Vacuum heat treatment furnace

By designing a multi-inlet/return water pipe parallel system in the vacuum heat treatment furnace, combined with temperature and flow detection, uniform distribution and real-time adjustment of cooling water were achieved, solving the problems of insufficient dynamic adjustment of cooling water and water circuit blockage, and improving system stability and maintenance efficiency.

CN224266775UActive Publication Date: 2026-05-22厦门金鹭硬质合金有限公司
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
厦门金鹭硬质合金有限公司
Filing Date
2025-04-21
Publication Date
2026-05-22

AI Technical Summary

Technical Problem

The existing cooling water distribution system for vacuum heat treatment furnaces has insufficient dynamic adjustment capability, resulting in temperature control deviations and the inability to monitor abnormal flow caused by water blockage in real time.

Method used

A cooling water distribution system for a vacuum heat treatment furnace was designed, including an inlet pipe, a return pipe, a water pump, a flow detection device, a temperature detection device, and a control device. Through the parallel design of multiple inlet/return pipes, the water pump power is adjusted in real time by combining temperature and flow detection, and water circuit blockage is monitored in real time. Flexible hose connection and modular fastener fixation are used to simplify the pipeline route and improve cooling uniformity and stability.

Benefits of technology

It achieves uniform distribution of cooling water and real-time temperature regulation, avoids over- or under-cooling, promptly detects water circuit blockage, improves system operational stability and maintenance response efficiency, and reduces energy consumption and maintenance time.

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Abstract

The utility model discloses a vacuum heat treatment furnace, belongs to the field of heat treatment equipment, and is used for solving the problem of flow abnormity caused by uneven cooling water distribution, cooling temperature control deviation and waterway blockage. The vacuum heat treatment furnace comprises a furnace body, a cooling water using part and a cooling water distribution system, wherein the cooling water distribution system comprises a water inlet pipe, a water return pipe, a water pump, a water inlet branch pipe, a water return branch pipe, a flow detection device, a temperature detection device and a control device; the water inlet pipe, the water return pipe, the water inlet branch pipe and the water return branch pipe are arranged outside the vacuum heat treatment furnace; one end of the water inlet branch pipe is connected with the water inlet pipe, and the other end is connected with the water inlet end of a water using part; one end of the water return branch pipe is connected with the water return pipe, and the other end is connected with the water outlet end of a water using component; the flow detection device is connected with the water return branch pipe; the temperature detection device is arranged on the water consumption part; the flow detection device, the temperature detection device and the water pump are all electrically connected with the control device.
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Description

Technical Field

[0001] This application relates to the field of heat treatment equipment technology, and in particular to a vacuum heat treatment furnace. Background Technology

[0002] Vacuum heat treatment furnaces are indispensable pieces of equipment in industrial production, and the cooling water distribution system is a key component ensuring their stable operation. This system uses circulating cooling water to continuously absorb and remove heat generated by water-using components such as electrodes, furnace body, motor, and vacuum pump, thereby maintaining the normal operating temperature of each module. The cooling water system of a vacuum heat treatment furnace mainly consists of water pumps, cooling water pipelines, radiators, and a control system. During furnace operation, cooling water is drawn in by the pumps and sent into the cooling water pipelines. As the water flows, it continuously absorbs the heat generated by the furnace. When the water temperature rises, it is sent to the radiators for cooling. Subsequently, the cooled water is sent back into the furnace for further cooling. This process is continuously repeated to ensure the normal operation of the vacuum heat treatment furnace.

[0003] Existing cooling water distribution systems for vacuum heat treatment furnaces suffer from over- or under-cooling defects: over-cooling refers to the cooling water system's excessive cooling effect on each module, resulting in excessively low operating temperatures; under-cooling refers to the cooling water system's insufficient cooling effect on the vacuum heat treatment furnace, resulting in excessively high temperatures in each module. Furthermore, existing cooling water distribution systems lack reasonable allocation and real-time monitoring mechanisms for changes in cooling water flow. When local blockages occur in the cooling water path, timely warnings based on abnormal flow rates are not available. Since blockages lead to reduced water flow rate, decreased heat exchange efficiency, and even under-cooling or localized overheating, current technologies rely on periodic manual inspections, making it difficult to detect blockages promptly, resulting in delayed maintenance and risks to system stability.

[0004] It should be noted that the information disclosed in the background section above is only used to enhance the understanding of the background of this disclosure, and therefore may include information that does not constitute prior art known to those skilled in the art. Utility Model Content

[0005] (a) Technical problems to be solved

[0006] This application provides a cooling water distribution system for a vacuum heat treatment furnace, which can solve the problems of temperature control deviation caused by insufficient dynamic adjustment capability of cooling water and abnormal flow caused by the inability to monitor water blockage in real time in the prior art.

[0007] (II) Technical Solution

[0008] To solve the above-mentioned technical problems, this application provides the following technical solution:

[0009] A vacuum heat treatment furnace is provided, comprising: a furnace body, a cooling water component, and a cooling water distribution system. The cooling water distribution system includes an inlet pipe, a return pipe, a water pump, an inlet water pipe, a return water pipe, a flow detection device, a temperature detection device, and a control device. The inlet pipe, return pipe, inlet water pipe, and return water pipe are located outside the furnace body. The inlet pipe supplies cooling water via the water pump. One end of the inlet water pipe is connected to the inlet pipe, and the other end is connected to the inlet end of the water component. One end of the return water pipe is connected to the return pipe, and the other end is connected to the outlet end of the water component. The flow detection device is connected to the return water pipe and is used to detect the water flow rate of the return water pipe. The temperature detection device is disposed on the water component and configured to detect the temperature of the water component. The flow detection device, the temperature detection device, and the water pump are all electrically connected to the control device.

[0010] In some embodiments, the inlet pipe and the return pipe extend axially along the furnace body and are parallel to each other; there are multiple inlet pipes, which are spaced apart along the length of the inlet pipe and are respectively connected to the cooling water pipes of multiple water-using components; there are multiple return pipes, which are spaced apart along the length of the return pipe and are respectively connected to the cooling water pipes of multiple water-using components.

[0011] In some embodiments, the water inlet pipe has a bend section that extends circumferentially along the furnace body towards the water return pipe; the water return pipe has a bend section that extends circumferentially along the furnace body towards the water inlet pipe; the number of the water return pipes corresponds to the number of the plurality of water inlet pipes.

[0012] In some embodiments, the inlet water pipe and the return water pipe are each provided with a straight section, one end of which is connected to the inlet water pipe or the return water pipe, and the other end is connected to the bend section.

[0013] In some embodiments, one end of the water inlet pipe and the water return pipe are respectively provided with a connector, and the connector is connected to the water inlet or outlet of the water-using component through a flexible hose.

[0014] In some embodiments, pressure gauges are provided on the inlet pipe and the return pipe.

[0015] In some embodiments, the cooling water distribution system of the vacuum heat treatment furnace further includes a support rod and fasteners. The support rod is fixedly disposed on the outside of the furnace body of the vacuum heat treatment furnace. The fasteners have two fastener bodies, each of which is provided with an arc groove. The water inlet pipe or water return pipe is disposed between the arc grooves of the two fastener bodies. The two fastener bodies are connected to the support rod by bolts.

[0016] In some embodiments, the support rod has a through groove extending along the length direction, and an opening extending along the length direction is provided on one side of the through groove. The two fasteners are connected to the inner wall of the through groove by the bolt passing through the opening.

[0017] In some embodiments, the water-using components include at least two of the following: furnace shell, electrodes, motor, mold temperature controller, vacuum pump, and rapid cooling module.

[0018] (III) Beneficial Effects

[0019] Compared with the prior art, the vacuum heat treatment furnace of this application can achieve at least the following technical effects:

[0020] 1) Through the parallel design of multiple inlet / outlet water pipes, each water-using component has an independent inlet / outlet water pipe, ensuring uniform distribution of cooling water.

[0021] 2) The temperature of each water-using component is monitored in real time by a temperature detection device, and the data is fed back to the control device. Combined with the closed-loop regulation of the water pump power: when the temperature is higher than the preset value, the power is increased to increase the flow rate of the coolant; when the temperature is lower than the preset value, the power is reduced to decrease the flow rate, thus solving the temperature deviation problem caused by over-cooling or under-cooling in the existing technology.

[0022] 3) By connecting the flow detection device to the inlet bend, the system can detect the inlet water flow and compare it with a preset threshold to determine in real time whether the cooling water circuit is blocked. For example, if the flow rate is lower than the threshold, it is considered blocked. By connecting the control device to the flow detection device, the system can obtain and output abnormal flow detection results, reminding personnel to perform timely maintenance intervention to avoid water flow stagnation, reduced heat exchange efficiency, or module overheating damage caused by local blockage, thereby improving system operation stability and maintenance response efficiency.

[0023] 4) By building the cooling water system on the outside of the furnace body, and combining the inlet / outlet water pipes arranged parallel to the furnace body axis, with the bend section design of the inlet and outlet water pipes around the furnace body, the furnace shell and other cooling water-using components (high-temperature components) can be cooled simultaneously, while simplifying the pipeline route, avoiding cross interference, improving cooling efficiency, and saving external space of the furnace body.

[0024] 5) The use of hose connections and modular fasteners facilitates the disassembly and replacement of parts; pressure gauge monitoring can quickly locate blockages or leaks. Attached Figure Description

[0025] To more clearly illustrate the technical solutions in the embodiments of this application, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the accompanying drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0026] Figure 1 This is a perspective view of the cooling water distribution system of the vacuum heat treatment furnace in the embodiments of this application;

[0027] Figure 2 This is a system block diagram of the cooling water distribution system for the vacuum heat treatment furnace in an embodiment of this application;

[0028] Figure 3 This is a top view of the cooling water distribution system of the vacuum heat treatment furnace in an embodiment of this application;

[0029] Figure 4 This is a front view of the cooling water distribution system of the vacuum heat treatment furnace in an embodiment of this application;

[0030] Figure 5 yes Figure 1 A schematic diagram of region A in the middle.

[0031] Reference numerals: 1. Inlet pipe; 2. Return pipe; 3. Water pump; 4. Flow detection device; 5. Temperature detection device; 6. Control device; 7. Water-using component; 8. Furnace shell; 9. Support rod; 11. Inlet pipe; 21. Return pipe; 91. Fastener; 92. Through groove; 93. Opening; 94. Fastener body; 95. Arc groove; 96. Bolt; 111. Bend section; 112. Straight section; 113. Connector; 114. Pressure gauge.

[0032] The accompanying drawings illustrate specific embodiments of this application, which will be described in more detail below. These drawings and descriptions are not intended to limit the scope of the concept in any way, but rather to illustrate the concept of this application to those skilled in the art through reference to particular embodiments. Detailed Implementation

[0033] To make the objectives, technical solutions, and advantages of this application clearer, the embodiments of this application will be described in further detail below with reference to the accompanying drawings.

[0034] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of the present utility model.

[0035] The existing cooling water distribution system for vacuum heat treatment furnaces suffers from insufficient dynamic adjustment capability of cooling water, resulting in temperature control deviations, and the inability to monitor water blockages in real time, leading to abnormal flow rates.

[0036] To address the aforementioned technical problems, this embodiment provides a vacuum heat treatment furnace, including a cooling water distribution system. (See reference...) Figures 1 to 4 As shown, Figure 1 This is a perspective view of the cooling water distribution system of the vacuum heat treatment furnace in an embodiment of this application. Figure 2 This is a system block diagram of the cooling water distribution system for the vacuum heat treatment furnace in an embodiment of this application. Figure 3 This is a top view of the cooling water distribution system of the vacuum heat treatment furnace in an embodiment of this application. Figure 4 This is a front view of the cooling water distribution system of the vacuum heat treatment furnace in this embodiment of the application.

[0037] The cooling water distribution system includes: inlet pipe 1, return pipe 2, water pump 3, inlet water pipe 11, return water pipe 21, flow detection device 4, temperature detection device 5, and control device 6.

[0038] The vacuum heat treatment furnace also includes the furnace body and cooling water supply components 7.

[0039] The inlet pipe 1 inputs cooling water through the water pump 3, and the return pipe 2 is configured to output the cooling water after heat exchange with the water-using component 7.

[0040] One end of the inlet water pipe 11 is connected to the inlet water pipe 1, and the other end is connected to the inlet end of the water-using component 7. The number of inlet water pipes 11 corresponds to the number of water-using components 7, and they are used to deliver cooling water to each water-using component 7. One end of the return water pipe 21 is connected to the return water pipe 2, and the other end is connected to the outlet end of the water-using component 7. The number of return water pipes 21 corresponds to the number of water-using components 7, and they are used to output the cooling water after heat exchange in the water-using component 7. Here, the cooling water-using component 7 includes at least two of the following: furnace shell, heating electrode, motor, mold temperature controller, vacuum pump, and rapid cooling module. For example, the water-using component 7 is an electrode, and the electrode has a cooling channel inside. The inlet water pipe 11 is connected to the inlet end of the cooling channel through a hose to deliver cooling water into the electrode to cool it. The return water pipe 21 is connected to the outlet end of the cooling channel to output the cooling water after heat exchange inside the electrode.

[0041] The flow detection device 4 is connected to the return water pipe 21. Each return water pipe 21 is equipped with a flow detection device 4 to detect the water flow rate of each return water pipe 21. The flow detection device 4 can be an existing flow meter.

[0042] Temperature detection device 5 is used to detect the temperature of each water-using component 7 and feed the temperature information back to control device 6. Temperature detection device 5 can be an existing temperature sensor, and its installation method and location depend on the specific situation of each water-using component 7. Existing installation methods can be used.

[0043] The control device 6 is communicatively connected to the temperature detection device 5, the flow detection device 4, and the water pump 3. When the temperature is lower than a preset value, the control device 6 reduces the power of the water pump 3 to decrease the coolant input flow rate, and increases the power of the water pump 3 to increase the flow rate when the temperature is higher than the preset value. The control device 6 triggers an alarm when the water flow rate in the return water pipe 21 is lower than a threshold value. The preset value can be dynamically set according to the working stage of the vacuum heat treatment furnace.

[0044] For example, control device 6 implements temperature-power closed-loop regulation through existing PLC programming. For example, control device 6 includes a data acquisition module, data processing logic, and an execution control module. The data acquisition module integrates temperature, flow rate, and pressure signals; the data processing module compares the temperature with a preset value, adjusts the water pump power, and simultaneously detects the flow rate threshold, determines blockage, and triggers an alarm, such as using an existing PID control algorithm; the execution control module outputs water pump control commands and alarm signals.

[0045] For example, control device 6 can trigger an alarm using an existing alarm light or sound device.

[0046] The existing cooling water distribution system for vacuum heat treatment furnaces suffers from long and redundant cooling water delivery paths, resulting in significant pressure drop losses, increased energy consumption of the water pump 3, and reduced overall heat exchange efficiency. To address this issue, in one embodiment, the inlet and return water pipes are located outside the furnace shell 8, extending axially and parallel to each other. The inlet water pipe 11 and return water pipe 21 are positioned outside the furnace shell 8. The inlet water pipes 11 are spaced apart along their length, with the spacing matching the distribution of the water-using components. The return water pipes 21 are spaced apart along their length. This arrangement ensures that the inlet water pipes 11 are evenly distributed from the inlet water pipe 1 and directly connected to the inlet of each water-using component 7; the return water pipes 21 converge from the outlet of the water-using component 7 to the return water pipe 2. This structure shortens the cooling water delivery path and reduces pipe bends and branch resistance. The short-path parallel structure reduces water flow resistance and pressure drop loss, improves cooling water delivery efficiency, and reduces the energy consumption of water pump 3; while the spaced arrangement ensures uniform distribution of cooling water to each water-using component 7, avoiding localized insufficient cooling or redundancy. It should be noted that the length directions of both the inlet pipe 1 and the return pipe 2 can be parallel to the length direction of the furnace shell 8 of the vacuum heat treatment furnace.

[0047] In one embodiment, the furnace body is cylindrical.

[0048] Further, see Figure 1 and Figure 4As shown, the inlet water pipe 11 and the return water pipe 21 are provided with bent sections 111. The shape of the bent sections 111 matches the shape of the outer surface of the furnace body of the vacuum heat treatment furnace. The bent sections of the inlet water pipe 11 extend circumferentially along the furnace shell 8 towards the return water pipe; the bent sections of the return water pipe 21 extend circumferentially along the furnace shell 8 towards the return water pipe. For example, each bent section 111 is an arc with the same radius, and the arc-shaped bent section 111 is coaxially arranged with the furnace shell 8 of the vacuum heat treatment furnace. The bent sections 111 extend along the arc of the outer wall of the furnace shell 8, forming a ring-shaped water channel distribution. In this way, the arc-shaped bent sections 111 are coaxial with the furnace shell 8, avoiding eddies or pressure changes caused by sharp turns in the water flow, ensuring a smooth water flow. The annular layout matches the internal space of the vacuum heat treatment furnace, optimizes the coverage of cooling water on the furnace surface, and, combined with the above-mentioned layout of the inlet water pipe 11 and return water pipe 21 distributed at intervals on the outside of the furnace body, can simultaneously dissipate heat from the furnace body, achieve uniform heat dissipation, and efficiently cool each area of ​​the furnace shell 8.

[0049] In one implementation, see [reference] Figure 1 and Figure 4 As shown, the inlet water pipe 11 and the return water pipe 21 are provided with straight sections 112 extending along the height direction of the furnace shell 8. One end of the straight section 112 is connected to the inlet water pipe 1 or the return water pipe 2, and the other end is connected to the bend section 111. In this way, the straight section 112 extends along the height direction of the furnace shell 8, providing a support reference for the bend section 111. The straight section 112 simplifies the pipeline routing, reduces the complexity when installed on the inlet water pipe 1 or the return water pipe 2, and facilitates quick location of branch pipes during maintenance.

[0050] In one embodiment where the aforementioned inlet water pipe 11 and return water pipe 21 are connected to the inlet water pipe 1 or the return water pipe 2, see [reference needed]. Figure 1 and Figure 4 As shown, the inlet water pipe 11 and the return water pipe 21 are each equipped with a connector 113 at one end. The connector 113 is connected to the inlet or outlet of the water-using component 7 via a flexible hose. The flexible hose is made of high-temperature resistant and corrosion-resistant material, allowing for a certain degree of deformation. The flexible connection compensates for thermal expansion and contraction or vibration displacement during the operation of the vacuum heat treatment furnace, preventing cracking and leakage of the rigid interface. At the same time, the flexible hose facilitates quick assembly and disassembly, shortening maintenance time.

[0051] In one implementation, see [reference] Figure 1 As shown, pressure gauges 114 are installed on the inlet pipe 1 and the return pipe 2, and the pressure gauges 114 display the internal pressure of the pipes in real time. For example, the pressure gauges 114 are located at the ends of the inlet pipe 1 and the return pipe 2. The pressure data helps to determine whether the pipes are blocked or leaking (for example, a sudden drop in pressure indicates a leak, and a rise in pressure indicates a blockage). Together with flow detection, they form a dual verification, providing additional basis for system status assessment.

[0052] In one implementation, see [reference] Figure 1and Figure 5 As shown, Figure 5 yes Figure 1 A schematic diagram of area A. The cooling water distribution system of the vacuum heat treatment furnace also includes support rods 9 and fasteners 91. The support rod 9 has a through groove 92 extending along its length, and an opening 93 extending along its length is provided on one side of the through groove 92. The fastener 91 includes two fastener bodies 94, each with an arc groove 95. The inlet water pipe 11 or the return water pipe 21 is located between the arc grooves 95 of the two fastener bodies 94. Bolts 96 pass through the two fastener bodies 94 and can be connected to the inside of the opening 93 of the support rod 9 to fix the inlet water pipe 11 or the return water pipe 21 to the support rod 9. The support rods 9 are distributed along the outer wall or frame of the furnace shell 8. The fasteners 91 form an adjustable structure through the connecting rods and fastener bodies 94 to adapt to different pipe diameters, realize the rapid positioning and stable fixation of the water distribution pipes, and prevent water flow impact from causing pipe displacement. The structure of the opening 93 of the through groove 92 facilitates adjustment of the installation position and improves layout flexibility.

[0053] The working process of the cooling water distribution system of the vacuum heat treatment furnace in this application is as follows: the water pump 3 drives the cooling water to flow in from the water inlet pipe 1, and distributes it evenly to each water-using component 7 of the vacuum heat treatment furnace (such as electrodes, furnace body, etc.) through the parallel water inlet pipe 11, absorbing the heat generated by them; the cooling water after absorbing heat flows into the water return pipe 2 through the water return pipe 21, and is transported to the external radiator for cooling, and then re-enters the circulation; the water inlet / return pipes are arranged along the outer path of the furnace shell 8 to reduce water flow resistance, and the bend section 111 adopts a circular arc design coaxial with the furnace shell 8 to avoid water flow vortex and improve the conveying efficiency.

[0054] The temperature dynamic monitoring and adjustment process of the cooling water distribution system of the vacuum heat treatment furnace in this application is as follows: the temperature detection device 5 continuously collects the surface temperature data of each water-using component 7 and feeds it back to the control device 6; when the temperature of the water-using component 7 exceeds the preset threshold, the control device 6 increases the power of the water pump 3, increases the cooling water flow rate, and accelerates the removal of heat; when the temperature is below the threshold, the power of the water pump 3 is reduced, the cooling water flow rate is reduced, and overcooling is prevented.

[0055] It is understandable that, in order to control the flow rate of each water inlet pipe 11 individually, each water inlet pipe 11 can also be equipped with a separate flow control device, such as an electronic valve, to control the cooling water delivery rate of each water-using component 7.

[0056] The abnormal flow detection and blockage warning process of the cooling water distribution system for the vacuum heat treatment furnace in this application is as follows: The flow detection device 4 is installed on the return water pipe 21 to monitor the return water flow in real time; if the flow rate is continuously lower than the preset threshold (such as due to pipe blockage or leakage causing the return water to be blocked), the control device 6 will immediately trigger an alarm signal; maintenance personnel can quickly locate the blockage point and clean it to avoid local overheating or equipment damage caused by insufficient flow.

[0057] In summary, the cooling water distribution system for the vacuum heat treatment furnace of this application employs a multi-inlet / return water pipe parallel design, ensuring uniform cooling water distribution for each water-using component with independent inlet / return water pipes. A temperature detection device monitors the temperature of each water-using component in real time and feeds the data back to the control device. Combined with closed-loop adjustment of the water pump power: when the temperature is higher than the preset value, the power is increased to increase the coolant flow rate; when the temperature is lower than the preset value, the power is reduced to decrease the flow rate, thus solving the temperature deviation problem caused by over- or under-cooling in existing technologies. A flow detection device connected to the inlet bend detects the inlet water flow rate and compares it with a preset threshold, enabling real-time determination of whether the cooling water path is blocked. Blockages are detected when the flow rate falls below a threshold; the control device connects to the flow detection device to obtain and output abnormal flow detection results, alerting personnel to timely maintenance intervention and preventing water flow stagnation, decreased heat exchange efficiency, or module overheating damage caused by local blockages, thereby improving system operational stability and maintenance response efficiency; by building the cooling water system on the outside of the furnace body, combined with the parallel arrangement of inlet / return water pipes along the furnace body axis, and the bend design of the inlet and return water pipes around the furnace body, the system can simultaneously cool the furnace shell and other cooling water-using components (high-temperature components), while simplifying pipeline routing, avoiding cross-interference, improving cooling efficiency, and saving external space of the furnace body. Flexible hose connections and modular fasteners facilitate component disassembly and replacement; pressure gauge monitoring can quickly locate blockages or leaks.

[0058] The above description is merely an optional embodiment of this application and is not intended to limit this application. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this application should be included within the protection scope of this application.

Claims

1. A vacuum heat treatment furnace, characterized in that, It includes a furnace body, cooling water components, and a cooling water distribution system. The cooling water distribution system includes an inlet pipe, a return pipe, a water pump, an inlet branch pipe, a return branch pipe, a flow detection device, a temperature detection device, and a control device. The water inlet pipe, water return pipe, water inlet branch pipe, and water return branch pipe are located on the outside of the vacuum heat treatment furnace. Cooling water is supplied through the water inlet pipe via a water pump; One end of the water inlet pipe is connected to the water inlet pipe, and the other end is connected to the water inlet end of the water-using component; One end of the return water pipe is connected to the return water pipe, and the other end is connected to the water outlet of the water-using component. The flow detection device is connected to the return water pipe and is used to detect the water flow rate of the return water pipe; The temperature detection device is installed on the water-using component and is configured to detect the temperature of the water-using component; the flow detection device, the temperature detection device, and the water pump are all electrically connected to the control device.

2. The vacuum heat treatment furnace according to claim 1, characterized in that, The inlet and return water pipes extend axially along the furnace body and are parallel to each other; there are multiple inlet water pipes, which are spaced apart along the length of the inlet water pipe and are respectively connected to the cooling water pipes of multiple water-using components; there are multiple return water pipes, which are spaced apart along the length of the return water pipe and are respectively connected to the cooling water pipes of multiple water-using components.

3. The vacuum heat treatment furnace according to claim 2, characterized in that, The water inlet pipe is equipped with a bend section. , Furthermore, the bend in the pipe extends circumferentially along the furnace body towards the return water pipe; the return water pipe is provided with a bend in the pipe. , Furthermore, the bend in the pipe extends along the circumference of the furnace body towards the water inlet pipe.

4. The vacuum heat treatment furnace according to claim 3, characterized in that, The inlet water pipe and the return water pipe are each provided with a straight section. One end of the straight section is connected to the inlet water pipe or the return water pipe, and the other end is connected to the bend section.

5. The vacuum heat treatment furnace according to any one of claims 1-4, characterized in that, The inlet water pipe and the return water pipe are each provided with a connector at one end, and the connector is connected to the inlet or outlet of the water-using component through a flexible hose.

6. The vacuum heat treatment furnace according to any one of claims 1-4, characterized in that, Pressure gauges are installed on the inlet and outlet water pipes.

7. The vacuum heat treatment furnace according to any one of claims 1-4, characterized in that, The cooling water distribution system of the vacuum heat treatment furnace also includes a support rod and fasteners. The support rod is fixedly installed on the outside of the furnace body of the vacuum heat treatment furnace. The fasteners have two fastener bodies, each with an arc groove. The water inlet pipe or water return pipe is located between the arc grooves of the two fastener bodies. The two fastener bodies are connected to the support rod by bolts.

8. The vacuum heat treatment furnace according to claim 7, characterized in that, The support rod has a through groove extending along its length, and an opening extending along its length is provided on one side of the through groove. The two fasteners are connected to the inner wall of the through groove by bolts passing through the opening.

9. The vacuum heat treatment furnace according to claim 1, characterized in that, The cooling water components include at least two of the following: furnace shell, electrodes, motor, mold temperature controller, vacuum pump, and rapid cooling module.