Hydrophobic anti-corrosion degassing tower for electronic grade sulfuric acid production

Abstract

The utility model relates to the technical field of degassing towers, and discloses a hydrophobic anti-corrosion degassing tower for electronic grade sulfuric acid production, which comprises a degassing tower body, an exhaust port is mounted at the top of the degassing tower body, a discharge port is mounted at the bottom of the degassing tower body, a feed port is mounted on the outer surface of the degassing tower body, and a discharge port is mounted at the bottom of the degassing tower body. According to the hydrophobic anti-corrosion degassing tower for electronic-grade sulfuric acid production, by arranging a stabilizing assembly, when a cylinder is inserted into an insertion hole, the inclined surface of a stabilizing block is in contact with the inner wall of the insertion hole and retracts into a cavity to compress a spring I; after the cylinder completely penetrates through the inserting hole, the first spring pushes the stabilizing block to reset, the plane end of the stabilizing block abuts against the surface of the second flange to achieve automatic limiting, it is ensured that the first flange and the second flange are aligned and fixed, manual supporting is not needed, assembly deviation is effectively prevented, and normal fixing can be achieved through bolts. During disassembly, the gear ring is rotated to drive the gear and the rotating rod, the T-shaped block is driven by the linkage plate to pull the stabilizing block back to the cavity, and limiting separation can be relieved.

Description

Technical Field

[0001] This utility model relates to the field of degassing tower technology, specifically a hydrophobic and corrosion-resistant degassing tower for electronic-grade sulfuric acid production. Background Technology

[0002] In existing industrial technologies, electronic-grade sulfuric acid, as an important wet electronic chemical, is widely used in processes such as silicon wafer cleaning, photolithography, and etching. It can also be used for etching and cleaning printed circuit boards. This substance has the ability to efficiently remove particulate impurities, inorganic residues, and carbon deposits from wafers and circuit boards. During processing, a degassing tower is used.

[0003] Currently, flange bolts are commonly used to fix the feed pipe and feed inlet of degassing towers. However, the mounting holes on the flange must be perfectly aligned before the bolts can be inserted. In actual operation, the flange position needs to be repeatedly adjusted, especially in large equipment or confined spaces. Manual alignment is time-consuming and labor-intensive. The existing design does not have a temporary positioning mechanism. Before bolt installation, the flange is prone to displacement due to accidental bumps or gravity, causing the aligned mounting holes to become misaligned again, requiring readjustment. Frequent adjustments not only reduce installation efficiency but may also increase safety risks due to operators coming into contact with highly corrosive media. Utility Model Content

[0004] The purpose of this invention is to provide a hydrophobic and corrosion-resistant degassing tower for electronic-grade sulfuric acid production, in order to solve the problems mentioned in the background art.

[0005] To achieve the above objectives, this utility model provides the following technical solution: a hydrophobic and corrosion-resistant degassing tower for electronic-grade sulfuric acid production, comprising a degassing tower body, an exhaust port installed at the top of the degassing tower body, a discharge port installed at the bottom of the degassing tower body, a feed inlet installed on the outer surface of the degassing tower body, a flange two fixed on the outer surface of the feed inlet, a flange one mated to the outer surface of the flange two, a feed pipe fixed on the inner side of the flange one, and stabilizing components and limiting components provided on the surfaces of the flange one and the flange two;

[0006] The stabilizing component includes:

[0007] The socket is used to mate with the cylinder for positioning and installation.

[0008] Stabilizing block: The stabilizing block is used to stabilize flange one and flange two against each other.

[0009] Linkage components are used to release the limit for easy separation.

[0010] Preferably, the insertion hole is formed on the outer surface of flange two. A cylinder is fixed to the side of flange one near flange two. A cavity is formed inside the cylinder. A stabilizing block is slidably connected to the inner wall of the cavity. A fixing block is fixed to the inner wall of the cavity. The end of the stabilizing block away from the fixing block passes through the cylinder. A spring is fixed to the outer surface of the stabilizing block. The end of the spring away from the stabilizing block is fixed to the outer surface of the fixing block. When the cylinder is inserted into the insertion hole, the inclined surface of the stabilizing block contacts the inner wall of the insertion hole, causing it to retract into the cavity of the cylinder and compress the spring. After the cylinder has completely passed through the insertion hole, the spring pushes the stabilizing block to reset, so that its flat end abuts against the surface of flange two, realizing automatic limiting, thereby keeping flange one and flange two fixedly aligned, which facilitates bolt installation.

[0011] Preferably, the linkage includes a fixed plate fixed to the outer surface of the stabilizing block. A T-shaped block is slidably connected to the side of the cavity away from the stabilizing block. A rotating rod is disposed inside the cylinder, penetrating the cylinder and rotatably connected to it. A linkage plate is fixed to the outer surface of the rotating rod. A connecting plate is hinged to the end of the linkage plate away from the rotating rod. The end of the connecting plate away from the linkage plate is hinged to the outer surface of the T-shaped block. A gear is penetrating and fixed to the end of the rotating rod away from the linkage plate. The gear is rotatably connected to the side of flange one away from flange two. A gear ring is rotatably connected to the outer surface of flange one, meshing with the gear. A pull plate is fixed to the outer surface of the gear ring. During disassembly, rotating the gear ring drives the gear and the rotating rod, causing the linkage plate and the connecting plate to flip, pulling the T-shaped block and the stabilizing block back into the cavity, automatically releasing the limit and completing the separation.

[0012] Preferably, the limiting component includes a slot located on the side of the flange away from the cylinder. A groove is formed on the outer surface of the pull plate, and a rod is slidably connected to the inner wall of the groove. The rod passes through the pull plate and is slidably connected to it. A circular plate is fixed to the outer surface of the rod, and a movable groove is formed on its outer surface. A limiting block is slidably connected to the inner wall of the movable groove. A second spring is fixed to the outer surface of the limiting block, and the end of the second spring away from the limiting block is fixed to the inner wall of the movable groove. A stabilizing groove is formed on the inner wall of the groove. During installation, the rod is inserted into the slot to lock the toothed ring, preventing accidental loosening. During disassembly, the circular plate is pulled out to remove the rod from the slot, and the limiting block compresses the second spring, causing it to retract into the movable groove. After the rod moves to another stabilizing groove, the second spring pushes the limiting block into the new groove to prevent rebound. At this point, the toothed ring can be rotated for safe disassembly.

[0013] Preferably, the end of the stabilizing block away from the spring is set as an inclined surface, so that when it is pressed, the stabilizing block can move into the cavity of the cylinder without affecting normal docking.

[0014] Preferably, the end of the limiting block away from the second spring has a triangular cross-section. When the insert rod moves, its surface abuts against the inner wall of the stabilizing groove, which allows the limiting block to move into the movable groove without affecting the normal movement of the insert rod.

[0015] Preferably, the stabilizing groove is provided in two sets, which facilitates the use of the limiting block to stabilize the insertion rod and prevent the insertion rod from moving on its own.

[0016] Compared with the prior art, this utility model provides a hydrophobic and corrosion-resistant degassing tower for electronic-grade sulfuric acid production, which has the following beneficial effects:

[0017] 1. This hydrophobic and corrosion-resistant degassing tower for electronic-grade sulfuric acid production utilizes a stabilizing component. When the cylinder is inserted into the insertion hole, the inclined surface of the stabilizing block contacts the inner wall of the insertion hole and retracts into the cavity, compressing the first spring. After the cylinder has completely passed through the insertion hole, the first spring pushes the stabilizing block back to its original position, causing its flat end to abut against the surface of the second flange, achieving automatic positioning and ensuring that the first flange and the second flange are aligned and fixed. No manual support is required, effectively preventing assembly misalignment, and the tower can be normally fixed with bolts. During disassembly, rotating the gear ring drives the gear and the rotating rod, which, through the connecting plate, pulls the T-shaped block back into the cavity, thus releasing the positioning and separating the tower.

[0018] 2. This hydrophobic and corrosion-resistant degassing tower for electronic-grade sulfuric acid production has a limiting component. During installation, the insert rod can be inserted into the slot to lock the toothed ring, preventing accidental rotation from causing the stabilizing block to loosen. During disassembly, the circular plate is pulled to remove the insert rod from the slot, at which point the toothed ring can be safely rotated to complete the disassembly. Attached Figure Description

[0019] Figure 1 This is a front view structural diagram of the present invention;

[0020] Figure 2 This is a side view of the structure of this utility model;

[0021] Figure 3 This is a partial front view structural diagram of the present utility model;

[0022] Figure 4 This is a front view schematic diagram of the flange and slot structure of this utility model;

[0023] Figure 5 This is a cross-sectional front view of some of the stabilizing components and limiting components of this utility model;

[0024] Figure 6 This is a cross-sectional front view of the limiting component of this utility model;

[0025] Figure 7 This is a cross-sectional front view of a portion of the stabilizing component of this utility model.

[0026] In the diagram: 1. Degassing tower body; 2. Exhaust port; 3. Discharge port; 4. Feed port; 5. Feed pipe; 6. Flange 1; 7. Flange 2; 8. Stabilizing assembly; 80. Insertion hole; 81. Stabilizing block; 82. Fixing block; 83. Spring 1; 85. Cylinder; 84. Linkage component; 840. Fixing plate; 841. T-block; 842. Connecting plate; 843. Linkage plate; 844. Rotating rod; 845. Gear; 846. Gear ring; 847. Pull plate; 9. Limiting assembly; 90. Slot; 91. Slide groove; 92. Insertion rod; 93. Circular plate; 94. Stabilizing groove; 95. Movable groove; 96. Limiting block; 97. Spring 2. Detailed Implementation

[0027] like Figures 1-7 As shown, this utility model provides a technical solution: a hydrophobic and corrosion-resistant degassing tower for electronic-grade sulfuric acid production, comprising a degassing tower body 1, an exhaust port 2 installed at the top of the degassing tower body 1, a discharge port 3 installed at the bottom of the degassing tower body 1, a feed port 4 installed on the outer surface of the degassing tower body 1, a flange 2 7 fixed on the outer surface of the feed port 4, a flange 1 6 mated to the outer surface of the flange 2 7, a feed pipe 5 fixed on the inner side of the flange 1 6, and stabilizing components 8 and limiting components 9 provided on the surfaces of the flange 1 6 and the flange 2 7; the stabilizing component 8 includes: a socket 80, a stabilizing block 81, a fixing block 82, a spring 1 83, a cylinder 85, a connecting component 84, a fixing plate 840, a T-shaped block 841, a connecting plate 842, a connecting plate 843, a rotating rod 844, a gear 845, a gear ring 846, and a pull plate 847.

[0028] A socket 80 is formed on the outer surface of flange 2 7. A cylinder 85 is fixed to the side of flange 1 6 near flange 2 7. A cavity is formed inside the cylinder 85. A stabilizing block 81 is slidably connected to the inner wall of the cavity. A fixing block 82 is fixed to the inner wall of the cavity. The end of the stabilizing block 81 away from the fixing block 82 passes through the cylinder 85. A spring 1 83 is fixed to the outer surface of the stabilizing block 81. The end of the spring 1 83 away from the stabilizing block 81 is fixed to the outer surface of the fixing block 82. A linkage 84 includes a fixing plate 840, which is fixed to the outer surface of the stabilizing block 81. A T-shaped block 841 is slidably connected to the side of the cavity away from the stabilizing block 81. A rotating rod 844 is provided inside the cylinder 85. The rotating rod 844 passes through the cylinder 85 and is rotatably connected to the cylinder 85. A linkage plate 843 is fixed to the outer surface of the rotating rod 844. A connecting plate 84 is hinged to the end of the linkage plate 843 away from the rotating rod 844. 2. The end of the connecting plate 842 away from the connecting plate 843 is hinged to the outer surface of the T-block 841. The end of the rotating rod 844 away from the connecting plate 843 is connected to and fixed with a gear 845. The gear 845 is rotatably connected to the side of flange 6 away from flange 7. A gear ring 846 is rotatably connected to the outer surface of flange 6. The gear ring 846 meshes with the gear 845. A pull plate 847 is fixed to the outer surface of the gear ring 846. The end of the stabilizing block 81 away from the spring 83 is set as an inclined surface. When the cylinder 85 is inserted into the socket 80, the inclined surface of the stabilizing block 81 contacts the inner wall of the socket 80, forcing the stabilizing block 81 to retract into the cavity of the cylinder 85 and compress the spring 83. After the cylinder 85 has completely passed through the socket 80, the spring 83 releases its elastic force to push the stabilizing block 81 back to its original position, so that its flat end abuts against the surface of flange 7 to achieve automatic limiting, so that flange 6 and flange 7 are kept in a fixed alignment state, which is convenient for bolt installation. During disassembly, the rotating gear ring 846 drives the gear 845, which in turn causes the connecting plate 843 and the connecting plate 842 to flip via the rotating rod 844. This pulls the T-shaped block 841 back to the stabilizing block 81 into the cavity, thus releasing the limit and completing the separation. The entire process requires no manual support, effectively preventing assembly misalignment.

[0029] The limiting component 9 includes a slot 90, which is located on the side of the flange 6 away from the cylinder 85. A groove 91 is provided on the outer surface of the pull plate 847. A rod 92 is slidably connected to the inner wall of the groove 91. The rod 92 passes through the pull plate 847 and is slidably connected to the pull plate 847. A circular plate 93 is fixed on the outer surface of the rod 92. A movable groove 95 is provided on the outer surface of the rod 92. A limiting block 96 is slidably connected to the inner wall of the movable groove 95. A spring 97 is fixed on the outer surface of the limiting block 96. One end of the spring 97 away from the limiting block 96 is fixed to the inner wall of the movable groove 95. A stabilizing groove 94 is provided on the inner wall of the groove 91. The cross-section of the end of the limiting block 96 away from the spring 97 is triangular. Two sets of stabilizing grooves 94 are provided. When the rod 92 is inserted into the slot 90, the toothed ring 846 can be locked to prevent accidental rotation during installation, which could cause the stabilizing block 81 to loosen. During disassembly, pull the circular plate 93 to disengage the insertion rod 92 from the slot 90. At this time, the limiting block 96 is compressed into the movable slot 95 and compresses the second spring 97. When the insertion rod 92 moves to the position of another set of stabilizing slots 94, the second spring 97 pushes the limiting block 96 into the new slot to prevent the insertion rod 92 from springing back. At this time, the toothed ring 846 can be safely rotated for disassembly.

[0030] During installation, connect the feed inlet 4 to the feed pipe 5, ensuring that flange 1 6 and flange 2 7 are properly aligned. Insert the cylinder 85 into the insertion hole 80. At this point, the inclined surface of the stabilizing block 81 abuts against the inner wall of the insertion hole 80, causing the stabilizing block 81 to move into the cavity of the cylinder 85. Simultaneously, spring 1 83 is compressed. When the cylinder 85 has completely passed through the insertion hole 80, the stabilizing block 81 disengages from the insertion hole 80. Spring 1 83 then releases, causing the stabilizing block 81 to return to its original position. At this point, the side of the stabilizing block 81 furthest from the inclined surface is aligned with the flange. When flange 7 is in contact with the surface away from flange 6, it can be limited. At this time, flange 6 and flange 7 mutually limit each other. Simultaneously, the insert rod 92 is inserted into the slot 90, which limits the toothed ring 846, preventing accidental rotation of the toothed ring 846 during installation and preventing the stabilizing block 81 from being released from its limit. At this time, it can be fixed normally with bolts without personnel support and without accidental contact that could cause displacement, thus avoiding affecting the installation of bolts. When it is necessary to remove it, pull the circular plate 93 to disengage the insert rod 92 from the slot. 90. Release the limiting position on the gear ring 846. Simultaneously, as the insertion rod 92 moves, the surface of the limiting block 96 abuts against the inner wall of the stabilizing groove 94. At this time, the limiting block 96 moves into the movable groove 95, and the second spring 97 is compressed. When the position of the limiting block 96 is parallel to another set of stabilizing grooves 94, the second spring 97 is released, which can drive the limiting block 96 to enter, thus preventing the insertion rod 92 from moving on its own. At this time, the gear ring 846 can rotate normally. At this time, the gear 845 drives the rotating rod 844 and the connecting plate 843 to rotate synchronously. The connecting plate 842 can be rotated, which can then pull the T-shaped block 841 to move. At this time, the outer surface of the T-shaped block 841 abuts against the outer surface of the fixing plate 840, which can pull the stabilizing block 81 into the cavity of the cylinder 85, thereby releasing the limit and facilitating disassembly and separation. In use, sulfuric acid raw material is added into the degassing tower body 1 through the feed port 4 and falls evenly under the action of the distributor. At the same time, compressed air is added, and the compressed air rises to the packing, driving the sulfuric acid raw material in the packing to undergo degassing treatment. The degassed sulfuric acid raw material in the packing drips down to the bottom of the degassing tower body 1 and is discharged through the discharge port 3. This completes the degassing treatment.

[0031] The inner wall of the tower is coated with a micro-nano hydrophobic coating (such as a fluorosilane modified coating) to reduce droplet adhesion. The packing and tray surfaces are roughened and hydrophobically treated to promote droplet rolling. The entire tower or the inner lining is coated with PTFE (polytetrafluoroethylene), which is resistant to strong acids and has strong hydrophobicity, making it suitable for electronic environments.

[0032] The present invention has been described in detail above. However, modifications or improvements can be made to it, which will be obvious to those skilled in the art. Therefore, any modifications or improvements that do not depart from the spirit of the present invention are within the protection scope of the present invention.

Claims

1. A hydrophobic and corrosion-resistant degassing tower for electronic-grade sulfuric acid production, comprising a degassing tower body (1), characterized in that: The top of the degassing tower body (1) is equipped with an exhaust port (2), the bottom of the degassing tower body (1) is equipped with a discharge port (3), the outer surface of the degassing tower body (1) is equipped with a feed port (4), the outer surface of the feed port (4) is fixed with a flange two (7), the outer surface of the flange two (7) is mated with a flange one (6), the inner side of the flange one (6) is fixed with a feed pipe (5), and the surfaces of the flange one (6) and the flange two (7) are provided with a stabilizing component (8) and a limiting component (9). The stabilizing component (8) includes: The socket (80) is used to mate with the cylinder (85) for docking and positioning installation; Stabilizing block (81) is used to stabilize flange one (6) and flange two (7) against each other; Linkage (84) is used to release the limit.

2. The hydrophobic and corrosion-resistant degassing tower for electronic-grade sulfuric acid production according to claim 1, characterized in that: The insertion hole (80) is opened on the outer surface of flange two (7). A cylinder (85) is fixed on the side of flange one (6) near flange two (7). A cavity is opened inside the cylinder (85). A stabilizing block (81) is slidably connected to the inner wall of the cavity. A fixing block (82) is fixed on the inner wall of the cavity. The end of the stabilizing block (81) away from the fixing block (82) passes through the cylinder (85). A spring one (83) is fixed on the outer surface of the stabilizing block (81). The end of the spring one (83) away from the stabilizing block (81) is fixed on the outer surface of the fixing block (82).

3. The hydrophobic and corrosion-resistant degassing tower for electronic-grade sulfuric acid production according to claim 2, characterized in that: The linkage (84) includes a fixed plate (840) fixed to the outer surface of the stabilizing block (81). A T-shaped block (841) is slidably connected to the side of the cavity away from the stabilizing block (81). A rotating rod (844) is provided inside the cylinder (85), the rotating rod (844) passes through the cylinder (85), and the rotating rod (844) is rotatably connected to the cylinder (85). A linkage plate (843) is fixed to the outer surface of the rotating rod (844), and a hinge is connected to the end of the linkage plate (843) away from the rotating rod (844). A connecting plate (842) is hinged at one end away from the connecting plate (843) to the outer surface of the T-block (841). A gear (845) is fixed at one end of the rotating rod (844) away from the connecting plate (843). The gear (845) is rotatably connected to the side of flange one (6) away from flange two (7). A gear ring (846) is rotatably connected to the outer surface of flange one (6). The gear ring (846) meshes with the gear (845). A pull plate (847) is fixed to the outer surface of the gear ring (846).

4. The hydrophobic and corrosion-resistant degassing tower for electronic-grade sulfuric acid production according to claim 3, characterized in that: The limiting component (9) includes a slot (90) located on the side of the flange (6) away from the cylinder (85). The outer surface of the pull plate (847) is provided with a sliding groove (91). The inner wall of the sliding groove (91) is slidably connected to a rod (92). The rod (92) passes through the pull plate (847) and is slidably connected to the pull plate (847). The outer surface of the rod (92) is fixed with a circular plate (93). The outer surface of the rod (92) is provided with a movable groove (95). The inner wall of the movable groove (95) is slidably connected to a limiting block (96). The outer surface of the limiting block (96) is fixed with a spring (97). The end of the spring (97) away from the limiting block (96) is fixed to the inner wall of the movable groove (95). The inner wall of the sliding groove (91) is provided with a stabilizing groove (94).

5. A hydrophobic and corrosion-resistant degassing tower for electronic-grade sulfuric acid production according to claim 2, characterized in that: The end of the stabilizing block (81) away from the spring (83) is set as an inclined surface.

6. A hydrophobic and corrosion-resistant degassing tower for electronic-grade sulfuric acid production according to claim 4, characterized in that: The cross-section of the end of the limiting block (96) away from the second spring (97) is triangular.

7. A hydrophobic and corrosion-resistant degassing tower for electronic-grade sulfuric acid production according to claim 4, characterized in that: The stabilizing tank (94) is provided in two sets.

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