Vacuum sample heating device

Abstract

The utility model discloses a vacuum sample heating device. The vacuum sample heating device comprises a longitudinal adjusting table, the linear sliding rail is fixedly connected to the bottom of the longitudinal adjusting table; the horizontal moving seat is connected with the linear sliding rail, so that the horizontal moving seat can move in the horizontal direction; a sample holder and a filament holder, wherein the sample holder and the filament holder are clamped with the horizontal moving seat; the sample transfer rod is magnetically coupled with a transmission device outside the vacuum environment, and the sample transfer rod is connected with a position adjusting rod outside the linear sliding rail. According to the utility model, after the filament is invalid after being used for a long time, the filament can be transferred to the rapid sample introduction chamber through the sample transfer rod on the premise that the vacuum environment of the equipment is not influenced, so that the rapid replacement of the heating wire is realized.

Description

Technical Field

[0001] This utility model relates to the field of vacuum heating technology, specifically to a vacuum sample heating device. Background Technology

[0002] Vacuum heaters are used to heat materials in a vacuum environment. This heating method avoids oxidation reactions in air and improves the precision and uniformity of heating. Traditional vacuum heaters mainly rely on resistance heating or radiation heating, but these devices suffer from low energy efficiency and uneven heating at high temperatures. To address these issues, related technologies have provided heating devices that utilize DC filaments for radiation heating. However, after prolonged use, the DC filaments are difficult to replace due to the vacuum environment, thus affecting the replacement efficiency and the normal operation of the vacuum heater. Utility Model Content

[0003] The purpose of this invention is to provide a vacuum sample heating device in order to solve the above problems.

[0004] To achieve the above objectives, this utility model specifically adopts the following technical solution:

[0005] A vacuum sample heating device, comprising:

[0006] Longitudinal adjustment table;

[0007] A linear slide rail, which is fixedly connected to the bottom of the longitudinal adjustment platform;

[0008] A horizontally movable seat, which is connected to the linear slide rail, enables the horizontally movable seat to move in the horizontal direction;

[0009] The sample holder and the filament holder are both engaged with the horizontal moving base;

[0010] The sample transfer rod is magnetically coupled to an external transmission device in a vacuum environment, and is connected to a position adjustment rod outside a linear slide rail.

[0011] In one embodiment, the linear slide rail includes a slide rail base, inside which a transmission gear is disposed. The transmission gear meshes with a transmission rack, and the transmission rack is fixed to the horizontal moving seat. The top of the horizontal moving seat is slidably connected to the slide rail base via a guide rail.

[0012] In one embodiment, the position adjusting rod is connected to the center of the transmission gear, and the end of the position adjusting rod is a plate-shaped connecting portion.

[0013] In one embodiment, the filament holder includes a filament holder body, a beam shaping shroud is fixed to one side of the filament holder body, two contact electrodes are fixed inside the beam shaping shroud, the beam shaping shroud is electrically connected to one of the contact electrodes, and a filament is connected between the two contact electrodes.

[0014] In one embodiment, the filament is made of an ultra-high temperature metal.

[0015] In one embodiment, a sheet-like connecting portion two is provided on one side of the filament holder body.

[0016] In one embodiment, a sheet-like connecting portion three is provided on one side of the sample holder.

[0017] In one embodiment, one end of the sample transfer rod is provided with a groove, the groove including a central circular groove and a longitudinal groove provided in the central circular groove.

[0018] In one embodiment, the groove is adapted to the shape of the sheet-like connecting portion one, the sheet-like connecting portion two, and the sheet-like connecting portion three.

[0019] In one embodiment, the horizontal moving base is provided with two fixing slots, which are respectively engaged with the sample holder and the filament holder.

[0020] The beneficial effects of this utility model are as follows:

[0021] 1. This utility model adopts a universal flag-type filament holder structure. When the filament fails, it can be quickly replaced by transferring it to the rapid sample injection chamber through the vacuum transfer rod without affecting the vacuum environment of the equipment. This solves the problems of complicated filament replacement, vacuum breaking maintenance, and time and labor consumption in traditional vacuum environments.

[0022] 2. The beam shaping hood of this utility model focuses the thermionic beam through a unique electric field distribution. After being accelerated by the accelerating voltage between the sample and the filament, the heating efficiency and energy are improved, and the sample can be heated to a higher temperature. At the same time, the electron beam is restricted to a local sample area, avoiding unnecessary heating of other auxiliary devices and problems such as deformation and gas release in the vacuum.

[0023] To more clearly illustrate the structural features and functions of this utility model, the following detailed description of this utility model is provided in conjunction with the accompanying drawings and specific embodiments. Attached Figure Description

[0024] Figure 1 This is a perspective view of the vacuum heating device and sample transfer rod of this utility model.

[0025] Figure 2 This is a perspective view of the vacuum heating device of this utility model.

[0026] Figure 3 This is a side view of the vacuum heating device of this utility model.

[0027] Figure 4 This is a perspective view of the filament holder of this utility model.

[0028] Figure 5 This is a front view of the filament holder of this utility model.

[0029] Figure 6 This is a perspective view of the sample transfer rod of this utility model.

[0030] Reference numerals: 100, longitudinal adjustment stage; 200, linear slide rail; 210, slide rail seat; 220, transmission gear; 230, transmission rack; 240, guide rail; 250, position adjustment rod; 260, sheet-like connecting part one; 300, horizontal moving seat; 310, fixing slot one; 320, fixing slot two; 400, sample holder; 410, sheet-like connecting part three; 500, filament holder; 510, filament holder body; 520, beam shaping cover; 530, contact electrode; 540, sheet-like connecting part two; 550, filament; 600, sample transfer rod; 610, groove. Detailed Implementation

[0031] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings.

[0032] like Figures 1-6 As shown, in one embodiment, a vacuum sample heating device includes...

[0033] The longitudinal adjustment stage 100 can be used to adjust the longitudinal position of the entire vacuum sample heating device, allowing the entire vacuum sample heating device to move longitudinally. Optionally, a hydraulic rod or cylinder is connected to the upper end of the longitudinal adjustment stage 100.

[0034] The linear slide rail 200 is fixedly connected to the bottom of the longitudinal adjustment platform 100. The function of the linear slide rail 200 is to allow the structure below it to move horizontally. For example, it can move in the X or Y direction.

[0035] The horizontal moving seat 300 is connected to the linear slide rail 200, enabling the horizontal moving seat 300 to move in the horizontal direction.

[0036] The sample holder 400 and the filament holder 500 are both engaged with the horizontal moving base 300. When the horizontal moving base 300 moves horizontally, it can move the sheet-like connecting part of the sample holder 400 and the filament holder 500 to a position aligned with the sample transfer rod 600. Then, the sample holder 400 or the filament holder 500 is quickly transferred to the sample injection chamber through the sample transfer rod 600, which can realize the rapid replacement of heating wire or sample.

[0037] The sample transfer rod 600 is magnetically coupled to the external transmission device of the vacuum environment, and is connected to the position adjustment rod 250 outside the linear slide rail 200. The sensor can move linearly in its axial direction, thereby removing the sample holder 400 or the filament holder 500 from the fixed slot, enabling rapid replacement of the filament 550 or the sample. The sample transfer rod 600 can rotate around its circumference. After being connected to the position adjustment rod outside the linear slide rail 200, the rotation of the sample transfer rod 600 causes the linear slide rail 200 to move the horizontal moving seat 300 horizontally, facilitating the subsequent removal of the filament holder 500 or the sample holder 400 by the sample transfer rod 600.

[0038] Through the above technical solution, the filament holder 500 and sample holder 400 are moved horizontally simultaneously by the movement of the horizontal moving seat 300, and moved to a position flush with the sample transfer rod 600. Then, the filament holder 500 and sample holder 400 can be quickly replaced in a vacuum environment through the sample transfer rod 600, thereby improving the replacement efficiency of the filament 550 of the sample heating device.

[0039] In one embodiment, the linear slide rail 200 includes a slide rail base 210, inside which a transmission gear 220 is provided. The transmission gear 220 meshes with a transmission rack 230, and the transmission rack 230 is fixed to a horizontal moving seat 300. The top of the horizontal moving seat 300 is slidably connected to the slide rail base 210 via a guide rail 240. The slide rail seat 210 is fixedly connected to the upper longitudinal adjustment platform 100 by bolts. The guide rail 240 provided on the top inner wall of the slide rail seat 210 is slidably connected to a part of the horizontal moving seat 300 inside the slide rail seat 210 to ensure the stability and smoothness of the horizontal moving seat 300 when moving horizontally. At the same time, the transmission gear 220 provided inside the slide rail seat 210 meshes with the transmission rack 230 of the horizontal moving seat 300. One side of the transmission gear 220 passes through the slide rail seat 210 and is connected to the position adjustment rod 250. After the transfer rod 600 is connected to the position adjustment rod 250, the horizontal moving seat 300 can be moved in the horizontal direction by rotating the transfer rod 600.

[0040] In one embodiment, the end of the position adjusting rod 250 is a plate-shaped connecting portion 260, which can be referred to as... Figure 2A groove 610 is provided at one end of the sample transfer rod 600. When in use, the groove 610 is inserted into the sheet-like connecting plate. When the sample transfer rod 600 rotates, it can drive the position adjustment rod 250 to rotate, which in turn drives the transmission gear 220 to rotate, so that the horizontal moving seat 300 moves in the horizontal direction.

[0041] In one embodiment, such as Figure 4-5 As shown, the filament holder 500 includes a filament holder body 510. A beam shaping shroud 520 is fixed to one side of the filament holder body 510. Two contact electrodes 530 are fixed inside the beam shaping shroud 520. The beam shaping shroud 520 is electrically connected to one of the contact electrodes 530. A filament 550 is connected between the two contact electrodes 530. The filament holder 500 is a flag-type filament holder 500, which is machined from high-temperature resistant metal. The filament 550 is fixed on the two high-temperature resistant metal contact electrode 530 posts. There is a gasket made of insulating material between the contact electrode 530 and the filament holder 500 to electrically isolate the filament holder 500 and the contact electrode 530 from each other and prevent short circuits at both ends of the filament 550.

[0042] The beam shaper 520 is in contact with and electrically connected to one of the two contact electrodes 530, while the other is electrically isolated by an insulating material to prevent short circuits between the contact electrodes 530. At the same time, the beam shaper 520 and the filament 550 can be at the same potential or voltage.

[0043] Understandably, the beam shaping shroud 520 uses its unique electric field distribution to focus the thermionic electrons emitted by the thermal filament 550. The focused electron beam is then accelerated by the accelerating voltage between the sample and the filament 550. This accelerated electron beam possesses high heating efficiency and energy, allowing the sample to be heated to 1500 or 1800 degrees Celsius. Simultaneously, because the electron beam can be confined to a localized sample area, it avoids simultaneously heating other auxiliary components to unnecessarily high temperatures, preventing problems such as deformation and gas release in a vacuum.

[0044] Furthermore, due to electrical isolation, a positive voltage bias can be applied between the filament 550 and the sample. For example, the filament 550 is grounded, and a negative voltage is applied to the sample. Alternatively, a positive voltage can be applied to the sample, and the filament 550 is grounded at a potential. Simultaneously, the beam shaper 520 has the same potential as the filament 550.

[0045] In one embodiment, a sheet-like connecting part 540 is provided on one side of the filament holder body 510. The sheet-like connecting part 540 can be fixed and locked to the groove 610 of the sample transfer rod 600 (after the sheet-like connecting part 540 is inserted into the groove 610, the sample transfer rod 600 can be rotated 90° to achieve mutual locking). Then, the sample transfer rod 600 moves along its axial direction to remove the filament holder 500 from the fixed slot and transfer it to different vacuum walls or different positions.

[0046] In one embodiment, a sheet-like connecting part 3 410 is provided on one side of the sample holder 400. The structure of the sheet-like connecting part 3 410 is similar to that of the sheet-like connecting part 2 540, and its cooperation with the sample transfer rod 600 is also the same as that of the sheet-like connecting part 2 540, which will not be described in detail here.

[0047] In one embodiment, the horizontal moving base 300 is provided with two fixing slots, namely fixing slot one 310 and fixing slot two 320, which respectively engage with the sample holder 400 and the filament holder 500. Regarding the engagement of the filament holder 500 with fixing slot one 310, when the filament holder 500 is inserted into the fixing slot of the vacuum chamber, the two contact electrodes 530 contact and conduct with the two contacts at the rear of the fixing slot. These two contacts in the slot are connected to a power source outside the vacuum chamber via a vacuum feedthrough.

[0048] In one embodiment, a groove 610 is provided at one end of the sample transfer rod 600. The groove 610 includes a central circular groove and a longitudinal groove provided in the central circular groove. The central circular groove and the longitudinal groove are connected so that the second sheet-like connecting part 540 and the third sheet-like connecting part 410 can be inserted into the groove 610. After the sheet-like connecting parts are inserted to a certain depth, the sample transfer rod 600 can be rotated to lock the sample transfer rod 600, the sample holder 400 and the filament holder 500, and achieve the effect of removing the filament holder 500 and the sample holder 400 from the fixed slot.

[0049] The above description of the disclosed embodiments enables those skilled in the art to make or use the present invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the present invention. Therefore, the present invention is not to be limited to the embodiments shown herein, but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A vacuum sample heating device, characterized in that, include: Longitudinal adjustment table; A linear slide rail, which is fixedly connected to the bottom of the longitudinal adjustment platform; A horizontally movable seat, which is connected to the linear slide rail, enables the horizontally movable seat to move in the horizontal direction; The sample holder and the filament holder are both engaged with the horizontal moving base; The sample transfer rod is magnetically coupled to an external transmission device in a vacuum environment, and is connected to a position adjustment rod outside a linear slide rail.

2. The vacuum sample heating device according to claim 1, characterized in that, The linear slide rail includes a slide rail base, inside which a transmission gear is provided. The transmission gear meshes with a transmission rack, and the transmission rack is fixed to the horizontal moving seat. The top of the horizontal moving seat is slidably connected to the slide rail base via a guide rail.

3. The vacuum sample heating device according to claim 2, characterized in that, The position adjustment rod is connected to the center of the transmission gear, and the end of the position adjustment rod is a plate-shaped connecting part.

4. The vacuum sample heating device according to claim 1, characterized in that, The filament holder includes a filament holder body, a beam shaping shroud is fixed to one side of the filament holder body, two contact electrodes are fixed inside the beam shaping shroud, the beam shaping shroud is electrically connected to one of the contact electrodes, and a filament is connected between the two contact electrodes.

5. The vacuum sample heating device according to claim 4, characterized in that, The filament is made of ultra-high temperature metal.

6. The vacuum sample heating device according to claim 4, characterized in that, A sheet-like connecting part 2 is provided on one side of the filament support body.

7. The vacuum sample heating device according to claim 4, characterized in that, The sample holder has a sheet-like connecting part on one side.

8. The vacuum sample heating device according to claim 7, characterized in that, One end of the sample transfer rod is provided with a groove, which includes a central circular groove and a longitudinal groove disposed in the central circular groove.

9. The vacuum sample heating device according to claim 8, characterized in that, The groove is adapted to the shape of the sheet-like connecting part one, the sheet-like connecting part two, and the sheet-like connecting part three.

10. The vacuum sample heating device according to claim 1, characterized in that, The horizontal moving base is provided with two fixed slots, which are respectively engaged with the sample holder and the filament holder.

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