Multi-nozzle spray type cleaning device for exposure machine

Abstract

The utility model relates to the technical field of exposure machines, and discloses a multi-nozzle spray type cleaning device for an exposure machine, which comprises a cleaning box, the bottom of the inner wall of the cleaning box is fixedly connected with a fixed table, the top of the fixed table is fixedly connected with an anti-slip disc, and a cleaning assembly is arranged in the cleaning box. And the cleaning assembly comprises a motor frame, a servo motor is installed in the motor frame, the output end of the servo motor is fixedly connected with a lead screw, and the surface of the lead screw is in threaded connection with a moving table. By arranging the moving table, the servo motor is started, the output end of the servo motor drives the lead screw to rotate, the lead screw rotates to drive the moving table to move on the surface of the lead screw, and the moving table moves to synchronously drive the atomization nozzle located on the surface of the metal pipe to move; and the atomization spraying area can be increased conveniently when the atomization nozzle conducts atomization cleaning on the surface of the disc.

Description

Technical Field

[0001] This utility model relates to the field of exposure machine technology, specifically to a multi-nozzle spray cleaning device for exposure machines. Background Technology

[0002] An exposure machine is a photolithography device, crucial in semiconductor manufacturing, printed circuit boards, and other fields. It uses photolithography technology to precisely transfer patterns from a photomask onto a wafer or substrate coated with photoresist. During operation, a light source emits light of a specific wavelength, which, after processing by an optical system, uniformly illuminates the photomask. The light passes through the patterned portion of the photomask, causing a photochemical reaction in the photoresist. Following subsequent steps such as development, the desired pattern is formed on the substrate.

[0003] When the exposure machine is in use, it needs to perform photolithography through the internal disk. As a result, some dust and impurities will remain on the surface during the photolithography process, requiring regular cleaning. However, spraying cleaning fluid directly on the disk during routine cleaning will cause scratches on the surface of the disk. Therefore, a device that can reliably clean the surface is needed. Utility Model Content

[0004] To solve the above-mentioned technical problems, this utility model provides a multi-nozzle spray cleaning device for an exposure machine, including a cleaning box, a fixed platform fixedly connected to the bottom of the inner wall of the cleaning box, an anti-slip plate fixedly connected to the top of the fixed platform, a cleaning component installed inside the cleaning box, a drain pipe fixedly connected to the cleaning box, and a feeding component installed on the surface of the cleaning box.

[0005] The cleaning assembly includes a motor frame, inside which a servo motor is installed. The output end of the servo motor is fixedly connected to a lead screw, and a moving platform is threaded onto the surface of the lead screw. A metal tube is fixedly connected to the front of the moving platform, and an atomizing nozzle is installed on the surface of the metal tube. A connecting hose is fixedly connected to the output end of the metal tube, and a water pump is installed at the input end of the connecting hose. A water tank is installed on the surface of the cleaning box.

[0006] The above technical solution involves setting up a moving platform, starting a servo motor, and having the output of the servo motor drive a lead screw to rotate. The rotation of the lead screw causes the moving platform to move on the surface of the lead screw. The movement of the moving platform synchronously moves the atomizing nozzle located on the surface of the metal tube, thereby increasing the atomizing spray area when the atomizing nozzle performs atomized cleaning on the surface of the disc.

[0007] As a further improvement to the above solution, the number of atomizing nozzles is set to several, and the several atomizing nozzles are evenly distributed on the surface of the metal tube with the center of the front of the metal tube symmetrically, and the input end of the atomizing nozzle is located inside the metal tube.

[0008] The above technical solution enables simultaneous spray cleaning of different parts of the disc surface, further improving cleaning efficiency. The evenly distributed nozzles ensure more comprehensive and uniform cleaning, avoiding cleaning dead spots.

[0009] As a further improvement to the above solution, the connecting hose penetrates the inner wall of the cleaning tank.

[0010] The above technical solution ensures that the cleaning fluid can be smoothly delivered from the water tank to the metal pipe and atomizing nozzle, while avoiding leakage and contamination of the cleaning fluid during the delivery process.

[0011] As a further improvement to the above solution, the input end of the water pump is located inside the water tank.

[0012] The above technical solution can effectively extract the cleaning fluid from the water tank and deliver it to the atomizing nozzle, ensuring the supply of cleaning fluid and facilitating the control of the flow rate and pressure of the cleaning fluid.

[0013] As a further improvement to the above solution, a slider is fixedly connected to the end of the moving platform away from the metal tube, and a slide rail is slidably connected to the surface of the slider.

[0014] The above technical solution provides guidance and support for the movement of the mobile stage, enabling it to move smoothly under the drive of the lead screw, thereby ensuring the stability and accuracy of the movement of the atomizing nozzle.

[0015] As a further improvement to the above solution, the rear end of the slide rail is fixedly connected to the inner wall of the cleaning tank.

[0016] The above technical solutions further enhance the stability and robustness of the slide rail, ensuring the reliable operation of the entire cleaning assembly.

[0017] As a further improvement to the above solution, the feeding assembly includes a mounting frame, a cylinder is fixedly connected to the bottom of the inner wall of the mounting frame, a connecting plate is fixedly connected to the output end of the cylinder, a support rod is fixedly connected to the bottom of the connecting plate, and a feeding platform is fixedly connected to the bottom of the support rod.

[0018] Through the above technical solution, the cylinder's extension and retraction movement can drive the feeding platform to move up and down, realizing the automatic feeding and removal of the disc to be cleaned, thus improving the automation level and working efficiency of the cleaning device.

[0019] As a further improvement to the above solution, the top of the mounting bracket is located above the cleaning tank, and there are two support rods. The two support rods are evenly distributed symmetrically around the center of the front of the connecting plate, and the feeding platform is concentric with the anti-slip plate.

[0020] The above technical solution ensures the stability and balance of the unloading platform during lifting, preventing it from tilting or wobbling. The unloading platform is concentric with the anti-slip plate, ensuring that the discs to be cleaned are accurately placed on the anti-slip plate during insertion and removal, facilitating cleaning and subsequent processing.

[0021] Compared with the prior art, the beneficial effects of this utility model are:

[0022] This invention features a movable platform that activates a servo motor. The output of the servo motor drives a lead screw to rotate, which in turn moves the movable platform across its surface. Simultaneously, the movement of the movable platform moves the atomizing nozzle located on the surface of the metal tube, thereby increasing the atomization spray area when the atomizing nozzle performs atomized cleaning on the disc surface.

[0023] This utility model features a feeding platform. When a disc is placed on top of the feeding platform, a cylinder is activated, and the cylinder's output end moves the feeding platform downwards until it reaches the bottom of the anti-slip disc, allowing the disc to contact the top of the anti-slip disc. This facilitates the removal of the disc before and after cleaning. Attached Figure Description

[0024] Figure 1 This is a schematic diagram of the overall structure of this utility model;

[0025] Figure 2 This is a schematic cross-sectional view of the overall structure of this utility model;

[0026] Figure 3 This is a schematic diagram of the overall side structure of this utility model;

[0027] Figure 4 This is a schematic diagram of the overall structure of the cleaning component of this utility model;

[0028] Figure 5 This is a schematic diagram of the overall structure of the feeding component of this utility model.

[0029] In the diagram: 1. Cleaning tank; 2. Fixed platform; 3. Anti-slip disc; 4. Cleaning assembly; 41. Motor frame; 42. Servo motor; 43. Lead screw; 44. Moving platform; 45. Metal pipe; 46. Atomizing nozzle; 47. Connecting hose; 48. Water pump; 49. Water tank; 5. Drain pipe; 6. Slider; 7. Slide rail; 8. Feeding assembly; 81. Mounting bracket; 82. Cylinder; 83. Connecting plate; 84. Support rod; 85. Discharge platform. Detailed Implementation

[0030] The present invention will be further described below with reference to the accompanying drawings and specific embodiments. It should be noted that, without conflict, the various embodiments or technical features described below can be arbitrarily combined to form new embodiments.

[0031] Example:

[0032] Please combine Figure 1-5 This embodiment of an exposure machine multi-nozzle spray cleaning device includes a cleaning tank 1, a fixed platform 2 fixedly connected to the bottom of the inner wall of the cleaning tank 1, an anti-slip plate 3 fixedly connected to the top of the fixed platform 2, a cleaning component 4 installed inside the cleaning tank 1, a drain pipe 5 fixedly connected to the cleaning tank 1, and a feeding component 8 installed on the surface of the cleaning tank 1.

[0033] The cleaning component 4 includes a motor frame 41, a servo motor 42 is installed inside the motor frame 41, a lead screw 43 is fixedly connected to the output end of the servo motor 42, a moving platform 44 is threadedly connected to the surface of the lead screw 43, a metal tube 45 is fixedly connected to the front of the moving platform 44, an atomizing nozzle 46 is installed on the surface of the metal tube 45, a connecting hose 47 is fixedly connected to the output end of the metal tube 45, a water pump 48 is installed at the input end of the connecting hose 47, and a water tank 49 is installed on the surface of the cleaning tank 1.

[0034] The number of atomizing nozzles 46 is set to several, and the several atomizing nozzles 46 are evenly distributed on the surface of the metal tube 45 with the center of the front side symmetrically. The input end of the atomizing nozzle 46 is located inside the metal tube 45.

[0035] The connecting hose 47 penetrates the inner wall of the cleaning tank 1.

[0036] The inlet of the water pump 48 is located inside the water tank 49.

[0037] A slider 6 is fixedly connected to the end of the moving platform 44 away from the metal tube 45, and a slide rail 7 is slidably connected to the surface of the slider 6.

[0038] The rear end of the slide rail 7 is fixedly connected to the inner wall of the cleaning tank 1.

[0039] The feeding assembly 8 includes a mounting frame 81, a cylinder 82 is fixedly connected to the bottom of the inner wall of the mounting frame 81, a connecting plate 83 is fixedly connected to the output end of the cylinder 82, a support rod 84 is fixedly connected to the bottom of the connecting plate 83, and a feeding platform 85 is fixedly connected to the bottom of the support rod 84.

[0040] The top of the mounting bracket 81 is located above the cleaning tank 1. There are two support rods 84, which are symmetrically and evenly distributed around the center of the front of the connecting plate 83. The feeding platform 85 is concentric with the anti-slip plate 3.

[0041] The implementation principle of a multi-nozzle spray cleaning device for an exposure machine in this embodiment is as follows: when cleaning the exposure machine disc, the servo motor 42 is started, and the output end of the servo motor 42 drives the lead screw to rotate. The rotation of the lead screw 43 drives the moving stage 44 to move on the surface of the lead screw 43. The movement of the moving stage 44 synchronously drives the atomizing nozzle 46 located on the surface of the metal tube 45 to move, so as to increase the atomizing spray area when the atomizing nozzle 46 performs atomized cleaning on the surface of the disc.

[0042] Then, the water pump 48 is started. The output end of the water pump 48 draws the cleaning fluid from the water tank 49 into the connecting hose 47, and sends it into the metal tube 45 through the connecting hose 47, so that the atomizing nozzle 46 atomizes and sprays it onto the surface of the disc.

[0043] By placing the disc on the top of the feeding platform 85, the cylinder 82 is activated. The output end of the cylinder 82 drives the feeding platform 85 to move downward until the feeding platform 85 moves to the bottom of the anti-slip plate 3, so that the disc contacts the top of the anti-slip plate 3, making it easy to pick up before and after cleaning the disc.

[0044] The above embodiments are merely preferred embodiments of this utility model and should not be construed as limiting the scope of protection of this utility model. Any non-substantial changes and substitutions made by those skilled in the art based on this utility model shall fall within the scope of protection claimed by this utility model.

Claims

1. A multi-nozzle spray cleaning device for an exposure machine, characterized in that: Includes a cleaning tank (1), a fixed platform (2) is fixedly connected to the bottom of the inner wall of the cleaning tank (1), an anti-slip plate (3) is fixedly connected to the top of the fixed platform (2), a cleaning component (4) is installed inside the cleaning tank (1), a drain pipe (5) is fixedly connected to the cleaning tank (1), and a feeding component (8) is installed on the surface of the cleaning tank (1). The cleaning component (4) includes a motor frame (41), a servo motor (42) is installed inside the motor frame (41), a lead screw (43) is fixedly connected to the output end of the servo motor (42), a moving platform (44) is threadedly connected to the surface of the lead screw (43), a metal tube (45) is fixedly connected to the front of the moving platform (44), an atomizing nozzle (46) is installed on the surface of the metal tube (45), a connecting hose (47) is fixedly connected to the output end of the metal tube (45), a water pump (48) is installed at the input end of the connecting hose (47), and a water tank (49) is installed on the surface of the cleaning tank (1).

2. The multi-nozzle spray cleaning device for an exposure machine according to claim 1, characterized in that: The number of atomizing nozzles (46) is set to several, and the several atomizing nozzles (46) are evenly distributed on the surface of the metal tube (45) with the center of the front side symmetrically. The input end of the atomizing nozzle (46) is located inside the metal tube (45).

3. The multi-nozzle spray cleaning device for an exposure machine according to claim 1, characterized in that: The connecting hose (47) penetrates the inner wall of the cleaning tank (1).

4. The multi-nozzle spray cleaning device for an exposure machine according to claim 1, characterized in that: The input end of the water pump (48) is located inside the water tank (49).

5. A multi-nozzle spray cleaning device for an exposure machine according to claim 1, characterized in that: The movable stage (44) is fixedly connected to a slider (6) at the end away from the metal tube (45), and a slide rail (7) is slidably connected to the surface of the slider (6).

6. A multi-nozzle spray cleaning device for an exposure machine according to claim 5, characterized in that: The rear end of the slide rail (7) is fixedly connected to the inner wall of the cleaning tank (1).

7. A multi-nozzle spray cleaning device for an exposure machine according to claim 1, characterized in that: The feeding assembly (8) includes a mounting frame (81), a cylinder (82) is fixedly connected to the bottom of the inner wall of the mounting frame (81), a connecting plate (83) is fixedly connected to the output end of the cylinder (82), a support rod (84) is fixedly connected to the bottom of the connecting plate (83), and a feeding platform (85) is fixedly connected to the bottom of the support rod (84).

8. A multi-nozzle spray cleaning device for an exposure machine according to claim 7, characterized in that: The top of the mounting bracket (81) is located above the cleaning tank (1). There are two support rods (84). The two support rods (84) are evenly distributed symmetrically around the front center of the connecting plate (83). The feeding platform (85) is concentric with the anti-slip plate (3).

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