Electronic-grade hydrogen bromide purification device

Abstract

The utility model relates to the technical field of hydrogen bromide purification, and discloses an electronic-grade hydrogen bromide purification device which comprises a settling tank, a rotary feeding mechanism is arranged on the settling tank, and a waste gas discharge mechanism is arranged at the top of the settling tank; the rotary feeding mechanism comprises a supporting seat, the supporting seat is fixedly mounted at the top of the settling tank, a fixed pipeline is fixedly mounted on the inner wall of the supporting seat, and a first valve pipe is fixedly connected to the top of the fixed pipeline. Through the overall design of a rotary introduction mechanism, ozone can be introduced from a first valve pipe, the ozone can penetrate through a rotary pipeline to be output from the end of a branch pipeline, meanwhile, through work of a driving motor, the rotary pipeline can be driven to rotate integrally, so that the ozone is rotationally introduced into a stock solution, and meanwhile, a stirring paddle can be driven to rotate; the stirring paddle can stir the stock solution, so that the contact effect of the stock solution and the ozone is further improved, the utilization rate of the ozone is improved, and the consumption of the ozone is reduced.

Description

Technical Field

[0001] This utility model relates to the field of hydrogen bromide purification technology, specifically to an electronic-grade hydrogen bromide purification device. Background Technology

[0002] Electronic-grade hydrogen bromide is a high-purity form of hydrogen bromide, primarily used as a key electronic-grade chemical in semiconductor manufacturing and polycrystalline silicon plasma etching. Its purity must meet semiconductor manufacturing standards, and it typically features high purity, low metal ion content, high stability, and low volatile organic compounds.

[0003] In the purification process of electronic-grade hydrogen bromide, the purification device is mainly used to remove specific impurities from the raw materials to ensure that the product meets the high purity standards required for semiconductor manufacturing. Specific impurities to be purified include metal ions and salts.

[0004] When implementing oxidation-complex-breaking combined precipitation, oxidants such as ozone are introduced to decompose metal complexes, and then hydroxide precipitates are formed by pH adjustment. Existing precipitation tanks only have a single pipe for introducing ozone, resulting in poor contact between ozone and the raw liquid. If a better precipitation is required, a larger amount of ozone needs to be introduced, leading to an increase in raw material. Therefore, those skilled in the art provide an electronic-grade hydrogen bromide purification device to solve the problems mentioned in the background art. Utility Model Content

[0005] The purpose of this invention is to provide an electronic-grade hydrogen bromide purification device to solve the problem of poor contact between ozone and raw liquid in the prior art.

[0006] This utility model provides the following technical solution: an electronic-grade hydrogen bromide purification device, including a precipitation tank, wherein the precipitation tank is provided with a rotary inlet mechanism for ozone entry, and the top of the precipitation tank is provided with a waste gas emission mechanism for facilitating exhaust gas, the emission mechanism being located on one side of the rotary inlet mechanism;

[0007] The rotary inlet mechanism includes a support base, which is fixedly installed on the top of the sedimentation tank. A fixed pipe is fixedly installed on the inner wall of the support base. A valve pipe is fixedly connected to the top of the fixed pipe. A rotary joint is fixedly connected to the bottom of the fixed pipe. A rotary pipe is rotatably connected to the bottom of the rotary joint. The rotary pipe is rotatably connected to the top of the sedimentation tank. The bottom of the rotary pipe extends into the inner cavity of the sedimentation tank. An agitator is fixedly installed on the outer wall of the rotary pipe. A middle pipe is fixedly connected to the bottom of the rotary pipe. Multiple sets of branch pipes are fixedly connected to the outer wall of the middle pipe.

[0008] As a preferred embodiment of the above technical solution, a support leg is fixedly installed on the outer wall of the sedimentation tank, a discharge valve is fixedly connected to the bottom of the sedimentation tank, and a movable cover is detachably connected to the feed inlet at the top of the sedimentation tank.

[0009] As a preferred embodiment of the above technical solution, the rotary inlet mechanism further includes a drive motor, which is fixedly installed on the outer wall of the sedimentation tank. The output shaft of the drive motor is fixedly connected to a first pulley, and a second pulley is fixedly sleeved on the outer wall of the rotating pipe. Belts are connected to the outer walls of the second pulley and the first pulley for transmission.

[0010] As a preferred embodiment of the above technical solution, a perforated plate is fixedly installed on the inner wall of the branch pipe, a fixed plate is fixedly installed on the inner wall of the branch pipe, an elastic rod is fixedly connected to the outer wall of the fixed plate, and a circular sealing block is fixedly connected to the end of the elastic rod away from the fixed plate, and the circular sealing block movably abuts against the inner wall of the perforated plate.

[0011] As a preferred embodiment of the above technical solution, the exhaust gas emission mechanism includes a square tube, which is fixedly connected to the top of the sedimentation tank, and a second valve pipe is connected through the top of the square tube.

[0012] As a preferred embodiment of the above technical solution, a partition plate is fixedly installed on the inner wall of the square tube, an inner support plate is fixedly installed on the inner wall of the square tube, a slide rod is slidably connected to the inner wall of the inner support plate, a pressure plate is fixedly connected to the bottom of the slide rod, the bottom of the pressure plate is movably abutting against the top of the partition plate, and an elastic element is fixedly connected to the bottom of the inner support plate, the bottom of the elastic element is fixedly connected to the top of the pressure plate.

[0013] Compared with the prior art, the beneficial effects of this utility model are:

[0014] This invention, through the overall design of the rotating inlet mechanism, allows ozone to be introduced from the first valve pipe. The ozone passes through the rotating pipe and is output from the end of the branch pipe. Simultaneously, the operation of the drive motor drives the entire rotating pipe to rotate, allowing the ozone to be introduced into the interior of the raw liquid. At the same time, it also drives the stirring paddle to rotate, which stirs the raw liquid, further improving the contact effect between the raw liquid and ozone, increasing the utilization rate of ozone, and reducing the consumption of ozone. Attached Figure Description

[0015] Figure 1 A schematic diagram of an electronic-grade hydrogen bromide purification device;

[0016] Figure 2 A partially cross-sectional schematic diagram of the precipitation tank in an electronic-grade hydrogen bromide purification device.

[0017] Figure 3 A partially cross-sectional schematic diagram of a branch pipeline in an electronic-grade hydrogen bromide purification and refining device.

[0018] Figure 4 A schematic diagram of a porous plate in an electronic-grade hydrogen bromide purification device.

[0019] Figure 5 A cross-sectional schematic diagram of a square tube in an electronic-grade hydrogen bromide purification device;

[0020] Figure 6 This is a schematic diagram of the partition plate of an electronic-grade hydrogen bromide purification device.

[0021] Legend:

[0022] 1. Sedimentation tank; 11. Support leg; 12. Discharge valve; 13. Movable cover; 2. Rotary inlet mechanism; 21. Support base; 22. Fixed pipe; 23. Valve pipe No. 1; 24. Rotary joint; 25. Rotary pipe; 26. Drive motor; 261. Pulley No. 1; 262. Pulley No. 2; 27. Agitator; 28. Central pipe; 29. ​​Branch pipe; 291. Perforated plate; 292. Fixed plate; 293. Elastic rod; 294. Circular sealing block; 3. Exhaust gas emission mechanism; 31. Square tube; 32. Partition plate; 33. Internal support plate; 34. Sliding rod; 35. Elastic element; 36. Pressure plate; 37. Valve pipe No. 2. Detailed Implementation

[0023] The technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present invention.

[0024] Please see Figures 1-6 As shown, this utility model provides a technical solution: an electronic-grade hydrogen bromide purification device, including a precipitation tank 1, a rotary inlet mechanism 2 for ozone entry on the precipitation tank 1, and a waste gas emission mechanism 3 for gas emission on the top of the precipitation tank 1, the waste gas emission mechanism 3 being located on one side of the rotary inlet mechanism 2.

[0025] The rotary inlet mechanism 2 includes a support base 21, which is fixedly installed on the top of the sedimentation tank 1. A fixed pipe 22 is fixedly installed on the inner wall of the support base 21. A valve pipe 23 is fixedly connected to the top of the fixed pipe 22. A rotary joint 24 is fixedly connected to the bottom of the fixed pipe 22. A rotary pipe 25 is rotatably connected to the bottom of the rotary joint 24. The rotary pipe 25 is rotatably connected to the top of the sedimentation tank 1. The bottom of the rotary pipe 25 extends into the inner cavity of the sedimentation tank 1. An agitator 27 is fixedly installed on the outer wall of the rotary pipe 25. The fixed pipe 22 is fixedly connected to the middle pipe 28. Multiple sets of branch pipes 29 are fixedly connected to the outer wall of the middle pipe 28. With the support of the support seat 21, the fixed pipe 22 is fixed above the sedimentation tank 1. In use, the ozone output pipe can be pre-connected to the top of the first valve pipe 23. By controlling the opening of the first valve pipe 23, ozone can be delivered. The ozone will pass through the rotating pipe 25 and be output from the end of the branch pipe 29. Through the design of the rotating joint 24, the inner cavities of the fixed pipe 22 and the rotating pipe 25 are connected, and the ends are rotatably connected.

[0026] As one implementation method in this embodiment, please refer to Figure 1 As shown, a support leg 11 is fixedly installed on the outer wall of the sedimentation tank 1, and a discharge valve 12 is fixedly connected to the bottom of the sedimentation tank 1. A movable cover 13 is detachably connected to the feed inlet at the top of the sedimentation tank 1. By removing the movable cover 13, the raw liquid can be added into the inner cavity of the sedimentation tank 1. After sedimentation is completed, the discharge valve 12 can be opened first to discharge the sediment. After changing the receiving container, the discharge valve 12 can be opened again to discharge the treated raw liquid.

[0027] As one implementation method in this embodiment, please refer to Figure 2 As shown, the rotary inlet mechanism 2 also includes a drive motor 26, which is fixedly installed on the outer wall of the sedimentation tank 1. The output shaft of the drive motor 26 is fixedly connected to a first pulley 261, and a second pulley 262 is fixedly sleeved on the outer wall of the rotary pipe 25. A belt is connected to the outer walls of the second pulley 262 and the first pulley 261. The diameter of the first pulley 261 is larger than the diameter of the second pulley 262. Controlling the drive motor 26 to work can drive the first pulley 261 to rotate, and through the belt transmission, drive the second pulley 262 to rotate, thereby driving the rotary pipe 25 to rotate as a whole, so that ozone rotates and enters the interior of the raw liquid. At the same time, it will also drive the stirring paddle 27 to rotate, and the stirring paddle 27 will stir the raw liquid, further improving the contact effect between the raw liquid and ozone.

[0028] As one implementation method in this embodiment, please refer to Figure 3As shown, a perforated plate 291 is fixedly installed on the inner wall of the branch pipe 29, and a fixed plate 292 is fixedly installed on the inner wall of the branch pipe 29. An elastic rod 293 is fixedly connected to the outer wall of the fixed plate 292. A circular sealing block 294 is fixedly connected to the end of the elastic rod 293 away from the fixed plate 292. The circular sealing block 294 movably abuts against the inner wall of the perforated plate 291. When ozone is introduced into the interior of the rotating pipe 25, the pressure of the ozone can push the circular sealing block 294, causing the circular sealing block 294 to stretch the elastic rod 293 and move away from the fixed plate 292, so that a gap is created between the perforated plate 291 and the circular sealing block 294. Ozone can pass through this gap. After the ozone is stopped, the pressure disappears. At this time, the reset force of the elastic rod 293 drives the circular sealing block 294 to reset, sealing the holes of the perforated plate 291, realizing the function of unidirectional addition, and avoiding the problem of the original liquid flowing into the interior of the intermediate pipe 28 and the rotating pipe 25.

[0029] As one implementation method in this embodiment, please refer to Figure 5 As shown, the exhaust gas emission mechanism 3 includes a square tube 31, which is fixedly connected to the top of the sedimentation tank 1. A second valve pipe 37 is connected through the top of the square tube 31. The exhaust gas collection device is fixedly connected to the end of the second valve pipe 37 in advance. When the second valve pipe 37 is opened, the exhaust gas can be introduced into the interior of the exhaust gas collection device when the interior of the sedimentation tank 1 overflows. Then, the user can centrally treat the exhaust gas and avoid the exhaust gas being directly discharged into the workshop, which would cause serious air pollution inside the workshop.

[0030] As one implementation method in this embodiment, please refer to Figure 5 As shown, a partition plate 32 is fixedly installed on the inner wall of the square tube 31, and an inner support plate 33 is fixedly installed on the inner wall of the square tube 31. A sliding rod 34 is slidably connected to the inner wall of the inner support plate 33, and a pressure plate 36 is fixedly connected to the bottom of the sliding rod 34. The bottom of the pressure plate 36 is in movable contact with the top of the partition plate 32. An elastic element 35 is fixedly connected to the bottom of the inner support plate 33, and the bottom of the elastic element 35 is fixedly connected to the top of the pressure plate 36. When gas is about to overflow from the inside of the sedimentation tank 1, the gas pressure in the cavity of the sedimentation tank 1 will increase. The gas pressure will push the pressure plate 36 upward, causing a gap to be created between the partition plate 32 and the pressure plate 36, which facilitates the passage of gas. After the gas pressure inside the sedimentation tank 1 is restored, the pressure plate 36 can be driven downward by the restoring elastic force of the elastic element 35, and re-fitted and sealed on the top of the partition plate 32, thereby realizing the function of one-way exhaust and avoiding the problem of collected waste gas flowing back into the sedimentation tank 1.

[0031] Working principle: During use, by removing the movable cover 13, the raw liquid can be added to the inner cavity of the sedimentation tank 1. The ozone output pipe is pre-connected to the top of the first valve pipe 23. By controlling the opening of the first valve pipe 23, ozone can be delivered. The ozone will pass through the rotating pipe 25 and be output from the end of the branch pipe 29. The drive motor 26 is controlled to work, which can drive the first pulley 261 to rotate. Through the belt transmission, the second pulley 262 is driven to rotate, which in turn drives the rotating pipe 25 to rotate as a whole, so that the ozone rotates and enters the interior of the raw liquid. At the same time, it will also drive the stirring paddle 27 to rotate, which will stir the raw liquid and further improve the contact effect between the raw liquid and ozone. After sedimentation is completed, the discharge valve 12 can be opened first to discharge the sediment. After changing the receiving container, the discharge valve 12 can be opened again to discharge the treated raw liquid.

[0032] The above embodiments are only used to illustrate the technical solution of this utility model, and are not intended to limit it.

Claims

1. An apparatus for purification of electronic grade hydrogen bromide, comprising a settling tank (1), characterized in that: The top of the sedimentation tank (1) is provided with a rotary inlet mechanism (2) for ozone entry, and the top of the sedimentation tank (1) is provided with a waste gas emission mechanism (3) for convenient gas emission, and the waste gas emission mechanism (3) is located on one side of the rotary inlet mechanism (2). The rotary inlet mechanism (2) includes a support base (21), which is fixedly installed on the top of the sedimentation tank (1). A fixed pipe (22) is fixedly installed on the inner wall of the support base (21). A valve pipe (23) is fixedly connected to the top of the fixed pipe (22). A rotary joint (24) is fixedly connected to the bottom of the fixed pipe (22). A rotary pipe (25) is rotatably connected to the bottom of the rotary joint (24). The rotary pipe (25) is rotatably connected to the top of the sedimentation tank (1). The bottom of the rotary pipe (25) extends into the inner cavity of the sedimentation tank (1). A stirring paddle (27) is fixedly installed on the outer wall of the rotary pipe (25). A middle pipe (28) is fixedly connected to the bottom of the rotary pipe (25). Multiple sets of branch pipes (29) are fixedly connected to the outer wall of the middle pipe (28).

2. The electronic-grade hydrogen bromide purification apparatus according to claim 1, characterized in that: The sedimentation tank (1) is fixedly installed with a support leg (11) on its outer wall, and a discharge valve (12) is fixedly connected to the bottom of the sedimentation tank (1). A movable cover (13) is detachably connected to the feed inlet at the top of the sedimentation tank (1).

3. The electronic-grade hydrogen bromide purification apparatus according to claim 1, characterized in that: The rotary inlet mechanism (2) also includes a drive motor (26), which is fixedly installed on the outer wall of the sedimentation tank (1). The output shaft of the drive motor (26) is fixedly connected to a first pulley (261), and a second pulley (262) is fixedly sleeved on the outer wall of the rotary pipe (25). A belt is connected to the outer walls of the second pulley (262) and the first pulley (261).

4. The electronic-grade hydrogen bromide purification apparatus according to claim 1, characterized in that: A perforated plate (291) is fixedly installed on the inner wall of the branch pipe (29), a fixed plate (292) is fixedly installed on the inner wall of the branch pipe (29), an elastic rod (293) is fixedly connected to the outer wall of the fixed plate (292), and a circular sealing block (294) is fixedly connected to the end of the elastic rod (293) away from the fixed plate (292). The circular sealing block (294) moves against the inner wall of the perforated plate (291).

5. The electronic-grade hydrogen bromide purification apparatus according to claim 1, characterized in that: The exhaust gas emission mechanism (3) includes a square tube (31), which is fixedly connected to the top of the sedimentation tank (1), and a second valve pipe (37) is connected through the top of the square tube (31).

6. The electronic-grade hydrogen bromide purification apparatus according to claim 5, characterized in that: A partition plate (32) is fixedly installed on the inner wall of the square tube (31), and an inner support plate (33) is fixedly installed on the inner wall of the square tube (31). A slide rod (34) is slidably connected to the inner wall of the inner support plate (33). A pressure plate (36) is fixedly connected to the bottom of the slide rod (34). The bottom of the pressure plate (36) is in movable contact with the top of the partition plate (32). An elastic element (35) is fixedly connected to the bottom of the inner support plate (33). The bottom of the elastic element (35) is fixedly connected to the top of the pressure plate (36).

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