Wafer basket gripping mechanism

Abstract

The utility model discloses a wafer basket grabbing mechanism belongs to semiconductor wafer cleaning equipment technical field, including two horizontal guide rails, sliding plate, sliding block movement drive arrangement, the sliding plate is connected with two horizontal guide rails through sliding block movement drive arrangement, the lifting assembly is installed on the sliding plate, and the vertical rotation shaft is equipped on the lifting assembly, the top surface is the disc of horizontal plane, and it is installed at the bottom of rotation shaft, and the rotation shaft is connected with the rotation shaft drive arrangement set up on the lifting assembly, and the disc rotates along its central axis under the drive of rotation shaft drive arrangement, the wafer basket grabbing manipulator is installed at one end of disc bottom surface. The utility model discloses wafer basket grabbing mechanism has the characteristics of fast speed of grabbing, small volume.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor wafer cleaning equipment, and in particular to a wafer basket grasping mechanism. Background Technology

[0002] In semiconductor device manufacturing, approximately 20% of the processes involve wafer cleaning. After wafers undergo various processing steps such as slicing, chamfering, grinding, surface treatment, polishing, and epitaxy, their surfaces become severely contaminated. The purpose of cleaning is to remove contaminants such as particles, metal ions, and organic matter from the wafer surface.

[0003] Currently, wafer cleaning primarily relies on chemical cleaning. Chemical cleaning involves using various chemical reagents and organic solvents to react with or dissolve impurities and oil adsorbed on the surface of the object being cleaned. This process may also involve physical measures such as ultrasound, heating, or vacuuming, causing the impurities to detach from the surface. The surface is then rinsed with a large amount of high-purity hot and cold deionized water to achieve a clean surface. Chemical cleaning can be divided into wet chemical cleaning and dry chemical cleaning, with wet chemical cleaning technology still dominating in wafer surface cleaning. In wet chemical cleaning, a cleaning basket is used to hold the wafer, which is then placed in the cleaning solution. Existing cleaning machines typically have a horizontal cleaning tank with a horizontal guide rail above it. A horizontal motion drive device moves the cleaning basket hook along the guide rail. The main drawbacks are: when there are many cleaning tanks, the wafer basket gripping mechanism becomes quite long, resulting in a larger cleaning machine with a larger footprint; additionally, the horizontal motion drive device is time-consuming and inefficient when running along the guide rail. Summary of the Invention

[0004] The purpose of this invention is to address the shortcomings of existing technologies by providing a chip basket grasping mechanism that features fast grasping speed and small size.

[0005] The technical solution adopted in this utility model is as follows.

[0006] A chip basket grasping mechanism is characterized by comprising two horizontal guide rails, a sliding plate, and a slider motion drive device; the sliding plate is connected to the two horizontal guide rails through the slider motion drive device.

[0007] The lifting assembly is mounted on the slide plate, and a vertical rotating shaft is provided on the lifting assembly.

[0008] A turntable with a horizontal top surface is mounted at the bottom of a rotating shaft. The rotating shaft is connected to a rotating shaft drive device mounted on the lifting assembly. Driven by the rotating shaft drive device, the turntable rotates along its central axis.

[0009] The chip basket grasping robot is mounted on one end of the bottom surface of the turntable.

[0010] The beneficial effects of this invention are as follows: the slider motion drive device drives the slide plate to move on two horizontal guide rails, the lifting component drives the turntable to rise and fall, and the wafer basket grasping robot is installed at one end of the bottom surface of the turntable. Thus, under the action of the slider motion drive device and the lifting component, the wafer basket grasping robot can move laterally and vertically. Since the rotating shaft drive device can drive the rotating shaft to rotate, the longitudinal grasping range of the wafer basket grasping robot is the horizontal width of the turntable bottom surface. In this way, multiple rows of cleaning tanks can be set within the horizontal width of the turntable bottom surface below the horizontal guide rails. With the same number of cleaning tanks, compared to the existing grasping mechanism with only one horizontal row of cleaning tanks, the size is smaller, the slide plate travels on the two horizontal guide rails for a shorter time, and the cleaning efficiency is higher.

[0011] As a preferred technical solution, the slide plate is provided with a vertical through hole for the rotating shaft; the slide plate is provided with a vertical plate; the lifting assembly includes a sliding frame and a vertical lifting device for the sliding frame, the sliding frame is connected to the vertical lifting device for the sliding frame, and the vertical lifting device for the sliding frame is installed on the side of the vertical plate near the through hole for the rotating shaft; a rotating shaft and a rotating shaft drive device are vertically installed on the sliding frame, the centroid of the top surface of the turntable is connected to the bottom end of the rotating shaft, and the rotating shaft passes through the through hole for the rotating shaft.

[0012] Using this technical solution, the lifting component can drive the rotating shaft to rise and fall.

[0013] As a preferred technical solution, the rotating shaft drive device includes a rotating shaft drive motor vertically mounted on the sliding frame, a second drive gear on the output shaft of the rotating shaft drive motor, and a third drive gear meshing with the second drive gear on the rotating shaft.

[0014] Using this technical solution, the rotating shaft can rotate under the drive of the second drive gear.

[0015] As a preferred technical solution, the vertical lifting device of the sliding frame includes a vertically arranged lifting screw and a screw rotation drive motor. The top end of the lifting screw is connected to the screw rotation drive motor, and the screw rotation drive motor is connected to the top end of the vertical plate.

[0016] As a preferred technical solution, the vertical lifting device includes an electric push rod that is vertically mounted on the slide plate, and a sliding frame is connected to the top of the electric push rod.

[0017] As a preferred technical solution, the chip basket grasping robot includes two grippers, each gripper having a hook at its bottom end. The two grippers are connected to a gripper drive device mounted on a turntable. Under the action of the gripper drive device, the two grippers move closer to or further away from each other.

[0018] As a preferred technical solution, the turntable is provided with a through hole for mounting the wafer basket gripper robot. The center line of the through hole passes through the centroid of the turntable. The gripper drive device includes a horizontal lead screw mounted on the through hole and a lead screw drive motor connected to the horizontal lead screw. A lead screw slider is provided on the horizontal lead screw. One of the two grippers is connected to the lead screw slider, and the other gripper is fixed to the turntable. The two grippers are located on both sides of the center of the through hole. Under the action of the lead screw drive motor, the two grippers move closer to or further away from each other.

[0019] Using this technical solution, the two grippers can clamp the chip basket 6 by bringing them close together.

[0020] As a preferred technical solution, the bottom surface of the turntable is provided with a wafer basket gripping robot mounting rail, the center line of which passes through the centroid of the turntable; the gripper drive device includes a sliding block mounted on the wafer basket gripping robot mounting rail and an electric push rod connected to the sliding block. The electric push rod is connected to the bottom surface of the turntable. One of the two grippers is connected to the sliding block, and the other gripper is fixed to the turntable. The two grippers are located on both sides of the center of the wafer basket gripping robot mounting rail, and under the action of the lead screw and electric push rod, the two grippers move closer to or further away from each other.

[0021] As a preferred technical solution, the slider motion driving device includes a horizontal motion driving motor vertically mounted on the slide plate, a horizontal rack connected to a horizontal guide rail, and a first driving gear meshing with the horizontal rack on the output shaft of the horizontal motion driving motor.

[0022] As a preferred technical solution, the two ends of the horizontal guide rail without the horizontal rack are connected to the corrugated plate, and the rotating shaft passes through the middle of the corrugated plate and is connected to the middle of the corrugated plate through a sealing sleeve.

[0023] This technical solution can prevent the gas volatilized in the cleaning fluid from entering the part above the corrugated plate of the rotating shaft. Attached Figure Description

[0024] Figure 1 This is a three-dimensional structural schematic diagram of a preferred embodiment of the chip basket grasping mechanism of this utility model.

[0025] Figure 2 yes Figure 1 A magnified view of part A.

[0026] Figure 3 yes Figure 1 A magnified view of part B.

[0027] Figure 4 yes Figure 1 A magnified view of part C.

[0028] Figure 5 yes Figure 1 The right view of the chip basket grasping mechanism shown.

[0029] Figure 6 yes Figure 5 A magnified view of part D.

[0030] Figure 7 yes Figure 5 A magnified view of part E.

[0031] Figure 8 yes Figure 5 A magnified view of part F.

[0032] Figure 9 yes Figure 1 The image shows a front view of the chip basket grasping mechanism.

[0033] Figure 10 yes Figure 9 A magnified view of part G.

[0034] Figure 11 yes Figure 9 A magnified view of part H.

[0035] Figure 12 yes Figure 1 The image shows a top view of the chip basket grasping mechanism.

[0036] Figure 13 yes Figure 12 The chip basket gripping mechanism shown is a cross-sectional view along I-I'.

[0037] Figure 14 yes Figure 13 A magnified view of part J.

[0038] Figure 15 yes Figure 13 A magnified view of part K.

[0039] Figure 16 yes Figure 1 The diagram shows a motion state of the chip basket grasping mechanism.

[0040] Figure 17 yes Figure 16 A magnified view of part L.

[0041] Figure 18 This is a schematic diagram of a preferred embodiment of the chip basket grasping mechanism of this utility model.

[0042] Figure 19 This is a schematic diagram of a preferred embodiment of the chip basket grasping mechanism of this utility model.

[0043] Among them: horizontal guide rail-1; sliding plate-11; horizontal motion drive motor-12; horizontal rack-13; first drive gear-14; rotating shaft through hole-15; vertical plate-16; corrugated plate-17; sealing sleeve-18;

[0044] Lifting assembly-2; Sliding frame-21; Lifting screw-22; Screw rotation drive motor-23; Electric push rod-24;

[0045] Rotating shaft-3; Rotating shaft drive motor-31; Second drive gear-32; Third drive gear-33;

[0046] Turntable-4;

[0047] 5. Chip basket gripper - 51. Gripper - 52. Hook - 53. Horizontal lead screw - 54. Lead screw drive motor - 55. Lead screw slider - 56. Chip basket gripper mounting rail - 57. Sliding block - 58. Electric push rod - 59.

[0048] Chip Basket-6;

[0049] Cleaning tank-7; Transfer platform-8. Detailed Implementation

[0050] The present invention will now be further described in conjunction with the accompanying drawings and embodiments.

[0051] Example 1. As... Figure 1-17 As shown, a chip basket grasping mechanism is characterized by comprising two horizontal guide rails 1, a sliding plate 11, and a slider motion drive device; the sliding plate 11 is connected to the two horizontal guide rails 1 through the slider motion drive device.

[0052] The lifting assembly 2 is mounted on the slide plate 11, and the lifting assembly 2 has a vertically oriented rotating shaft 3.

[0053] The turntable 4, with a horizontal top surface, is mounted at the bottom of the rotating shaft 3. The rotating shaft 3 is connected to the rotating shaft drive device set on the lifting assembly 2. Under the drive of the rotating shaft drive device, the turntable 4 rotates along its central axis.

[0054] The chip basket grasping robot 5 is mounted on one end of the bottom surface of the turntable 4.

[0055] like Figure 2-3As shown, the slide plate 11 is provided with a vertical rotating shaft through hole 15; the slide plate 11 is provided with a vertical plate 16; the lifting assembly 2 includes a sliding frame 21 and a sliding frame vertical lifting device. The sliding frame 21 is connected to the sliding frame vertical lifting device, and the sliding frame vertical lifting device is installed on the side of the vertical plate 16 near the rotating shaft through hole 15; a rotating shaft 3 and a rotating shaft drive device are vertically installed on the sliding frame 21. The centroid of the top surface of the turntable 4 is connected to the bottom end of the rotating shaft 3, and the rotating shaft 3 passes through the rotating shaft through hole 15.

[0056] Using this technical solution, the lifting component 2 can drive the rotating shaft 3 to rotate and lift.

[0057] like Figure 2 As shown, the rotating shaft drive device includes a rotating shaft drive motor 31 vertically mounted on the sliding frame 21. A second drive gear 32 is provided on the output shaft of the rotating shaft drive motor 31, and a third drive gear 33 that meshes with the second drive gear 32 is provided on the rotating shaft 3.

[0058] Using this technical solution, the rotating shaft 3 can rotate under the drive of the second drive gear 32.

[0059] like Figure 3 As shown, the vertical lifting device of the sliding frame includes a vertically arranged lifting screw 22 and a screw rotation drive motor 23. The top end of the lifting screw 22 is connected to the screw rotation drive motor 23, and the screw rotation drive motor 23 is connected to the top end of the vertical plate 16.

[0060] like Figure 15 As shown, the chip basket gripping robot 5 includes two grippers 51, and each gripper 51 has two hooks 52 at its bottom end. The two grippers 51 are connected to a gripper drive device mounted on a turntable 4. Under the action of the gripper drive device, the two grippers 51 move closer to or further away from each other.

[0061] The turntable 4 is provided with a through hole 41 for mounting a wafer basket gripping robot, and the center line of the through hole 41 for mounting the wafer basket gripping robot passes through the centroid of the turntable 4.

[0062] The gripper drive device includes a horizontal lead screw 53 mounted on the through hole 41 of the wafer basket gripper robot and a lead screw drive motor 54 connected to the horizontal lead screw 53. A lead screw slider 55 is provided on the horizontal lead screw 53. One of the two grippers 51 is connected to the lead screw slider 55, and the other gripper 51 is fixed to the turntable 4. The two grippers 51 are located on both sides of the center of the through hole 41 of the wafer basket gripper robot. Under the action of the lead screw drive motor 54, the two grippers 51 move closer to each other or further away.

[0063] Using this technical solution, the two grippers 51 can clamp the wafer basket 6 by bringing them close together.

[0064] like Figure 7 As shown, the slider motion drive device includes a horizontal motion drive motor 12 vertically mounted on the slide plate 11 and a horizontal rack 13 connected to a horizontal guide rail 1. The output shaft of the horizontal motion drive motor 12 is provided with a first drive gear 14 that meshes with the horizontal rack 13.

[0065] like Figure 12 As shown, the two ends of the horizontal guide rail 1, which is not connected to the transverse rack 13, are connected to the corrugated plate 17. Figure 11 As shown, the rotating shaft 3 passes through the middle of the corrugated plate 17 and is connected to the middle of the corrugated plate 17 through the sealing sleeve 18.

[0066] This technical solution can prevent the gas volatilized in the cleaning fluid from entering the part above the corrugated plate 17 of the rotating shaft 3.

[0067] A slider motion drive device drives the slide plate 11 to move on two horizontal guide rails 1. A lifting component 2 drives the turntable 4 to rise and fall. A wafer basket gripping robot 5 is mounted on one end of the bottom surface of the turntable 4. Thus, under the action of the slider motion drive device and the lifting component 2, the wafer basket gripping robot 5 can move laterally and vertically. Since the rotating shaft drive device can drive the rotating shaft 3 to rotate, the longitudinal gripping range of the wafer basket gripping robot 5 is the horizontal width of the bottom surface of the turntable 4. In this way, multiple rows of cleaning tanks can be arranged within the horizontal width of the bottom surface of the turntable 4 below the horizontal guide rails 1. With the same number of cleaning tanks, compared to the existing gripping mechanism with only one horizontal row of cleaning tanks, the size is smaller, the running time of the slide plate 11 on the two horizontal guide rails 1 is shorter, and the cleaning efficiency is higher.

[0068] Example 2. (As shown) Figure 18 As shown, the difference between this embodiment and embodiment 1 is that the vertical lifting device includes an electric push rod 24 vertically arranged on the slide plate 11, and the sliding frame 21 is connected to the top of the electric push rod 24.

[0069] Example 3. (As shown) Figure 19 As shown, the difference between this embodiment and Embodiment 1 is that: the bottom surface of the turntable 4 is provided with a wafer basket gripping robot mounting rail 56, and the center line of the wafer basket gripping robot mounting rail 56 passes through the centroid of the turntable 4; the gripper driving device includes a sliding block 57 mounted on the wafer basket gripping robot mounting rail 56 and an electric push rod 58 connected to the sliding block 57. The electric push rod 58 is connected to the bottom surface of the turntable 4. One of the two grippers 51 is connected to the sliding block 57, and the other gripper 51 is fixed to the turntable 4. The two grippers 51 are located on both sides of the center of the wafer basket gripping robot mounting rail 56. Under the action of the lead screw and electric push rod 58, the two grippers 51 move closer or further apart. Using this technical solution, the two grippers 51 can grip the wafer basket 6 by moving closer together.

[0070] The embodiments listed above are for understanding the present utility model only and are not intended to limit the technical solutions described herein. Those skilled in the art can make various changes or modifications, and all equivalent changes or modifications should be covered within the protection scope of the present utility model. Any aspects not detailed in the present utility model are well-known to those skilled in the art.

Claims

1. A chip basket grasping mechanism, characterized in that, It includes two horizontal guide rails (1), a slide plate (11), and a slider motion drive device; the slide plate (11) is connected to the two horizontal guide rails (1) through the slider motion drive device; A lifting assembly (2) is mounted on a sliding plate (11), and a rotating shaft (3) is provided vertically on the lifting assembly (2). A turntable (4) with a horizontal top surface is mounted on the bottom end of a rotating shaft (3). The rotating shaft (3) is connected to a rotating shaft drive device set on the lifting assembly (2). Under the drive of the rotating shaft drive device, the turntable (4) rotates along its central axis. A chip basket grasping robot (5) is installed at one end of the bottom surface of the turntable (4).

2. The wafer basket grasping mechanism as described in claim 1, characterized in that: The slide (11) is provided with a vertical through hole (15) for rotating shaft; the slide (11) is provided with a vertical plate (16); the lifting assembly (2) includes a sliding frame (21) and a vertical lifting device for the sliding frame. The sliding frame (21) is connected to the vertical lifting device for the sliding frame. The vertical lifting device for the sliding frame is installed on the side of the vertical plate (16) near the through hole (15) for rotating shaft; a rotating shaft (3) and a rotating shaft drive device are installed vertically on the sliding frame (21). The centroid of the top surface of the turntable (4) is connected to the bottom end of the rotating shaft (3). The rotating shaft (3) passes through the through hole (15) for rotating shaft.

3. The wafer basket grasping mechanism as described in claim 2, characterized in that: The rotating shaft drive device includes a rotating shaft drive motor (31) mounted vertically on the sliding frame (21), a second drive gear (32) is provided on the output shaft of the rotating shaft drive motor (31), and a third drive gear (33) is provided on the rotating shaft (3) to mesh with the second drive gear (32).

4. The wafer basket grasping mechanism as described in claim 2, characterized in that: The vertical lifting device of the sliding frame includes a vertically arranged lifting screw (22) and a screw rotation drive motor (23). The top of the lifting screw (22) is connected to the screw rotation drive motor (23), and the screw rotation drive motor (23) is connected to the top of the vertical plate (16).

5. The wafer basket grasping mechanism as described in claim 1, characterized in that: The vertical lifting device includes an electric push rod (24) vertically mounted on the slide plate (11), and a sliding frame (21) connected to the top of the electric push rod (24).

6. The wafer basket grasping mechanism as described in claim 1, characterized in that: The chip basket gripper (5) includes two grippers (51), each gripper (51) has a hook (52) at its bottom end, and the two grippers (51) are connected to a gripper drive device mounted on a turntable (4). Under the action of the gripper drive device, the two grippers (51) move closer to each other or further away.

7. The wafer basket grasping mechanism as described in claim 6, characterized in that: The turntable (4) is provided with a through hole (41) for mounting a wafer basket gripping robot, and the center line of the through hole (41) for mounting the wafer basket gripping robot passes through the centroid of the turntable (4). The gripper drive device includes a horizontal lead screw (53) installed on the through hole (41) of the wafer basket gripper and a lead screw drive motor (54) connected to the horizontal lead screw (53). The horizontal lead screw (53) is provided with a lead screw slider (55). One of the two grippers (51) is connected to the lead screw slider (55), and the other gripper (51) is fixed to the turntable (4). The two grippers (51) are located on both sides of the center of the through hole (41) of the wafer basket gripper. Under the action of the lead screw drive motor (54), the two grippers (51) move closer to each other or further away.

8. The wafer basket grasping mechanism as described in claim 6, characterized in that: The bottom surface of the turntable (4) is provided with a wafer basket gripping robot mounting rail (56), and the center line of the wafer basket gripping robot mounting rail (56) passes through the centroid of the turntable (4); The gripper drive device includes a sliding block (57) mounted on the wafer basket gripper mounting rail (56) and an electric push rod (58) connected to the sliding block (57). The electric push rod (58) is connected to the bottom surface of the turntable (4). One of the two grippers (51) is connected to the sliding block (57), and the other gripper (51) is fixed to the turntable (4). The two grippers (51) are located on both sides of the center of the wafer basket gripper mounting rail (56). Under the action of the lead screw electric push rod (58), the two grippers (51) move closer to each other or further away.

9. The wafer basket grasping mechanism as described in claim 1, characterized in that: The slider motion drive device includes a horizontal motion drive motor (12) mounted vertically on the slide plate (11) and a horizontal rack (13) connected to a horizontal guide rail (1). The output shaft of the horizontal motion drive motor (12) is provided with a first drive gear (14) that meshes with the horizontal rack (13).

10. The wafer basket grasping mechanism as described in claim 9, characterized in that: The two ends of the horizontal guide rail (1) without the horizontal rack (13) are connected to the corrugated plate (17), and the rotating shaft (3) passes through the middle of the corrugated plate (17) and is connected to the middle of the corrugated plate (17) through the sealing sleeve (18).

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