Trace oxygen purity detection device

Abstract

The utility model relates to the technical field of oxygen detection, and discloses a trace oxygen purity detection device which comprises an outer tube and a detection inner tube, and a platinum wire temperature sensor is wound outside the detection inner tube; the sealing structure comprises end cylinders and ribs, the two ends of the outer pipe are each provided with one end cylinder, the two end cylinders are fixedly provided with the multiple ribs, the ribs are attached to the exterior of the outer pipe, gas is fed into a cavity of the detection inner pipe through the gas feeding pipe, and the gas is mainly hydrogen generated by electrolyzing water and gas to be detected; hydrogen and oxygen react to release heat under the catalytic action of a catalyst, the platinum wire temperature sensor can absorb heat, bridge unbalance is triggered through changes of the platinum wire temperature sensor, an output voltage signal and the oxygen concentration are in a linear relation, and then the oxygen concentration is measured. The trace oxygen detection device is improved in the aspects of precision, speed and stability in a breakthrough manner, and is particularly suitable for the advanced manufacturing field with strict requirements on oxygen content control.

Description

Technical Field

[0001] This utility model relates to the field of oxygen detection technology, and in particular to a device for detecting trace oxygen purity. Background Technology

[0002] Industrial applications sensitive to oxygen content, such as semiconductor manufacturing, high-purity gas production, and electronic packaging, require strict control of oxygen concentration.

[0003] A search revealed a prior art device for determining trace oxygen content in chlorine gas (publication number: CN216132865U), comprising a gas measuring tube body and a graduated glass tube.

[0004] The gas measuring tube body includes a large-diameter measuring tube cylinder and a medium-diameter measuring tube cylinder. The medium-diameter measuring tube cylinder is located at the top of the large-diameter measuring tube cylinder and is connected to it as a whole. The bottom of the large-diameter measuring tube cylinder is symmetrically provided with inlet I and inlet II. The top of the medium-diameter measuring tube cylinder and the small-diameter measuring tube cylinder are connected to each other as a whole. The top of the small-diameter measuring tube cylinder is connected to symmetrically arranged outlet I and outlet II. The graduated glass tube is connected to the gas measuring tube outlet II through a transparent flexible tube.

[0005] The existing technology has the following drawbacks:

[0006] Weak anti-interference capability: Traditional electrochemical sensors are susceptible to temperature fluctuations, requiring additional temperature compensation modules, which increases system complexity.

[0007] Response speed lag: Polarographic sensors rely on gas diffusion membranes. For example, the zirconia sensor used in a certain patent has a response time of more than 30 seconds, which cannot meet the requirements of real-time monitoring.

[0008] Therefore, we propose a device for detecting trace oxygen purity. Utility Model Content

[0009] The present invention mainly addresses the technical problem of slow detection response speed mentioned above, and provides a trace oxygen purity detection device.

[0010] To achieve the above objectives, this utility model adopts the following technical solution: a trace oxygen purity detection device, comprising:

[0011] The outer tube and the inner detection tube are fitted inside the outer tube, forming a buffer cavity between the outer tube and the inner detection tube. The buffer cavity is filled with filler, and the inner detection tube cavity is filled with catalyst. A platinum wire temperature sensor is wound around the outside of the inner detection tube.

[0012] A sealing structure is provided at the end of the outer tube to seal the ports of the outer tube and detect the inner tube. The sealing structure includes an end tube and ribs. An end tube is provided at each end of the outer tube, and several ribs are fixedly provided on the two end tubes. The ribs fit against the outside of the outer tube, and the multiple ribs form a spiral barrier on the outer wall of the outer tube.

[0013] The constant temperature structure is set on the outside of the outer tube to heat the outer tube and the internal materials.

[0014] In a preferred embodiment of this utility model, the sealing structure further includes an air supply pipe and a terminal block. An air supply pipe is fixedly installed at the end of each of the two end cylinders. The air supply pipe is directly opposite the port of the detection inner tube. The terminal block is fixedly connected to the end cylinder and electrically connected to the platinum wire temperature sensor.

[0015] In a preferred embodiment of this utility model, the platinum wire temperature sensor is spiral-shaped, and the end of the platinum wire temperature sensor is fixedly connected to the end cylinder.

[0016] In a preferred embodiment of this utility model, the rib is a spiral metal sheet, and the two ends of the rib are fixedly connected to two end cylinders respectively.

[0017] In a preferred embodiment of this utility model, the end tube forms a cylindrical structure, a flange is fixedly provided on the outside of the end tube, and a sealing ring is provided on the inner end face of the end tube. The ends of the outer tube and the inner tube abut against the sealing ring to form a seal.

[0018] In a preferred embodiment of this utility model, the constant temperature structure includes a shell and a heating rod. The shell has a cavity, the outer tube is located inside the cavity of the shell, and the heating rod is fixedly installed on the outside of the shell, extending into the cavity of the shell.

[0019] As a preferred embodiment of this utility model, the top of the outer shell is provided with an oil filling hole, and a sealing nut is threaded into the filling hole. A pressure relief valve is also fixedly installed on the top of the outer shell.

[0020] This invention provides a device for detecting trace oxygen purity. It has the following beneficial effects:

[0021] 1. This trace oxygen purity detection device uses diatomaceous earth as the filler and manganese-palladium catalyst particles as the catalyst. Gas is introduced into the inner detection tube via a gas delivery pipe. The gas consists mainly of hydrogen produced by water electrolysis and the gas to be detected. Since hydrogen and oxygen react exothermically under the catalytic action of the catalyst, and the platinum wire temperature sensor absorbs this heat, changes in the temperature sensor trigger a bridge imbalance. The output voltage signal is linearly related to the oxygen concentration, thus determining the oxygen concentration. This design achieves a short response time, high speed, low detection limit, and longer catalyst lifespan when detecting oxygen concentration, meeting the requirements for detecting low-concentration oxygen. It represents a breakthrough improvement in the accuracy, speed, and stability of trace oxygen detection devices, making it particularly suitable for advanced manufacturing fields with stringent oxygen content control requirements.

[0022] 2. This trace oxygen purity detection device injects heat-conducting oil into the outer shell through a filling hole, seals the filling hole with bolts and gaskets, heats the heat-conducting oil by connecting to a power source via a heating rod, and has a temperature sensor inside the outer shell to monitor and control the temperature of the heat-conducting oil. As a result, the outer tube is kept in a constant temperature heat-conducting oil, and the reaction temperature is stabilized and controlled, which can improve the detection accuracy of oxygen.

[0023] 3. This trace oxygen purity detection device forms a spiral barrier on the outside of the outer tube through ribs. On the one hand, it can support and protect the outer tube, and on the other hand, it can increase the contact area between the outer tube and the heat transfer oil, thereby ensuring the heating effect of the heat transfer oil on the outer tube. Attached Figure Description

[0024] Figure 1 This is a perspective view of the outer tube of this utility model;

[0025] Figure 2 This is a perspective view of the outer tube and the inner testing tube of this utility model;

[0026] Figure 3 This is a partial cross-sectional view of the outer tube and the inner detection tube of this utility model;

[0027] Figure 4 This is one of the overall perspective views of this utility model;

[0028] Figure 5 This is a schematic diagram of the internal structure of the outer shell of this utility model.

[0029] Legend: 10. Outer tube; 11. Inner detection tube; 12. Platinum wire temperature sensor; 13. End tube; 14. Rib; 15. Air supply tube; 16. Terminal; 20. Outer shell; 21. Heating rod. Detailed Implementation

[0030] A trace oxygen purity detection device, such as Figure 1 and Figure 2As shown, it includes:

[0031] The outer tube 10 and the inner detection tube 11 are fitted inside the outer tube 10. A buffer cavity is formed between the outer tube 10 and the inner detection tube 11. The buffer cavity is filled with filler. The inner detection tube 11 is filled with catalyst. A platinum wire temperature sensor 12 is wound around the outside of the inner detection tube 11. The platinum wire temperature sensor 12 is spiral in shape. The end of the platinum wire temperature sensor 12 is fixedly connected to the end cylinder 13.

[0032] Figure 1 , Figure 2 and Figure 3 As shown, a sealing structure is provided at the end of the outer tube 10 to seal the ports of the outer tube 10 and the detection inner tube 11. The sealing structure includes an end cylinder 13 and ribs 14. An end cylinder 13 is provided at each end of the outer tube 10. Several ribs 14 are fixedly provided on the two end cylinders 13. The ribs 14 fit against the outside of the outer tube 10. The multiple ribs 14 form a spiral barrier on the outer wall of the outer tube 10. The sealing structure also includes an air supply pipe 15 and a terminal block 16. An air supply pipe 15 is fixedly installed at the end of each of the two end cylinders 13. The air supply pipe 15 faces the port of the detection inner tube 11. The terminal block 16 is fixedly connected to the end cylinder 13 and electrically connected to the platinum wire temperature sensor 12. The ribs 14 are spiral metal sheets. The two ends of the ribs 14 are fixedly connected to the two end cylinders 13 respectively. The end cylinder 13 forms a cylindrical structure. A flange is fixedly provided on the outside of the end cylinder 13. A sealing ring is provided on the inner end face of the end cylinder 13. The ends of the outer tube 10 and the detection inner tube 11 abut against the sealing ring to form a seal.

[0033] In this scheme, the packing material is mainly diatomaceous earth inert support, and the catalyst is manganese-palladium catalyst particles. Gas is sent into the cavity of the inner detection tube 11 through the gas supply pipe 15. The gas mainly consists of hydrogen produced by water electrolysis and the gas to be detected. Since hydrogen and oxygen react exothermically under the catalytic action of the catalyst, and the platinum wire temperature sensor 12 can absorb the heat, the change in temperature of the platinum wire temperature sensor 12 is ΔR = α·ΔT (α = 3.85 × outer tube 10). -3 The circuit is triggered by a voltage level of / ℃, causing the output voltage signal to be linearly related to the oxygen concentration, thus allowing the oxygen concentration to be measured. This design achieves a short response time, high speed, low detection limit, and longer catalyst life when detecting oxygen concentration, making it capable of meeting the detection requirements for low-concentration oxygen. It represents a breakthrough improvement in the accuracy, speed, and stability of trace oxygen detection devices, and is particularly suitable for advanced manufacturing fields with stringent requirements for oxygen content control.

[0034] like Figure 4 and Figure 5 As shown, a constant temperature structure is installed outside the outer tube 10 for heating the outer tube 10 and the internal material;

[0035] The constant temperature structure includes a shell 20 and a heating rod 21. The shell 20 has a cavity, and the outer tube 10 is located inside the cavity of the shell 20. The heating rod 21 is fixedly installed on the outside of the shell 20 and extends into the cavity of the shell 20. The top of the shell 20 has an oil filling hole, and a sealing nut is threaded into the filling hole. A pressure relief valve is also fixedly installed on the top of the shell 20.

[0036] To reduce the impact of external temperature changes on the reaction, heat transfer oil is injected into the outer casing 20 through the filling hole. The filling hole is then sealed with bolts and gaskets. The heat transfer oil is heated by connecting to a power source via an electric heating rod 21. The outer casing 20 is equipped with a temperature sensor to monitor and control the temperature of the heat transfer oil. As a result, the outer tube 10 is kept in a constant-temperature heat transfer oil, and the reaction temperature is stabilized and controlled, which can improve the accuracy of oxygen detection.

[0037] The ribs 14 form a spiral barrier on the outside of the outer tube 10, which can support and protect the outer tube 10 on the one hand, and increase the contact area between the outer tube 10 and the heat transfer oil on the other hand, thereby ensuring the heating effect of the heat transfer oil on the outer tube 10.

[0038] The working principle of this utility model is as follows: One gas supply pipe 15 is connected to a three-way pipe. One port of the three-way pipe is connected to a gas source for supplying hydrogen, and the other port is connected to a gas source for supplying the gas to be tested. The hydrogen supply rate is controlled at 50 ml / min, and the heat transfer oil temperature is controlled at 180 degrees Celsius. The packing material is mainly diatomaceous earth inert support, and the catalyst is manganese-palladium catalyst particles. The flange on the outer wall of the end cylinder 15 is locked and fixed to the outer shell 20 by bolts and sealing gaskets to form a seal. The gas supply pipe 15 and the terminal block 16 are located outside the outer shell 20. The gas is supplied into the cavity of the inner detection tube 11 through the gas supply pipe 15. The gas is mainly hydrogen produced by water electrolysis and the gas to be tested. Since hydrogen and oxygen react exothermically under the catalytic action of the catalyst, and the platinum wire temperature sensor 12 can absorb the heat, the change in temperature of the platinum wire temperature sensor 12 is ΔR = α·ΔT (α = 3.85 × outer tube 10). -3 / ℃) triggers bridge imbalance, output voltage signal is linearly related to oxygen concentration, thus measuring oxygen concentration, heat transfer oil is injected into the outer casing 20 through filling hole, the filling hole is sealed with bolts and gaskets, heat transfer oil is heated by power supply through heating rod 21, temperature sensor is installed in the outer casing 20 to monitor and control the temperature of heat transfer oil, thus the outer tube 10 will be in constant temperature heat transfer oil, ensuring the reaction temperature of hydrogen and oxygen.

[0039] The foregoing has shown and described the basic principles, main features, and advantages of this utility model. Those skilled in the art should understand that this utility model is not limited to the above embodiments. The embodiments and descriptions in the specification are merely illustrative of the principles of this utility model. Various changes and modifications can be made to this utility model without departing from its spirit and scope, and all such changes and modifications fall within the scope of the claims. The scope of protection of this utility model is defined by the appended claims and their equivalents.

Claims

1. A trace oxygen purity detection device, characterized in that, include: The outer tube (10) and the inner detection tube (11) are fitted inside the outer tube (10). A buffer cavity is formed between the outer tube (10) and the inner detection tube (11). The buffer cavity is filled with filler. The inner detection tube (11) is filled with catalyst. A platinum wire temperature sensor (12) is wound around the outside of the inner detection tube (11). A sealing structure is provided at the end of the outer tube (10) to seal the port of the outer tube (10) and the detection inner tube (11). The sealing structure includes an end tube (13) and ribs (14). An end tube (13) is provided at each end of the outer tube (10). Several ribs (14) are fixedly provided on the two end tubes (13). The ribs (14) fit against the outside of the outer tube (10). Multiple ribs (14) form a spiral barrier on the outer wall of the outer tube (10). The constant temperature structure is set outside the outer tube (10) to heat the outer tube (10) and the internal materials.

2. The trace oxygen purity detection device according to claim 1, characterized in that: The sealing structure also includes an air supply pipe (15) and a terminal block (16). An air supply pipe (15) is fixedly installed at the end of each of the two end cylinders (13). The air supply pipe (15) is directly opposite the port of the detection inner tube (11). The terminal block (16) is fixedly connected to the end cylinder (13) and electrically connected to the platinum wire temperature sensor (12).

3. The trace oxygen purity detection device according to claim 1, characterized in that: The platinum wire temperature sensor (12) is spiral-shaped, and the end of the platinum wire temperature sensor (12) is fixedly connected to the end cylinder (13).

4. The trace oxygen purity detection device according to claim 1, characterized in that: The rib (14) is a spiral metal sheet, and the two ends of the rib (14) are fixedly connected to the two end cylinders (13) respectively.

5. The trace oxygen purity detection device according to claim 1, characterized in that: The end tube (13) forms a cylindrical structure. A flange is fixedly provided on the outside of the end tube (13). A sealing ring is provided on the inner end face of the end tube (13). The ends of the outer tube (10) and the inner tube (11) abut against the sealing ring to form a seal.

6. The trace oxygen purity detection device according to claim 1, characterized in that: The constant temperature structure includes a shell (20) and a heating rod (21). The shell (20) has a cavity. The outer tube (10) is located inside the cavity of the shell (20). The heating rod (21) is fixedly installed on the outside of the shell (20) and extends into the cavity of the shell (20).

7. The trace oxygen purity detection device according to claim 6, characterized in that: The top of the outer casing (20) is provided with an oil filling hole, and a sealing nut is threaded into the filling hole. A pressure relief valve is also fixedly installed on the top of the outer casing (20).

Images