Laser online cleaning device

Abstract

This utility model discloses an online laser cleaning device, including a fiber optic spectrometer probe mounted on a horizontal slide table. A laser probe is also mounted on the horizontal slide table. The horizontal slide table cooperates with a horizontal slide rail. The fiber optic spectrometer probe is connected to a fiber optic spectrometer via a fiber optic spectrometer connection cable, and the laser probe is connected to a laser via a laser fiber optic connection cable. This utility model solves the problem of low contaminant removal accuracy in laser cleaning of existing cleaning devices.

Description

Technical Field

[0001] This utility model belongs to the field of laser processing technology and relates to a laser online cleaning device. Background Technology

[0002] In industrial production and scientific research, the cleanliness of substrates plays a decisive role in subsequent processes and product performance. Especially when oil contamination is present on the substrate surface, it severely affects the adhesion between the substrate and other materials, electrical conductivity, and optical properties. Traditional methods such as sandblasting, high-pressure water cleaning, and chemical cleaning are simple and mature, but they are inefficient, pollute the environment, and damage equipment. With the development of laser cleaning technologies, their advantages of low cost, environmental friendliness, and high effectiveness are gradually becoming apparent, and they are beginning to replace conventional cleaning methods, finding widespread application in industrial production.

[0003] Current laser cleaning methods use a parallel beam with a wavelength of 800-1064nm to scan the area to be cleaned line by line, and operators judge the cleaning effect by visual inspection. This results in low cleaning accuracy and poses a health hazard to operators. Current research on laser cleaning technology, both domestically and internationally, mainly focuses on the laser cleaning mechanism, laser wavelength selection, and optimization of the cleaning threshold. How to further improve cleaning accuracy remains a pressing problem to be solved. Utility Model Content

[0004] The purpose of this invention is to provide an online laser cleaning device that solves the problem of low contaminant removal accuracy in existing laser cleaning devices.

[0005] The technical solution adopted in this utility model is a laser online cleaning device, including a fiber optic spectrometer probe, which is mounted on a horizontal slide table. A laser probe is also mounted on the horizontal slide table. The horizontal slide table cooperates with a horizontal slide rail. The fiber optic spectrometer probe is connected to the fiber optic spectrometer through a fiber optic spectrometer connection cable, and the laser probe is connected to the laser through a laser fiber optic connection cable.

[0006] The features of this utility model also include:

[0007] The fiber optic spectrometer probe is fixed on a horizontal slide table by a fiber optic spectrometer probe fixing bracket.

[0008] The horizontal slide is connected to stepper motor A.

[0009] The fiber optic spectrometer is connected to the host computer via a spectral data transmission line.

[0010] The laser is connected to the host computer via a laser data transmission line.

[0011] The horizontal slide rail is mounted on the horizontal slide rail fixture.

[0012] The horizontal slide rail is fixed to the vertical slide.

[0013] The vertical slide table works in conjunction with the vertical slide rail.

[0014] The vertical slide is connected to stepper motor B.

[0015] The beneficial effects of this utility model are as follows:

[0016] 1. Improved stability: The dual-rail structure suppresses vibrations caused by high-power lasers;

[0017] 2. Data accuracy: The coaxial layout ensures zero deviation between the spectral acquisition area and the cleaning area;

[0018] 3. Increased efficiency: The cleaning process and the analysis of contaminants on the substrate are completed simultaneously in a single cycle, while the cleaning progress is monitored in real time. Attached Figure Description

[0019] Figure 1 This is a schematic diagram of the structure of the laser online cleaning device of this utility model;

[0020] Figure 2 This is a diagram of the sliding table mechanism in the laser online cleaning device of this utility model.

[0021] In the diagram, 1. Fiber optic spectrometer probe, 2. Fiber optic spectrometer probe mounting bracket, 3. Laser probe, 4. Fiber optic spectrometer connecting cable, 5. Horizontal slide table, 6. Fiber optic spectrometer, 7. Laser fiber optic connecting cable, 8. Horizontal slide rail holder, 9. Laser, 10. Stepper motor A, 11. Spectral data transmission line, 12. Laser data transmission line, 13. Host computer, 14. Substrate, 15. Horizontal slide rail, 16. Vertical slide rail, 17. Vertical slide table, 18. Stepper motor B. Detailed Implementation

[0022] The following detailed description is provided in conjunction with specific implementation methods.

[0023] This utility model relates to an online laser cleaning device, such as... Figure 1 As shown, the system includes a fiber optic spectrometer probe 1, a fiber optic spectrometer probe mounting bracket 2, a laser probe 3, a fiber optic spectrometer connecting cable 4, a horizontal slide table 5, a fiber optic spectrometer 6, a laser fiber optic connecting cable 7, a horizontal slide rail holder 8, a laser 9, a stepper motor A10, a spectral data transmission line 11, a laser data transmission line 12, a host computer 13, a substrate 14, and a horizontal slide rail 15. It also includes a slide mechanism, comprising a vertical slide rail 16, a vertical slide table 17, and a stepper motor B18.

[0024] The fiber optic spectrometer probe 1 is fixed to the horizontal slide table 5 via the fiber optic spectrometer probe mounting bracket 2. The laser probe 3 is also fixed to the horizontal slide table 5. The horizontal slide table 5 is controlled by a stepper motor A10 to slide horizontally on the horizontal slide rail 15. The fiber optic spectrometer probe 1 is connected to the fiber optic spectrometer 6 via the fiber optic spectrometer connecting cable 4, and the laser probe 3 is connected to the laser 9 via the laser fiber optic connecting cable 7. When the fiber optic spectrometer 6 is working, it transmits data to the host computer 13 via the spectral data transmission cable 11. When the laser 9 is working, it transmits data to the host computer 13 via the laser data transmission cable 12.

[0025] in, Figure 1 The horizontal slide rail retainer 8 and Figure 2 The vertical slide 17 is connected in the middle. Figure 2 The vertical slide 17 in the middle passes through Figure 2 The stepper motor B18 in the middle Figure 2 The vertical slide rail 16 moves.

[0026] The intelligent unmanned laser online cleaning device uses slide rails 15 and 5, and slide rails 16 and 17, orthogonally distributed, combined with stepper motors A10 and B18, to form a two-dimensional plane. The host computer 13 sends commands to stepper motors A10 and B18 to achieve movement of the two-dimensional plane. With this structure, the laser probe 3 and the fiber optic spectrometer probe 1 can move synchronously, enabling automatic detection and laser cleaning of contaminants on the substrate 14 (to be tested or with contaminants).

[0027] This utility model's online laser cleaning device uses a host computer 13 to call upon a laser 9 and a spectrometer 6. A high-power pulsed laser with a wavelength of 1064nm is focused onto the surface of a substrate 14 (such as iron, aluminum, or a substrate with contaminants (iron sheets containing rust or oil)), instantly generating temperatures above 100°C. This melts the contaminants on the substrate 14 surface (including but not limited to iron-based oxides, oil, and aluminum-based oxides) to form plasma. The plasma collides with atoms, producing an avalanche effect and forming a large amount of high-temperature plasma. During the cooling process of the high-temperature plasma, excited-state atoms and ions transition to lower energy levels, releasing light radiation with elemental characteristics. Therefore, after the cleaning operation begins, the main steps include:

[0028] Step 1: Spectrometer 6 acquires the raw spectral data of substrate 14;

[0029] Step 2: The raw spectral data collected by the spectrometer 6 is transmitted to the host computer 13 through the spectral data transmission line 11 to analyze the spectral information of the substrate or the substrate 14 with contaminants.

[0030] Step 3: Based on the information processing results, if the spectral information of the substrate or the substrate 14 with contaminants analyzed in the host computer 13 is indeed the substrate, then the cleaning is stopped; if the spectral information of the substrate or the substrate 14 with contaminants analyzed in the host computer 13 is contaminants containing oil or rust, then the cleaning operation on the substrate 14 with contaminants is started.

[0031] Step 4: During the cleaning process, the spectrometer 6 collects real-time spectral data during the cleaning process and transmits it to the host computer 13 through the spectral data transmission line 11 for spectral data analysis. It then determines whether the spectral information of the substrate 14 with contaminants matches the spectral information of the substrate. If the real-time spectral information matches the spectral information characteristics of the clean substrate, the cleaning process stops; otherwise, the cycle of step 3 continues.

[0032] Through the above steps, real-time monitoring of spectral analysis during laser cleaning is achieved, which not only improves cleaning efficiency but also enables unmanned autonomous cleaning.

[0033] Example 1

[0034] The laser online cleaning device includes a fiber optic spectrometer probe 1, which is mounted on a horizontal slide 5. A laser probe 3 is also mounted on the horizontal slide 5. The horizontal slide 5 cooperates with a horizontal slide rail 15. The fiber optic spectrometer probe 1 is connected to a fiber optic spectrometer 6 via a fiber optic spectrometer connecting cable 4. The laser probe 3 is connected to a laser 9 via a laser fiber optic connecting cable 7.

[0035] Example 2

[0036] The laser online cleaning device includes a fiber optic spectrometer probe 1, which is mounted on a horizontal slide 5. A laser probe 3 is also mounted on the horizontal slide 5. The horizontal slide 5 cooperates with a horizontal slide rail 15. The fiber optic spectrometer probe 1 is connected to a fiber optic spectrometer 6 via a fiber optic spectrometer connecting cable 4. The laser probe 3 is connected to a laser 9 via a laser fiber optic connecting cable 7.

[0037] The fiber optic spectrometer probe 1 is fixed on the horizontal slide table 5 by the fiber optic spectrometer probe fixing bracket 2.

[0038] Example 3

[0039] The laser online cleaning device includes a fiber optic spectrometer probe 1, which is mounted on a horizontal slide 5. A laser probe 3 is also mounted on the horizontal slide 5. The horizontal slide 5 cooperates with a horizontal slide rail 15. The fiber optic spectrometer probe 1 is connected to a fiber optic spectrometer 6 via a fiber optic spectrometer connecting cable 4. The laser probe 3 is connected to a laser 9 via a laser fiber optic connecting cable 7.

[0040] The fiber optic spectrometer probe 1 is fixed on the horizontal slide table 5 by the fiber optic spectrometer probe fixing bracket 2.

[0041] The horizontal slide 5 is connected to the stepper motor A10.

[0042] Example 4

[0043] The laser online cleaning device includes a fiber optic spectrometer probe 1, which is mounted on a horizontal slide 5. A laser probe 3 is also mounted on the horizontal slide 5. The horizontal slide 5 cooperates with a horizontal slide rail 15. The fiber optic spectrometer probe 1 is connected to a fiber optic spectrometer 6 via a fiber optic spectrometer connecting cable 4. The laser probe 3 is connected to a laser 9 via a laser fiber optic connecting cable 7.

[0044] The fiber optic spectrometer probe 1 is fixed on the horizontal slide table 5 by the fiber optic spectrometer probe fixing bracket 2.

[0045] The horizontal slide 5 is connected to the stepper motor A10.

[0046] The fiber optic spectrometer 6 is connected to the host computer 13 via the spectral data transmission line 11.

[0047] Example 5

[0048] The laser online cleaning device includes a fiber optic spectrometer probe 1, which is mounted on a horizontal slide 5. A laser probe 3 is also mounted on the horizontal slide 5. The horizontal slide 5 cooperates with a horizontal slide rail 15. The fiber optic spectrometer probe 1 is connected to a fiber optic spectrometer 6 via a fiber optic spectrometer connecting cable 4. The laser probe 3 is connected to a laser 9 via a laser fiber optic connecting cable 7.

[0049] The fiber optic spectrometer probe 1 is fixed on the horizontal slide table 5 by the fiber optic spectrometer probe fixing bracket 2.

[0050] The horizontal slide 5 is connected to the stepper motor A10.

[0051] The fiber optic spectrometer 6 is connected to the host computer 13 via the spectral data transmission line 11.

[0052] Laser 9 is connected to host computer 13 via laser data transmission line 12.

[0053] Example 6

[0054] The laser online cleaning device includes a fiber optic spectrometer probe 1, which is mounted on a horizontal slide 5. A laser probe 3 is also mounted on the horizontal slide 5. The horizontal slide 5 cooperates with a horizontal slide rail 15. The fiber optic spectrometer probe 1 is connected to a fiber optic spectrometer 6 via a fiber optic spectrometer connecting cable 4. The laser probe 3 is connected to a laser 9 via a laser fiber optic connecting cable 7.

[0055] The fiber optic spectrometer probe 1 is fixed on the horizontal slide table 5 by the fiber optic spectrometer probe fixing bracket 2.

[0056] The horizontal slide 5 is connected to the stepper motor A10.

[0057] The fiber optic spectrometer 6 is connected to the host computer 13 via the spectral data transmission line 11.

[0058] Laser 9 is connected to host computer 13 via laser data transmission line 12.

[0059] The horizontal slide rail 15 is mounted on the horizontal slide rail fixture 8.

[0060] Example 7

[0061] The laser online cleaning device includes a fiber optic spectrometer probe 1, which is mounted on a horizontal slide 5. A laser probe 3 is also mounted on the horizontal slide 5. The horizontal slide 5 cooperates with a horizontal slide rail 15. The fiber optic spectrometer probe 1 is connected to a fiber optic spectrometer 6 via a fiber optic spectrometer connecting cable 4. The laser probe 3 is connected to a laser 9 via a laser fiber optic connecting cable 7.

[0062] The fiber optic spectrometer probe 1 is fixed on the horizontal slide table 5 by the fiber optic spectrometer probe fixing bracket 2.

[0063] The horizontal slide 5 is connected to the stepper motor A10.

[0064] The fiber optic spectrometer 6 is connected to the host computer 13 via the spectral data transmission line 11.

[0065] Laser 9 is connected to host computer 13 via laser data transmission line 12.

[0066] The horizontal slide rail 15 is mounted on the horizontal slide rail fixture 8.

[0067] The horizontal slide rail retainer 8 is connected to the vertical slide table 17.

[0068] Example 8

[0069] The laser online cleaning device includes a fiber optic spectrometer probe 1, which is mounted on a horizontal slide 5. A laser probe 3 is also mounted on the horizontal slide 5. The horizontal slide 5 cooperates with a horizontal slide rail 15. The fiber optic spectrometer probe 1 is connected to a fiber optic spectrometer 6 via a fiber optic spectrometer connecting cable 4. The laser probe 3 is connected to a laser 9 via a laser fiber optic connecting cable 7.

[0070] The fiber optic spectrometer probe 1 is fixed on the horizontal slide table 5 by the fiber optic spectrometer probe fixing bracket 2.

[0071] The horizontal slide 5 is connected to the stepper motor A10.

[0072] The fiber optic spectrometer 6 is connected to the host computer 13 via the spectral data transmission line 11.

[0073] Laser 9 is connected to host computer 13 via laser data transmission line 12.

[0074] The horizontal slide rail 15 is mounted on the horizontal slide rail fixture 8.

[0075] The horizontal slide rail retainer 8 is connected to the vertical slide table 17.

[0076] The vertical slide 17 is coupled with the vertical slide rail 16.

[0077] Example 9

[0078] The laser online cleaning device includes a fiber optic spectrometer probe 1, which is mounted on a horizontal slide 5. A laser probe 3 is also mounted on the horizontal slide 5. The horizontal slide 5 cooperates with a horizontal slide rail 15. The fiber optic spectrometer probe 1 is connected to a fiber optic spectrometer 6 via a fiber optic spectrometer connecting cable 4. The laser probe 3 is connected to a laser 9 via a laser fiber optic connecting cable 7.

[0079] The fiber optic spectrometer probe 1 is fixed on the horizontal slide table 5 by the fiber optic spectrometer probe fixing bracket 2.

[0080] The horizontal slide 5 is connected to the stepper motor A10.

[0081] The fiber optic spectrometer 6 is connected to the host computer 13 via the spectral data transmission line 11.

[0082] Laser 9 is connected to host computer 13 via laser data transmission line 12.

[0083] The horizontal slide rail 15 is mounted on the horizontal slide rail fixture 8.

[0084] The horizontal slide rail retainer 8 is connected to the vertical slide table 17.

[0085] The vertical slide 17 is coupled with the vertical slide rail 16.

[0086] The vertical slide 17 is connected to the stepper motor B18.

[0087] The features of this utility model's online laser cleaning device are as follows:

[0088] In terms of cleaning efficiency, laser cleaning devices utilize high-energy-density laser beams to instantly target oil stains on substrate surfaces. When the laser pulse irradiates the oil, it rapidly absorbs energy, quickly heating up to a state of evaporation, vaporization, or even decomposition. Compared to traditional methods such as soaking followed by manual wiping or mechanical brushing, laser cleaning eliminates lengthy soaking times and cumbersome mechanical procedures. For example, in the case of cleaning silicon substrates for electronic component manufacturers, traditional chemical cleaning takes several hours to complete a batch of substrates, and manual operation can easily lead to inconsistent cleaning results; while laser cleaning can complete the cleaning of the same number of substrates in just a few minutes, increasing efficiency by several times or even dozens of times, effectively meeting the needs of large-scale production.

[0089] In protecting substrates, traditional mechanical cleaning uses tools such as brushes and sandpaper, which can easily scrape and abrade the substrate surface while removing oil and dirt, altering its roughness and microstructure, and thus affecting substrate performance. Chemical cleaning agents may also react chemically with the substrate, causing corrosion. Laser cleaning, however, precisely controls parameters such as laser energy density, pulse width, and frequency to effectively remove oil and dirt while ensuring the substrate remains intact. In semiconductor chip manufacturing, chip substrates are extremely delicate and have stringent requirements for surface integrity. Laser cleaning equipment, with its non-contact characteristics, ensures the smooth progress of chip manufacturing processes, preventing chip performance degradation or scrapping due to substrate damage.

[0090] Laser cleaning equipment also boasts extremely high cleaning precision. The laser beam has excellent directionality and focusing ability, and through an optical focusing system, it can be precisely focused onto tiny areas of the substrate surface, achieving high-precision localized cleaning. In the aerospace field, component substrates have complex shapes with many hard-to-reach corners and crevices, and are prone to localized oil contamination. Laser cleaning equipment can precisely clean localized oil-contaminated areas by controlling the laser beam scanning path and energy distribution, without affecting other parts of the substrate. For high-end optical instrument manufacturing and other scenarios with extremely high cleanliness requirements, laser cleaning can achieve sub-micron or even nanometer-level cleaning precision, effectively removing tiny oil particles and ensuring the high resolution and imaging quality of optical instruments.

[0091] From an environmental perspective, laser cleaning equipment offers significant advantages. Traditional chemical cleaning requires the use of large amounts of organic solvents, which are not only costly but also prone to volatilization, producing harmful gases that endanger the health of operators and pollute the air and water. Furthermore, the oily residue and chemical wastewater generated during cleaning are difficult and costly to treat. Laser cleaning, on the other hand, uses no chemical reagents and produces no harmful gases, wastewater, or waste residue. The removed oil residue exists primarily in the form of vaporized or microparticles, which can be collected using simple dust collection devices, aligning with sustainable development principles and reducing environmental burden on businesses.

[0092] In terms of cost-effectiveness, laser cleaning equipment also performs exceptionally well. Although the initial investment in equipment purchase is high, the subsequent operating costs are extremely low. It eliminates the need for large-scale chemical reagent purchases and reduces replacement costs caused by substrate damage from traditional cleaning methods. Furthermore, its high cleaning efficiency saves significant labor and time costs. Taking the cleaning of engine block substrates in automobile manufacturing as an example, in the long run, laser cleaning equipment can save substantial annual costs in cleaning agents and labor, and its long service life and low maintenance costs bring significant economic benefits to enterprises.

[0093] Furthermore, laser cleaning equipment is highly automated and easily integrated with automated control systems. By pre-setting laser parameters and cooperating with equipment such as robotic arms and automated conveyor lines, unattended automated cleaning can be achieved, improving the consistency and reliability of the cleaning process and reducing labor intensity.

[0094] In terms of applicability, laser cleaning devices also have significant advantages. They can effectively clean substrates of various materials, such as metals, ceramics, plastics, and semiconductors, as well as various types of oil stains, including mineral oil, vegetable oil, lubricating oil, and complex oil mixtures, by adjusting the laser parameters. This wide applicability has led to their widespread use in numerous fields, including electronics, machinery manufacturing, aerospace, automotive, and cultural relic preservation.

[0095] Laser cleaning devices for oily substrates have become an ideal choice for solving the problem of cleaning oily substrates due to their many advantages, such as high efficiency and speed, substrate protection, high cleaning precision, environmental friendliness, cost-effectiveness, high degree of automation, and wide applicability.

Claims

1. A laser online cleaning device, characterized in that: The system includes a fiber optic spectrometer probe (1), which is mounted on a horizontal slide (5). A laser probe (3) is also mounted on the horizontal slide (5). The horizontal slide (5) is in conjunction with a horizontal slide rail (15). The fiber optic spectrometer probe (1) is connected to the fiber optic spectrometer (6) via a fiber optic spectrometer connecting cable (4). The laser probe (3) is connected to the laser (9) via a laser fiber optic connecting cable (7).

2. The laser online cleaning device according to claim 1, characterized in that: The fiber optic spectrometer probe (1) is fixed on the horizontal slide (5) by the fiber optic spectrometer probe fixing bracket (2).

3. The laser online cleaning device according to claim 1, characterized in that: The horizontal slide (5) is connected to the stepper motor A (10).

4. The laser online cleaning device according to claim 1, characterized in that: The fiber optic spectrometer (6) is connected to the host computer (13) via a spectral data transmission line (11).

5. The laser online cleaning device according to claim 1, characterized in that: The laser (9) is connected to the host computer (13) via a laser data transmission line (12).

6. The laser online cleaning device according to claim 1, characterized in that: The horizontal slide rail (15) is mounted on the horizontal slide rail fixture (8).

7. The laser online cleaning device according to claim 6, characterized in that: The horizontal slide rail fixer (8) is connected to the vertical slide table (17).

8. The laser online cleaning device according to claim 7, characterized in that: The vertical slide (17) is coupled with the vertical slide rail (16).

9. The laser online cleaning device according to claim 8, characterized in that: The vertical slide (17) is connected to the stepper motor B (18).

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