Semiconductor lens detection device

Abstract

The utility model discloses a semiconductor lens detection device, which relates to the technical field of lens detection and comprises an operation table top, and an adjusting mechanism is arranged on the surface of the operation table top. A lens is placed between the two sets of clamping plates, due to the arrangement of the anti-slip strips fixedly installed on one sides of the clamping plates, the lens falling phenomenon possibly occurring in the machining process can be effectively avoided, use in the grinding machining process is more convenient, and due to the arrangement of the adjusting structure, when lenses with different thicknesses are clamped, the lens can be conveniently adjusted, and the machining efficiency is improved. According to the lens clamping device, the adjusting plates on the two sides only need to be pulled, the fixing plates are pulled through the connecting rods, the springs are stretched in the through holes and then loosened, auxiliary clamping is carried out on lenses with different thicknesses through contraction and reset of the springs, and the problem that the lens breakage rate is high due to a traditional rigid clamp is solved.

Description

Technical Field

[0001] This utility model relates to the field of lens testing technology, and specifically to a semiconductor lens testing device. Background Technology

[0002] In the semiconductor manufacturing industry, lens inspection is a crucial step. The quality and performance of semiconductor lenses directly affect the performance and reliability of the entire semiconductor device. Traditional semiconductor lens inspection devices have some shortcomings, such as low inspection accuracy, complex operation, and low inspection efficiency.

[0003] To address the aforementioned issues, various semiconductor lens inspection devices have emerged in the prior art. However, these devices still have some drawbacks. For example, some inspection devices employ contact measurement methods, which can easily damage the lens surface, affecting the lens's performance and lifespan. Furthermore, some inspection devices involve cumbersome operation procedures, requiring specialized technicians to operate them, increasing inspection costs and time.

[0004] Furthermore, with the continuous development of semiconductor technology, the requirements for lens inspection are becoming increasingly stringent. Traditional inspection devices are no longer sufficient to meet the demands of modern semiconductor manufacturing in terms of inspection accuracy, speed, and automation. Therefore, there is an urgent need for a new type of semiconductor lens inspection device to improve inspection accuracy, simplify operation procedures, increase inspection efficiency, and adapt to the high requirements of modern semiconductor manufacturing.

[0005] In summary, the present invention aims to provide an improved semiconductor lens inspection device to solve the problems existing in the prior art and meet the high requirements of the semiconductor manufacturing industry for lens inspection. Utility Model Content

[0006] The purpose of this invention is to provide a semiconductor lens detection device to solve the problems mentioned in the background art.

[0007] To solve the above-mentioned technical problems, the technical solution adopted by this utility model is as follows:

[0008] A semiconductor lens inspection device includes an operating table, an adjustment mechanism on the surface of the operating table, a clamping mechanism on the surface of the adjustment mechanism, a support frame fixedly connected to one side of the operating table, and a red ultraviolet inspection lamp fixedly connected to one end of the support frame.

[0009] The adjustment mechanism includes a second motor, which is fixedly connected to the bottom of the operating table. A fourth gear is fixedly connected to the output end of the second motor. A third gear is meshed with one side of the fourth gear. A support column is fixedly connected to one end of the third gear. The support column is movably connected to the surface of the operating table.

[0010] A further improvement of this utility model is that: a movable sleeve is movably connected to the surface of the support column, an electric telescopic rod is fixedly connected to the surface of the movable sleeve, one end of the electric telescopic rod is fixedly connected to one end of the support column, a first motor is fixedly connected to the surface of the movable sleeve, and a second gear is fixedly connected to the output end of the first motor. When the semiconductor lens is being tested, the first motor drives the second gear to rotate, the second gear drives the first gear to rotate, and the first gear drives the rotating column to rotate.

[0011] A further improvement of this utility model is that: four connecting sleeves are fixedly connected to the surface of the movable sleeve, a rotating column is movably connected to the surface of the connecting sleeve, a first gear is fixedly connected to the surface of the rotating column, a second gear is meshed with one side of the first gear, the first gear drives the rotating column to rotate, the rotating column drives the clamping mechanism to rotate, thereby driving the semiconductor lens to flip, when detailed testing of the semiconductor lens is required.

[0012] A further improvement of the present invention is that the clamping mechanism includes a support base, one end of the rotating column is fixedly connected to the support base, a fixing block is fixedly connected to the surface of the support base, a mounting frame is fixedly connected to the surface of the fixing block, and a clamping member is provided on the surface of the mounting frame, and the clamping member is mounted on the mounting frame.

[0013] A further improvement of this utility model is that the clamping component includes a knob, which is rotatably installed in a mounting hole on the mounting bracket. A pointing groove is provided on one end face of the knob, and a limit rod is slidably installed inside the knob. A threaded groove is provided on the other end of the limit rod. The knob and the limit rod are fixed and limited to the mounting bracket by a nut. Only by first rotating the nut in the opposite direction a certain distance to loosen the limit rod can the angle of the clamping mechanism be adjusted by rotating the knob and the limit rod.

[0014] A further improvement of this utility model is that: a clamping plate is fixedly connected to one end of the knob, an anti-slip strip is fixedly connected to the surface of the clamping plate, a through hole is opened on the surface of the clamping plate, a spring is installed inside the through hole, a fixing plate is fixedly connected to both ends of the spring, a connecting rod is fixedly connected to one end of the fixing plate, the connecting rod passes through the through hole, and an adjusting plate is fixedly connected to one end of the connecting rod. After rotating a certain angle, the knob and the clamping mechanism as a whole can be limited by tightening the nut.

[0015] Due to the adoption of the above technical solution, the technological progress achieved by this utility model compared to the prior art is as follows:

[0016] 1. This utility model provides a semiconductor lens inspection device. A second motor is started, which drives a fourth gear to rotate. The fourth gear drives a third gear to rotate, and the third gear drives a support column to rotate on the operating table. This causes the clamping mechanism on the movable sleeve to rotate alternately under a red ultraviolet inspection lamp for inspection. When inspecting the semiconductor lens, a first motor drives a second gear to rotate, which in turn drives a first gear to rotate. The first gear drives a rotating column to rotate, which in turn drives the clamping mechanism to rotate, thus causing the semiconductor lens to flip. When a detailed inspection of the semiconductor lens is required, an electric telescopic rod drives the movable sleeve on the support column to rise and fall, thereby causing the semiconductor lens on the clamping mechanism to rise and fall. This allows for flexible and more accurate inspection of the semiconductor lens.

[0017] 2. This utility model provides a semiconductor lens inspection device. The lens is placed between two sets of clamping plates. The anti-slip strip fixedly installed on one side of the clamping plate can effectively prevent the lens from falling off during processing, making it easier to use during grinding. By adjusting the structure, when clamping lenses of different thicknesses, it is only necessary to pull the adjusting plates on both sides, thereby pulling the fixed plate through the connecting rod, so that the spring is stretched inside the through hole, and then released. The spring retracts and resets, which can assist in clamping lenses of different thicknesses, solving the problem of high lens breakage rate caused by traditional rigid clamps. Attached Figure Description

[0018] Figure 1 This is a schematic diagram of the overall structure of this utility model;

[0019] Figure 2 This is a schematic diagram of the adjustment mechanism of this utility model;

[0020] Figure 3 This is a schematic diagram of the clamping mechanism of this utility model;

[0021] Figure 4This is a schematic diagram of the structure of the clamping component of this utility model.

[0022] In the diagram: 1. Operating table; 2. Adjustment mechanism; 20. Support column; 21. Electric telescopic rod; 22. Movable sleeve; 23. Connecting sleeve; 24. Rotating column; 25. First gear; 27. Second gear; 28. First motor; 29. ​​Third gear; 291. Fourth gear; 292. Second motor; 3. Clamping mechanism; 30. Support base; 31. Fixing block; 32. Mounting bracket; 33. Clamping component; 330. Knob; 331. Pointing groove; 332. Limiting rod; 334. Clamping plate; 335. Anti-slip strip; 336. Through hole; 337. Adjustment plate; 338. Connecting rod; 339. Spring; 3391. Fixing plate; 4. Support frame; 5. Red ultraviolet inspection lamp. Detailed Implementation

[0023] The present invention will be further described in detail below with reference to embodiments:

[0024] Example 1

[0025] like Figure 1-4 As shown, this utility model provides a semiconductor lens inspection device, including an operating table 1. An adjustment mechanism 2 is provided on the surface of the operating table 1, and a clamping mechanism 3 is provided on the surface of the adjustment mechanism 2. A support frame 4 is fixedly connected to one side of the operating table 1, and a red ultraviolet inspection lamp 5 is fixedly connected to one end of the support frame 4. The adjustment mechanism 2 includes a second motor 292, which is fixedly connected to the bottom of the operating table 1. A fourth gear 291 is fixedly connected to the output end of the second motor 292. A third gear 29 is meshed with one side of the fourth gear 291, and a support column 20 is fixedly connected to one end of the third gear 29. The support column 20 is movably connected to the surface of the operating table 1. The surface of the support column 20 is movably connected to the movable sleeve 22. The surface of the movable sleeve 22 is fixedly connected to the electric telescopic rod 21. One end of the electric telescopic rod 21 is fixedly connected to one end of the support column 20. The surface of the movable sleeve 22 is fixedly connected to the first motor 28. The output end of the first motor 28 is fixedly connected to the second gear 27. The surface of the movable sleeve 22 is fixedly connected to the four connecting sleeves 23. The surface of the connecting sleeves 23 is movably connected to the rotating column 24. The surface of the rotating column 24 is fixedly connected to the first gear 25. One side of the first gear 25 is meshed with the second gear 27.

[0026] Specifically, the second motor 292 is started, which drives the fourth gear 291 to rotate. The fourth gear 291 drives the third gear 29 to rotate, and the third gear 29 drives the support column 20 to rotate on the operating table 1. This causes the clamping mechanism 3 on the movable sleeve 22 to rotate alternately under the red and ultraviolet inspection lamp 5 for testing. When testing the semiconductor lens, the first motor 28 drives the second gear 27 to rotate, which in turn drives the first gear 25 to rotate. The first gear 25 drives the rotating column 24 to rotate, which in turn drives the clamping mechanism 3 to rotate, thus causing the semiconductor lens to flip. When a detailed test of the semiconductor lens is required, the electric telescopic rod 21 drives the movable sleeve 22 to rise and fall on the support column 20, thereby causing the semiconductor lens on the clamping mechanism 3 to rise and fall.

[0027] Example 2

[0028] like Figure 1-4 As shown, based on Embodiment 1, this utility model provides a technical solution: Preferably, the clamping mechanism 3 includes a support base 30, one end of the rotating column 24 is fixedly connected to the support base 30, a fixing block 31 is fixedly connected to the surface of the support base 30, a mounting frame 32 is fixedly connected to the surface of the fixing block 31, a clamping member 33 is provided on the surface of the mounting frame 32, the clamping member 33 includes a knob 330, the knob 330 is rotatably installed in the mounting hole on the mounting frame 32, a guide groove 331 is opened on one end face of the knob 330, and a limit rod 332 is slidably installed inside the knob 330. The other end is provided with a threaded groove. The knob 330 and the limiting rod 332 are fixed and limited by the nut and the mounting bracket 32. One end of the knob 330 is fixedly connected to the clamping plate 334. The surface of the clamping plate 334 is fixedly connected to the anti-slip strip 335. The surface of the clamping plate 334 is provided with a through hole 336. A spring 339 is provided inside the through hole 336. The two ends of the spring 339 are fixedly connected to the fixing plate 3391. One end of the fixing plate 3391 is fixedly connected to the connecting rod 338. The connecting rod 338 is inserted into the through hole 336. One end of the connecting rod 338 is fixedly connected to the adjusting plate 337.

[0029] Specifically, the lens needs to be placed between two sets of clamping plates 334. The anti-slip strip 335 fixedly installed on one side of the clamping plate 334 effectively prevents the lens from falling off during processing, making it easier to use during grinding. By adjusting the structure, when clamping lenses of different thicknesses, simply pull the adjusting plates 337 on both sides, which in turn pulls the fixing plate 3391 via the connecting rod 338. This stretches the spring 339 inside the through hole 336, and then releases it. The spring 339 retracts and resets, assisting in clamping lenses of different thicknesses, ensuring the stability of the device during use. It can clamp lenses of various thicknesses, broadening its applicability. The angle of the semiconductor lens held in the clamp is adjusted. To adjust, simply turn the nut in the opposite direction a certain distance to loosen the limiting rod 332. Then, the angle of the clamping mechanism 3 can be adjusted by rotating the knob 330 and the limiting rod 332. After rotating a certain angle, the knob 330 and the clamping mechanism 3 can be limited by tightening the nut. The other clamping mechanisms 3 are adjusted sequentially according to the direction of the pointing groove 331 to ensure the accuracy and uniformity of the angle adjustment. Through the cooperation between the above structures, this new invention not only facilitates the clamping of lenses of different thicknesses but also allows for the adjustment and fixing of their angles, making it more flexible and practical for lens inspection.

[0030] The working principle of this semiconductor lens detection device will be explained in detail below.

[0031] like Figure 1-4As shown, the second motor 292 is activated, which drives the fourth gear 291 to rotate. The fourth gear 291 then drives the third gear 29 to rotate, which in turn drives the support column 20 to rotate on the operating table 1. This causes the clamping mechanism 3 on the movable sleeve 22 to rotate alternately under the red and ultraviolet inspection lamp 5 for testing. When testing the semiconductor lens, the first motor 28 drives the second gear 27 to rotate, which in turn drives the first gear 25 to rotate. The first gear 25 then drives the rotating column 24 to rotate, which in turn drives the clamping mechanism 3 to rotate, thus causing the semiconductor lens to flip. When a detailed test of the semiconductor lens is required, the electric extension... The retracting rod 21 drives the movable sleeve 22 to rise and fall on the support column 20, thereby driving the semiconductor lens on the clamping mechanism 3 to rise and fall. The lens needs to be placed between two sets of clamping plates 334. The anti-slip strip 335 fixedly installed on one side of the clamping plate 334 can effectively prevent the lens from falling off during processing, making it easier to use during grinding. By adjusting the structure, when clamping lenses of different thicknesses, it is only necessary to pull the adjusting plates 337 on both sides, thereby pulling the fixed plate 3391 through the connecting rod 338, so that the spring 339 is stretched inside the through hole 336, and then released. The spring 339 retracts and resets, thus assisting in clamping lenses of different thicknesses.

[0032] The present invention has been described in detail above. However, modifications or improvements can be made to it, which will be obvious to those skilled in the art. Therefore, any modifications or improvements that do not depart from the spirit of the present invention are within the protection scope of the present invention.

Claims

1. A semiconductor lens inspection apparatus comprising an operating table (1), characterized in that: An adjustment mechanism (2) is provided on the surface of the operating table (1), and a clamping mechanism (3) is provided on the surface of the adjustment mechanism (2). A support frame (4) is fixedly connected to one side of the operating table (1), and a red ultraviolet inspection lamp (5) is fixedly connected to one end of the support frame (4). The adjustment mechanism (2) includes a second motor (292), which is fixedly connected to the bottom of the operating table (1). The output end of the second motor (292) is fixedly connected to a fourth gear (291). A third gear (29) is meshed with one side of the fourth gear (291). A support column (20) is fixedly connected to one end of the third gear (29). The support column (20) is movably connected to the surface of the operating table (1).

2. The apparatus of claim 1, wherein: The surface of the support column (20) is movably connected to a movable sleeve (22), the surface of the movable sleeve (22) is fixedly connected to an electric telescopic rod (21), one end of the electric telescopic rod (21) is fixedly connected to one end of the support column (20), the surface of the movable sleeve (22) is fixedly connected to a first motor (28), and the output end of the first motor (28) is fixedly connected to a second gear (27).

3. The apparatus of claim 2, wherein: The surface of the movable sleeve (22) is fixedly connected to four connecting sleeves (23), the surface of the connecting sleeve (23) is movably connected to a rotating column (24), the surface of the rotating column (24) is fixedly connected to a first gear (25), and a second gear (27) is meshed with one side of the first gear (25).

4. The apparatus of claim 3, wherein: The clamping mechanism (3) includes a support base (30), one end of the rotating column (24) is fixedly connected to the support base (30), a fixing block (31) is fixedly connected to the surface of the support base (30), a mounting bracket (32) is fixedly connected to the surface of the fixing block (31), and a clamping member (33) is provided on the surface of the mounting bracket (32).

5. The apparatus of claim 4, wherein: The clamping member (33) includes a knob (330), which is rotatably mounted in a mounting hole on the mounting bracket (32). A guide groove (331) is provided on one end face of the knob (330). A limit rod (332) is slidably mounted inside the knob (330). A threaded groove is provided on the other end of the limit rod (332). The knob (330) and the limit rod (332) are both fixed and limited to the mounting bracket (32) by nuts.

6. The apparatus of claim 5, wherein: One end of the knob (330) is fixedly connected to a clamping plate (334), and an anti-slip strip (335) is fixedly connected to the surface of the clamping plate (334). A through hole (336) is opened on the surface of the clamping plate (334), and a spring (339) is installed inside the through hole (336). A fixing plate (3391) is fixedly connected to both ends of the spring (339), and a connecting rod (338) is fixedly connected to one end of the fixing plate (3391). The connecting rod (338) is inserted into the through hole (336), and an adjusting plate (337) is fixedly connected to one end of the connecting rod (338).

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