Self-adjusting composite coating deposition equipment

Abstract

The utility model relates to an automatic adjusting composite coating deposition device which comprises a furnace body, an air inlet pipe is vertically installed at the top of the furnace body in a penetrating mode, a hollow end is installed at the bottom of the air inlet pipe, and a plurality of first air outlet holes are formed in the upper surface of the hollow end in an annular array mode. A gas gathering cover is installed on the top wall of the furnace body, and second gas outlet holes are evenly formed in the lower surface of the gas gathering cover. A plurality of first electric push rods are installed on the top of the furnace body in an annular array mode, and the telescopic ends of the first electric push rods penetrate into the furnace body and are jointly provided with a drainage ring. Through the arrangement of the hollow end head and the gas gathering cover, after entering the hollow end head from the gas inlet pipe, gas is blown to the top wall of the furnace body through the first gas outlet holes, is diffused to the periphery along the top wall of the furnace body, finally gathers in the gas gathering cover and is discharged downwards through the second gas outlet holes; therefore, the gas can be uniformly dispersed in the furnace body and flows downwards, and the coating uniformity and the product quality are improved.

Description

Technical Field

[0001] This utility model relates to the field of coating deposition technology, specifically to an automatic adjustment composite coating deposition device. Background Technology

[0002] Coating deposition is a technical process that attaches specific materials to the surface of a substrate in the form of a thin film or coating. In physical vapor deposition, the material is vaporized and deposited onto the substrate, which can impart additional properties to the substrate material, such as enhanced wear resistance, corrosion resistance, electrical conductivity, and optical properties. There are various coating deposition methods.

[0003] Chinese patent CN217628611U discloses a chemical vapor deposition (CVD) apparatus for silicon carbide coating production. This apparatus features a guide ring tightly attached to the inner wall of the furnace body, which can be raised and lowered. Adjusting the height of the guide ring diverts and redirects the gas, ensuring it flows evenly onto the upper and side walls of the substrate for deposition. This design allows for deposition on substrates of various shapes within a single furnace, further expanding the application range of deposition furnaces and eliminating the need for custom furnace designs for different substrates, thus reducing economic costs.

[0004] In the aforementioned patent, gas enters the furnace body vertically through the first air inlet. The gas does not easily diffuse within the furnace body, resulting in more gas near the axis of the first air inlet and less gas near the inner wall of the furnace body. This uneven gas distribution can easily lead to poor coating uniformity and reduced product quality. Furthermore, the aforementioned patent can only process one product at a time, resulting in low efficiency. Utility Model Content

[0005] The purpose of this invention is to provide an automatic adjustment composite coating deposition device that effectively solves the problems mentioned in the background art.

[0006] To achieve the above objectives, the present invention provides the following technical solution.

[0007] An automatically adjustable composite coating deposition device includes a furnace body. An air inlet pipe is vertically installed through the top of the furnace body, and a hollow end is installed at the bottom of the air inlet pipe. Multiple first air outlets are arranged in a ring array on the upper surface of the hollow end. A gas-gathering hood is installed on the top wall of the furnace body, and second air outlets are evenly distributed on the lower surface of the gas-gathering hood. Multiple first electric push rods are arranged in a ring array on the top of the furnace body, and the telescopic ends of the first electric push rods penetrate into the furnace body and are collectively fitted with a flow-guiding ring. A carrier plate is installed inside the furnace body via a drive mechanism, and multiple heating platforms are arranged in a ring array on the upper surface of the carrier plate.

[0008] As can be seen, after the gas enters the hollow end through the inlet pipe, it is blown towards the top wall of the furnace body through the first outlet and diffuses outwards along the top wall of the furnace body. Finally, it gathers inside the gas gathering hood and is discharged downwards through the second outlet. This allows the gas to be evenly dispersed inside the furnace body and flow downwards, improving the uniformity of the coating and the quality of the product.

[0009] Furthermore, the drive mechanism includes a bottom cover located at the bottom of the furnace body, with a support shaft running through the interior of the bottom cover. The top of the support shaft is connected to the bottom of the carrier plate. A motor is mounted on the lower surface of the bottom cover via a fixed base. A drive gear is mounted on the end of the motor output shaft, and a driven gear is mounted on the outer surface of the support shaft. The driven gear meshes with the drive gear.

[0010] Furthermore, a sleeve is vertically installed inside the bottom cover, and a support shaft is rotatably installed inside the sleeve. A rotating shaft is connected to the bottom of the heating platform, and the end of the rotating shaft extends through to the bottom of the platform and is rotatably connected thereto. A transmission mechanism is provided between the sleeve and the rotating shaft.

[0011] Furthermore, the transmission mechanism includes a first transmission gear mounted on the outer surface of the sleeve, and a second transmission gear mounted on the bottom of multiple rotating shafts, the second transmission gear meshing with the first transmission gear.

[0012] Furthermore, brackets are installed on both sides of the outer surface of the furnace body, and a base plate is installed at the bottom of the two brackets. Two second electric push rods are installed on the upper surface of the base plate, and the ends of the telescopic ends of the second electric push rods are connected to the bottom of the bottom cover.

[0013] Furthermore, a groove is provided on the outer surface of the bracket along its height direction, and a slider is installed on the outer surface of the bottom cover, with the slider set inside the groove.

[0014] Furthermore, a receiving cavity is provided between the second air outlet and the inner wall of the furnace body, and the size of the receiving cavity is larger than the size of the diversion ring.

[0015] Furthermore, the air inlet pipe, hollow end cap, and gas-gathering hood are all coaxially aligned with the furnace body.

[0016] Compared with the prior art, the beneficial effects of this utility model are as follows.

[0017] 1. This utility model, through the setting of hollow end and gas-gathering hood, allows gas to enter the hollow end through the inlet pipe, be blown towards the top wall of the furnace body through the first outlet, and diffuse outwards along the top wall of the furnace body, finally converging inside the gas-gathering hood and being discharged downwards through the second outlet. This allows the gas to be evenly dispersed inside the furnace body and flow downwards, improving the uniformity of the coating and the quality of the product.

[0018] 2. By setting up a drive mechanism and a transmission mechanism, this utility model enables multiple heating platforms to rotate while the carrier plate rotates. The multiple heating platforms revolve and rotate simultaneously, so that gas can flow to the surface of multiple products at the same time, achieving the purpose of processing multiple products at once and improving production efficiency. Attached Figure Description

[0019] Figure 1 This is a three-dimensional schematic diagram of the overall structure of this utility model;

[0020] Figure 2 This is a front view cross-sectional structural diagram of the furnace body in this utility model;

[0021] Figure 3 for Figure 2 Enlarged schematic diagram of the structure at point A in the middle;

[0022] Figure 4 This is one of the structural schematic diagrams of the carrier plate in this utility model;

[0023] Figure 5 This is the second schematic diagram of the carrier plate in this utility model.

[0024] In the diagram: 100, furnace body; 101, air inlet pipe; 102, hollow end; 103, first air outlet; 104, gas concentrator; 105, second air outlet; 106, first electric push rod; 107, flow guide ring; 108, carrier plate; 109, heating platform; 200, drive mechanism; 201, bottom cover; 202, support shaft; 203, fixed base; 204, motor; 205, drive gear; 206, driven gear; 300, sleeve; 301, rotating shaft; 400, transmission mechanism; 401, first transmission gear; 402, second transmission gear; 500, bracket; 501, base plate; 502, second electric push rod; 600, slide groove; 601, slider; 700, receiving cavity. Detailed Implementation

[0025] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0026] In the description of the embodiments of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "connection" and "installation" should be interpreted broadly. For example, "connection" can be a detachable connection or a non-detachable connection; it can be a direct connection or an indirect connection through an intermediate medium. Furthermore, "connection" can be a direct connection or an indirect connection through an intermediate medium. "Fixed" means that the relative positional relationship remains unchanged after the connection. The directional terms mentioned in the embodiments of this utility model, such as "inner," "outer," "top," and "bottom," are only for reference to the directions in the accompanying drawings. Therefore, the directional terms used are for better and clearer explanation and understanding of the embodiments of this utility model, and are not intended to indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the embodiments of this utility model.

[0027] In this embodiment of the invention, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Therefore, a feature defined with "first" and "second" may explicitly or implicitly include one or more of that feature.

[0028] Please see Figures 1-5 This utility model provides an automatic adjustable composite coating deposition device, comprising a furnace body 100. An air inlet pipe 101 is vertically installed through the top of the furnace body 100, and a hollow end 102 is installed at the bottom of the air inlet pipe 101. Multiple first air outlets 103 are arranged in a ring array on the upper surface of the hollow end 102. A gas-gathering hood 104 is installed on the top wall of the furnace body 100, and second air outlets 105 are evenly distributed on the lower surface of the gas-gathering hood 104. Multiple first electric push rods 106 are arranged in a ring array on the top of the furnace body 100. The telescopic ends of the first electric push rods 106 penetrate into the furnace body 100 and are collectively mounted with a flow-guiding ring 107. A carrier plate 108 is installed inside the furnace body 100 via a drive mechanism 200, and multiple heating platforms 109 are arranged in a ring array on the upper surface of the carrier plate 108.

[0029] In use, the product is placed on the heating platform 109. Gas enters the hollow end 102 through the air inlet pipe 101, is blown towards the top wall of the furnace body 100 through the first air outlet 103, and diffuses outwards along the top wall of the furnace body 100. Finally, it gathers inside the gas gathering hood 104 and is discharged downwards through the second air outlet 105. This allows the gas to be evenly dispersed inside the furnace body 100 and flow downwards. Then, the drive mechanism 200 drives the carrier plate 108 to rotate, causing multiple heating platforms 109 to continuously change positions. This prevents multiple products from being confined to a fixed position, avoiding the degradation of coating uniformity and product quality caused by uneven local gas distribution. Furthermore, since multiple products can be processed at once, the production efficiency is higher.

[0030] By adjusting the height of the guide ring 107 using the first electric push rod 106, gas can be guided to different heights, thereby enabling uniform coating deposition on the side surfaces of products at different heights.

[0031] Preferably, the drive mechanism 200 includes a bottom cover 201 disposed at the bottom of the furnace body 100, a support shaft 202 extending through the interior of the bottom cover 201, and the top of the support shaft 202 connected to the bottom of the carrier plate 108. A motor 204 is mounted on the lower surface of the bottom cover 201 via a fixing seat 203, a drive gear 205 is mounted on the end of the output shaft of the motor 204, and a driven gear 206 is mounted on the outer surface of the support shaft 202, the driven gear 206 meshing with the drive gear 205.

[0032] When the motor 204 is started, it drives the drive gear 205 to rotate. Since the drive gear 205 and the driven gear 206 mesh with each other, the carrier plate 108 can be rotated through the support shaft 202.

[0033] Preferably, a sleeve 300 is vertically installed inside the bottom cover 201, and a support shaft 202 is rotatably installed inside the sleeve 300. A rotating shaft 301 is connected to the bottom of the heating platform 109, and the end of the rotating shaft 301 extends through to the bottom of the carrier plate 108 and is rotatably connected thereto. A transmission mechanism 400 is provided between the sleeve 300 and the rotating shaft 301.

[0034] When the support shaft 202 rotates, the transmission mechanism 400 can drive multiple heating platforms 109 to rotate, achieving the purpose of simultaneous revolution and rotation. In conjunction with the gas guiding ring 107, the gas can be evenly distributed on the side surface of the product, achieving the purpose of processing multiple products at once.

[0035] When connecting wires, the heating stage 109 is equipped with an electric slip ring to ensure that it can be energized while rotating.

[0036] Preferably, the transmission mechanism 400 includes a first transmission gear 401 mounted on the outer surface of the sleeve 300, and a second transmission gear 402 mounted on the bottom of each of the plurality of rotating shafts 301, the second transmission gear 402 being meshed with the first transmission gear 401.

[0037] When the support shaft 202 rotates, the sleeve 300 remains fixed. Therefore, when the carrier plate 108 rotates, it drives multiple second transmission gears 402 to rotate around the first transmission gear 401 simultaneously. Since the second transmission gears 402 and the first transmission gear 401 mesh with each other, the second transmission gears 402 can rotate and drive the heating platform 109 to rotate through the rotating shaft 301.

[0038] Preferably, brackets 500 are installed on both sides of the outer surface of the furnace body 100, and a base plate 501 is installed on the bottom of the two brackets 500. Two second electric push rods 502 are installed on the upper surface of the base plate 501, and the ends of the telescopic ends of the second electric push rods 502 are connected to the bottom of the bottom cover 201.

[0039] By activating the second electric push rod 502, the bottom cover 201 can be raised or lowered. When it is necessary to place or retrieve products, the bottom cover 201 can be lowered to bring the carrier plate 108 down to the bottom of the furnace body 100. After the products are placed or retrieved, the bottom cover 201 can be raised to bring the carrier plate 108 up into the furnace body 100, which facilitates the placement and retrieval of products. In addition, the inner wall of the furnace body 100 is seamless, which improves the smoothness and flatness of the inner wall of the furnace body 100 and facilitates the smooth raising and lowering of the flow ring 107.

[0040] Preferably, the outer surface of the bracket 500 is provided with a groove 600 along its height direction, and the outer surface of the bottom cover 201 is provided with a slider 601, which is disposed in the groove 600.

[0041] The sliding groove 600 and the slider 601 are designed to limit the bottom cover 201, ensuring that the bottom cover 201 can be raised and lowered smoothly and accurately.

[0042] Preferably, a receiving cavity 700 is provided between the second air outlet 105 and the inner wall of the furnace body 100, and the size of the receiving cavity 700 is larger than the size of the flow guide ring 107.

[0043] When depositing lumpy products, the drainage ring 107 can rise into the receiving cavity 700 without the need for gas guidance.

[0044] Preferably, the air inlet pipe 101, the hollow end 102, and the gas-gathering hood 104 are all arranged coaxially with the furnace body 100.

[0045] This allows the gas to be evenly distributed within the hollow end 102 and the gas-gathering hood 104, ensuring that the gas is evenly distributed within the furnace body 100, further improving the coating uniformity and product quality.

[0046] It will be apparent to those skilled in the art that this invention is not limited to the details of the exemplary embodiments described above, and that it can be implemented in other specific forms without departing from the spirit or essential characteristics of this invention. Therefore, the embodiments should be considered illustrative and non-limiting in all respects, and the scope of this invention is defined by the appended claims rather than the foregoing description. Thus, it is intended that all variations falling within the meaning and scope of equivalents of the claims be included within this invention. No reference numerals in the claims should be construed as limiting the scope of the claims.

Claims

1. An automatic adjustable composite coating deposition apparatus, comprising a furnace body (100), characterized in that: An air inlet pipe (101) is vertically installed through the top of the furnace body (100), and a hollow end (102) is installed at the bottom of the air inlet pipe (101). Multiple first air outlet holes (103) are arranged in a ring array on the upper surface of the hollow end (102). The top wall of the furnace body (100) is equipped with a gas-gathering hood (104), and the lower surface of the gas-gathering hood (104) is uniformly provided with second gas outlet holes (105). The top of the furnace body (100) is equipped with a ring array of multiple first electric push rods (106), the ends of the telescopic ends of the first electric push rods (106) penetrate into the furnace body (100) and are all equipped with a flow guide ring (107). The furnace body (100) is equipped with a carrier plate (108) inside by a drive mechanism (200), and a plurality of heating platforms (109) are arranged in a ring array on the upper surface of the carrier plate (108).

2. The automatic adjustment composite coating deposition equipment according to claim 1, characterized in that: The drive mechanism (200) includes a bottom cover (201) disposed at the bottom of the furnace body (100), and a support shaft (202) is disposed through the interior of the bottom cover (201), the top of the support shaft (202) being connected to the bottom of the carrier plate (108); A motor (204) is mounted on the lower surface of the bottom cover (201) via a fixing seat (203). A drive gear (205) is mounted on the end of the output shaft of the motor (204). A driven gear (206) is mounted on the outer surface of the support shaft (202). The driven gear (206) meshes with the drive gear (205).

3. The automatic adjustment composite coating deposition equipment according to claim 2, characterized in that: A sleeve (300) is vertically installed inside the bottom cover (201), and the support shaft (202) is rotatably installed inside the sleeve (300); The bottom of the heating platform (109) is connected to a rotating shaft (301), the end of which extends through to the bottom of the carrier plate (108) and is rotatably connected thereto. A transmission mechanism (400) is provided between the sleeve (300) and the rotating shaft (301).

4. The automatic adjustment composite coating deposition equipment according to claim 3, characterized in that: The transmission mechanism (400) includes a first transmission gear (401) mounted on the outer surface of the sleeve (300), and a second transmission gear (402) mounted on the bottom of each of the plurality of rotating shafts (301), the second transmission gear (402) meshing with the first transmission gear (401).

5. The automatic adjustment composite coating deposition equipment according to claim 2, characterized in that: The furnace body (100) has brackets (500) installed on both sides of its outer surface. The bottom of the two brackets (500) is connected to a base plate (501). The upper surface of the base plate (501) is equipped with two second electric push rods (502). The ends of the telescopic ends of the second electric push rods (502) are connected to the bottom of the bottom cover (201).

6. The automatic adjustment composite coating deposition equipment according to claim 5, characterized in that: The outer surface of the bracket (500) is provided with a groove (600) along its height direction, and the outer surface of the bottom cover (201) is provided with a slider (601), which is disposed in the groove (600).

7. The automatic adjustment composite coating deposition equipment according to claim 1, characterized in that: A receiving cavity (700) is provided between the second air outlet (105) and the inner wall of the furnace body (100), and the size of the receiving cavity (700) is larger than the size of the flow guide ring (107).

8. The automatic adjustment composite coating deposition equipment according to claim 1, characterized in that: The air inlet pipe (101), the hollow end (102), and the gas gathering hood (104) are all arranged coaxially with the furnace body (100).

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