Intelligent water leakage protection system of ion implantation equipment and ion implantation equipment

Abstract

The utility model provides an intelligent water leakage protection system of ion implantation equipment. The intelligent water leakage protection system comprises a water leakage sensing device, a controller, an alarm device and an electromagnetic valve, the water leakage sensing device is arranged on the ion implantation equipment, and when the water leakage sensing device detects water leakage of the equipment, an electric signal is sent to the controller; the alarm device is electrically connected with the controller; the electromagnetic valve is arranged on a water flow main pipeline of the ion implantation equipment and is electrically connected with the controller; when the water leakage sensing device detects water leakage of the equipment, the controller receives the electric signal and sends out an alarm control signal and a valve control signal according to the electric signal; the alarm device receives the alarm control signal and gives an alarm; and the electromagnetic valve receives the valve control signal and blocks the water flow main pipeline. The system can effectively avoid equipment shutdown and damage caused by the fact that the water leakage problem of the equipment is not found in time, meanwhile, the ion implantation equipment does not need to be inspected manually, and manpower resources and equipment management cost are effectively saved.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor equipment technology, and in particular to an intelligent water leakage protection system for an ion implantation device and an ion implantation device using the system. Background Technology

[0002] Ion implantation equipment is a key piece of equipment in semiconductor manufacturing, used to complete the ion implantation process. However, this equipment currently suffers from a significant leakage problem, posing numerous hidden dangers to production and operation. On one hand, aging and corrosion of the equipment's piping can cause leaks. With prolonged operation, the piping is constantly exposed to specific working environments, subjected to the combined effects of temperature, pressure, and the medium being transported. This causes the piping materials to gradually age, their physical properties to decline, and their corrosion resistance to weaken, leading to thinning of the pipe walls, cracking, and ultimately, leakage. On the other hand, aging of flexible hoses and leaks at joints are also common. As part of the equipment's connection structure, flexible hoses, due to their flexibility requirements, age faster due to frequent bending, twisting, and contact with the external environment. Simultaneously, joints, under long-term vibration and stress, gradually lose their tightness and sealing performance, leading to leaks. More importantly, if leaks are not detected in time, they can have serious consequences. For example, in other wafer fabrication plants, there have been instances where water leaks in ion implantation equipment went undetected, causing water from the third-floor equipment to spread to the second-floor auxiliary equipment, resulting in the shutdown of more equipment on the second floor. This not only disrupts normal production processes, causing production stoppages and direct economic losses, but can also cause irreversible damage to equipment, increasing maintenance and replacement costs, and severely impacting the company's production efficiency and economic benefits. Therefore, there is an urgent need for an effective technical solution to promptly detect and resolve water leaks in ion implantation equipment. Utility Model Content

[0003] In view of the shortcomings of the prior art described above, the purpose of this utility model is to provide an intelligent water leakage protection system for ion implantation equipment, which solves the water leakage problem of ion implantation equipment in the prior art and the problem of how to detect water leakage in a timely manner.

[0004] To achieve the above objectives, the first aspect of this utility model provides an intelligent leakage protection system for an ion implantation device, comprising:

[0005] A water leakage sensing device is arranged in the ion implantation equipment, and the water leakage sensing device generates an electrical signal when it detects water leakage in the equipment.

[0006] The controller is electrically connected to the leakage detection device and is used to receive the electrical signal;

[0007] An alarm device is electrically connected to the controller;

[0008] An electromagnetic valve is installed on the main water flow line of the ion implantation equipment and is electrically connected to the controller.

[0009] When the leakage sensor detects a water leak in the equipment, the controller receives the electrical signal and issues an alarm control signal and a valve control signal based on the electrical signal; the alarm device receives the alarm control signal and issues an alarm; the solenoid valve receives the valve control signal and blocks the main water flow pipeline.

[0010] Preferably, the water leakage sensing device is a water leakage sensing cable.

[0011] Preferably, it also includes a water storage tank, which is located below the detected part of the ion implantation device; the water storage tank has a water storage space for receiving and storing leaked water.

[0012] Preferably, the leakage sensing cable is disposed within the water storage space and in contact with the bottom surface of the water storage space.

[0013] Preferably, the ion implantation device includes a reflector water jacket having a bevel, and the leakage sensing cable is disposed along the bottom edge of the guide bevel.

[0014] Preferably, the alarm device is an alarm indicator light and / or a buzzer.

[0015] Preferably, the controller includes a detachable power supply for powering the leakage sensing device.

[0016] Preferably, it also includes a display device, which is electrically connected to the controller and is used to display location data of the leaking water on the leak sensing cable.

[0017] Preferably, the bottom surface of the water storage space is provided with a plurality of fasteners, which are fixedly connected to the bottom surface of the water storage space for fixing the leakage sensing cable; the plurality of fasteners are spaced apart along the extension direction of the leakage sensing cable.

[0018] The second aspect of this invention provides an ion implantation device, including the intelligent water leakage protection system as described in the first aspect of this invention.

[0019] The beneficial effects of this invention are as follows: The intelligent water leakage protection system for the ion implantation equipment of this invention detects leaking water using a water leakage sensing cable and generates an electrical signal. The controller receives this signal and activates an alarm device to alert personnel. Simultaneously, it controls a solenoid valve to cut off the main water supply to prevent further spread of the leak. This system effectively avoids equipment downtime and damage caused by failure to detect water leakage in a timely manner. Furthermore, it eliminates the need for manual inspection of the ion implantation equipment, effectively saving human resources and equipment management costs. Attached Figure Description

[0020] Figure 1 This is a schematic diagram of the overall structure of the intelligent water leakage protection system of the ion implantation device disclosed in this embodiment of the utility model.

[0021] Figure 2 for Figure 1 Top view of the middle water jacket and reflector water jacket;

[0022] Figure 3 This is a schematic diagram showing the positional relationship between the water storage tank, the gas control panel, and the AC power distribution cabinet in an embodiment of this utility model.

[0023] Figure 4 This is a schematic diagram of the structure of the water leakage sensing cable installed in the water storage tank in this embodiment of the utility model;

[0024] Figure 5 This is a structural schematic diagram of the fastener in an embodiment of the present utility model.

[0025] Figure label:

[0026] 1-Leakage detection device; 11-First leakage detection cable; 12-Second leakage detection cable;

[0027] 2-Controller; 21-Display screen;

[0028] 3-Alarm device; 31-Alarm indicator light; 32-Buzzer;

[0029] 4-Solenoid valve; 41-Main water pipe;

[0030] 5. Central Control Center;

[0031] 6-Water jacket; 61-Reflector water jacket; 62-Sloping surface; 63-Mounting part; 64-Deionized water connection port; 65-Deionized water pipe;

[0032] 7-Water storage tank; 71-Water storage space; 72-Fixing component; 721-Mounting base; 722-First clamp; 723-Second clamp; 724-Clamping space;

[0033] 8-Gas control panel; 9-AC power distribution cabinet. Detailed Implementation

[0034] To make the objectives, technical solutions, and advantages of this utility model clearer, the technical solutions in the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. All other embodiments obtained by those skilled in the art based on the embodiments of this utility model without inventive effort are within the scope of protection of this utility model. Unless otherwise defined, the technical or scientific terms used herein should have the ordinary meaning understood by those skilled in the art to which this utility model pertains. The terms "comprising" and similar expressions used herein mean that the element or object preceding the word covers the element or object listed after the word and its equivalents, but does not exclude other elements or objects. Unless otherwise specified, the term "connection" as used herein can refer to a direct connection or an indirect connection, i.e., a connection through an intermediate object.

[0035] Please see Figure 1 The first aspect of this utility model provides an intelligent water leakage protection system for an ion implantation device, which is applied to the ion implantation device to detect water leakage in the device in a timely manner and solve the water leakage problem.

[0036] The intelligent water leakage protection system includes: a water leakage sensor 1, a controller 2, an alarm device 3, and a solenoid valve 4. The water leakage sensor 1 is located in the ion implantation equipment and is used to detect water leakage. When the water leakage sensor 1 detects a leak, it generates an electrical signal. The controller 2 is electrically connected to the water leakage sensor and receives the electrical signal. The alarm device 3 is electrically connected to the controller 2. The solenoid valve 4 is located on the main water flow pipe 41 of the ion implantation equipment and is electrically connected to the controller 2.

[0037] When the leakage sensor 1 detects a water leak in the equipment, the controller 2 receives the electrical signal and issues an alarm control signal and a valve control signal based on the electrical signal; the alarm device 3 receives the alarm control signal and issues an alarm; the solenoid valve 4 receives the valve control signal and blocks the main water pipe 41.

[0038] In this embodiment, the alarm device 3 is an alarm indicator light 31. In some embodiments, the alarm device 3 is a buzzer 32;

[0039] In other embodiments, the alarm device 3 includes an alarm indicator light 31 and a buzzer 32. In this embodiment, when the alarm device 3 receives an alarm control signal, the alarm indicator light 31 flashes while the buzzer 32 sounds.

[0040] Furthermore, it also includes a display device electrically connected to the controller 2, used to display location data of the leaking water on the leak detection cable, facilitating engineers to quickly locate the leak point and carry out repairs. In this embodiment, the display device is a display screen 21.

[0041] Furthermore, upon receiving the electrical signal, the controller 2 will also upload the leak location data to the central control center 5 via the ModBus communication protocol to attract the attention of the staff at the central control center 5, so that personnel can be organized in a timely manner to repair the water leak.

[0042] In this embodiment, the water leakage sensing device 1 uses a water leakage sensing cable, which is a device used in the prior art to detect water leaks. It can accurately detect water damage in the environment and is widely used in places with high waterproofing requirements, such as computer rooms, warehouses, and power distribution rooms. Once a leak is detected, it will promptly send a signal to remind personnel to take measures to avoid equipment damage and property loss caused by the leak. Common water leakage detection lines generally consist of two parallel conductive metal wires, such as copper wires, wrapped with a special material that conducts electricity when exposed to water, such as a polymer that absorbs water and expands while conducting electricity. Some also have an insulating sheath on the outermost layer for protection and to prevent false triggering. Under normal circumstances, the two conductive metal wires are not conductive due to the outer insulating material. When water comes into contact with the detection line, the water-absorbing material absorbs the moisture and becomes conductive, making the two metal wires conductive, forming a circuit, thereby triggering the detection system to send a water leakage signal. Based on the principle of resistance change, by measuring the change in resistance value of the detection line at different locations and combining it with pre-calibrated data, the distance from the leak point to the starting end of the detection line is calculated, achieving precise location of the leak.

[0043] In this embodiment, a leak detection cable is used to enable rapid response to leaks. Once a leak occurs, the leak detection cable immediately sends an electrical signal to the leak controller 2. Upon receiving this signal, the leak controller 2 inputs it into its built-in signal processing system. This system processes the signal and generates alarm control signals and valve control signals. Simultaneously, the display screen 21 shows the location data of the leaking water contacting the leak detection cable. The alarm indicator 31 immediately activates upon receiving the alarm control signal to alert the engineer. Simultaneously, the solenoid valve 4 immediately responds upon receiving the valve control signal and blocks the main water supply pipe 41 to prevent further leakage. The engineer checks the display screen 21, locates the corresponding leak on the equipment based on the location data of the leaking water contacting the leak detection cable, and repairs it. After the leak is repaired, the intelligent leak protection system is reset for future monitoring.

[0044] By installing an intelligent leakage protection system on the ion implantation equipment, manual inspection of the ion implantation equipment can be eliminated, effectively saving human resources.

[0045] In some embodiments, the leakage sensing device 1 can also be a point-type leakage sensor. The point-type leakage sensing device 1 has a simple structure. It works by contacting water with a sensing probe, utilizing the conductivity of water to change the circuit state and trigger an alarm. In this embodiment, the sensing probe of the point-type leakage sensor is located at the DI water / CW (deionized water / cooling water) junction.

[0046] Comprehensive reference Figure 1 and Figure 2 In some embodiments, the ion implantation device includes a water jacket 6, in which a reflector water jacket 61 is installed, the reflector water jacket 61 being perpendicular to the bottom surface of the water jacket 6. Specifically, the lower part of the reflector water jacket 61 has an inclined surface 62, the guide inclined surface 62 and the bottom end have a mounting part 63, the mounting part 63 being connected to the bottom surface of the water jacket 6 by bolts. In this embodiment, the leakage sensing cable includes a first leakage sensing cable 111 and a second leakage sensing cable 12, wherein the first leakage sensing cable 11 extends along the bottom edge of the inclined surface 62, and the second leakage sensing cable 12 extends along the periphery of the mounting part 63.

[0047] The reflector water jacket 61 has multiple deionized water connection ports 64, which are connected to deionized water pipes 65. When a leak occurs at the connection between the deionized water connection port 64 and the deionized water pipe 65, in one scenario, the leaking water drips onto the inclined surface 62 and flows along the inclined surface 62 to the bottom edge of the inclined surface 62, where it comes into contact with the first leak detection cable 11, triggering an alarm. In another scenario, the leaking water drips onto the outer area of ​​the mounting part 63 and comes into contact with the second leak detection cable 12, triggering an alarm.

[0048] refer to Figure 3 and Figure 4 In some embodiments, the intelligent leakage protection system of the ion implantation device further includes a water storage tank 7, which is disposed below the detected part of the ion implantation device; the water storage tank 7 has a water storage space 71, which is used to receive and store leaked water. The leakage sensing cable is disposed within the water storage space 71 and contacts the bottom surface of the water storage space 71.

[0049] refer to Figure 3In this embodiment, the ion implantation equipment is equipped with a gas control panel 8 and an AC power distribution cabinet 9. The AC power distribution cabinet 9 is located below the gas control panel 8. The gas control panel 8 is connected to multiple gas pipe interfaces and liquid pipe interfaces. To prevent leaked water from dripping onto the AC power distribution cabinet 9 in case of leakage at the liquid pipe interfaces of the gas control panel 8, a water storage tank 7 is installed between the gas control panel 8 and the AC power distribution cabinet 9. By installing this water storage tank 7, it is possible to effectively prevent leaked water from affecting the power supply short circuit in the AC power distribution cabinet 9. At the same time, the location of the leak can be quickly detected by the water leakage sensing cable inside the water storage tank 7.

[0050] refer to Figure 4 In some embodiments, the leakage sensing cable is arranged in an "S" shape on the bottom surface of the water storage space 71. The "S" arrangement of the leakage sensing cable can effectively expand its contact area with the bottom surface of the water storage space 71, thereby making it easier for the leakage sensing cable to come into contact with the leaking water.

[0051] In some embodiments, the water storage tank 7 is located at the bottom of the ion implantation equipment, specifically directly below the interface of the deionized water pipe or cooling water pipe, so as to ensure that leaked water drips into the water storage tank 7 and causes the leaked water to contact the leak detection cable to trigger the alarm device.

[0052] Comprehensive reference Figure 4 and Figure 5 In some embodiments, the bottom surface of the water storage space 71 is provided with a plurality of fixing members 72, which are fixedly connected to the bottom surface of the water storage space 71 for fixing the leakage sensing cable; the plurality of fixing members 72 are spaced apart along the extension direction of the leakage sensing cable to maintain the leakage sensing cable in an "S" shape. The fixing member 72 includes a mounting base 721 and a first clamp 722 and a second clamp 723 disposed opposite to each other. The mounting base 721 is integrally formed with the water storage tank 7, and a clamping space 724 for accommodating the leakage sensing cable is formed between the first clamp 722 and the second clamp 723.

[0053] In some embodiments, the controller 2 includes a detachable power supply (not shown) for powering the leakage sensing device 1.

[0054] A second aspect of this invention also provides an ion implantation device, including the intelligent leakage protection system described in the first aspect. By installing the intelligent leakage protection system on the ion implantation device, an alarm can be triggered immediately upon the occurrence of a leakage problem, and the main water supply pipe 41 can be shut off to prevent further deterioration of the leakage problem. With this simplified intelligent leakage protection system, manual inspection of the ion implantation device is unnecessary, effectively saving manpower and equipment maintenance costs.

[0055] In summary, the intelligent water leakage protection system for the ion implantation equipment of this invention uses a water leakage sensing cable to detect leaking water and generate an electrical signal. The controller receives this signal and activates an alarm device to alert personnel. Simultaneously, it controls a solenoid valve to cut off the main water supply to prevent further spread of the leak. This system effectively avoids equipment downtime and damage caused by failure to detect leaks in a timely manner. Furthermore, it eliminates the need for manual inspection of the ion implantation equipment, effectively saving manpower and equipment management costs. Therefore, this invention effectively overcomes the various shortcomings of existing technologies and has high industrial application value.

[0056] The above description is merely a specific implementation of the embodiments of this application, but the protection scope of the embodiments of this application is not limited thereto. Any changes or substitutions within the technical scope disclosed in the embodiments of this application should be covered within the protection scope of the embodiments of this application. Therefore, the protection scope of the embodiments of this application should be determined by the protection scope of the claims.

Claims

1. An intelligent leakage protection system for an ion implantation device, characterized in that, include: A water leakage sensing device is arranged in the ion implantation equipment, and the water leakage sensing device generates an electrical signal when it detects water leakage in the equipment. The controller is electrically connected to the leakage detection device and is used to receive the electrical signal; An alarm device is electrically connected to the controller; An electromagnetic valve is installed on the main water flow line of the ion implantation equipment and is electrically connected to the controller. When the leakage sensor detects a water leak in the equipment, the controller receives the electrical signal and issues an alarm control signal and a valve control signal based on the electrical signal; the alarm device receives the alarm control signal and issues an alarm; the solenoid valve receives the valve control signal and blocks the main water flow pipeline.

2. The intelligent leakage protection system for the ion implantation equipment according to claim 1, characterized in that: The water leakage sensing device is a water leakage sensing cable.

3. The intelligent leakage protection system for the ion implantation equipment according to claim 2, characterized in that: Also includes: A water storage tank is located below the area to be detected in the ion implantation device; the water storage tank has a water storage space for receiving and storing leaked water.

4. The intelligent leakage protection system for the ion implantation equipment according to claim 3, characterized in that: The leakage sensing cable is installed inside the water storage space and is in contact with the bottom surface of the water storage space.

5. The intelligent leakage protection system for the ion implantation equipment according to claim 2, characterized in that: The ion implantation device includes a reflector water jacket having a bevel, and the leakage sensing cable is disposed along the bottom edge of the bevel.

6. The intelligent leakage protection system for the ion implantation equipment according to any one of claims 1-5, characterized in that: The alarm device is an alarm indicator light and / or a buzzer.

7. The intelligent leakage protection system for the ion implantation equipment according to any one of claims 1-5, characterized in that: The controller includes a detachable power supply for powering the leakage sensing device.

8. The intelligent leakage protection system for the ion implantation equipment according to claim 2, characterized in that: It also includes a display device, which is electrically connected to the controller, for displaying location data of the leaking water on the leak sensing cable.

9. The intelligent leakage protection system for the ion implantation equipment according to claim 4, characterized in that: The bottom surface of the water storage space is provided with multiple fasteners, which are fixedly connected to the bottom surface of the water storage space for fixing the leakage sensing cable; the multiple fasteners are spaced apart along the extension direction of the leakage sensing cable.

10. An ion implantation device, characterized in that: Including the intelligent water leakage protection system as described in any one of claims 1-9.

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