An electromagnetic adsorption dressing head and a chemical mechanical polishing device

Abstract

This utility model discloses an electromagnetic adsorption dressing head and a chemical mechanical polishing device. An electromagnet attracts and fixes an iron plate, thereby securing a diamond disc. Compared to traditional bolt-fixed methods, this method is more convenient for assembly and disassembly, and the connection will not loosen due to the high-speed rotation of the diamond disc. Compared to existing technologies, this utility model uses an electromagnet and a permanent magnet to attract and fix the iron plate via a magnetically conductive plate, thereby securing the diamond disc. This method is more convenient for assembly and disassembly than traditional bolt-fixed methods, and the connection will not loosen due to the high-speed rotation of the diamond disc.

Description

Technical Field

[0001] This utility model relates to the field of chemical mechanical polishing technology, and in particular to an electromagnetic adsorption dressing head and chemical mechanical polishing equipment. Background Technology

[0002] In semiconductor manufacturing processes, chemical mechanical polishing (CMP) is a core technology for achieving global nanoscale planarization of wafers, especially indispensable in advanced processes (such as those below 7nm) with multilayer wiring. This technology precisely removes surface material through the synergistic effect of chemical etching and mechanical polishing, resolving the stepped morphology caused by photolithography and etching, and ensuring the accuracy of insulation and conduction between circuit layers. However, polishing pads, as a core consumable in CMP, face problems such as surface microstructure wear, pore blockage, and hardening during continuous operation, leading to a significant decrease in polishing rate and uniformity.

[0003] The dressing head, as the core device for polishing pad dressing, uses a dressing disc equipped with diamond abrasive grains to micro-cut the pad surface, removing residual slurry crystals and reshaping micro-grooves, thereby maintaining the polishing pad's slurry retention capacity and mechanical friction performance. Traditional dressing heads generally use rigid mechanical clamping structures to fix the dressing disc, such as bolts or pressure plates. While traditional dressing heads typically use mechanical clamping to fix the dressing disc, these methods are prone to vibration and wear under high-speed rotation and high-pressure conditions, affecting dressing accuracy and stability. Utility Model Content

[0004] The main purpose of this utility model is to provide an electromagnetic adsorption dressing head and a chemical mechanical grinding device. The electromagnet and permanent magnet fix the iron plate by adsorbing it through the magnetic plate, thereby fixing the diamond disc. Compared with the traditional bolt fixing method, it is more convenient to disassemble and assemble, and the connection will not loosen due to the high speed rotation of the diamond disc.

[0005] To achieve the above objectives, the technical solution adopted by this utility model is as follows:

[0006] An electromagnetic adsorption trimming head includes a motor, a cantilever fixed to the top output shaft of the motor, a mounting housing fixed to one end of the cantilever, an electromagnet fixed inside the mounting housing, a fixing iron plate adsorbed and fixed to the bottom of the electromagnet, and a diamond disc fixed to the bottom of the fixing iron plate.

[0007] Furthermore, a number of permanent magnets are arranged around the electromagnet, and the number of permanent magnets are fixedly connected to the mounting housing.

[0008] Furthermore, it also includes energy storage devices and controllers connected in parallel with the mains power.

[0009] Furthermore, the energy storage device is a rechargeable battery.

[0010] Furthermore, the energy storage device and controller are fixed to the cantilever.

[0011] Furthermore, a magnetic guide plate is provided at the bottom of the electromagnet and the permanent magnet.

[0012] Furthermore, at least two sets of limiting devices are provided between the magnetic guide plate and the fixed iron plate.

[0013] Furthermore, the limiting device includes a positioning pin fixed to the top of the fixed iron plate, and the magnetic guide plate has a positioning hole that matches the positioning pin.

[0014] This utility model also discloses a chemical mechanical polishing apparatus, including the above-mentioned electromagnetic adsorption trimming head.

[0015] Compared with the prior art, the present invention has the following beneficial effects:

[0016] The present invention uses an electromagnet to attract and fix an iron plate, thereby fixing a diamond disc. Compared with the traditional bolt fixing method, it is easier to assemble and disassemble, and the connection will not loosen due to the high-speed rotation of the diamond disc.

[0017] The controller of this utility model controls the energy storage device to supply power to the electromagnet, so that the electromagnet can work normally when the mains power is interrupted, thus preventing the diamond disc from detaching from the mounting housing due to a sudden power outage during operation, thereby improving safety. Attached Figure Description

[0018] Figure 1 This is a schematic diagram of the overall structure of an electromagnetic adsorption trimming head according to the present invention.

[0019] Figure 2 This is a schematic diagram of the internal structure of the mounting housing of an electromagnetic adsorption trimming head according to this utility model.

[0020] Figure 3 This is a schematic diagram of the connection structure between the magnetic plate and the fixed iron plate of an electromagnetic adsorption trimming head according to this utility model.

[0021] In the diagram: 1. Motor; 2. Cantilever; 3. Mounting housing; 4. Permanent magnet; 5. Electromagnet; 6. Controller; 7. Magnetic plate; 8. Fixing plate; 9. Limiting device; 901. Positioning hole; 902. Positioning pin; 10. Energy storage device; 11. Diamond disc. Detailed Implementation

[0022] The present invention will now be described in detail with reference to the accompanying drawings.

[0023] In the description of this utility model, it should be understood that the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc., indicating the orientation or positional relationship are based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this utility model and simplifying the description, and are not intended to indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model.

[0024] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this utility model, "a plurality of" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0025] In this utility model, unless otherwise explicitly specified and limited, the terms "installation," "connection," "joining," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components, unless otherwise explicitly limited. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances. Example 1

[0026] like Figure 1-3 As shown, an electromagnetic adsorption trimming head includes a motor 1, a cantilever 2 fixed to the top output shaft of the motor 1, a mounting housing 3 fixed to one end of the cantilever 2, an electromagnet 5 fixed inside the mounting housing 3, a plurality of permanent magnets 4 arranged around the electromagnet 5, the plurality of permanent magnets 4 being fixedly connected to the mounting housing 3, a magnetic guide plate 7 adsorbed and fixed to the bottom of the electromagnet 5 and the permanent magnets 4, the magnetic guide plate 7 being located at the bottom of the mounting housing 3 and a fixed iron plate 8 adsorbed to the bottom of the magnetic guide plate 7, a diamond disk 11 brazed to the bottom of the fixed iron plate 8, wherein the magnetic guide plate 7 is made of soft magnetic ferrite.

[0027] In this embodiment, such as Figure 1 and Figure 2As shown, when the electromagnet 5 is energized, it will attract and fix the iron plate 8 through the magnetic plate 7, thereby fixing the diamond disc 11 below the mounting housing 3. During this process, several permanent magnets 4 are also attracted and fixed to the iron plate 8 with the assistance of the magnetic plate 7. Therefore, when the motor 1 is working, the cantilever 2 will drive the diamond disc 11 to rotate through the mounting housing 3, thereby performing finishing and grinding operations on the product.

[0028] When the magnetic plate 7 magnetically fixes the iron plate 8, the electromagnet 5 mainly plays the role of magnetic attraction. This can prevent the diamond disc 11 from becoming loose due to the loose fit between the magnetic plate 7 and the fixed iron plate 8 during the finishing and grinding process. However, when it is necessary to replace the diamond disc 11, the electromagnet 5 is turned off. At this time, although several permanent magnets 4 can still fix the diamond disc 11 to the mounting housing 3 by attracting the fixed iron plate 8 through the magnetic plate 7, the magnetic attraction force on the fixed iron plate 8 is reduced. Personnel can more easily remove the fixed iron plate 8 from the magnetic plate 7 to replace the corresponding diamond disc 11.

[0029] Among them, such as Figure 3 As shown, at least two sets of limiting devices 9 are provided between the magnetic plate 7 and the fixed iron plate 8. The limiting device 9 includes a positioning pin 902 fixed to the top of the fixed iron plate 8. The magnetic plate 7 is provided with a positioning hole 901 that matches the positioning pin 902. When the magnetic plate 7 magnetically attracts the fixed iron plate 8, the positioning pin 902 is inserted into the positioning hole 901. Thus, under the action of multiple sets of limiting devices 9, the magnetic plate 7 and the fixed iron plate 8 will not rotate relative to each other.

[0030] This utility model also discloses a chemical mechanical polishing apparatus, including the above-mentioned electromagnetic adsorption trimming head. Example 2

[0031] The difference from Example 1 is that:

[0032] like Figure 2 As shown, an electromagnetic adsorption dressing head also includes a power storage device 10 and a controller 6 connected in parallel with the mains power. When the mains power is normal, the electromagnet 5 directly uses the mains power. When the mains power fails, the controller 6 controls the power storage device 10 to supply power to the electromagnet 5, thereby ensuring that the electromagnet 5 can still work normally and adhere to the iron plate 8 through the magnetic plate 7 when the mains power fails. This prevents the diamond disc 11 from detaching from the mounting housing 3 due to a sudden power outage during operation, thus improving safety. The principle is similar to that of a UPS (Uninterruptible Power Supply).

[0033] After the mains power is cut off, the device immediately stops working, ensuring that the diamond disk 11 remains stationary before the power in the energy storage device 10 is exhausted.

[0034] Among them, the energy storage device 10 is a rechargeable battery that can be recharged and used repeatedly.

[0035] The energy storage device 10 and the controller 6 are fixed on the cantilever 2.

[0036] Working principle: When the device is not in operation, several permanent magnets 4 attract and fix the iron plate 8 through the magnetic guide plate 7, thereby fixing the diamond disc 11 under the mounting housing 3. When the device is about to work, the operator should control the electromagnet 5 to work, so that it attracts and fixes the iron plate 8 through the magnetic guide plate 7, thereby further improving the stability of fixing the iron plate 8. Then, the operator can manually control the motor 1 to work, and the motor 1 will drive the cantilever 2 to rotate, thereby driving the diamond disc 11 to rotate through the mounting housing 3, and then performing finishing and grinding operations on the product.

[0037] When the mains power is normal, the electromagnet 5 directly uses the mains power. When the mains power is interrupted, the controller 6 controls the energy storage device 10 to supply power to the electromagnet 5, thereby ensuring that the electromagnet 5 can still work normally when the mains power is interrupted. The iron plate 8 is attracted and fixed by the magnetic plate 7, thus preventing the diamond disc 11 from detaching from the mounting housing 3 when the mains power suddenly fails, because the magnetic plate 7 cannot stably attract and fix the iron plate 8, thereby improving safety.

[0038] The above embodiments are only for illustrating the technical concept and features of this utility model, and are intended to enable those skilled in the art to understand the content of this utility model and implement it accordingly. They should not be construed as limiting the scope of protection of this utility model. All equivalent transformations or modifications made in accordance with the spirit and essence of this utility model should be included within the scope of protection of this utility model.

Claims

1. An electromagnetic adsorption trimming head, comprising a motor (1), a cantilever (2) fixed on the top output shaft of the motor (1), and a mounting shell (3) fixed on one end of the cantilever (2), characterized in that: An electromagnet (5) is fixed inside the mounting housing (3). A fixing iron plate (8) is attached to the bottom of the electromagnet (5). A diamond disc (11) is fixed to the bottom of the fixing iron plate (8).

2. An electromagnetic chucking head according to claim 1, characterized in that: The electromagnet (5) is surrounded by several permanent magnets (4), and the several permanent magnets (4) are fixedly connected to the mounting housing (3).

3. A trimming head for electromagnetic adsorption according to claim 1 or 2, characterized in that: It also includes an energy storage device (10) and a controller (6) connected in parallel with the mains power.

4. The trimming head with electromagnetic adsorption according to claim 3, characterized in that: The energy storage device (10) is a rechargeable battery.

5. The trimming head for electromagnetic adsorption according to claim 4, characterized in that: The energy storage device (10) and the controller (6) are fixed on the cantilever (2).

6. The trimming head for electromagnetic adsorption according to claim 2, characterized in that: The electromagnet (5) and the permanent magnet (4) are provided with a magnetic guide plate (7) at their bottom.

7. The trimming head for electromagnetic adsorption according to claim 6, characterized in that: At least two sets of limiting devices (9) are provided between the magnetic guide plate (7) and the fixed iron plate (8).

8. The trimming head for electromagnetic adsorption according to claim 7, characterized in that: The limiting device (9) includes a positioning pin (902) fixed to the top of the fixed iron plate (8), and the magnetic plate (7) is provided with a positioning hole (901) that matches the positioning pin (902).

9. A chemical mechanical grinding apparatus, characterized in that: Includes an electromagnetic adsorption trimming head as described in any one of claims 1, 2, 4-8.

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