 6 is located inside the limiting rod 3; the number of second limiting blocks 5 corresponds to the number of first limiting blocks 4; the adjusting member 6 moves the second limiting blocks 5 closer to or further away from the first limiting blocks 4.

[0022] Both the first limiting block 4 and the second limiting block 5 have chamfers 8 on their end faces; the chamfers 8 facilitate the insertion of the silicon wafer.

[0023] The limiting rod 3 has a first groove 31; the adjusting component 6 includes a slider 61 and a moving component 62 that drives the slider 61 to slide in the first groove 31; the slider 61 corresponds to the first groove 31; the side wall of the first groove 31 has a second groove 32; the second limiting block 5 slides in the second groove 32; the moving component 62 rotates on the second plate 2 and is threadedly connected to the slider 61.

[0024] A third groove 33 is provided on the side wall of the second groove 32; a baffle 51 is provided on the side wall of the second limiting block 5; the baffle 51 is inserted into the third groove 33 and the second limiting block 5 moves synchronously with the baffle 51; the baffle 51 isolates the liquid to prevent the liquid from entering the first groove 31.

[0025] The limiting component 7 includes a connecting plate 71, a limiting block 72, and a resetting elastic component 73; the connecting plate 71 is disposed on the moving component 62; rotating the moving component 62 causes the connecting plate 71 to rotate synchronously; the elastic component 73 is disposed on the connecting plate 71; the block 72 is disposed on the elastic component 73; a plurality of slots 21 are provided on the second plate 2; a plurality of slots 21 are arranged in an array with the moving component 62 as the center; the position of the block 72 corresponds to the position of the slot 21; when the block 72 is inserted into any slot 21, the position of the moving component 62 is fixed; when one set of moving components 62 is rotated until the block 72 is inserted into one set of slots 21 and the second limiting block 5 and the first limiting block 4 limit the silicon wafer, the other sets of adjusting components 6 are rotated so that the angle of each set of blocks 72 is consistent, so that the distance between each set of first limiting blocks 4 and second limiting blocks 5 corresponds.

[0026] The adjusting component 6 drives the slider 61 via a thread to slide the second limiting block 5 along the limiting rod 3. It works in conjunction with the locking block 72 and the slot 21 of the limiting component 7 to lock the first limiting block 4 and the second limiting block 5 into stepless adjustment, covering the needs of large-size and ultra-thin silicon wafers. The triangular layout of the three sets of limiting rods 3, combined with the chamfered corners 8 of the limiting blocks, forms a uniformly distributed support. The center weight of the silicon wafer is distributed and borne by three points, reducing the center sagging deformation caused by the wafer's own weight. The support spacing dynamically matches the wafer thickness, avoiding interference between the wafer removal mechanism and the wafer. The elastic element 73 of the limiting component 7 provides a flexible locking force when the locking block 72 is embedded in the locking slot 21, eliminating mechanical hard impact. The synchronous rotation design of the adjusting component 6 ensures that the spacing of multiple sets of limiting blocks is consistent, avoiding micro-cracks at the edge of the silicon wafer caused by unilateral overpressure. The baffle 51 of the second limiting block 5 is embedded in the third slot 33 to form a labyrinth seal, preventing cleaning fluid or etching gas from entering the interior of the limiting rods 3. The surface coating treatment of the limiting rods 3 enhances corrosion resistance, adapts to wet process environments, and extends service life. When rotating the moving part 62, the scaled matching between the locking block 72 and the slot 21 (e.g., a 0.5mm change in spacing for every 15° rotation) combined with the visual markings on the limit rod 3 allows operators to quickly switch silicon wafer specifications, reducing the changeover time to within 1 minute. The slider 61, limit block, and elastic part 73 adopt a plug-in structure, allowing for replacement without disassembling the entire basket after wear. The limit rod 3 is independently detachable, adapting to production line cleaning or upgrade needs.

[0027] Because the adjusting component 6 drives the slider 61 via a thread to slide the second limiting block 5 along the limiting rod 3, and the locking block 72 of the limiting component 7 locks with the slot 21, the distance between the first limiting block 4 and the second limiting block 5 can be infinitely adjusted, covering the needs of large-size and ultra-thin silicon wafers. The triangular layout of the three sets of limiting rods 3, combined with the chamfered corners 8 of the limiting blocks, forms a uniformly distributed support. The center weight of the silicon wafer is distributed and borne by three points, reducing the center sagging deformation caused by the wafer's own weight. The support spacing dynamically matches the wafer thickness, avoiding interference between the wafer removal mechanism and the wafer. The elastic element 73 of the limiting component 7 provides a flexible locking force when the locking block 72 is embedded in the locking slot 21, eliminating mechanical hard impact. The synchronous rotation design of the adjusting component 6 ensures that the spacing of multiple sets of limiting blocks is consistent, avoiding micro-cracks at the edge of the silicon wafer caused by unilateral overpressure. The baffle 51 of the second limiting block 5 is embedded in the third slot 33 to form a labyrinth seal, preventing cleaning fluid or etching gas from entering the interior of the limiting rods 3. The surface coating treatment of the limiting rods 3 enhances corrosion resistance, adapts to wet process environments, and extends service life. When rotating the moving part 62, the scaled matching between the locking block 72 and the slot 21 (e.g., a 0.5mm change in spacing for every 15° rotation) combined with the visual markings on the limit rod 3 allows operators to quickly switch silicon wafer specifications, reducing the changeover time to within 1 minute. The slider 61, limit block, and elastic part 73 adopt a plug-in structure, allowing for replacement without disassembling the entire basket after wear. The limit rod 3 is independently detachable, adapting to production line cleaning or upgrade needs.

[0028] Although preferred embodiments of the present invention have been described, those skilled in the art, upon learning the basic inventive concept, can make other changes and modifications to these embodiments. Therefore, the appended claims are intended to be interpreted as including the preferred embodiments as well as all changes and modifications falling within the scope of the present invention.

[0029] Obviously, those skilled in the art can make various modifications and variations to this utility model without departing from its spirit and scope. Therefore, if these modifications and variations fall within the scope of the claims of this utility model and their equivalents, this utility model also intends to include these modifications and variations.

Claims

1. A flower basket adaptable to silicon wafers of different widths, characterized in that, The device includes a first plate (1), a second plate (2) disposed on the other side of the first plate (1), a limiting rod (3) disposed between the first plate (1) and the second plate (2), a first limiting block (4) that restricts the silicon wafer, a second limiting block (5) that slides on the limiting rod (3), an adjusting member (6) that adjusts the position of the second limiting block (5), and a limiting member (7) that restricts the position of the second limiting block (5); the limiting rod (3) array is arranged in three sets; the limiting rod (3) supports the silicon wafer at three points; the first limiting block (4) array is disposed on the limiting rod (3); the adjusting member (6) is located inside the limiting rod (3); the number of the second limiting blocks (5) corresponds to the number of the first limiting blocks (4); the adjusting member (6) drives the second limiting blocks (5) to move closer to or away from the first limiting blocks (4).

2. The flower basket adapted to silicon wafers of different widths as described in claim 1, characterized in that, Both the first limiting block (4) and the second limiting block (5) have chamfers (8) on their end faces; the chamfers (8) facilitate the insertion of the silicon wafer.

3. The flower basket adapted to silicon wafers of different widths as described in claim 2, characterized in that, The limiting rod (3) has a first groove (31); the adjusting member (6) includes a slider (61) and a moving member (62) that drives the slider (61) to slide in the first groove (31); the slider (61) corresponds to the first groove (31); a second groove (32) is provided on the side wall of the first groove (31); the second limiting block (5) slides in the second groove (32); the moving member (62) rotates on the second plate (2) and the moving member (62) is threadedly connected to the slider (61).

4. The flower basket adapted to silicon wafers of different widths as described in claim 3, characterized in that, A third groove (33) is provided on the side wall of the second groove (32); a baffle (51) is provided on the side wall of the second limiting block (5); the baffle (51) is inserted into the third groove (33) and the second limiting block (5) moves synchronously with the baffle (51); the baffle (51) isolates the liquid to prevent the liquid from entering the first groove (31).

5. The flower basket adapted to silicon wafers of different widths as described in claim 3, characterized in that, The limiting component (7) includes a connecting plate (71), a limiting block (72), and a resetting elastic component (73); the connecting plate (71) is disposed on the moving component (62); rotating the moving component (62) drives the connecting plate (71) to rotate synchronously; the elastic component (73) is disposed on the connecting plate (71); the blocking block (72) is disposed on the elastic component (73); a plurality of slots (21) are provided on the second plate (2); a plurality of slots (21) are arranged in an array with the moving component (62) as the center; the blocking block (72) is disposed in a circular array with the moving component (62) as the center; the blocking block (73) is disposed in a circular array with the moving component (62) as the center; the blocking block (72 ... The position of the block (72) corresponds to that of the slot (21); when the block (72) is inserted into any of the slots (21), the position of the moving part (62) is fixed; when one of the moving parts (62) is rotated until the block (72) is inserted into one of the slots (21) and the second limiting block (5) and the first limiting block (4) limit the silicon wafer, the other sets of the adjusting parts (6) are rotated so that the angle of each set of blocks (72) is consistent, so that the distance between each set of the first limiting block (4) and the second limiting block (5) corresponds.