Etching machine with weightlessness detection function

By installing a weighing module on the etching machine turntable, the weight loss of the board before and after etching is measured in real time, which solves the problems of weighing error and inaccurate liquid replenishment caused by manual operation, realizes precise liquid replenishment during the etching process, and improves product yield.

CN224258790UActive Publication Date: 2026-05-19SHANGHAI MEIYIN TECH CO LTD
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
SHANGHAI MEIYIN TECH CO LTD
Filing Date
2025-04-18
Publication Date
2026-05-19

AI Technical Summary

Technical Problem

Existing etching equipment relies on manual operation for process control during magnesium alloy etching, resulting in large weighing errors, inaccurate liquid replenishment, and the failure of automatic liquid replenishment equipment to be linked with real-time etching data.

Method used

A weighing module, including a non-contact weighing sensor and a permanent magnet, is installed on the etching machine turntable to measure the weight loss of the board before and after etching in real time. The weight difference is displayed through a display module, and the amount of chemical replenishment is automatically adjusted in conjunction with the control system.

Benefits of technology

It enables precise weight loss detection during the etching process, provides accurate chemical replenishment data, improves product yield, and avoids errors and inaccuracies caused by traditional manual operation.

✦ Generated by Eureka AI based on patent content.

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Abstract

The utility model provides an etching machine with a weightlessness detection function. The etching machine comprises an etching machine body, an etching machine top cover, an etching turntable and a weighing module, the upper portion of the etching machine body is covered with the etching machine top cover, a sealing cavity is formed by the etching machine top cover and an etching groove formed in the etching machine top cover, the etching rotary disc is rotatably arranged in the sealing cavity, and the bottom of the etching rotary disc is used for installing a plate to be etched; and the weighing module is arranged between the etching turntable and the top cover of the etching machine and is used for measuring the weight of the etching turntable and the plate to be etched. According to the utility model, the weighing module is additionally arranged on the turntable of the etching machine, the weighing module can accurately measure the weightlessness condition of a plate before and after etching and generate weightlessness data in real time, and more accurate reference data is provided for subsequent calculation of the dosage of liquid medicine needing to be fed, so that the problem that the fed liquid medicine is invalid due to inaccurate weighing can be solved; and the product yield is greatly improved.
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Description

Technical Field

[0001] This utility model relates to the field of etching machine technology, specifically to an etching machine with weightlessness detection function. Background Technology

[0002] In the field of magnesium alloy etching, traditional etching equipment generally relies on manual operation for process control. After the etching process, existing equipment requires operators to transfer the substrate to an independent electronic scale for two weighings, and the amount of chemical replenishment is calculated based on the weight difference. This method has significant drawbacks: First, residual chemical dripping during substrate transfer and changes in ambient temperature and humidity can easily lead to weighing errors; actual measurement data shows that manual operation is prone to error. Second, operators may miss the weighing step, directly resulting in inaccurate replenishment. Although some improved equipment is equipped with automatic replenishment pumps, their replenishment volume still relies on preset programs and fails to link with real-time etching data.

[0003] Therefore, how to provide a solution that can accurately weigh the weight loss of the substrate during etching and obtain real-time weight loss data is a technical problem that urgently needs to be solved in this field.

[0004] Existing patent document CN204690108U discloses a fully automatic etching device, which achieves mechanization of liquid addition to a certain extent. However, because it does not integrate an online weighing module, the amount of liquid added is disconnected from the actual etching loss, resulting in inaccurate liquid replenishment. Utility Model Content

[0005] In view of the deficiencies in the existing technology, the purpose of this utility model is to provide an etching machine with weightlessness detection function.

[0006] The etching machine with weight loss detection function provided by this utility model includes an etching machine body, an etching machine top cover, an etching turntable, and a weighing module.

[0007] The top cover of the etching machine covers the upper part of the etching machine body and forms a sealed cavity with the etching groove inside the top cover. The etching turntable is rotatably disposed inside the sealed cavity, and the bottom of the etching turntable is used to install the plate to be etched.

[0008] The weighing module is installed between the etching turntable and the top cover of the etching machine, and is used to measure the weight of the etching turntable and the plate to be etched.

[0009] Preferably, a rotating shaft is mounted on the top of the etching turntable, and the rotating shaft is rotatably mounted on the inner wall of the top cover of the etching machine, and the weighing module is mounted on the rotating shaft.

[0010] Preferably, a display module is provided on the outside of the etching machine body. The display module is connected to the weighing module and is used to display the weight difference of the plate to be etched before and after etching.

[0011] Preferably, the weighing module includes a weighing unit and a data transmission module, wherein the weighing unit is mounted on the rotating shaft at the top of the etching turntable;

[0012] The data transmission module is electrically connected to the weighing unit and communicatively connected to the display module.

[0013] Preferably, the weighing unit includes a non-contact weighing sensor, a weighing transmitter, and a permanent magnet, wherein the weighing sensor and the permanent magnet are mounted vertically at intervals on the outer wall of the rotating shaft;

[0014] The weighing sensor is connected to the weighing transmitter via signal, and the weighing transmitter is connected to the display module via signal.

[0015] The rotating shaft can generate a displacement proportional to the load, and the weighing transmitter is used to generate a linear voltage output based on the change in magnetic flux caused by the displacement change between the non-contact weighing sensor and the permanent magnet.

[0016] Preferably, the weighing sensor includes a Hall sensor or a magnetoresistive sensor.

[0017] Preferably, the vertical distance between the weighing sensor and the permanent magnet is 1-20 mm.

[0018] Preferably, the weighing module is covered with vibration damping rubber, the vibration damping rubber is covered with a sealed shell, and the outer surface of the sealed shell is coated with an anti-corrosion layer.

[0019] Preferably, the device also includes a reagent feeding tank, which is connected to the feeding port of the top cover of the etching machine via a pipeline, and a metering pump is provided at the outlet of the reagent feeding tank.

[0020] Preferably, the system further includes a control system, which is communicatively connected to the metering pump and is used to control the metering pump to add a preset dose of reagent into the sealed cavity of the etching machine body.

[0021] Compared with the prior art, the present invention has the following beneficial effects:

[0022] This invention adds a weighing module to the etching machine turntable. The weighing module can accurately measure the weight loss of the board before and after etching and generate weight loss data in real time. This provides more accurate reference data for subsequent calculation of the dosage of chemical to be added, thereby improving the problem of chemical failure caused by inaccurate weighing and greatly improving the product yield. Attached Figure Description

[0023] Other features, objects, and advantages of this invention will become more apparent from the following detailed description of non-limiting embodiments with reference to the accompanying drawings:

[0024] Figure 1 This is a schematic diagram of the overall structure of this utility model;

[0025] Figure 2 This is a structural schematic diagram of the weighing module in this utility model.

[0026] The diagram shows:

[0027] Control system 1 Etching substrate 7

[0028] First reagent feeding tank 2 Etching machine body 8

[0029] Second reagent feeding tank 3 Permanent magnet 9

[0030] Etching machine top cover 4, weighing sensor 10

[0031] Weighing module 5, vibration damping rubber 11

[0032] Etched turntable 6 Detailed Implementation

[0033] The present invention will now be described in detail with reference to specific embodiments. These embodiments will help those skilled in the art to further understand the present invention, but do not limit the present invention in any way. It should be noted that those skilled in the art can make several changes and improvements without departing from the concept of the present invention. These all fall within the protection scope of the present invention.

[0034] This utility model discloses an etching machine with a weight loss detection function. By adding a weighing module to the etching machine turntable, the weighing module can accurately calculate the weight loss of the board before and after etching and generate weight loss data, so as to calculate the dosage of the chemical solution to be added. Subsequently, the preset dosage of chemical solution is added into the etching chamber for mixing, which solves the problem of chemical solution failure caused by inaccurate weighing and greatly improves the product yield.

[0035] According to the etching machine with weightlessness detection function provided by this utility model, such as Figure 1As shown, the etching machine includes an etching machine body 8, an etching machine top cover 4, an etching turntable 6, and a weighing module 5. The etching machine top cover 4 covers the upper part of the etching machine body 8 and forms a sealed cavity with the etching groove inside the etching machine top cover 4. The etching turntable 6 is rotatably disposed inside the sealed cavity, and the bottom of the etching turntable 6 is used to install the plate to be etched 7. The weighing module 5 is installed between the etching turntable 6 and the etching machine top cover 4 and is used to measure the weight of the etching turntable 6 and the plate to be etched 7.

[0036] By installing a weighing module 5 between the etching turntable 6 and the top cover 4 of the etching machine, the weight loss of the board before and after the etching process can be accurately measured, thus providing an accurate data basis for calculating the dosage of the chemical to be added and solving the problem of chemical failure caused by inaccurate weighing.

[0037] Specifically, a rotating shaft is mounted on the top of the etching turntable 6, and the turntable 6 is rotatably mounted on the inner wall of the top cover 4 of the etching machine. The weighing module 5 is mounted on the rotating shaft. A display module is provided on the outside of the etching machine body 8. The display module is signal-connected to the weighing module 3 and is used to display the weight difference of the material to be etched 7 before and after etching. The weighing module 3 includes a weighing unit and a data transmission module. The weighing unit is mounted on the rotating shaft at the top of the etching turntable 6; the data transmission module is electrically connected to the weighing unit and communicatively connected to the display module. By communicatively connecting the weighing module 5 and the display module, real-time display of weight loss data before and after etching can be achieved.

[0038] In a preferred embodiment, the weighing unit includes a non-contact weighing sensor 10, a weighing transmitter, and a permanent magnet 9. The weighing sensor 10 and the permanent magnet 9 are vertically spaced and mounted on the outer wall of the rotating shaft. The weighing sensor 10 is signal-connected to the weighing transmitter, and the weighing transmitter is signal-connected to a display module. The rotating shaft is capable of generating a displacement proportional to the load. The weighing transmitter generates a linear voltage output based on the change in magnetic flux caused by the displacement change between the non-contact weighing sensor 10 and the permanent magnet 9. The weighing sensor 10 includes a Hall effect sensor or a magnetoresistive sensor.

[0039] The measurement principle of the weighing unit is as follows:

[0040] When the rotating shaft is subjected to a load, it deforms and produces a displacement proportional to the load. The permanent magnet 9 is fixed on the rotating shaft and changes its relative position with the load cell 10 as the displacement changes. When the permanent magnet 9 moves closer to or further away from the load cell 10 due to the displacement, the magnetic flux density B at the load cell 10 changes. The Hall sensor or magnetoresistive sensor converts the change in magnetic flux into a linear voltage signal.

[0041] The correspondence between load, displacement, and voltage is as follows:

[0042] F = kx

[0043] Where k is the elastic coefficient, F is the load, and x is the displacement of the elastic element;

[0044] V = Sx

[0045] Where V is the output voltage and S is the sensitivity coefficient;

[0046] The final result is:

[0047] V = (S / k)F, thus achieving a linear mapping between load and voltage.

[0048] In a preferred embodiment, the vertical distance between the weighing sensor 10 and the permanent magnet 9 is 1-20 mm. The weighing module 5 is externally covered with vibration-damping rubber 11, and the vibration-damping rubber 11 is externally covered with a sealed shell, the outer surface of which is coated with an anti-corrosion layer.

[0049] In a preferred embodiment, the etching equipment further includes a reagent feeding tank and a control system 1. The reagent feeding tank is connected to the feeding port of the top cover 4 of the etching machine via a pipeline. A metering pump is provided at the outlet of the reagent feeding tank. The control system 1 is communicatively connected to the metering pump and is used to control the metering pump to add a preset dose of reagent into the sealed cavity of the etching machine body 8.

[0050] This invention solves the problem of inaccurate liquid replenishment caused by manual weighing or forgetting to weigh in traditional weighing schemes through automatic weighing. Furthermore, the module is resistant to strong acid corrosion, occupies little space, and can achieve high-precision measurement even when the turntable is rotating at high speed. Moreover, this invention adopts a non-contact measurement method, which effectively avoids the problems of easy wear and tear of traditional contact modules and the decrease in measurement accuracy and sensitivity due to poor contact.

[0051] In the description of this application, it should be understood that the terms "upper", "lower", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application.

[0052] The specific embodiments of this utility model have been described above. It should be understood that this utility model is not limited to the specific embodiments described above, and those skilled in the art can make various changes or modifications within the scope of the claims, which do not affect the substantive content of this utility model. Unless otherwise specified, the embodiments and features described in this application can be arbitrarily combined with each other.

Claims

1. An etching machine with weightlessness detection function, characterized in that, It includes the etching machine body (8), the etching machine top cover (4), the etching turntable (6), and the weighing module (5); The top cover (4) of the etching machine covers the upper part of the etching machine body (8) and forms a sealed cavity with the etching groove inside the top cover (4). The etching turntable (6) is rotatably disposed inside the sealed cavity. The bottom of the etching turntable (6) is used to install the plate to be etched (7). The weighing module (5) is installed between the etching turntable (6) and the top cover (4) of the etching machine, and is used to measure the weight of the etching turntable (6) and the plate to be etched (7).

2. The etching machine with weightlessness detection function according to claim 1, characterized in that, The top of the etching turntable (6) is equipped with a rotating shaft, which is rotatably mounted on the inner wall of the top cover (4) of the etching machine. The weighing module (5) is mounted on the rotating shaft.

3. The etching machine with weightlessness detection function according to claim 1, characterized in that, The etching machine body (8) is equipped with a display module on its exterior. The display module is connected to the weighing module (5) and is used to display the weight difference of the plate (7) to be etched before and after etching.

4. The etching machine with weightlessness detection function according to claim 3, characterized in that, The weighing module (5) includes a weighing unit and a data transmission module. The weighing unit is installed on the rotating shaft at the top of the etching turntable (6). The data transmission module is electrically connected to the weighing unit and communicatively connected to the display module.

5. The etching machine with weightlessness detection function according to claim 4, characterized in that, The weighing unit includes a non-contact weighing sensor (10), a weighing transmitter, and a permanent magnet (9). The weighing sensor (10) and the permanent magnet (9) are installed vertically on the outer wall of the rotating shaft. The weighing sensor (10) is connected to the weighing transmitter, and the weighing transmitter is connected to the display module. The rotating shaft can generate a displacement proportional to the load, and the weighing transmitter is used to generate a linear voltage output based on the change in magnetic flux caused by the displacement change between the non-contact weighing sensor (10) and the permanent magnet (9).

6. The etching machine with weightlessness detection function according to claim 5, characterized in that, The weighing sensor (10) includes a Hall sensor or a magnetoresistive sensor.

7. The etching machine with weightlessness detection function according to claim 6, characterized in that, The vertical distance between the weighing sensor (10) and the permanent magnet (9) is 1-20 mm.

8. The etching machine with weightlessness detection function according to claim 1, characterized in that, The weighing module (5) is covered with vibration damping rubber (11), and the vibration damping rubber (11) is covered with a sealed shell, the outer surface of which is coated with an anti-corrosion layer.

9. The etching machine with weightlessness detection function according to claim 1, characterized in that, It also includes a reagent feeding tank, which is connected to the feeding port of the top cover (4) of the etching machine via a pipeline, and a metering pump is provided at the outlet of the reagent feeding tank.

10. The etching machine with weightlessness detection function according to claim 9, characterized in that, It also includes a control system (1), which is communicatively connected to the metering pump and is used to control the metering pump to add a preset dose of reagent into the sealed cavity of the etching machine body (8).