Cavity cover anti-falling structure and semiconductor processing device

Abstract

The utility model relates to a cavity cover anti-falling structure and a semiconductor processing device. The cavity cover anti-falling structure comprises a tooth-shaped groove, the tooth-shaped groove comprises a bottom plate extending in the first direction and a tooth-shaped side plate connected to the side face of the bottom plate in the second direction, and the tooth-shaped side plate is provided with a plurality of tooth openings distributed at intervals in the first direction; the limiting assembly comprises a main sliding block, the main sliding block is located on the bottom plate and can slide along the tooth-shaped groove, a containing cavity is formed in the main sliding block, a pressing sliding block and a clamping structure are arranged in the containing cavity, the pressing sliding block can ascend and descend in the third direction, and a through hole is formed in the side face, in the second direction, of the main sliding block; when the pressing sliding block moves in the third direction, the clamping structure can be pushed to stretch out of the through hole and be inserted into the tooth opening. One end of the supporting rod is connected with the main sliding block, and the other end of the supporting rod is used for being connected with the cavity cover. According to the utility model, the problem of falling of the cavity cover caused by misoperation of workers or accidents in the cavity opening process is avoided.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor processing technology, and in particular to a cavity cover anti-fall structure and a semiconductor processing device. Background Technology

[0002] The reaction chamber inside a semiconductor processing device is one of its most critical components. With the evolution of semiconductor manufacturing processes towards the nanoscale and the application of new technologies such as plasma technology, the weight of the chamber cover located above the reaction chamber has increased significantly. To ensure the smooth operation of the processing within the reaction chamber, regular inspection and maintenance are necessary. During the opening of the semiconductor processing device for inspection and maintenance, as well as the installation and assembly of components within the chamber cover, it is often necessary to fix the chamber cover in a specific position and prevent it from falling due to operator error or accident, thus avoiding injury or damage to the semiconductor processing device. However, currently there is no effective method to prevent the chamber cover from falling, relying solely on manual supervision, which increases the risk and difficulty of inspecting or maintaining the semiconductor processing device.

[0003] Therefore, how to reduce the risk of the cavity cover falling off during the inspection or maintenance of semiconductor processing devices, thereby reducing operational complexity and increasing operational safety, and avoiding personal injury or damage to the semiconductor processing devices, is a technical problem that urgently needs to be solved. Summary of the Invention

[0004] This utility model provides a cavity cover anti-fall structure and a semiconductor processing device to reduce the risk of the cavity cover falling during the opening inspection or maintenance of the semiconductor processing device, thereby reducing the operational complexity and increasing operational safety, and avoiding personal injury or damage to the semiconductor processing device.

[0005] According to some embodiments, this utility model provides a cavity cover anti-fall structure, comprising:

[0006] The toothed groove includes a base plate extending along a first direction and a toothed side plate connected to the side of the base plate along a second direction. The toothed side plate has a plurality of teeth spaced apart along the first direction, wherein the first direction intersects the second direction perpendicularly.

[0007] A limiting component includes a main slider located on the base plate and capable of sliding along the toothed groove. The main slider has an internal receiving cavity containing a pressing slider and a clamping structure. The pressing slider is capable of vertical movement along a third direction. The main slider has a through hole on its side along the second direction. When the pressing slider moves along the third direction, it can push the clamping structure to extend out of the through hole and insert into the toothed groove. The third direction intersects perpendicularly to both the first and second directions.

[0008] A support rod, one end of which is connected to the main slider and the other end of which is used to connect to the cavity cover.

[0009] In some embodiments, the base plate includes a bearing surface for supporting the main slider, and the tooth sidewall of the toothed jaw intersects the bearing surface of the base plate at an angle.

[0010] In some embodiments, the limiting component further includes:

[0011] A handle is located on the top surface of the main slider, and the handle extends through the main slider and into the receiving cavity along the third direction;

[0012] A compression spring is located inside the receiving cavity, with one end connected to the handle and the other end connected to the main slider.

[0013] In some embodiments, the handle includes:

[0014] Rotate the handle;

[0015] A pull rod extends along the third direction, with one end of the pull rod connected to the rotary handle and the other end connected to the compression spring;

[0016] A guide post is connected to the top surface of the main slider. The guide post has a through hole extending through the guide post in the third direction and a guide groove located on the side of the guide post. The guide groove communicates with the through hole.

[0017] A guide plate is located above the guide post and connected to the side of the pull rod, and the guide plate can pass through the guide groove.

[0018] In some embodiments, the locking structure includes:

[0019] A clamping slider is located on the side of the pressing slider along the second direction, and the pressing slider can push the clamping slider to move along the second direction;

[0020] A pin is connected to the surface of the clamping slider away from the pressing slider in the second direction, and the pin can extend out of the through hole and be inserted into the toothed opening.

[0021] In some embodiments, the two clamping sliders are symmetrically distributed on opposite sides of the pressing slider along the second direction, and the two pins are connected one-to-one to the surfaces of the two clamping sliders that are away from the pressing slider along the second direction;

[0022] The pressing slider is an inverted isosceles trapezoidal slider, and the clamping slider is a right-angled trapezoidal slider. The opposite two sides of the inverted isosceles trapezoidal slider match and contact the oblique sides of the two right-angled trapezoidal sliders.

[0023] In some embodiments, the clamping structure further includes:

[0024] A return spring is located inside the receiving cavity. One end of the return spring is connected to the side of the clamping slider, and the other end is connected to the pin.

[0025] In some embodiments, the main slider includes a front end and a rear end distributed along the first direction, and the receiving cavity is located at the rear end;

[0026] The front end of the main slider has a groove, and the support rod is connected to the groove.

[0027] According to other embodiments, the present invention also provides a semiconductor processing apparatus, comprising:

[0028] The outer shell of the cavity encloses and forms a semiconductor processing chamber;

[0029] The cavity cover anti-fall structure described above is connected to the outer wall of the cavity shell facing away from the semiconductor processing chamber;

[0030] A cavity cover, located above the outer shell of the cavity, is used to seal the semiconductor processing chamber. The side wall of the cavity cover is connected to the support rod in the cavity cover anti-fall structure.

[0031] In some embodiments, the two cavity cover anti-fall structures are symmetrically connected to the opposite two outer side walls of the cavity shell along the second direction.

[0032] The cavity cover anti-fall structure and semiconductor processing device provided by this utility model, by setting a support rod, a toothed groove and a limiting component in the cavity cover anti-fall structure, wherein the toothed groove is provided with multiple toothed openings, the main slider in the limiting component is placed in the toothed groove and can slide along the toothed groove, the support rod is used to connect the main slider and the cavity cover, when the cavity cover is opened, the pressing slider in the limiting component can be controlled to move vertically downward (for example, downward along the third direction), thereby pushing the clamping structure to move horizontally outward (for example, along the second direction), so that the clamping structure extends out from the through hole on the side of the main slider and inserts into the toothed opening, thereby fixing the position of the main slider through the toothed opening, preventing the main slider from sliding continuously, and thus preventing the cavity cover connected to the main slider from falling, avoiding the problem of the cavity cover falling due to operator error or accident during the cavity opening process. Furthermore, since the toothed groove has multiple teeth, the main slider can be fixed at the multiple teeth positions using the clamping structure according to actual needs. This allows for flexible adjustment of the opening and closing angle of the cavity cover, facilitating inspection and maintenance of the semiconductor processing device by personnel. Moreover, the cavity cover anti-fall structure provided by this invention is a purely mechanical structure without any electrical components, making it not only simple to install but also safe and reliable to operate. Furthermore, the cavity cover anti-fall structure provided by this invention is compact, easy to install, and reliable in operation, automatically preventing the cavity cover from falling without manual intervention. Attached Figure Description

[0033] To more clearly illustrate the technical solutions in the embodiments of this utility model, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without any creative effort.

[0034] Figure 1 This is a schematic diagram of the cavity cover anti-fall structure and the cavity cover connection in a specific embodiment of this utility model;

[0035] Figure 2 This is a schematic diagram of the cavity cover anti-fall structure in a specific embodiment of this utility model when it is not locked.

[0036] Figure 3 This is a schematic diagram of the cavity cover anti-fall structure when it is locked in a specific embodiment of this utility model.

[0037] Explanation of reference numerals in the attached figures

[0038] 10. Cavity cover

[0039] 11. Cavity cover upper part

[0040] 12 Support rod seat

[0041] 13 Support rods

[0042] 14. Cavity outer shell

[0043] 15 Toothed Grooves

[0044] 16 Limiting components

[0045] 17 Semiconductor processing chamber

[0046] 20 Main slider

[0047] 21 Receiving cavity

[0048] 22 Pressing slider

[0049] 23. Return spring

[0050] 24 Clamping slider

[0051] 25 Pins

[0052] 26 Toothed side plates

[0053] 27 teeth

[0054] 28. Tooth mouth sidewall

[0055] 29 Rotating handle

[0056] 30 Guide Plate

[0057] 31 Guide Column

[0058] 32 Guide groove

[0059] 33 Compression Spring

[0060] 34 Connecting Plate

[0061] 35 Connecting hole

[0062] 36 base plate Detailed Implementation

[0063] The specific embodiments of the cavity cover anti-fall structure and semiconductor processing device provided by this utility model will be described in detail below with reference to the accompanying drawings.

[0064] This specific embodiment provides a cavity cover anti-fall structure. Figure 1 This is a schematic diagram of the cavity cover anti-fall structure connected to the cavity cover in a specific embodiment of this utility model. Figure 2 This is a schematic diagram of the cavity cover anti-fall structure in a specific embodiment of this utility model when it is not locked. Figure 3 This is a schematic diagram of the cavity cover anti-fall structure when it is locked in a specific embodiment of this utility model. (See diagram below.) Figure 1 , Figure 2 and Figure 3 As shown, the cavity cover anti-fall structure includes:

[0065] The toothed groove 15 includes a base plate 36 extending along a first direction D1 and a toothed side plate 26 connected to the side of the base plate 36 along a second direction D2. The toothed side plate 26 has a plurality of teeth 27 arranged at intervals along the first direction D1, wherein the first direction D1 intersects the second direction D2 perpendicularly.

[0066] The limiting component 16 includes a main slider 20, which is located on the base plate 36 and can slide along the toothed groove 15. The main slider 20 has a receiving cavity 21 inside, which contains a pressing slider 22 and a clamping structure. The pressing slider 22 can move up and down along a third direction D3. The main slider 20 has a through hole on its side along the second direction D2. When the pressing slider 22 moves along the third direction D3, it can push the clamping structure to extend out of the through hole and insert into the toothed opening 27. The third direction D3 intersects perpendicularly with both the first direction D1 and the second direction D2.

[0067] Support rod 13, one end of which is connected to the main slider 20 and the other end is used to connect to the cavity cover 10.

[0068] Specifically, such as Figure 2 and Figure 3 As shown, the toothed groove 15 includes a base plate 36 extending along the first direction D1 and two toothed side plates 26 located on opposite sides of the base plate 36 along the second direction D2. The base plate 36 and the two toothed side plates 26 together define the sliding path of the main slider 20 in the limiting assembly 16. The top surface of the main slider 20 is higher than the toothed groove 15. Each toothed side plate 26 extending along the first direction D1 has a plurality of teeth 27 arranged along the first direction D1, thereby making each toothed side plate 26 serrated. In one example, the base plate 36 includes a bearing surface for supporting the main slider 20, with both the first direction D1 and the second direction D2 parallel to the bearing surface, and the third direction D3 intersecting perpendicularly to both the first direction D1 and the second direction D2. The main slider 20 is located on the base plate 36 of the toothed groove 15 and can slide along the extension direction of the base plate 36 (e.g., the first direction D1). The main slider 20 has a receiving cavity 21 inside, and both the pressing slider 22 and the clamping structure are located within the receiving cavity 21. In one example, the clamping structure is located on the side of the pressing slider 22 along the second direction D2.

[0069] When the main slider 20 is connected to the cavity cover 10 in the semiconductor processing device via the support rod 13 (see...), Figure 1 Subsequently, during the cavity inspection of the semiconductor processing device, the cavity cover 10 is opened. The opening of the cavity cover 10 causes the main slider 20 to move forward along the toothed groove 15 via the support rod 13. At this time, the clamping slider 22 within the main slider 20 is driven to move downward along the third direction D3. As the clamping slider 22 moves downward along the third direction D3, it pushes a portion of the clamping structure out of the through hole on the side of the main slider 20 and inserts into a toothed opening 27, while the other portion of the clamping structure remains within the receiving cavity 21. After the portion of the clamping structure is inserted into the toothed opening 27, it blocks the sliding of the main slider 20, thereby fixing the main slider 20 within the toothed groove 15. After the main slider 20 stops moving, the support rod 13 blocks the movement of the cavity cover 10, thus preventing the cavity cover 10 from falling. Meanwhile, since the toothed groove 15 in this specific embodiment is provided with a plurality of toothed openings 27 arranged along the first direction D1, the locking structure can be adjusted to engage with the corresponding toothed openings 27 according to the opening angle requirements of the cavity cover 10, facilitating the inspection and maintenance of the semiconductor processing device by the staff according to actual needs. Furthermore, the cavity cover anti-fall structure provided in this specific embodiment is a purely mechanical structure without any electrical components, making it not only simple to install but also safe and reliable to operate. In one example, the third direction D3 is perpendicular to the bearing surface of the base plate 36.

[0070] In one example, the length of the toothed groove 15 along the first direction D1 or the groove span (e.g., the width of the toothed groove 15 along the second direction D2) can be adjusted according to the required opening angle of the cavity cover 10. For example, when the required opening angle of the cavity cover 10 increases, the length of the toothed groove 15 along the first direction D1 can be appropriately increased.

[0071] In some embodiments, the base plate 36 includes a bearing surface for supporting the main slider 20, and the tooth sidewall 28 of the toothed tooth 27 intersects the bearing surface of the base plate 36 at an incline.

[0072] For example, such as Figure 2 and Figure 3 As shown, the toothed opening 27 is an arc-shaped toothed opening, and the toothed opening sidewall 28 is an inclined sidewall, which facilitates the insertion of the clamping structure into the toothed opening 27 and avoids scratching the clamping structure, thus helping to improve the service life of the cavity cover anti-fall structure.

[0073] In some embodiments, the limiting component 16 further includes:

[0074] A handle is located on the top surface of the main slider 20, and the handle extends through the main slider 20 along the third direction D3 and into the receiving cavity 21;

[0075] A compression spring 33 is located inside the receiving cavity 21. One end of the compression spring 33 is connected to the handle, and the other end is connected to the main slider 20.

[0076] In some embodiments, the handle includes:

[0077] Rotate handle 29;

[0078] A pull rod extends along the third direction D3, with one end of the pull rod connected to the rotary handle 29 and the other end connected to the compression spring 33;

[0079] A guide post 31 is connected to the top surface of the main slider 20. The guide post 31 has a through hole that extends through the guide post 31 along the third direction D3 and a guide groove 32 located on the side of the guide post 31. The guide groove 32 communicates with the through hole.

[0080] The guide plate 30 is located above the guide post 31 and connected to the side of the pull rod. The guide plate 30 can pass through the guide groove 32.

[0081] Specifically, such as Figure 2 and Figure 3As shown, the main slider 20 includes a top surface and a bottom surface that are relatively distributed along the third direction D3. The bottom surface of the main slider 20 faces the bearing surface of the base plate 36, and the handle is installed on the top surface of the main slider 20. The handle includes a rotating handle 29, a pull rod, a guide post 31, and a guide plate 30. The pull rod is a straight rod that extends along the third direction D3 and into the interior of the receiving cavity 21. The top end of the pull rod is connected to the rotating handle 29, and the bottom end of the pull rod is connected to the compression spring 33. By setting the compression spring 33, the pulling force or pushing force of the handle on the compression slider 22 can be buffered, avoiding damage to the compression slider 22 and the clamping structure. The rotating handle 29 is used for workers to grip. The guide post 31 is fixed to the top surface of the main slider 20, and the pull rod passes through the through hole in the guide post 31 before extending into the receiving cavity 21. The guide groove 32 not only penetrates the guide post 31 along the third direction D3, but also penetrates the guide post 31 along a fourth direction, which is parallel to the bearing surface of the base plate 36. In one example, the fourth direction may be parallel to or intersect with the first direction D1. The guide plate 30 is connected to the side of the pull rod located above the guide post 31, and the size of the guide plate 30 matches the size of the guide groove 32, so that when the position of the guide plate 30 is aligned with the position of the guide groove 32, the guide plate 30 can freely pass through the guide groove 32.

[0082] When it is necessary to open the cavity cover 10 and secure the locking structure within one of the toothed openings 27, the operator can grasp and rotate (e.g., 90 degrees counterclockwise) the rotating handle 29 to align the guide plate 30 with the guide groove 32. Then, pressing the rotating handle 29 downwards along the third direction D3 causes the pull rod to move downwards along the through hole, while the guide plate 30 also moves downwards along the guide groove 32. The movement of the pull rod drives the clamping spring 33 below it to push the clamping slider 22 downwards along the third direction D3, thereby pushing the locking structure out of the through hole on the side of the main slider 20 and inserting it into one of the toothed openings 27. Figure 3 As shown, this is to prevent the cavity cover 10 from falling off.

[0083] When the cavity cover 10 needs to be closed, the operator can grasp and pull the rotating handle 29 upward along the third direction D3. The upward movement of the rotating handle 29 along the third direction D3 drives the pull rod upward. The movement of the pull rod, in turn, drives the clamping slider 22 upward along the third direction D3 via the clamping spring 33, thereby causing the locking structure to retract along the second direction D2, and thus causing the locking structure to disengage from the toothed opening 27. The main slider 20 can then move backward along the toothed groove 15. During the upward movement of the pull rod, the guide plate 30 also moves upward along the guide groove 32. When the guide plate 30 is completely above the guide post 31, the operator can rotate the rotating handle 29 again (e.g., 90 degrees clockwise) to offset the position of the guide plate 30 from the position of the guide groove 32, and the guide plate 30 is secured to the top surface of the guide post 31. Figure 2 As shown, the locking structure achieves self-locking when it exits the toothed state 27, thereby eliminating the need to continuously pull the handle during the closing of the cavity cover 10, further increasing the convenience and safety of the cavity cover anti-fall structure operation.

[0084] In some embodiments, the locking structure includes:

[0085] The clamping slider 24 is located on the side of the pressing slider 22 along the second direction D2, and the pressing slider 22 can push the clamping slider 24 to move along the second direction D2;

[0086] The pin 25 is connected to the surface of the clamping slider 24 away from the pressing slider 22 along the second direction D2, and the pin 25 can extend out of the through hole and be inserted into the toothed opening 27.

[0087] In some embodiments, the two clamping sliders 24 are symmetrically distributed on opposite sides of the pressing slider 22 along the second direction D2, and the two pins 25 are connected one-to-one to the surfaces of the two clamping sliders 24 that are away from the pressing slider 22 along the second direction D2;

[0088] The pressing slider 22 is an inverted isosceles trapezoidal slider, and the clamping slider 24 is a right-angled trapezoidal slider. The opposite two sides of the inverted isosceles trapezoidal slider match and contact the oblique sides of the two right-angled trapezoidal sliders.

[0089] In some embodiments, the clamping structure further includes:

[0090] The return spring 23 is located inside the receiving cavity 21. One end of the return spring 23 is connected to the side of the clamping slider 24, and the other end is connected to the pin 25.

[0091] Specifically, the clamping slider 22 is an inverted isosceles trapezoidal slider, meaning the width of the upper surface of the clamping slider 22 facing the handle is greater than the width of the lower surface facing away from the handle. The clamping slider 24 is a right-angled trapezoidal slider, with the inverted isosceles trapezoidal slider sandwiched between the two right-angled trapezoidal sliders. The opposite sides of the inverted isosceles trapezoidal slider match and contact the inclined sides of the two right-angled trapezoidal sliders, such as... Figure 2 and Figure 3 As shown. In one example, the clamping slider 22 is always held between the two clamping sliders 24. One end of the return spring 23 is fixedly connected to the surface of the clamping slider 24 facing away from the clamping slider 22, and the other end is fixedly connected to the pin 25. The position of the pin 25 corresponds to the position of the through hole on the side of the main slider 20. In one example, the curvature of the bottom of the arc-shaped toothed opening 27 matches the shape of the pin 25 to prevent the pin 25 from wobbling within the toothed opening 27.

[0092] When it is necessary to open the cavity cover 10 and secure the clamping structure within one of the toothed openings 27, the operator can grasp and rotate (e.g., 90 degrees counterclockwise) the rotating handle 29 to align the guide plate 30 with the guide groove 32. Then, pressing the rotating handle 29 downwards along the third direction D3 causes the guide plate 30 to move downwards along the guide groove 32 as the pull rod moves downwards along the through hole. The movement of the pull rod drives the clamping spring 33 below it to push the clamping slider 22 downwards along the third direction D3. As the clamping slider 22 moves downwards, it pushes the two clamping sliders 24 on both sides to move away from the clamping slider 22 along the second direction D2, causing the pin 25 connected to the clamping slider 24 to extend from the through hole on the side of the main slider 20 and insert into one of the toothed openings 27. Figure 3 As shown, this is to prevent the cavity cover 10 from falling off.

[0093] When the cavity cover 10 needs to be closed, the operator can grasp and pull the rotating handle 29 upward along the third direction D3. The upward movement of the rotating handle 29 along the third direction D3 drives the pull rod upward, and the movement of the pull rod, in turn, drives the clamping slider 22 upward along the third direction D3 via the clamping spring 33. The upward movement of the clamping slider 22 causes the two clamping sliders 24 to move towards each other along the second direction D2 under the elastic restoring force of the return spring 23, thereby causing the pin 25 to retract along the second direction D2 and disengage from the toothed opening 27. Figure 2As shown. The main slider 20 can move backward along the toothed groove 15.

[0094] In some embodiments, the main slider 20 includes a front end and a rear end distributed along the first direction D1, and the receiving cavity 21 is located at the rear end;

[0095] The front end of the main slider 20 has a groove, and the support rod 13 is connected to the groove.

[0096] This specific embodiment also provides a semiconductor processing apparatus. A schematic diagram of the semiconductor processing apparatus can be found in [reference needed]. Figure 1 A schematic diagram of the cavity cover anti-fall structure in the semiconductor processing device can be found in [reference needed]. Figure 2 and Figure 3 .like Figures 1-3 As shown, the semiconductor processing apparatus includes:

[0097] The outer shell 14 encloses and forms a semiconductor processing chamber 17;

[0098] The cavity cover anti-fall structure described above is connected to the outer wall of the cavity shell 14 facing away from the semiconductor processing chamber 17;

[0099] The cavity cover 10 is located above the cavity shell 14 and is used to seal the semiconductor processing chamber 17. The side wall of the cavity cover 10 is connected to the support rod 13 in the cavity cover anti-fall structure.

[0100] Specifically, such as Figures 1-3 As shown, the semiconductor processing device includes a cavity housing 14, a cavity cover 10 located above the cavity housing 14, and a cavity cover upper component 11 located on the cavity cover 10. The cavity cover anti-fall structure also includes a support rod seat 12 and a connecting plate 34. The support rod seat 12 is connected to the end of the support rod 13 away from the limiting component 16, and the support rod seat 12 is fixed to the side wall of the cavity cover 10, so as to realize the connection between the cavity cover 10 and the main slider 20 through the support rod seat 12 and the support rod 13. The connecting plate 34 is connected to the side of the toothed groove 15, and the connecting plate 34 has a connecting hole 35. By inserting a connector into the connecting hole 35, the two connecting plates 34 are fixed to the side of the cavity housing 14.

[0101] In some embodiments, two cavity cover anti-fall structures are symmetrically connected along the second direction D2 to the two opposite outer side walls of the cavity housing 14 to ensure uniform force distribution on the cavity cover 10 and further prevent the cavity cover 10 from falling. For example, when the weight of the cavity cover upper part 11 exceeds a preset weight, two cavity cover anti-fall structures are symmetrically arranged on the two opposite outer side walls of the cavity housing 14; when the weight of the cavity cover upper part 11 is lower than the preset weight, only one cavity cover anti-fall structure can be arranged on one of the outer side walls of the cavity housing 14.

[0102] The cavity cover anti-fall structure and semiconductor processing device provided in this specific embodiment, by setting a support rod, a toothed groove and a limiting component in the cavity cover anti-fall structure, wherein the toothed groove is provided with multiple toothed openings, the main slider in the limiting component is placed in the toothed groove and can slide along the toothed groove, the support rod is used to connect the main slider and the cavity cover, when the cavity cover is opened, the clamping slider in the limiting component can be controlled to move vertically downward (for example, downward along the third direction), thereby pushing the clamping structure to move horizontally outward (for example, along the second direction), so that the clamping structure extends out from the through hole on the side of the main slider and inserts into the toothed opening, thereby fixing the position of the main slider through the toothed opening, preventing the main slider from sliding continuously, and thus preventing the cavity cover connected to the main slider from falling, avoiding the problem of the cavity cover falling due to operator error or accident during the cavity opening process. Furthermore, since the toothed groove has multiple teeth, the main slider can be fixed at the multiple teeth positions of the toothed groove using the clamping structure according to actual needs. This allows for flexible adjustment of the opening and closing angle of the cavity cover, facilitating inspection and maintenance of the semiconductor processing device by personnel. Moreover, the cavity cover anti-fall structure provided in this embodiment is a purely mechanical structure without any electrical components, making it not only simple to install but also safe and reliable to operate. Furthermore, the cavity cover anti-fall structure provided in this embodiment is compact, easy to install, and reliable in operation, automatically preventing the cavity cover from falling without manual intervention.

[0103] It should be noted that the terms "comprising" and "having," and their variations, used in this utility model document are intended to cover non-exclusive inclusion. The terms "first," "second," etc., are used to distinguish similar objects and are not necessarily used to describe a specific order or sequence, unless explicitly indicated by the context; it should be understood that such use of data can be interchanged where appropriate. The term "one or more" depends at least in part on the context and can be used to describe features, structures, or characteristics in a singular sense, or in a plural sense to describe combinations of features, structures, or characteristics. The term "based on" can be understood as not necessarily intended to express an exclusive set of factors, but can instead, also at least in part on the context, allow for the presence of other factors that are not necessarily explicitly described. Furthermore, embodiments and features in embodiments of this utility model can be combined with each other without conflict. In addition, descriptions of well-known components and technologies have been omitted in the above description to avoid unnecessarily obscuring the concepts of this utility model. In the various embodiments described above, each embodiment focuses on the differences from other embodiments; similar / identical parts between embodiments can be referred to mutually.

[0104] The above description is only a preferred embodiment of the present utility model. It should be noted that for those skilled in the art, several improvements and modifications can be made without departing from the principle of the present utility model, and these improvements and modifications should also be considered within the protection scope of the present utility model.

Claims

1. A cavity cover anti-fall structure, characterized in that, include: The toothed groove includes a base plate extending along a first direction and a toothed side plate connected to the side of the base plate along a second direction. The toothed side plate has a plurality of teeth spaced apart along the first direction, wherein the first direction intersects the second direction perpendicularly. A limiting component includes a main slider located on the base plate and capable of sliding along the toothed groove. The main slider has an internal receiving cavity containing a pressing slider and a clamping structure. The pressing slider is capable of vertical movement along a third direction. The main slider has a through hole on its side along the second direction. When the pressing slider moves along the third direction, it can push the clamping structure to extend out of the through hole and insert into the toothed groove. The third direction intersects perpendicularly to both the first and second directions. A support rod, one end of which is connected to the main slider and the other end of which is used to connect to the cavity cover.

2. The cavity cover anti-fall structure according to claim 1, characterized in that, The base plate includes a bearing surface for supporting the main slider, and the tooth sidewall of the toothed opening intersects the bearing surface of the base plate at an incline.

3. The cavity cover anti-fall structure according to claim 1, characterized in that, The limiting component further includes: a handle located on the top surface of the main slider, and the handle extends through the main slider and into the receiving cavity along the third direction; A compression spring is located inside the receiving cavity, with one end connected to the handle and the other end connected to the main slider.

4. The cavity cover anti-fall structure according to claim 3, characterized in that, The handle includes: Rotate the handle; A pull rod extends along the third direction, with one end of the pull rod connected to the rotary handle and the other end connected to the compression spring; A guide post is connected to the top surface of the main slider. The guide post has a through hole extending through the guide post in the third direction and a guide groove located on the side of the guide post. The guide groove communicates with the through hole. A guide plate is located above the guide post and connected to the side of the pull rod, and the guide plate can pass through the guide groove.

5. The cavity cover anti-fall structure according to claim 3, characterized in that, The clamping structure includes: a clamping slider located on the side of the pressing slider along the second direction, the pressing slider being able to push the clamping slider to move along the second direction; A pin is connected to the surface of the clamping slider away from the pressing slider in the second direction, and the pin can extend out of the through hole and be inserted into the toothed opening.

6. The cavity cover anti-fall structure according to claim 5, characterized in that, The two clamping sliders are symmetrically distributed on opposite sides of the pressing slider along the second direction, and the two pins are connected one-to-one to the surfaces of the two clamping sliders opposite to the pressing slider along the second direction; the pressing slider is an inverted isosceles trapezoidal slider, and the clamping slider is a right-angled trapezoidal slider, and the opposite sides of the inverted isosceles trapezoidal slider match and contact the inclined sides of the two right-angled trapezoidal sliders.

7. The cavity cover anti-fall structure according to claim 5, characterized in that, The clamping structure further includes a return spring located within the receiving cavity, one end of which is connected to the side of the clamping slider and the other end of which is connected to the pin.

8. The cavity cover anti-fall structure according to claim 1, characterized in that, The main slider includes a front end and a rear end distributed along the first direction, and the receiving cavity is located at the rear end; The front end of the main slider has a groove, and the support rod is connected to the groove.

9. A semiconductor processing apparatus, characterized in that, include: The outer shell of the cavity encloses and forms a semiconductor processing chamber; The cavity cover anti-fall structure as described in claim 1 is connected to the outer wall of the cavity shell facing away from the semiconductor processing chamber; A cavity cover, located above the outer shell of the cavity, is used to seal the semiconductor processing chamber. The side wall of the cavity cover is connected to the support rod in the cavity cover anti-fall structure.

10. The semiconductor processing apparatus according to claim 9, characterized in that, The two cavity cover anti-fall structures are symmetrically connected to the two opposite outer walls of the cavity shell along the second direction.

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