Gantry type anti-deformation sliding table structure

Abstract

The utility model relates to a gantry type anti-deformation sliding table structure. The gantry type anti-deformation sliding table structure comprises a marble base, a marble gantry, a first sliding table module, a second sliding table module, a third sliding table module and a fourth sliding table module, wherein the first sliding table module and the second sliding table module are arranged along the X axis; the first sliding table module is provided with a main workbench and an auxiliary workbench, and the third sliding table module is arranged on the main workbench. The first sliding table module, the second sliding table module and the third sliding table module are arranged on the base, the fourth sliding table module is arranged on the cross beam, and the table top of a working table of the fourth sliding table module is perpendicular to the mounting surface of the base. According to the sliding table structure, the multiple sliding table modules are integrated, machining, detecting, feeding, discharging and other operations can be conducted at the same time, the working efficiency of the sliding table modules is improved, the base and the portal frame are made of marble materials, and excellent deformation resistance is achieved.

Description

Technical Field

[0001] This utility model relates to the field of slide table structure technology, and in particular discloses a gantry-type anti-deformation slide table structure. Background Technology

[0002] In existing technologies, slide table modules play a crucial role in industrial production, especially in machining scenarios requiring multi-axis motion. Gantry slide tables, as a common high-precision motion platform, are widely used in industrial production and scientific research. Their structure typically consists of a base, a gantry, and slide table modules mounted on the gantry and base. However, traditional slide table modules often have several problems. For example, in semiconductor inspection / precision machining, traditional single-stage systems must complete the following sequentially: positioning → machining → material change → inspection → reset. 30% of the time is wasted waiting during idle travel, and high-speed motion interferes with precise positioning. Furthermore, components such as the base and stage are often made of common metal materials, which are prone to deformation during long-term use, leading to decreased motion accuracy, affecting equipment stability and reliability, increasing maintenance costs and downtime, and impacting machining quality. Therefore, developing a gantry slide table module that allows for parallel machining and inspection with good deformation resistance is of significant practical importance. Utility Model Content

[0003] In order to overcome the shortcomings and deficiencies of the existing technology, the purpose of this utility model is to provide a gantry-type anti-deformation slide structure.

[0004] To achieve the above objectives, this utility model provides a gantry-type anti-deformation slide structure, comprising a marble base and a marble gantry frame mounted on the base; the gantry frame includes a crossbeam and two columns, the two columns being respectively mounted at both ends of the base and supporting the ends of the crossbeam; the base is provided with a first slide module and a second slide module parallel to each other along the Y-axis direction (the length direction of the base), the first slide module having an independent main worktable and a secondary worktable, and the second slide module having a second worktable that reciprocates along the Y-axis; a third slide module is provided on the main worktable along the X-axis direction (the width direction of the base), the third slide module having a third worktable, and the third worktable reciprocating along the X-axis when the third slide module reciprocates along the Y-axis; a fourth slide module is provided on the crossbeam along the X-axis direction, the fourth slide module having a fourth worktable that reciprocates along the X-axis, the table surface of the fourth worktable being perpendicular to the mounting surface of the base.

[0005] Furthermore, the gantry also has mounting platforms, which protrude from one end of the column near the base. Each column has two mounting platforms, which are symmetrically arranged on both sides of the column. The column is reinforced and fixed to the base by the mounting platforms. The mounting platforms and the base are fixed by screws.

[0006] Furthermore, the first slide module has a first frame assembly, a first sliding assembly, and a first drive assembly. The first frame assembly includes two first side plates and a first top plate. The two first side plates are respectively installed at both ends of the base and are used to support both ends of the first top plate. The first sliding assembly is located below the first top plate and includes two first slide rails and a plurality of first sliders slidably installed on the first slide rails. The main worktable and the auxiliary worktable are slidably installed on the first slide rails via the first sliders. The first drive assembly includes a first stator plate disposed between the two first slide rails, a drive motor and an auxiliary drive motor respectively installed on the main worktable and the auxiliary worktable, and a main linear motor and an auxiliary linear motor that independently drive the drive motor and the auxiliary drive motor respectively.

[0007] Furthermore, the second slide module has a second frame assembly, which includes a second mounting plate, two second side plates, and a second top plate. The second mounting plate has a bottom plate and two protective side plates bent from both sides of the bottom plate. The bottom plate is fixedly mounted on the base, and the two second side plates are located at both ends of the second mounting plate. The two ends of the second top plate are respectively mounted on the two second side plates. The bottom plate, the two protective side plates, the two second side plates, and the second top plate form an accommodating cavity. There are guide seams between the two sides of the second top plate and the two protective side plates, and the guide seams are connected to the accommodating cavity.

[0008] Furthermore, the second slide module also has a second drive assembly and a second sliding assembly. The second drive assembly includes a lead screw, a nut sleeved on the lead screw, and a third drive mechanism for driving the lead screw to rotate. The two ends of the lead screw are rotatably mounted in the accommodating cavity via a fixed end and a support seat, respectively. The sliding assembly includes a second slide rail mounted on the base plate, a second slider slidably mounted on the second slide rail, and a second worktable fixedly mounted on the second slider and the nut. The second worktable has second protrusions on both sides, and the second protrusions extend out of the accommodating cavity via guide slots for mounting external parts.

[0009] Furthermore, the stroke length of the first slide module is greater than that of the second slide module.

[0010] Furthermore, the third slide module has a third frame assembly, a third sliding assembly, and a third drive assembly. The third frame assembly includes a third mounting plate, two third side plates, and a third top plate. The third mounting plate is fixedly mounted on the main worktable. The two third side plates are located at both ends of the third mounting plate, and both ends of the third top plate are supported by the two third side plates respectively. The third mounting plate has third protrusions on both sides. The third sliding assembly includes a third slide rail located at the top of the third protrusion and a third slider slidably mounted on the third slide rail. The third drive assembly includes a third stator plate located on the third mounting plate, a third mover mounted on the second worktable, and a third linear motor for driving the third mover.

[0011] Furthermore, the main workbench has a support plate, one end of which is fixed to the main workbench, and the other end of which is used to install a third mounting plate; the support plate is made of marble.

[0012] Furthermore, the fourth slide module has a fourth frame assembly, a fourth sliding assembly, and a fourth drive assembly; the fourth frame assembly includes two fourth side plates and a fourth top plate supported by the two fourth side plates; the fourth sliding assembly includes two fourth slide rails located between the two fourth side plates and covered by the fourth top plate, a fourth slider slidably mounted on the fourth slide rails, and the fourth worktable slidably mounted on the fourth slide rails via the fourth slider; the fourth drive assembly includes a fourth stator plate disposed between the two fourth slide rails, a fourth mover mounted on the third worktable, and a fourth linear motor for driving the third worktable to reciprocate along the fourth slide rails.

[0013] Furthermore, the slide module also includes anti-collision components and sensing components; the anti-collision components are anti-collision rubbers located at both ends of the worktable; the sensing components include a grating positioning unit and a limit position detection unit; the grating positioning unit includes a reference zero-position magnetic exciter fixed on the base or crossbeam, a grating ruler fixed on the base or crossbeam, and a reading head mounted on the worktable to cooperate with the grating ruler and the reference zero-position magnetic exciter for positioning; the limit position detection unit includes a sensing plate located on the worktable and a sensor mounted on the base or crossbeam to cooperate with the sensing plate.

[0014] The beneficial effects of this utility model are:

[0015] (1) Multi-axis linkage: This slide structure integrates multiple slide modules, which can perform processing, inspection, loading and unloading operations at the same time, thus improving the working efficiency of the slide module.

[0016] (2) High resistance to deformation: The base and gantry are made of marble, which enhances the resistance to deformation of the entire slide structure and ensures that it can maintain high-precision positioning and stable movement even under long-term use and heavy load. Attached Figure Description

[0017] Figure 1 This is a schematic diagram of the overall structure of a gantry-type anti-deformation slide table according to the present invention;

[0018] Figure 2 This is a schematic diagram of the first slide module of this utility model.

[0019] Figure 3 This is a schematic diagram of the second slide module structure of this utility model;

[0020] Figure 4 This is a schematic diagram of the third slide module structure of this utility model;

[0021] Figure 5 This is a schematic diagram of the third slide module structure of this utility model.

[0022] The reference numerals in the attached drawings include: 1. Base; 2. Gantry frame; 21. Crossbeam; 22. Column; 23. Mounting platform; 3. First slide module; 31. Main worktable; 32. Secondary worktable; 331. First side plate; 332. First top plate; 341. First slide rail; 342. First slider; 354. Main linear motor; 355. Secondary linear motor; 4. Second slide module; 41. Second worktable; 411. Second boss; 421. Second mounting plate; 422. Second side plate; 423. Second top plate; 424. Base plate; 425. Protective side plate; 431. Lead screw; 432. Nut; 433. Third drive mechanism; 434. Fixed end; 435. Support base; 441. Second 442. Slide rail; 5. Second slider; 6. Third slide module; 7. Third worktable; 8. Third mounting plate; 9. Third side plate; 10. Third top plate; 11. Third boss; 12. Third slide rail; 13. Third moving part; 14. Third linear motor; 15. Fourth slide module; 16. Fourth worktable; 17. Fourth side plate; 18. Fourth top plate; 19. Fourth slide rail; 10. Fourth stator plate; 11. Fourth moving part; 12. Fourth moving part; 13. Fourth linear motor; 14. Bearing plate; 15. Anti-collision rubber; 16. Reference zero position magnetic exciter; 17. Grating ruler; 18. Reading head; 19. Induction plate; 10. Sensor. Detailed Implementation

[0023] To further illustrate the technical means and effects adopted by this utility model in order to achieve the intended utility model purpose, the following detailed description of the specific implementation methods, structure, features and effects of this utility model is provided in conjunction with the accompanying drawings and preferred embodiments.

[0024] Please see Figures 1 to 5As shown, this utility model discloses a gantry-type anti-deformation slide structure, including a marble base 1 and a marble gantry frame 2 installed on the base 1; the gantry frame 2 includes a crossbeam 21 and two columns 22, which are respectively installed at both ends of the base 1 and are used to support the two ends of the crossbeam 21; the base 1 is provided with a first slide module 3 and a second slide module 4 parallel to each other along the Y-axis direction (the length direction of the base 1), the first slide module 3 has a main worktable 31 and a secondary worktable 32 that are independent of each other, and the second slide module... 4. A second worktable 41 reciprocates along the Y-axis; a third slide module 5 is provided on the main worktable 31 along the X-axis direction (width direction of the base 1), the third slide module 5 has a third worktable 51, and the third slide module 5 reciprocates along the X-axis when it reciprocates along the Y-axis with the main worktable 31; a fourth slide module 6 is provided on the crossbeam 21 along the X-axis direction, the fourth slide module 6 has a fourth worktable 61 reciprocating along the X-axis direction, and the table surface of the fourth worktable 61 is perpendicular to the mounting surface of the base 1.

[0025] In actual use, the gantry 2 is installed in the middle of the base 1, and the crossbeam 21 spans across the base 1. The first slide module 3 and the second slide module 4 are arranged perpendicularly to the crossbeam 21, and the first slide module 3 and the second slide module 4 are respectively located at both ends of the base 1; the first slide module 3 and the second slide module 4 provide a worktable that can reciprocate along the Y-axis direction, and the third slide module 5 and the fourth slide module 6 are connected by a worktable that reciprocates along the X-axis direction; the fourth slide module 6 is located above the other slide modules, and the third slide module 5 is stacked on top of the first slide module 3. Through precise design and installation, the slide modules work together to meet the requirements of complex motion trajectories.

[0026] Specifically, the gantry frame 2 also has a mounting platform 23, which protrudes from one end of the column 22 near the base 1. Each column 22 has two mounting platforms 23, which are symmetrically arranged on both sides of the column 22. The column 22 is reinforced and fixed to the base 1 by the mounting platforms 23.

[0027] In actual use, the column 22 is mounted on the base 1 through the mounting platforms 23 on both sides. The mounting platforms 23 and the base 1 have matching through holes. The other end of the column 22 has a blind hole, and the crossbeam 21 has a through hole that matches the blind hole.

[0028] Specifically, the first slide module 3 has a first frame assembly, a first sliding assembly, and a first drive assembly. The first frame assembly includes two first side plates 331 and a first top plate 332. The two first side plates 331 are respectively installed at both ends of the base 1 and are used to support the two ends of the first top plate 332. The first sliding assembly is located below the first top plate 332 and includes two first slide rails 341 and a plurality of first sliders 342 slidably installed on the first slide rails 341. The main worktable 31 and the auxiliary worktable 32 are slidably installed on the first slide rails 341 via the first sliders 342. The first drive assembly includes a first stator plate disposed between the two first slide rails 341, a drive motor and an auxiliary drive motor respectively installed on the main worktable 31 and the auxiliary worktable 32, and a main linear motor 354 and an auxiliary linear motor 355 that independently drive the drive motor and the auxiliary drive motor respectively.

[0029] In actual use, the first side plates 331 are respectively installed at both ends of the base 1. The two ends of the first top plate 332 are supported by the two first side plates 331. The two first slide rails 341 are directly installed on the base 1 and located below the first top plate 332. The eight first sliders 342 are evenly distributed on the two first slide rails 341. Four first sliders 342 are evenly installed on the main worktable 31, and four first sliders 342 are evenly installed on the auxiliary worktable 32, thereby realizing the sliding installation of the first sliders 342 and the second sliders 442 on the first slide rails 341. The main worktable 31 and the auxiliary worktable 32 each have a driving actuator and a driving actuator. The main worktable 31 and the auxiliary worktable 32 are driven independently by the main linear motor 354 and the auxiliary linear motor 355, respectively. The main worktable 31 is closer to the second slide module 4 than the auxiliary worktable 32.

[0030] Specifically, the second slide module 4 has a second frame assembly, which includes a second mounting plate 421, two second side plates 422, and a second top plate 423. The second mounting plate 421 has a bottom plate 424 and two protective side plates 425 bent from both sides of the bottom plate 424. The bottom plate 424 is fixedly mounted on the base 1. The two second side plates 422 are located at both ends of the second mounting plate 421, and the two ends of the second top plate 423 are respectively mounted on the two second side plates 422. The bottom plate 424, the two protective side plates 425, the two second side plates 422, and the second top plate 423 form an accommodating cavity. There are guide seams between the two sides of the second top plate 423 and the two protective side plates 425, and the guide seams are connected to the accommodating cavity.

[0031] In actual use, the second mounting plate 421 of the second slide module 4 is mounted on the base 1, and the second drive assembly and the second sliding assembly of the second slide module 4 are both mounted on the second mounting plate 421. The second mounting plate 421 is integrally formed with the protective side plate 425, making the second mounting plate 421 concave. Two second side plates 422 are respectively encapsulated at both ends of the concave second mounting plate 421. The two ends of the second top plate 423 are supported by the two second side plates 422, and the second top plate 423 is not completely closed with the protective side plate 425, but has a guide seam.

[0032] Specifically, the second slide module 4 also has a second drive assembly and a second sliding assembly. The second drive assembly includes a lead screw 431, a nut 432 sleeved on the lead screw 431, and a third drive mechanism 433 for driving the lead screw 431 to rotate. The two ends of the lead screw 431 are respectively rotatably mounted in the accommodating cavity via a fixed end 434 and a support base 435. The sliding assembly includes a second slide rail 441 mounted on a base plate 424, a second slider 442 slidably mounted on the second slide rail 441, and a second worktable 41 fixedly mounted on the second slider 442 and the nut 432. The second worktable 41 has second protrusions 411 on both sides. The second protrusions 411 protrude from the accommodating cavity via guide slots for mounting external parts.

[0033] In actual use, the fixed end 434 and the support base 435 are installed at both ends of the second mounting plate 421. The top plate and the two second side plates 422 are actually installed on the fixed end 434 and the support base 435. The lead screw 431, nut 432, sliding assembly, and second worktable 41 are housed in the accommodating cavity and are protected and isolated. The second bosses 411 provided at both ends of the second worktable 41 extend out of the accommodating cavity from the guide slot, ensuring that when the second worktable 41 reciprocates along the lead screw 431 and the second slide rail 441 in the accommodating cavity, the second bosses 411 reciprocate along the guide slot, thus ensuring the operation of the second worktable 41.

[0034] Specifically, the stroke length of the first slide module 3 is greater than the stroke length of the second slide module 4.

[0035] In actual use, the length of the first slide rail 341 is greater than that of the second slide rail 441. The first slide rail 341 is set from one end of the base 1 to the other end of the base 1, while the second slide rail 441 extends only from one end of the base 1 to the middle of the base 1.

[0036] Specifically, the third slide module 5 has a third frame assembly, a third sliding assembly, and a third drive assembly. The third frame assembly includes a third mounting plate 521, two third side plates 522, and a third top plate 523. The third mounting plate 521 is fixedly mounted on the main worktable 31. The two third side plates 522 are located at both ends of the third mounting plate 521, and both ends of the third top plate 523 are supported by the two third side plates 522 respectively. The third mounting plate 521 has third protrusions 524 on both sides respectively. The third sliding assembly includes a third slide rail 531 located at the top of the third protrusion 524 and a third slider slidably mounted on the third slide rail 531. The third drive assembly includes a third stator plate 541 located on the third mounting plate 521, a third mover 542 mounted on the second worktable 41, and a third linear motor 543 for driving the third mover 542.

[0037] In actual use, the main worktable 31 has first protrusions at both ends. The main worktable 31 is below the first top plate 332, and the first protrusions extend out of the first top plate 332. The third slide module 5 is vertically mounted on the first protrusions of the main worktable 31 via the third mounting plate 521. The third protrusion 524 is I-shaped with an increased top area for mounting the third slide rail 531, enhancing the load-bearing capacity of the third slide module 5. The third top plate 523 is provided with reinforcing ribs.

[0038] Specifically, the main workbench 31 has a support plate 7, one end of which is fixed to the main workbench 31, and the other end of which is used to install a third mounting plate 521; the support plate 7 is made of marble.

[0039] In actual use, the two ends of the support plate 7 are respectively installed on the two first protrusions of the main worktable 31. The support plate 7 is located above the first top plate 332 and below the third mounting plate 521. The third slide module 5 is installed on the main worktable 31 via the support plate 7, which can avoid the main worktable 31 from being subjected to concentrated force and extend the service life of the main worktable 31. The stability of the third slide module 5 can also be enhanced by installing the third slide module 5 on the main worktable 31 via the support plate 7 with a larger bearing area.

[0040] Specifically, the fourth slide module 6 has a fourth frame assembly, a fourth sliding assembly, and a fourth drive assembly; the fourth frame assembly includes two fourth side plates 621 and a fourth top plate 622 supported by the two fourth side plates 621; the fourth sliding assembly includes two fourth slide rails 631 located between the two fourth side plates 621 and covered by the fourth top plate 622, and a fourth slider slidably mounted on the fourth slide rails 631, and the fourth worktable 61 is slidably mounted on the fourth slide rails 631 via the fourth slider; the fourth drive assembly includes a fourth stator plate 641 disposed between the two fourth slide rails 631, a fourth mover 642 mounted on the third worktable 51, and a fourth linear motor 643 for driving the third worktable 51 to reciprocate along the fourth slide rails 631.

[0041] In actual use, the fourth slide module 6 is installed on the side of the crossbeam 21, and the working surface of the third worktable 51 is perpendicular to the mounting surface of the base 1. That is, the mounting surface of the third worktable 51 is perpendicular to the working surfaces of the main worktable 31, the auxiliary worktable 32, and the second worktable 41. At the same time, the third worktable 51 reciprocates along the X-axis.

[0042] Specifically, the slide module also has an anti-collision component and a sensing component; the anti-collision component is anti-collision rubber 8 provided at both ends of the worktable; the sensing component includes a grating positioning unit and a limit position detection unit; the grating positioning unit includes a reference zero-position magnetic exciter 911 fixed on the base 1 or the crossbeam 21, a grating ruler 912 fixed on the base 1 or the crossbeam 21, and a reading head 913 installed on the worktable to cooperate with the grating ruler 912 and the reference zero-position magnetic exciter 911 for positioning; the limit position detection unit includes a sensing plate 921 provided on the worktable and a sensor 922 installed on the base 1 or the crossbeam 21 to cooperate with the sensing plate 921.

[0043] In actual use, the anti-collision component can be anti-collision rubber 8 or a telescopic buffer. In this embodiment, it is anti-collision rubber 8. The anti-collision rubber 8 of the first slide module 3 is set on the first slide module 3 and the first side plate 331. The anti-collision rubber 8 of the second slide module 4 is set on the nut 432, the support base 435, and the mounting base. The anti-collision rubber 8 of the third slide module 5 is set on the third side plate 522. The anti-collision rubber 8 of the fourth slide module 6 is set on the fourth side plate 621. All four slide modules are equipped with limit position detection units. The first slide module 3 and the third slide module 5 are also equipped with grating positioning units. There are multiple sensors 922 in the four slide modules. In the first slide module 3, the side of the main worktable 31 is also equipped with a sensor 922 for detecting the relative position of the main worktable 31 and the auxiliary worktable 32. The reference zero-position magnetic exciter 911 and the grating ruler 912 of the first slide module 3 are mounted on the base 1, and the reference zero-position magnetic exciter 911 and the grating ruler 912 of the third slide module 5 are mounted on the side of the third boss 524.

[0044] The above description is merely a preferred embodiment of the present utility model and is not intended to limit the present utility model in any way. Although the present utility model has been disclosed above with reference to a preferred embodiment, it is not intended to limit the present utility model. Any person skilled in the art can make some modifications or alterations to the above-disclosed technical content to create equivalent embodiments without departing from the scope of the present utility model. Any simple modifications, equivalent changes and alterations made to the above embodiments based on the technical essence of the present utility model without departing from the scope of the present utility model shall still fall within the scope of the present utility model.

Claims

1. A gantry-type anti-deformation slide structure, characterized in that: include: Base (1): Made of marble; Gantry frame (2): Made of marble; includes a crossbeam (21) and two columns (22), which are respectively installed at both ends of the base (1) to support the crossbeam (21); First slide module (3): It is set on the base (1) along the Y-axis and has a main worktable (31) and a secondary worktable (32) that reciprocate along the Y-axis. Second slide module (4): It is set on the base (1) along the Y-axis and has a second worktable (41) that reciprocates along the Y-axis; The third slide module (5) is set on the main worktable (31) along the X-axis and has a third worktable (51); when the third slide module (5) moves back and forth along the Y-axis with the main worktable (31), the third worktable (51) moves back and forth along the X-axis. The fourth slide module (6) is set on the crossbeam (21) along the X-axis and has a fourth worktable (61). The surface of the fourth worktable (61) is perpendicular to the mounting surface of the base (1).

2. The gantry-type anti-deformation slide structure according to claim 1, characterized in that: The gantry (2) also has a mounting platform (23), which protrudes from one end of the column (22) near the base (1). Each column (22) is symmetrically provided with two mounting platforms (23). The column (22) is reinforced and fixed to the base (1) via the mounting platform (23).

3. The gantry-type anti-deformation slide structure according to claim 1, characterized in that: The first slide module (3) has a first frame assembly, a first sliding assembly and a first drive assembly. The first frame assembly includes two first side plates (331) and a first top plate (332). The two first side plates (331) are respectively installed at both ends of the base (1) and support both ends of the first top plate (332). The first sliding assembly is located below the first top plate (332) and includes two first slide rails (341) and multiple first sliders (342) slidably mounted on the two first slide rails (341). The main worktable (31) and the auxiliary worktable (32) are respectively connected to the corresponding first sliders (342). The first drive assembly includes a first stator plate disposed between the two first slide rails (341), an active motor and an auxiliary motor respectively installed on the main worktable (31) and the auxiliary worktable (32), and a main linear motor (354) and an auxiliary linear motor (355) that independently drive the active motor and the auxiliary motor respectively.

4. The gantry-type anti-deformation slide structure according to claim 1, characterized in that: The second slide module (4) has a second frame assembly, which includes a second mounting plate (421), two second side plates (422) and a second top plate (423). The second mounting plate (421) has a bottom plate (424) and two protective side plates (425) bent from both sides of the bottom plate (424). The bottom plate (424) is fixedly installed on the base (1). The two second side plates (422) are located at both ends of the second mounting plate (421), and the two ends of the second top plate (423) are respectively installed on the two second side plates (422). The bottom plate (424), the two protective side plates (425), the two second side plates (422) and the second top plate (423) surround to form an accommodating cavity. There is a guide seam between the two sides of the second top plate (423) and the two protective side plates (425), and the guide seam is connected to the accommodating cavity.

5. The gantry-type anti-deformation slide structure according to claim 4, characterized in that: The second slide module (4) also has a second drive assembly and a second sliding assembly. The second drive assembly includes a lead screw (431), a nut (432) sleeved on the lead screw (431), and a third drive mechanism (433) for driving the lead screw (431) to rotate. The two ends of the lead screw (431) are respectively rotatably mounted in the accommodating cavity via a fixed end (434) and a support base (435). The sliding assembly includes a second slide rail (441) mounted on the base plate (424), a second slider (442) slidably mounted on the second slide rail (441), and a second worktable (41) connected to the second slider (442) and the nut (432). The second worktable (41) has a second boss (411) protruding from both sides. The second boss (411) protrudes from the accommodating cavity via a guide slot for mounting external parts.

6. The gantry-type anti-deformation slide structure according to claim 1, characterized in that: The stroke length of the first slide module (3) is greater than the stroke length of the second slide module (4).

7. The gantry-type anti-deformation slide structure according to claim 1, characterized in that: The third slide module (5) has a third frame assembly, a third sliding assembly, and a third drive assembly. The third frame assembly includes a third mounting plate (521), two third side plates (522), and a third top plate (523). The third mounting plate (521) is fixedly mounted on the main worktable (31). The two third side plates (522) are located at both ends of the third mounting plate (521), and both ends of the third top plate (523) are supported by the two third side plates (522). The two sides of the third mounting plate (521) are respectively supported by the two third side plates (522). The third protrusion (524) is provided and is covered by the third top plate (523); the third sliding assembly includes a third slide rail (531) located at the top of the third protrusion (524) and a third slider slidably mounted on the third slide rail (531); the third driving assembly includes a third stator plate (541) located on the third mounting plate (521), a third mover (542) mounted on the third worktable (51), and a third linear motor (543) for driving the third mover (542).

8. A gantry-type anti-deformation slide structure according to claim 7, characterized in that: The main workbench (31) has a support plate (7), one end of which is fixed to the main workbench (31), and the other end of which is used to install a third mounting plate (521); the support plate (7) is made of marble.

9. A gantry-type anti-deformation slide structure according to claim 1, characterized in that: The fourth slide module (6) has a fourth frame assembly, a fourth sliding assembly and a fourth drive assembly; the fourth frame assembly includes two fourth side plates (621) and a fourth top plate (622) supported by the two fourth side plates (621); the fourth sliding assembly includes two fourth slide rails (631) located between the two fourth side plates (621) and covered by the fourth top plate (622), a fourth slider slidably mounted on the fourth slide rails (631), and the fourth worktable (61) slidably mounted on the fourth slide rails (631) via the fourth slider; the fourth drive assembly includes a fourth stator plate (641) located between the two fourth slide rails (631), a fourth mover (642) mounted on the fourth worktable (61), and a fourth linear motor (643) for driving the fourth worktable (61) to reciprocate along the fourth slide rails (631).

10. A gantry-type anti-deformation slide structure according to claim 1, characterized in that: The slide module also has an anti-collision component and a sensing component; the anti-collision component is anti-collision rubber (8) provided at both ends of the worktable; the sensing component includes a grating positioning unit and a limit position detection unit; the grating positioning unit includes a reference zero-position magnetic exciter (911) fixed on the base (1) or frame assembly, a grating ruler (912) fixed on the base (1) or frame assembly, and a reading head (913) installed on the worktable to cooperate with the grating ruler (912) and the reference zero-position magnetic exciter (911) for positioning; the limit position detection unit includes a sensing plate (921) provided on the worktable and a sensor (922) installed on the base (1) or crossbeam (21) to cooperate with the sensing plate (921) for positioning.

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