Integrated coded disc whirl coating jig
By combining the plug-in positioning structure with negative pressure adsorption, the problem of unstable adsorption of stepped structure code disks by traditional glue-spinning jigs is solved, achieving stable fixation of the code disk and uniformity of the photoresist layer, thereby improving operational convenience and equipment lifespan.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- HECHUANG OPTOELECTRONICS (WUHAN) CO LTD
- Filing Date
- 2025-06-13
- Publication Date
- 2026-05-19
AI Technical Summary
Traditional photoresist jigs have difficulty in stably adsorbing integrated metal code disks with stepped structures, which can easily lead to displacement, detachment, or being flung away during high-speed rotation, affecting the uniformity of the photoresist layer and the accuracy of subsequent processes.
The system employs a combination of plug-in positioning structure and negative pressure adsorption. Dual positioning is achieved by embedding mounting steps in the positioning groove and inserting positioning posts into the center hole. The negative pressure adsorption enhances the fixation stability, ensuring the concentricity and stability of the code disk during rotation.
It improves the uniformity of the photoresist layer and the accuracy of subsequent processes, avoids code disk misalignment and detachment, enhances operational convenience and equipment mechanical performance, and extends equipment lifespan.
Smart Images

Figure CN224253351U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of photoelectric encoder manufacturing technology, and in particular to an integrated code disk glue-spinning fixture. Background Technology
[0002] In the field of photoelectric encoder manufacturing, the code disk, as a key optical component, directly affects the encoder's measurement accuracy and performance stability. Currently, most mainstream code disks are made of annular glass or metal materials, with precision lines formed on their surface through photolithography. To ensure the quality of subsequent photolithography processes, the code disk substrate must be uniformly coated with photoresist (i.e., photoresist coating) before photolithography.
[0003] In existing spin coating processes, a rotating spin coating method is typically used to achieve uniform distribution of photoresist on the substrate surface. Traditional spin coating fixtures are mainly suitable for standard-shaped square or circular substrates, such as the photoelectric code disk dispensing fixture disclosed in utility model publication number CN218925133U.
[0004] like Figure 1 As shown, integrated metal code disks with stepped structures are small in size, relatively complex in structure, and have limited effective contact area for adsorption. In particular, the tubular mounting steps on their adsorption surface further reduce the actual usable adsorption area, making it difficult for traditional spin coating fixtures to achieve stable adsorption. Therefore, during the spin coating process, especially under high-speed rotation, these code disks are prone to displacement, detachment, or even being flung away due to insufficient adsorption force, severely affecting the uniformity of the photoresist layer and the accuracy of subsequent processes. Utility Model Content
[0005] In view of this, this utility model proposes an integrated code disk glue-spinning fixture, which uses two plug-in positioning structures to perform preliminary and precise positioning of the code disk, and enhances the fixing stability of the code disk with the cooperation of negative pressure adsorption force during rotation. This solves the problem that the existing glue-spinning fixtures have poor adsorption effect on integrated metal code disks with stepped structures, and the code disks are easily flung away.
[0006] The technical solution of this utility model is implemented as follows:
[0007] This utility model provides an integrated code disk spinning jig, including an adsorption component, wherein the bottom of the adsorption component is used to connect to the adsorption vacuum shaft of the spin coater;
[0008] The adsorption assembly has a cylindrical step at its top, and the top of the cylindrical step has a positioning groove, an annular adsorption groove, and a positioning column.
[0009] The annular adsorption groove is located on the outer periphery of the positioning groove and is connected to the adsorption vacuum shaft. The positioning column is located inside the positioning groove and is arranged concentrically with the positioning groove and the annular adsorption groove.
[0010] The annular adsorption groove is used to adsorb the code disk substrate to be processed, the inner side of the positioning groove is used to embed the mounting step of the code disk, and the positioning post is used to embed into the central hole of the mounting step.
[0011] Based on the above technical solutions, preferably, the outer diameter of the positioning column is equal to the inner diameter of the center hole of the mounting step, and the inner diameter of the positioning groove is greater than or equal to the outer diameter of the mounting step.
[0012] Based on the above technical solutions, preferably, the top of the positioning post is frustoconical, and the axial height of the positioning post is less than the depth of the positioning groove.
[0013] Based on the above technical solutions, preferably, the outer diameter of the cylindrical step is 1-5mm smaller than the outer diameter of the code disk substrate.
[0014] Based on the above technical solutions, preferably, at least one reinforcing rib is provided between the positioning groove and the positioning column.
[0015] Based on the above technical solutions, preferably, the cylindrical step is provided with an adhesive drainage hole on its side, wherein...
[0016] The adhesive discharge hole is connected to the positioning groove.
[0017] Based on the above technical solutions, preferably, the adsorption assembly includes an adsorption seat and a connecting seat, wherein,
[0018] The top of the connecting seat is fixedly connected to the adsorption seat, and the bottom is fixedly connected to the adsorption vacuum shaft;
[0019] The cylindrical step is formed by an upward protrusion at the middle of the top of the adsorption seat.
[0020] The adsorption seat is provided with a first air channel, and the connecting seat is provided with a second air channel. One end of the first air channel is connected to the annular adsorption groove, and the other end is connected to the second air channel.
[0021] The second airway is connected to the adsorption vacuum shaft.
[0022] Based on the above technical solutions, preferably, the first air passage is arranged vertically, with its upper end extending to the bottom of the annular adsorption groove and its lower end extending to the bottom of the adsorption seat.
[0023] Based on the above technical solutions, preferably, the bottom of the connecting seat is provided with a shaft hole, and the side of the shaft hole is provided with a keyway, wherein...
[0024] The adsorption vacuum shaft is embedded in the shaft hole and connected to the keyway key;
[0025] The end of the second air passage away from the first air passage is connected to the shaft hole.
[0026] Based on the above technical solutions, preferably, the second air passage is coaxially arranged with the shaft hole, wherein,
[0027] The top of the connector is provided with an annular intercepting groove along the circumference of the second air passage;
[0028] The bottom of the adsorption seat is provided with a recessed hole, which is concentric with and connected to the second airway.
[0029] The lower end of the first air passage is located inside the countersunk hole and is connected to it.
[0030] The integrated encoder stick of this utility model has the following advantages over the prior art:
[0031] (1) By setting the mounting step inside the positioning groove for embedding the code disk, and the positioning post for embedding in the center hole of the mounting step, the dual positioning of the inner and outer diameters of the mounting step is achieved, thereby achieving the initial accurate positioning of the code disk. During the rotation, the negative pressure adsorption force is coordinated to enhance the fixed stability of the code disk, making it less likely for the code disk to shift, fall off, or even fly away. At the same time, this structure ensures the concentricity of the code disk and the adsorption vacuum shaft, effectively improving the uniformity of the photoresist layer and the accuracy of subsequent processes.
[0032] (2) By setting the middle position of the top of the adsorption seat to form a cylindrical step, the positioning height of the code disk is increased, which improves the convenience for personnel to install or remove the code disk with the glue evenly applied.
[0033] (3) By setting an annular interception groove, the situation where photoresist is sucked into the spin coater can be reduced, thus ensuring the mechanical performance of the spin coater.
[0034] (4) By setting the outer diameter of the cylindrical step to be 1-5mm smaller than the outer diameter of the code disk substrate, it is convenient to use gravity to prevent the photoresist from directly contacting the top surface of the cylindrical step when it flows to the side wall of the code disk, thus ensuring the cleanliness of the adsorption surface and improving the adsorption effect. Attached Figure Description
[0035] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.
[0036] Figure 1 A three-dimensional view of an existing integrated metal encoder with a stepped structure;
[0037] Figure 2 This is a perspective view of an integrated encoder stick for applying adhesive.
[0038] Figure 3 This is a perspective view of an integrated encoder stick for dispensing glue according to this utility model.
[0039] Figure 4 This is a top view of an integrated encoder stick for dispensing glue according to the present invention;
[0040] Figure 5 for Figure 4 Sectional view along axis AA;
[0041] Figure 6 This is a 3D view of the adsorption base;
[0042] Figure 7 This is a three-dimensional view of the connector.
[0043] Figure 8 This is a diagram illustrating the usage state of an integrated encoder stick for applying adhesive according to this utility model.
[0044] In the diagram: 1. Adsorption assembly; 2. Adsorption vacuum shaft; 11. Adsorption seat; 12. Connecting seat; 31. Code disk substrate; 32. Mounting step; 101. Positioning groove; 102. Annular adsorption groove; 103. Positioning column; 104. Adhesive discharge hole; 111. First air passage; 112. Countersunk hole; 121. Second air passage; 122. Shaft hole; 123. Annular intercepting groove; 1221. Keyway. Detailed Implementation
[0045] The technical solutions of this utility model will be clearly and completely described below with reference to specific embodiments. Obviously, the described embodiments are only a part of the embodiments of this utility model, and not all of them. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this utility model.
[0046] like Figure 2-8As shown, this utility model discloses an integrated code disk spinning jig, comprising an adsorption component 1. The top of the adsorption component 1 is used to adsorb and fix the integrated code disk to be processed, and the bottom is used to connect to the adsorption vacuum shaft 2 of the spinning machine. The adsorption vacuum shaft 2 of the spinning machine is a rotating output component used to drive the entire spinning jig to rotate, thereby causing the integrated code disk to rotate.
[0047] In the adsorption assembly 1, a cylindrical step is provided at the top. The top of the cylindrical step is provided with a positioning groove 101, an annular adsorption groove 102 and a positioning post 103. The annular adsorption groove 102 is located on the outer periphery of the positioning groove 101 and is connected to the adsorption vacuum shaft 2. The positioning post 103 is located inside the positioning groove 101 and is arranged concentrically with the positioning groove 101 and the annular adsorption groove 102. The annular adsorption groove 102 is used to adsorb the code disk substrate 31 of the code disk to be processed. The inner side of the positioning groove 101 is used to embed the mounting step 32 of the code disk. The positioning post 103 is used to embed into the central hole of the mounting step 32.
[0048] In this structure, the positioning post 103 is embedded in the central hole of the mounting step 32 for insertion positioning, and the mounting step 32 is embedded in the positioning groove 101 for insertion positioning. This achieves dual positioning of the inner and outer diameters of the mounting step 32, thereby achieving preliminary precise positioning of the code disk. During rotation, the negative pressure adsorption force enhances the stability of the code disk, preventing it from shifting, falling off, or even flying away. Simultaneously, this structure ensures the concentricity of the code disk and the adsorption vacuum shaft 2, effectively improving the uniformity of the photoresist layer and the accuracy of subsequent processes. Furthermore, the upwardly protruding cylindrical step increases the positioning height of the code disk, improving the convenience for personnel installing or removing the coated code disk.
[0049] In this integrated encoder disk photoresist swivel fixture structure, the outer diameter of the positioning post 103 is equal to the inner diameter of the center hole of the mounting step 32, and the inner diameter of the positioning groove 101 is greater than or equal to the outer diameter of the mounting step 32. This ensures the accuracy of positioning, thereby ensuring the stability of the encoder disk during high-speed rotation and avoiding uneven photoresist layer thickness or surface defects caused by inaccurate positioning.
[0050] Furthermore, the top of the positioning post 103 is frustoconical, making it easier to insert into the center hole of the mounting step 32. Simultaneously, the axial height of the positioning post 103 is less than the depth of the positioning groove 101, preventing the positioning post 103 from being too long and interfering with the operation of other components. This structure helps improve operational efficiency and reduces the risk of equipment damage.
[0051] In this integrated code disk photoresist spinning fixture structure, the outer diameter of the cylindrical step is 1-5mm smaller than the outer diameter of the code disk substrate 31. For example, if the outer diameter of the cylindrical step is 1mm smaller than the outer diameter of the code disk substrate 31, after the code disk is placed, the outer diameter of the code disk substrate 31 is larger than the outer diameter of the cylindrical step, thus forming a flow guiding structure. Utilizing gravity, the photoresist flows downwards when it reaches the sidewall of the code disk substrate 31, instead of directly contacting the top surface of the cylindrical step. This ensures the cleanliness of the adsorption surface at the top of the cylindrical step and improves the adsorption effect.
[0052] In this integrated encoder stick adhesive-spinning fixture structure, at least one reinforcing rib is provided between the positioning groove 101 and the positioning post 103. This increases the overall strength of the fixture structure, prevents deformation or damage due to long-term use, extends the service life of the equipment, and improves production efficiency.
[0053] In this integrated encoder adhesive-spraying fixture structure, the cylindrical step side is provided with an adhesive discharge hole 104, which is connected to the positioning groove 101. Through this structure, adhesive that accidentally enters the positioning groove 101 can be discharged through the adhesive discharge hole 104, ensuring the cleanliness of the positioning groove 101 and facilitating the installation and disassembly of the encoder.
[0054] In this integrated encoder stick structure, the adsorption component 1 includes an adsorption seat 11 and a connecting seat 12. The top of the connecting seat 12 is fixedly connected to the adsorption seat 11, and the bottom is fixedly connected to the adsorption vacuum shaft 2. The middle position of the top of the adsorption seat 11 protrudes upward to form a cylindrical step. The adsorption seat 11 is provided with a first air channel 111, and the connecting seat 12 is provided with a second air channel 121. One end of the first air channel 111 is connected to the annular adsorption groove 102, and the other end is connected to the second air channel 121. The second air channel 121 is connected to the adsorption vacuum shaft 2.
[0055] In this structure, the connecting seat 12 and the adsorption seat 11 are fixedly connected by bolts to achieve a separable design, which facilitates subsequent maintenance. The adsorption vacuum shaft 2 is connected to the negative side of the vacuum pump. The vacuum pump evacuates the annular adsorption tank 102, thereby adsorbing and fixing the code disk to be processed onto the top of the annular adsorption tank 102.
[0056] In this structure, the bottom of the connecting seat 12 is provided with a shaft hole 122, and the side of the shaft hole 122 is provided with a keyway 1221. The adsorption vacuum shaft 2 is embedded in the shaft hole 122 and is keyed to the keyway 1221. After installation, a bolt is installed on the side of the connecting seat 12, and one end of the bolt is inserted into the shaft hole 122 to support the side of the adsorption vacuum shaft 2 and improve the stability of the adsorption vacuum shaft 2. The end of the second air passage 121 away from the first air passage 111 is connected to the shaft hole 122. The first air passage 111 is arranged vertically, with its upper end extending to the bottom of the annular adsorption groove 102 and its lower end extending to the bottom of the adsorption seat 11.
[0057] Specifically, the second air passage 121 is coaxially arranged with the shaft hole 122. An annular intercepting groove 123 is provided on the top of the connecting seat 12 along the circumference of the second air passage 121; a countersunk hole 112 is provided at the bottom of the adsorption seat 11, concentric with and connected to the second air passage 121; the lower end of the first air passage 111 is located inside the countersunk hole 112 and is connected to it. This structure sequentially connects the annular adsorption groove 102, the first air passage 111, the countersunk hole 112, the annular intercepting groove 123, the second air passage 121, and the adsorption vacuum shaft 2. Simultaneously, this mechanism forms a stepped intercepting structure, intercepting the absorbed photoresist, reducing the amount of photoresist sucked into the spin coater, and ensuring the mechanical performance of the spin coater.
[0058] The method of using the integrated encoder stick of this utility model is as follows:
[0059] First, install the spin coating fixture onto the adsorption vacuum shaft 2 of the coating equipment. Take the side of the code disk substrate 31 of the integrated metal code disk, align the mounting step 32 at the bottom of the code disk with the positioning groove 101 and positioning post 103, and insert them into the fixture to initially place the code disk into the fixture. Then, pinch the side of the substrate and apply a certain force to keep the bottom surface of the substrate in contact with the top surface of the cylindrical step. Turn on the vacuum pump to adsorb the substrate onto the spin coating fixture.
[0060] The above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.
Claims
1. An integrated encoder stick for spinning glue, comprising an adsorption component (1), wherein, The bottom of the adsorption component (1) is used to connect the adsorption vacuum shaft (2) of the spin coater. The feature is that: the top of the adsorption component (1) is provided with a cylindrical step, and the top of the cylindrical step is provided with a positioning groove (101), an annular adsorption groove (102) and a positioning column (103), wherein, The annular adsorption groove (102) is located on the outer periphery of the positioning groove (101) and is connected to the adsorption vacuum shaft (2). The positioning column (103) is located inside the positioning groove (101) and is arranged concentrically with the positioning groove (101) and the annular adsorption groove (102). The annular adsorption groove (102) is used to adsorb the code disk substrate (31) to be processed, the inner side of the positioning groove (101) is used to embed the mounting step (32) of the code disk, and the positioning post (103) is used to embed into the center hole of the mounting step (32).
2. The integrated encoder stick for dispensing glue as described in claim 1, characterized in that: The outer diameter of the positioning post (103) is equal to the inner diameter of the center hole of the mounting step (32), and the inner diameter of the positioning groove (101) is greater than or equal to the outer diameter of the mounting step (32).
3. The integrated encoder stick for dispensing glue as described in claim 1, characterized in that: The top of the positioning post (103) is truncated cone-shaped, and the axial height of the positioning post (103) is less than the groove depth of the positioning groove (101).
4. The integrated encoder stick for dispensing glue as described in claim 1, characterized in that: The outer diameter of the cylindrical step is 1-5 mm smaller than the outer diameter of the code disk substrate (31).
5. The integrated encoder stick for dispensing glue as described in claim 1, characterized in that: At least one reinforcing rib is provided between the positioning groove (101) and the positioning post (103).
6. The integrated encoder stick for dispensing glue as described in claim 1, characterized in that: The cylindrical step is provided with an adhesive drainage hole (104) on its side, wherein... The glue discharge hole (104) is connected to the positioning groove (101).
7. The integrated encoder stick for dispensing glue as described in claim 1, characterized in that: The adsorption assembly (1) includes an adsorption seat (11) and a connecting seat (12), wherein, The top of the connecting seat (12) is fixedly connected to the adsorption seat (11), and the bottom is fixedly connected to the adsorption vacuum shaft (2). The top of the adsorption seat (11) protrudes upward at the middle position to form the cylindrical step; The adsorption seat (11) is provided with a first air channel (111), and the connecting seat (12) is provided with a second air channel (121). One end of the first air channel (111) is connected to the annular adsorption groove (102), and the other end is connected to the second air channel (121). The second airway (121) is connected to the adsorption vacuum shaft (2).
8. The integrated encoder stick for dispensing glue as described in claim 7, characterized in that: The first air passage (111) is arranged vertically, with its upper end extending to the bottom of the annular adsorption groove (102) and its lower end extending to the bottom of the adsorption seat (11).
9. The integrated encoder stick for dispensing glue as described in claim 7, characterized in that: The bottom of the connecting seat (12) is provided with a shaft hole (122), and the side of the shaft hole (122) is provided with a keyway (1221). The adsorption vacuum shaft (2) is embedded in the shaft hole (122) and is keyed to the keyway (1221); The end of the second air passage (121) away from the first air passage (111) is connected to the shaft hole (122).
10. The integrated encoder stick for dispensing glue as described in claim 9, characterized in that: The second air passage (121) is coaxially arranged with the shaft hole (122), wherein, The top of the connecting seat (12) is provided with an annular intercepting groove (123) along the circumference of the second air passage (121). The bottom of the adsorption seat (11) is provided with a countersunk hole (112), which is concentric with and connected to the second airway (121); The lower end of the first air passage (111) is located inside the countersunk hole (112) and is connected to it.