Double-sided coating equipment

Abstract

The utility model provides double-sided coating equipment which comprises a cavity, a vacuum pump arranged outside the cavity, a winding device and a sputtering device, the winding device and the sputtering device are arranged inside the cavity, the winding device comprises an unwinding mechanism, a winding mechanism, a guide roller assembly, a first coating drum and a second coating drum, and the guide roller assembly, the first coating drum and the second coating drum are located on a base material conveying path between the unwinding mechanism and the winding mechanism. A part of the guide roller assembly is located on a base material conveying path between the first coating drum and the second coating drum so as to turn over the to-be-coated face of a base material, the sputtering device comprises a first sputtering assembly corresponding to the first coating drum and a second sputtering assembly corresponding to the second coating drum, and the cavity is provided with a concave part used for containing a vacuum pump. And the vacuum pump can be mounted in an embedded manner, so that the cavity volume is reduced, the vacuum pump can be mounted without additionally increasing the peripheral size of the coating equipment, and the coating equipment is more suitable for small-area plants.

Description

Technical Field

[0001] This utility model belongs to the field of coating equipment technology, and more specifically, it relates to a double-sided coating equipment. Background Technology

[0002] Roll-on coating equipment is a device that coats the surface of a substrate, which is a roll of material, in a vacuum chamber, thereby preparing a thin film with certain functions on the surface of the substrate.

[0003] In the prior art, there are, for example, roll-to-roll double-sided coating equipment that can coat both sides of a substrate. This equipment mainly includes a cavity, a vacuum pump, and a winding device and a sputtering device located within the cavity. The winding device includes a first coating drum and a second coating drum, and the sputtering device includes a first sputtering assembly and a second sputtering assembly. The first coating drum and the first sputtering assembly work together to coat the front side of the substrate, and the second coating drum and the second sputtering assembly work together to coat the back side of the substrate.

[0004] However, in the existing roll-to-roll double-sided coating equipment, the cavity volume is relatively large, and the vacuum pump is usually installed on the side of the cavity, which further increases the volume of the coating equipment. Utility Model Content

[0005] The purpose of this invention is to provide a double-sided coating equipment that can reduce the size of the coating equipment.

[0006] To achieve the above objectives, the technical solution adopted by this utility model is as follows:

[0007] This utility model provides a double-sided coating equipment, including a cavity, a vacuum pump disposed outside the cavity, a winding device and a sputtering device disposed inside the cavity. The winding device includes an unwinding mechanism, a winding mechanism, a guide roller assembly located on the substrate transport path between the unwinding mechanism and the winding mechanism, a first coating drum and a second coating drum. Part of the guide roller assembly is located on the substrate transport path between the first coating drum and the second coating drum to flip the substrate surface to be coated. The sputtering device includes a first sputtering component corresponding to the first coating drum and a second sputtering component corresponding to the second coating drum. The cavity is characterized by having a recess for placing the vacuum pump.

[0008] Furthermore, the cavity includes a first process cavity, a second process cavity arranged vertically to the first process cavity, a transition cavity communicating with the first and second process cavities, a loading cavity parallel to the first process cavity, and a unloading cavity parallel to the second process cavity; the first coating drum and the first sputtering assembly are located in the first process cavity, the second coating drum and the second sputtering assembly are located in the second process cavity, a portion of the guide roller assembly is located in the transition cavity, the unwinding mechanism is located in the loading cavity, and the winding mechanism is located in the unloading cavity; the first and second process cavities are provided with recessed portions.

[0009] Furthermore, the first process cavity has a first lower recess on the side near the second process cavity, and the second process cavity has a second upper recess on the side near the first process cavity and a second lower recess on the side away from the second process cavity.

[0010] Furthermore, an inflation sealing device is provided between the first process chamber and the loading chamber, and between the second process chamber and the unloading chamber. The inflation sealing device includes a mounting plate with a slit, an inflation sealing strip set inside the slit, and an air pipe channel communicating with the inflation sealing strip. The slit remains unobstructed after the inflation sealing strip is deflated to allow the substrate to pass through, and the slit is blocked after the inflation sealing strip is inflated to achieve a seal.

[0011] Furthermore, guide structures are provided at both ends of the slit along its length direction. The guide structures are used to guide the inflatable sealing strip to expand along the width direction of the slit when it is inflated.

[0012] Furthermore, the mounting plate includes a first mounting plate and a second mounting plate arranged symmetrically, the slit is formed by the first slit of the first mounting plate and the second slit of the second mounting plate, and the inflatable sealing strip includes a first inflatable sealing strip disposed inside the first slit and a second inflatable sealing strip disposed inside the second slit.

[0013] Furthermore, it also includes a laser cutting device, placed inside the feeding chamber and located on the substrate transport path between the second coating drum and the winding mechanism to cut off the edge portion of the substrate.

[0014] Furthermore, the first sputtering assembly includes a plurality of first sputtering sources uniformly distributed along the circumference of the first coating drum, wherein the first or last first sputtering source among the plurality of first sputtering sources is located in the first independent chamber, and the second sputtering assembly includes a plurality of second sputtering sources uniformly distributed along the circumference of the second coating drum, wherein the first or last second sputtering source among the plurality of second sputtering sources is located in the second independent chamber.

[0015] Furthermore, the first independent chamber is provided with a first arc-shaped baffle on the side near the first coating drum, and the second independent chamber is provided with a second arc-shaped baffle on the side near the first coating drum. The first arc-shaped baffle and the second arc-shaped baffle are provided with openings for sputtered particles to pass through.

[0016] Furthermore, cooling structures are provided inside the first and second coating drums.

[0017] Compared with the prior art, the double-sided coating equipment provided by this utility model has one of the following beneficial effects:

[0018] 1. The cavity has a recessed section, which allows for the embedded installation of a vacuum pump. This reduces the cavity volume and eliminates the need to increase the external dimensions of the coating equipment to install the vacuum pump, making it more suitable for small-area factories.

[0019] 2. By installing an air-filled sealing device between the feeding chamber, the unloading chamber and the process chamber to replace the gate valve, the cost of the opening and closing mechanism can be greatly reduced. The structure is simple and maintenance is convenient.

[0020] 3. By installing a laser cutting device inside the feeding chamber, the chance of atmospheric pollution to the substrate is reduced compared to cutting in an atmospheric environment. In addition, the integrated automated operation saves labor input. Attached Figure Description

[0021] To more clearly illustrate the technical solutions in the embodiments of this utility model, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0022] Figure 1 This is a schematic diagram of the double-sided coating equipment in this utility model;

[0023] Figure 2 This is a schematic diagram of the assembly of the air-filled sealing device and the side plate in this utility model;

[0024] Figure 3 for Figure 2 Enlarged view of point A in the middle;

[0025] Figure 4 This is a cross-sectional schematic diagram of the air-filled sealing device in this utility model;

[0026] The main markings in the attached figures are as follows:

[0027] 1. Substrate;

[0028] 21. First process chamber; 22. Second process chamber; 23. Transition chamber; 24. Loading chamber; 25. Unloading chamber; 26. Side plate;

[0029] 211. First lower recess; 221. Second upper recess; 222. Second lower recess;

[0030] 31. First coating drum; 32. Second coating drum;

[0031] 41. Mounting plate; 42. Inflatable sealing strip; 43. Air tube channel; 44. Guide structure;

[0032] 411. First mounting plate; 412. Second mounting plate; 421. First inflatable sealing strip; 422. Second inflatable sealing strip; 431. First air tube channel; 432. Second air tube channel;

[0033] 5. Laser cutting equipment;

[0034] 61. First sputtering source; 62. Second sputtering source; 63. First independent chamber; 64. Second independent chamber;

[0035] 611, First sputtering source; 612, Last sputtering source; 621, First sputtering source; 622, Last sputtering source; 631, First arc-shaped baffle; 641, Second arc-shaped baffle. Detailed Implementation

[0036] To make the technical problems, technical solutions, and beneficial effects of this utility model clearer, the present utility model will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the present utility model and are not intended to limit the present utility model.

[0037] Please refer to the following: Figures 1 to 4 The double-sided coating equipment provided by this utility model is used to coat both sides of a substrate 1. It mainly includes a cavity, a vacuum pump disposed outside the cavity, a winding device disposed inside the cavity, and a sputtering device.

[0038] The winding device includes an unwinding mechanism, a winding mechanism, and guide roller assemblies located on the substrate transport path between the unwinding mechanism and the winding mechanism, a first coating drum 31, and a second coating drum 32. A portion of the guide roller assembly is located on the substrate transport path between the first coating drum 31 and the second coating drum 32 to flip the substrate 1 so that the surface to be coated is rotated. The sputtering device includes a first sputtering assembly corresponding to the first coating drum 31 and a second sputtering assembly corresponding to the second coating drum 32. The first coating drum 31, in conjunction with the first sputtering assembly, can coat the front side of the substrate 1. After coating the front side of the substrate 1, a portion of the guide roller assembly turns the back side of the substrate 1 outwards, and then the second coating drum 32, in conjunction with the second sputtering assembly, coats the back side of the substrate 1.

[0039] The cavity includes a recess for housing a vacuum pump. This design allows for embedded installation of the vacuum pump, reducing the cavity volume and eliminating the need to increase the external dimensions of the coating equipment to accommodate the pump, making it more suitable for small-area factories.

[0040] Furthermore, this invention can further reduce the volume of the coating equipment by combining the cavity layout and the number of coating drums.

[0041] like Figure 1As shown, the cavity includes a first process cavity 21, a second process cavity 22 arranged vertically to the first process cavity 21, a transition cavity 23 communicating with the first and second process cavities 21 and 22, a loading cavity 24 parallel to the first process cavity 21, and a unloading cavity 25 parallel to the second process cavity 22. A first coating drum 31 and a first sputtering assembly are located within the first process cavity 21, a second coating drum 32 and a second sputtering assembly are located within the second process cavity 22, a portion of the guide roller assembly is located within the transition cavity 23, an unwinding mechanism is located within the loading cavity 24, and a winding mechanism is located within the unloading cavity 25. The first and second process cavities 21 and 22 are provided with recessed portions. This design optimizes the cavity layout, making the overall structure of the coating equipment more compact, thereby miniaturizing the overall coating equipment. Simultaneously, the corresponding loading cavity 24 and unloading cavity 25 are configured for the unwinding and winding mechanisms, enabling loading and unloading without disrupting the vacuum in the first and second process cavities.

[0042] like Figure 1 As shown, the first process cavity 21 has a first lower recess 211 on the side near the second process cavity 22, and the second process cavity 22 has a second upper recess 221 on the side near the first process cavity 21 and a second lower recess 222 on the side away from the second process cavity 22.

[0043] It should be understood that the first lower recess 211 of the first process chamber 21 and the second upper recess 221 of the second process chamber 22 cooperate to form a large-sized recess, which can be embedded to install a larger number of vacuum pumps, while the second lower recess 222 of the second process chamber 22 can be embedded to install a smaller number of vacuum pumps. This design can make greater use of the height space of the equipment, reduce the volume of the coating equipment to a certain extent, and thus make the overall coating equipment more compact.

[0044] like Figure 1 As shown, two first coating drums 31 are arranged side-by-side in the first process chamber 21, and two second coating drums 32 are arranged side-by-side in the second process chamber 22. A first lower recess 211 has two first inclined surfaces corresponding to the two first coating drums 31, and a second lower recess 222 has two second inclined surfaces corresponding to the two second coating drums 32. This design allows for multiple coating drums within the corresponding process chambers for coating the front or back of the substrate 1, which can reduce the diameter of the coating drums to a certain extent, thereby miniaturizing the overall coating equipment. Simultaneously, the inclined surfaces corresponding to the coating drums in each process chamber can guide the air around the coating drums towards the nearest vacuum pump, improving vacuum efficiency and increasing the vacuum level within the process chamber.

[0045] In addition, it should be noted that the cavity in the double-sided coating equipment can be composed of multiple sub-cavities such as the loading cavity 24, the unloading cavity 25, two process cavities (the first process cavity 21 and the second process cavity 22), and the transition cavity 23. The cavity is made of stainless steel and is also equipped with cavity doors corresponding to each sub-cavity to facilitate loading and unloading. The cavity door flanges are equipped with sealing rings, and a negative pressure space is formed after the cavity door is closed.

[0046] In addition, it should be noted that the vacuum pumps located outside the cavity in the double-sided coating equipment include a backing pump for coarse evacuation and a molecular pump for fine evacuation. The backing pump can be composed of a Roots pump and a rotary vane pump, and the molecular pump can be used in conjunction with cryogenic technology to remove water vapor released by condensed organic materials / sputtered materials.

[0047] Furthermore, it should be noted that the winding device in the double-sided coating equipment can be composed of an unwinding roller, a rewinding roller, multiple coating drums, a guide roller assembly, a tension measurement and control mechanism, and a coating main roller speed control mechanism. The guide roller assembly can be divided into five parts: the first part is located in the feeding chamber 24, the second part is located in the first process chamber 21, the third part is located in the transition chamber 23, the fourth part is located in the second process chamber 22, and the fifth part is located in the unloading chamber 25. Each part of the guide roller assembly consists of one or more combinations of guide rollers, tension rollers, flattening rollers, olive rollers, and auxiliary cooling rollers, and is driven by a motor to transport the substrate 1. The number of coating drums can be set according to actual needs. Taking four coating drums as an example, two coating drums are placed in a group within one process chamber. The coating drums are equipped with a cooling structure to reduce the temperature of the substrate 1 and prevent high-temperature damage.

[0048] Furthermore, existing technologies typically employ gate valves between adjacent sub-cavities. Opening the gate valve allows the substrate 1 to pass through, while closing it achieves a seal. However, gate valves are costly. In contrast, this invention uses an inflatable sealing device to replace the gate valve, significantly reducing the cost of the opening and closing mechanism. It also features a simple structure and convenient maintenance.

[0049] like Figures 2 to 4 As shown, an inflation sealing device is provided between the first process chamber 21 and the loading chamber 24, and between the second process chamber 22 and the unloading chamber 25. The inflation sealing device includes a mounting plate 41 with a slit, an inflation sealing strip 42 disposed inside the slit, and an air pipe channel 43 communicating with the inflation sealing strip 42. The slit remains unobstructed after the inflation sealing strip 42 is deflated to allow the substrate 1 to pass through. The slit is blocked after the inflation sealing strip 42 is inflated to achieve a seal.

[0050] It should be noted that the first process chamber 21 and the loading chamber 24, and the second process chamber 22 and the unloading chamber 25 can be separated by a side plate 26 with a window, and the inflation sealing device is installed on the side plate 26. In addition, the inflation sealing device can have one or two inflation sealing strips 42, that is, the inflation sealing strips 42 can be installed on one or both sides of the slit inside the mounting plate 41.

[0051] Preferably, the inflatable sealing device includes a mounting plate 41, an inflatable sealing strip 42, and an air passage 43. The mounting plate 41 is fixed to the window of the side plate 26 and includes a first mounting plate 411 and a second mounting plate 412 symmetrically arranged, with a first slit in the first mounting plate 411 corresponding to a second slit in the second mounting plate 412. The inflatable sealing strip 42 includes a first inflatable sealing strip 421 disposed inside the first slit and a second inflatable sealing strip 422 disposed inside the second slit. The air passage 43 includes a first air passage 431 disposed inside the side plate 26 and communicating with the first inflatable sealing strip 421, and a second air passage 432 disposed inside the side plate 26 and communicating with the second inflatable sealing strip 422. In practical applications, gas enters the two inflatable sealing strips 42 through the two air passages 43, causing the two inflatable sealing strips 42 to expand and seal the slits, thereby achieving a seal; when the gas is discharged, the two inflatable sealing strips 42 contract, allowing the substrate 1 to pass through the slits again.

[0052] like Figure 3 As shown, guide structures 44 are provided at both ends of the slit along its length. These guide structures 44 guide the inflatable sealing strip 42 to expand along the width of the slit during inflation. The guide structure 44 can be, but is not limited to, a guide arc surface, which curves towards the center of the slit. This design allows the guide structure 44 to guide the inflatable sealing strip 42 to quickly seal the slit during inflation, improving the sealing effect.

[0053] Furthermore, in existing technologies, a coating device is typically used to coat both sides of the substrate 1, followed by a secondary cutting process in an atmospheric environment. In contrast, this invention employs a laser cutting device 5 to remove and collect the uneven edge portions on both sides of the coated substrate 1 before winding it up.

[0054] like Figure 1 As shown, the double-sided coating equipment also includes a laser cutting device 5, placed inside the unloading chamber 25 and located on the substrate transport path between the second coating drum 32 and the winding mechanism to cut off the edge portion of the substrate 1. After double-sided coating is completed, the substrate 1 enters the unloading chamber 25, is cut by the laser cutting device 5, and then wound up. This design reduces the probability of atmospheric pollution of the substrate 1. In addition, it integrates automated operation, saves labor input, and ensures that all substrates 1 exiting the chamber are qualified products, eliminating the need for secondary processing to remove defective products from both sides.

[0055] In addition, the double-sided coating equipment provided by this utility model can also improve the film quality of the substrate 1.

[0056] like Figure 1 As shown, the first sputtering assembly includes a plurality of first sputtering sources 61 uniformly distributed circumferentially along the first coating drum 31, wherein the first first sputtering source 611 or the last first sputtering source 612 among the plurality of first sputtering sources 61 is located in the first independent chamber 63. The second sputtering assembly includes a plurality of second sputtering sources 62 uniformly distributed circumferentially along the second coating drum 32, wherein the first second sputtering source 621 or the last second sputtering source 622 among the plurality of second sputtering sources 62 is located in the second independent chamber 64.

[0057] It should be noted that the number of the first sputtering source 61 and the second sputtering source 62 can be set according to actual needs. Taking an example where there are 5 first sputtering sources 61 and 5 second sputtering sources 62, and 2 first coating drums 31 and 2 second coating drums 32, for the first coating drum 31 near the loading chamber 24, the first first sputtering source 611 on its periphery is located in the first independent chamber 63, mainly to enhance the adhesion between sputtered particles and substrate 1; for the first coating drum 31 near the transition chamber 23, the last first sputtering source 612 on its periphery is located in the first independent chamber 63, mainly to enhance the protection of substrate 1 after coating; similarly, for the second coating drum 32 near the transition chamber 23, the first second sputtering source 621 on its periphery is located in the second independent chamber 64, mainly to enhance the adhesion between sputtered particles and substrate 1; for the second coating drum 32 near the unloading chamber 25, the last second sputtering source 622 on its periphery is located in the second independent chamber 64, mainly to enhance the protection of substrate 1 after coating. This results in surface treatment processes on each side of the substrate 1 before and after coating, effectively improving the adhesion between the film layer and the substrate 1.

[0058] The first sputtering source 611, the last sputtering source 612, the first second sputtering source 621, and the last second sputtering source 622 all use planar targets. All other first sputtering sources 61 and second sputtering sources 62 use a set of rotating targets, with two rotating targets per set. Each set of rotating targets is driven individually by a micro-motor to ensure uniform sputtering. The controller is equipped with a digital display of the transmission speed. A DC pulse power supply is applied, which features high power, high current and voltage stability, and automatic arc suppression to reduce abnormal target discharge. The uniformity of the film layer on the substrate 1 can be improved by setting appropriate sputtering parameters, including sputtering power, gas flow rate, and zone uniformity. Of course, in other optional embodiments, all first sputtering sources 61 and second sputtering sources 62 can be set to use either planar or rotating targets; that is, the type of the first sputtering sources 61 and second sputtering sources 62 (planar or rotating targets) can be set according to actual needs.

[0059] like Figure 1 As shown, the first independent chamber 63 has a first arc-shaped baffle 631 on the side near the first coating drum 31, and the second independent chamber 64 has a second arc-shaped baffle 641 on the side near the first coating drum 31. The first arc-shaped baffle 631 and the second arc-shaped baffle 641 have openings for sputtered particles to pass through. This design ensures that the arc-shaped baffles have an arc that matches the shape of the coating drum, and the distance between them is small, thereby reducing oxygen leakage from the independent chambers.

[0060] Each of the aforementioned independent chambers (first independent chamber 63 and second independent chamber 64) is enclosed by multiple isolation baffles. A molecular pump can also be installed inside the independent chamber to promptly remove oxygen from the independent chamber, further preventing oxygen leakage and effectively isolating oxygen to avoid target poisoning.

[0061] In addition, the double-sided coating equipment provided by this utility model can also be equipped with an ion cleaning device and / or a baking device on the substrate transport path.

[0062] like Figures 1 to 4 As shown, taking the preferred double-sided coating equipment of this utility model as an example, its process flow is as follows: feeding---front baking---front ion cleaning---front coating 1---front coating 2---turning---reverse baking---reverse ion cleaning---reverse coating 1---reverse coating 2---laser edge cutting---unloading and winding.

[0063] The overall structure of this double-sided coating equipment is compact. Its cavity includes a first process cavity 21 and a second process cavity 22 arranged vertically. The bottom surface of the first process cavity 21 is concave, and the top surface and bottom surface of the second process cavity 22 are concave. Vacuum pumps can be embedded in these two places, which reduces the cavity volume and eliminates the need to increase the external dimensions of the coating equipment to install the vacuum pump, making it more suitable for small-area factories.

[0064] In addition, to improve the efficiency of loading and unloading, an inflation sealing device is installed between the loading chamber 24 and the first process chamber 21, and between the unloading chamber 25 and the second process chamber 22. The inflation sealing device includes a mounting plate 41 with a slit, an inflation sealing strip 42, and an air pipe channel 43. When the inflation sealing strip 42 is deflated, the slit allows the substrate 1 to pass through. When the loading chamber 24 and the unloading chamber 25 need to be opened during loading and unloading, gas is injected into the inflation sealing strip 42 to seal and isolate the process chambers. This ensures that the process chambers remain in a vacuum state when the vacuum in the loading chamber 24 and the unloading chamber 25 is broken, thus eliminating the need to repeatedly evacuate the process chambers and improving work efficiency.

[0065] In addition, online laser cutting is performed in the feeding chamber 25, and the unevenly coated edge parts on both sides of the substrate 1 are cut off and collected before winding. Compared with coating the substrate 1 and then performing secondary cutting in the atmospheric environment, the probability of atmospheric pollution to the substrate 1 is reduced. In addition, the integrated automated operation saves labor input.

[0066] The above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. A double-sided coating apparatus comprising a chamber, a vacuum pump disposed outside the chamber, a winding device disposed inside the chamber, the winding device comprising an unwinding mechanism, a winding-up mechanism, and a set of guide rollers located on a substrate transmission path between the unwinding mechanism and the winding-up mechanism, a first coating drum, and a second coating drum, part of the set of guide rollers being located on the substrate transmission path between the first coating drum and the second coating drum to turn over the side of the substrate to be coated, and a sputtering device comprising a first sputtering assembly corresponding to the first coating drum and a second sputtering assembly corresponding to the second coating drum, characterized in that, The cavity is provided with a recess for housing the vacuum pump.

2. The dual-side plating apparatus of claim 1, wherein The cavity includes a first process cavity, a second process cavity arranged vertically to the first process cavity, a transition cavity communicating with the first process cavity and the second process cavity, a loading cavity parallel to the first process cavity, and a unloading cavity parallel to the second process cavity. The first coating drum and the first sputtering assembly are located in the first process cavity, the second coating drum and the second sputtering assembly are located in the second process cavity, a portion of the guide roller assembly is located in the transition cavity, the unwinding mechanism is located in the loading cavity, and the winding mechanism is located in the unloading cavity; the first process cavity and the second process cavity are provided with the recessed portion.

3. The dual-side plating apparatus according to claim 2, wherein The first process cavity has a first lower recess on the side near the second process cavity, and the second process cavity has a second upper recess on the side near the first process cavity and a second lower recess on the side away from the second process cavity.

4. The double-sided coating equipment as described in claim 2, characterized in that, An inflation sealing device is provided between the first process chamber and the loading chamber, and between the second process chamber and the unloading chamber. The inflation sealing device includes a mounting plate with a slit, an inflation sealing strip disposed inside the slit, and an air pipe channel communicating with the inflation sealing strip. The slit remains unobstructed after the inflation sealing strip is deflated to allow the substrate to pass through, and the slit is blocked after the inflation sealing strip is inflated to achieve a seal.

5. The dual-side plating apparatus according to claim 4, wherein The slit is provided with guide structures at both ends along its length direction, and the guide structures are used to guide the inflatable sealing strip to expand along the width direction of the slit when it is inflated.

6. The dual-side plating apparatus according to claim 4, wherein The mounting plate includes a first mounting plate and a second mounting plate arranged symmetrically. The slit is formed by the cooperation of a first slit of the first mounting plate and a second slit of the second mounting plate. The inflatable sealing strip includes a first inflatable sealing strip disposed inside the first slit and a second inflatable sealing strip disposed inside the second slit.

7. The dual-side plating apparatus according to claim 2, wherein It also includes a laser cutting device, which is placed inside the feeding chamber and located on the substrate transport path between the second coating drum and the winding mechanism to cut off the edge portion of the substrate.

8. The double-sided coating apparatus according to any one of claims 1 to 7, wherein The first sputtering assembly includes a plurality of first sputtering sources uniformly distributed along the circumference of the first coating drum, wherein the first or last first sputtering source among the plurality of first sputtering sources is located in a first independent chamber. The second sputtering assembly includes a plurality of second sputtering sources uniformly distributed along the circumference of the second coating drum, wherein the first or last second sputtering source among the plurality of second sputtering sources is located in a second independent chamber.

9. The dual-side plating apparatus according to claim 8, wherein The first independent chamber has a first arc-shaped baffle on the side near the first coating drum, and the second independent chamber has a second arc-shaped baffle on the side near the first coating drum. The first arc-shaped baffle and the second arc-shaped baffle have openings for sputtered particles to pass through.

10. The double-sided coating apparatus according to any one of claims 1 to 7, wherein Cooling structures are provided inside the first coating drum and the second coating drum.

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