A multi-layer laser protection sheet, a laser output window, and a laser.

Abstract

This invention provides a multilayer laser protection sheet, a laser output window, and a laser. The multilayer laser protection sheet is applied to the laser, which also includes a laser body. The multilayer laser protection sheet comprises, sequentially arranged, an anti-laser damage layer, a high-transmittance substrate layer, and a protective layer, with the anti-laser damage layer disposed adjacent to the laser body. By adopting the solution provided by this invention, not only is good laser transmittance guaranteed, but it also allows for long-term use without replacing the multilayer laser protection sheet, thereby increasing its service life and reducing costs.

Description

Technical Field

[0001] This utility model relates to the field of laser technology, and in particular to a multilayer laser protection sheet, a laser output window, and a laser. Background Technology

[0002] A laser (Light Amplification by Stimulated Emission of Radiation) is a device that amplifies light signals through stimulated emission, producing high-intensity, highly directional, highly monochromatic, and highly coherent light waves. Lasers are widely used in various fields, such as precision cutting and welding of materials like metals, plastics, and ceramics in industrial settings, and laser scalpels and dental treatments in medical settings.

[0003] Existing laser protective sheets exhibit a rapid decrease in light transmittance across various application scenarios for different reasons. For instance, in industrial micromachining, laser ablation of polymer materials produces nanoscale carbonized particles, resulting in light scattering losses; in metal processing, molten slag spatter from high-power lasers contaminates the protective sheet, leading to a decrease in light transmittance.

[0004] In view of this, it is necessary to improve the existing laser protection sheet to solve the above problems.

[0005] It should be noted that the above description of the background technology is only for the purpose of providing a clear and complete explanation of the technical solution of this utility model and facilitating understanding by those skilled in the art. It should not be assumed that the above technical solutions are known to those skilled in the art simply because they have been described in the background technology section of this utility model. Utility Model Content

[0006] The purpose of this invention is to solve the problem that the light transmittance of the protective sheet in the prior art decreases rapidly due to the generation of nano-scale carbonized particles and molten slag splashing.

[0007] To achieve the above objectives, this utility model provides a multilayer laser protection sheet for use in a laser. The laser also includes a laser body. The multilayer laser protection sheet includes: an anti-laser damage layer, a high-transmittance substrate layer, and a protective layer arranged sequentially. The anti-laser damage layer is disposed adjacent to the laser body.

[0008] As a further improvement of this utility model, the laser damage threshold of the anti-laser damage layer is greater than that of the high-transmittance substrate layer and the protective layer.

[0009] And / or, the transmittance of the high-transmittance substrate layer is greater than the transmittance of the laser-resistant layer and the protective layer;

[0010] And / or, the hardness of the protective layer is greater than the hardness of the high-transmittance substrate layer;

[0011] And / or, the thickness of the high-transmittance substrate layer is greater than the thickness of the protective layer and the laser-damage-resistant layer.

[0012] As a further improvement of this utility model, the multilayer laser protection sheet further includes an antistatic layer, which is disposed on the side of the anti-laser damage layer away from the high-transmittance substrate layer;

[0013] The surface resistance of the antistatic layer is greater than that of the laser-damage-resistant layer.

[0014] As a further improvement to this utility model,

[0015] The surface resistance of the antistatic layer is greater than that of the high light transmittance substrate layer and the protective layer.

[0016] And / or, the thickness of the antistatic layer is less than the thickness of the high-transmittance substrate layer;

[0017] And / or, the laser damage threshold of the antistatic layer is less than the laser damage threshold of the anti-laser damage layer;

[0018] And / or, the light transmittance of the antistatic layer is less than that of the high-transmittance substrate layer.

[0019] As a further improvement of this utility model, the cross-sectional shape of the multilayer laser protection sheet is circular or rectangular;

[0020] And / or, the protective layer comprises an aluminum nitride hard film or an aluminum oxynitride hard film;

[0021] And / or, the thickness of the protective layer is 200-400 nm;

[0022] And / or, the Vickers hardness of the protective layer is 1600-2000;

[0023] And / or, the high-transmittance substrate layer comprises calcium fluoride, fused silica, or sapphire;

[0024] And / or, the thickness of the high-transmittance substrate layer is 1-3 mm;

[0025] And / or, the high transmittance substrate layer has a transmittance of more than 85-99% for lasers with wavelengths of 193-532nm;

[0026] And / or, the laser-damage-resistant layer comprises a diamond film;

[0027] And / or, the thickness of the laser-resistant layer is 80-120 nm;

[0028] And / or, the thermal conductivity of the laser-resistant layer is 1800-2100 W / m·K;

[0029] And / or, the laser damage threshold of the laser-resistant layer is greater than 10 J / cm2;

[0030] And / or, the antistatic layer comprises a diamond-like carbon conductive film;

[0031] And / or, the thickness of the antistatic layer is 85-115 nm.

[0032] Based on the same design concept, this utility model also discloses a laser output window, including: a multi-layer laser protection sheet as described in any of the above.

[0033] As a further improvement of this utility model, the laser output window also includes a base plate and a pressure plate that are magnetically attracted to each other. The base plate and the pressure plate together form a light-transmitting accommodating space, and the multilayer laser protection sheet is disposed in the light-transmitting accommodating space.

[0034] As a further improvement of this utility model, the base plate has a first through hole, and the pressure plate has a second through hole communicating with the first through hole;

[0035] The base plate has a first groove on the side surface near the pressure plate; the pressure plate has a second groove on the side surface near the base plate, and the first groove and the second groove communicate to form the light-transmitting accommodating space.

[0036] As a further improvement to this utility model,

[0037] The base plate includes a first sub-base plate and a second sub-base plate disposed on the first sub-base plate. The first sub-base plate has a first through hole, the second sub-base plate has a second through hole, and the pressure plate has a third through hole.

[0038] The first through hole, the second through hole, and the third through hole are connected in sequence to form the light-transmitting accommodating space; the multilayer laser protection sheet is disposed in the second through hole, the cross-sectional area of ​​the first through hole and the third through hole are both smaller than the cross-sectional area of ​​the multilayer laser protection sheet, and the cross-sectional area of ​​the second through hole is greater than or equal to the cross-sectional area of ​​the multilayer laser protection sheet.

[0039] Based on the same design concept, this utility model discloses a laser, including: a laser body and a laser output window disposed on the outgoing optical path of the laser body, wherein the laser output window is any of the laser output windows described above.

[0040] Compared with the prior art, the beneficial effects of this utility model are:

[0041] In the present utility model, the multi-layer laser protection sheet includes: an anti-laser damage layer, a high-transparency substrate layer, and a protection layer arranged in sequence. The anti-laser damage layer is arranged adjacent to the laser device body. The laser device body emits laser, and the laser first passes through the anti-laser damage layer, then through the high-transparency substrate layer, and finally through the protection layer. The anti-laser damage layer has a relatively high laser damage threshold and a relatively high thermal conductivity, which can reduce the decrease in transmittance caused by laser damage. Moreover, the high-transparency substrate layer has a relatively high transmittance. Thus, through the high-transparency substrate layer and the anti-laser damage layer, not only good laser transmittance is ensured, but the multi-layer laser protection sheet can also be used for a long time without being replaced; meanwhile, the protection layer can play a role in protecting the high-transparency substrate layer and effectively resist the problem of slag spatter caused by metal processing; by adopting this solution, the service life of the multi-layer laser protection sheet can be increased and the cost can be reduced. BRIEF DESCRIPTION OF THE DRAWINGS

[0042] Figure 1 is a sectional structure diagram of the multi-layer laser protection sheet shown in the present utility model;

[0043] Figure 2 is a cross-sectional view of a laser output window in one embodiment;

[0044] Figure 3 is a cross-sectional view of a laser output window in another embodiment;

[0045] Figure 4 is a cross-sectional view of a laser device in one embodiment. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0046] The present utility model will be described in detail below in conjunction with the embodiments shown in the drawings. However, it should be noted that these embodiments are not limitations to the present utility model. Any equivalent transformation or substitution in terms of function, method, or structure made by those of ordinary skill in the art based on these embodiments shall fall within the protection scope of the present utility model.

[0047] It should be understood that in the present utility model, the orientation or positional relationships indicated by terms such as "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "axial", "radial", etc. are based on the orientation or positional relationships shown in the drawings. These are only for the convenience of describing the technical solution and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation. Therefore, it should not be construed as a limitation to the technical solution.

[0048] Refer Figure 1As shown, this utility model illustrates a specific embodiment of a multilayer laser protection sheet 13. The multilayer laser protection sheet 13 is applied in a laser 100, which also includes a laser body 30. The multilayer laser protection sheet 13 is used to ensure the safe use of the laser.

[0049] The multilayer laser protection sheet 13 includes: an anti-laser damage layer 133, a high-transmittance substrate layer 132 and a protective layer 131 arranged sequentially, with the anti-laser damage layer 131 disposed adjacent to the laser body 31.

[0050] In this invention, the laser body 31 emits laser light, which first passes through the anti-laser damage layer 133, then through the high-transmittance substrate layer 132, and finally through the protective layer 131. The anti-laser damage layer 133 has a high laser damage threshold and high thermal conductivity, which can reduce the decrease in transmittance caused by laser damage. The high-transmittance substrate layer 132 also has high transmittance. Thus, the high-transmittance substrate layer 132 and the anti-laser damage layer 133 ensure good laser transmittance and allow for long-term use without replacing the multi-layer laser protective sheet 13. Simultaneously, the protective layer 131 protects the high-transmittance substrate layer 132, effectively resisting molten slag spatter caused by metal processing. This solution improves the service life of the multi-layer laser protective sheet and reduces costs.

[0051] Furthermore, the laser damage threshold of the anti-laser damage layer 133 is greater than that of the high-transmittance substrate layer 132 and the protective layer 131; and / or, the transmittance of the high-transmittance substrate layer 132 is greater than that of the anti-laser damage layer 133 and the protective layer 131; and / or, the hardness of the protective layer 131 is greater than that of the high-transmittance substrate layer 132; and / or, the thickness of the high-transmittance substrate layer 132 is greater than that of the protective layer 131 and the anti-laser damage layer 133.

[0052] In one implementation, the reference Figure 1 As shown, the multilayer laser protection sheet 13 further includes an antistatic layer 134, which is disposed on the side of the anti-laser damage layer 133 away from the high-transmittance substrate layer 132. Specifically, the surface resistance of the antistatic layer 134 is greater than the surface resistance of the anti-laser damage layer 133.

[0053] By setting an antistatic layer 134, the laser passes through the antistatic layer 134 before passing through the anti-laser damage layer 133, which can effectively prevent the energy loss of the laser caused by laser scattering due to electrostatic adsorption of particles, and further solve the problem of rapid decrease in light transmittance of existing protective sheets.

[0054] Furthermore, the surface resistance of the antistatic layer 134 is greater than that of the high-transmittance substrate layer 132 and the protective layer 131; and / or, the thickness of the antistatic layer 134 is less than that of the high-transmittance substrate layer 132; and / or, the laser damage threshold of the antistatic layer 134 is less than that of the laser damage threshold of the anti-laser damage layer 133; and / or, the light transmittance of the antistatic layer 134 is less than that of the high-transmittance substrate layer 132.

[0055] Optionally, the cross-sectional shape of the multilayer laser protection sheet 13 can be circular or rectangular, as long as the laser can pass through the antistatic layer 134, the anti-laser damage layer 133, the high-transmittance substrate layer 132 and the protective layer 131 in sequence (or, the anti-laser damage layer 133, the high-transmittance substrate layer 132 and the protective layer 131). This embodiment does not make specific limitations on this.

[0056] In one embodiment, the protective layer 131 comprises an aluminum nitride hard film or an aluminum oxide hard film; and / or, the thickness of the protective layer 131 is 200-400 nm (e.g., 200 nm, 210 nm, 230 nm, 250 nm, 270 nm, 290 nm, 310 nm, 330 nm, 350 nm, 370 nm, 390 nm or 400 nm); and / or, the Vickers hardness of the protective layer 131 is 1600-2000 (e.g., 1600, 1650, 1700, 1750, 1800, 1850, 1900, 1950 or 2000).

[0057] In one embodiment, the high-transmittance substrate 132 comprises calcium fluoride, fused silica, or sapphire; and / or, the thickness of the high-transmittance substrate 132 is 1-3 mm (e.g., 1 mm, 1.1 mm, 1.3 mm, 1.4 mm, 1.5 mm, 1.7 mm, 1.9 mm, 2.1 mm, 2.3 mm, 2.6 mm, or 3 mm); and / or, the high-transmittance substrate 132 has a transmittance of greater than 85-90% (e.g., 85%, 87%, 91%, 94%, or 99%) to laser light with wavelengths of 193-532 nm (e.g., 193 nm, 210 nm, 240 nm, 310 nm, 340 nm, 410 nm, 440 nm, 510 nm, or 532 nm).

[0058] In one embodiment, the anti-laser damage layer 133 comprises a diamond film; and / or, the thickness of the anti-laser damage layer 133 is 80-120 nm (e.g., 80 nm, 90 nm, 100 nm, 110 nm or 120 nm); and / or, the thermal conductivity of the anti-laser damage layer 133 is 1800-2100 W / m·K (e.g., 1800 W / m·K, 1900 W / m·K, 2000 W / m·K or 2100 W / m·K); and / or, the laser damage threshold of the anti-laser damage layer 133 is greater than 10 J / cm2.

[0059] In one embodiment, the antistatic layer 134 includes a diamond-like carbon conductive film; and / or, the thickness of the antistatic layer 134 is 85-115 nm (e.g., 85 nm, 90 nm, 95 nm, 100 nm, 105 nm, 110 nm or 115 nm).

[0060] In summary, in this utility model, the multilayer laser protective sheet 13 adopts a sandwich design, with the high-transmittance substrate layer 132 as the base layer, and different materials added to the upper and lower surfaces of the base layer, so that the entire multilayer laser protective sheet 13 can maintain its transmittance for a long time without decreasing, and significantly increase its service life.

[0061] Based on the same design philosophy, Figure 2 and Figure 3 As shown, this utility model also discloses a laser output window 10 (including laser output window 10a and laser output window 10b), the laser output window 10 including: a multi-layer laser protection sheet 13, used to ensure the safe use of the multi-layer laser protection sheet 13. For the specific structure of the multi-layer laser protection sheet 13, please refer to the previous description, and it will not be repeated here.

[0062] The specific assembly method of the multilayer laser protective sheet 13 can be either fixed assembly or detachable assembly; this embodiment does not impose any specific limitations on this.

[0063] In one embodiment, the laser output window 10 includes a base plate 11 and a pressure plate 12 that are mated together, wherein the base plate 11 and the pressure plate 12 are fixedly assembled or detachably assembled.

[0064] In one embodiment, a locking element (such as a bolt and nut) continuously penetrates the base plate 11 and the pressure plate 12 to form a detachable assembly that can movably clamp the multi-layer laser protective sheet 13. In another embodiment, the base plate 11 and the pressure plate 12 are magnetically attracted to each other. That is, a first magnetic attractor (not shown) is embedded on the side of the base plate 11 near the pressure plate 12, and a second magnetic attractor (not shown) is embedded on the side of the pressure plate 12 near the base plate 11. The first magnetic attractor and the second magnetic attractor are attracted to each other in opposite directions or released in opposite directions to form a detachable assembly that can movably clamp the multi-layer laser protective sheet 13.

[0065] Preferably, a magnetic suction structure is used to achieve detachable assembly of the base plate 11 and the pressure plate 12. Compared with the traditional protective sheet, which requires machine downtime for replacement and is time-consuming, and the long time required to remove the protective sheet can cause dust particles in the air to enter the optical path cavity of the laser and cause pollution, the magnetic quick-release solution provided by this utility model reduces the replacement time to less than a second while ensuring positioning accuracy. This not only improves the efficiency of laser use, but also prevents secondary pollution inside the laser.

[0066] More specifically, the base plate 11 and the pressure plate 12 together form a light-transmitting accommodating space 20 (including light-transmitting accommodating space 20a and light-transmitting accommodating space 20b), and the multilayer laser protection sheet 13 is disposed within the light-transmitting accommodating space 20.

[0067] In one implementation, the reference Figure 2 As shown, the base plate 11a has a first through hole 112a, and the pressure plate 12a has a second through hole 122a. The surface of the base plate 11a near the pressure plate 12a has a first groove 111a, and the surface of the pressure plate 12a near the base plate 11a has a second groove 121a. The first groove 111a and the second groove 121a communicate to form a light-transmitting accommodating space 20a.

[0068] In another implementation, the reference Figure 3 As shown, the base plate 11b includes a first sub-base plate 111b and a second sub-base plate 112b disposed on the first sub-base plate 111b. The first sub-base plate 111b has a first through hole 113b, the second sub-base plate 112b has a second through hole 114b, and the pressure plate 12b has a third through hole 121b. The first through hole 113b, the second through hole 114b, and the third through hole 121b are sequentially connected to form a light-transmitting accommodating space 20b. The multilayer laser protection sheet 13 is disposed in the second through hole 114b (i.e., disposed on the bearing surface formed by the first through hole 113b and the second through hole 114b). The cross-sectional areas of the first through hole 113b and the third through hole 121b are both smaller than the cross-sectional area of ​​the multilayer laser protection sheet 13, and the cross-sectional area of ​​the second through hole 114b is greater than or equal to the cross-sectional area of ​​the multilayer laser protection sheet 13, so that the multilayer laser protection sheet 13 is constrained by the first sub-base plate 111b and the pressure plate 12b.

[0069] Based on the same design philosophy, Figure 4 As shown, this utility model also discloses a laser 100, which includes a laser body 30 and a laser output window 10 disposed on the output optical path of the laser body 30. The laser output window 10 is the laser output window 10 disclosed above. Specific solutions can be found in the previous description and will not be repeated here.

[0070] The detailed descriptions listed above are merely specific descriptions of feasible implementations of this utility model, and are not intended to limit the scope of protection of this utility model. All equivalent implementations or modifications made without departing from the spirit of this utility model should be included within the scope of protection of this utility model.

[0071] The solution provided by this invention solves the core problems of traditional lasers, such as passive protection, low efficiency, and poor adaptability of the protective sheet. Firstly, due to the use of a gradient material design, the protective layer can effectively resist molten slag spatter caused by metal processing. Secondly, because traditional protective sheet materials have a low laser damage threshold, they require replacement after a period of use due to decreased transmittance caused by laser damage. This invention, however, uses a practical high-transmittance substrate layer combined with an anti-laser damage layer, ensuring good laser transmittance and having a high laser damage threshold, allowing for long-term use without replacement. Thirdly, industrial processing may result in polymer ablation producing a nanoscale carbonized shell that causes ultraviolet light scattering loss. The antistatic layer of this invention ensures a surface resistance of less than 10Ω / sq, effectively preventing electrostatic adsorption of particles that cause laser scattering and thus energy loss in the laser.

[0072] Furthermore, it should be understood that although this specification describes embodiments, not every embodiment contains only one independent technical solution. This narrative style is merely for clarity. Those skilled in the art should consider the specification as a whole, and the technical solutions in each embodiment can also be appropriately combined to form other embodiments that can be understood by those skilled in the art.

Claims

1. A multilayer laser protection sheet, characterized in that, The laser is used in a laser device, which also includes a laser body. The multilayer laser protection sheet includes: an anti-laser damage layer, a high-transmittance substrate layer and a protective layer arranged sequentially, with the anti-laser damage layer disposed adjacent to the laser body.

2. The multilayer laser protection sheet according to claim 1, characterized in that, The laser damage threshold of the laser-resistant layer is greater than that of the high-transmittance substrate layer and the protective layer. And / or, the transmittance of the high-transmittance substrate layer is greater than the transmittance of the laser-resistant layer and the protective layer; And / or, the hardness of the protective layer is greater than the hardness of the high-transmittance substrate layer; And / or, the thickness of the high-transmittance substrate layer is greater than the thickness of the protective layer and the laser-damage-resistant layer.

3. The multilayer laser protection sheet according to claim 1, characterized in that, The multilayer laser protection sheet also includes an antistatic layer, which is disposed on the side of the anti-laser damage layer away from the high-transmittance substrate layer. The surface resistance of the antistatic layer is greater than that of the laser-damage-resistant layer.

4. The multilayer laser protection sheet according to claim 3, characterized in that, The surface resistance of the antistatic layer is greater than that of the high light transmittance substrate layer and the protective layer. And / or, the thickness of the antistatic layer is less than the thickness of the high-transmittance substrate layer; And / or, the laser damage threshold of the antistatic layer is less than the laser damage threshold of the anti-laser damage layer; And / or, the light transmittance of the antistatic layer is less than that of the high-transmittance substrate layer.

5. The multilayer laser protection sheet according to claim 3, characterized in that, The cross-sectional shape of the multilayer laser protection sheet is circular or rectangular; And / or, the protective layer comprises an aluminum nitride hard film or an aluminum oxynitride hard film; And / or, the thickness of the protective layer is 200-400 nm; And / or, the Vickers hardness of the protective layer is 1600-2000; And / or, the high-transmittance substrate layer comprises calcium fluoride, fused silica, or sapphire; And / or, the thickness of the high-transmittance substrate layer is 1-3 mm; And / or, the high transmittance substrate layer has a transmittance of more than 85-99% for lasers with wavelengths of 193-532nm; And / or, the laser-damage-resistant layer comprises a diamond film; And / or, the thickness of the laser-resistant layer is 80-120 nm; And / or, the thermal conductivity of the laser-resistant layer is 1800-2100 W / m·K; And / or, the laser damage threshold of the laser-resistant layer is greater than 10 J / cm. 2 ; And / or, the antistatic layer comprises a diamond-like carbon conductive film; And / or, the thickness of the antistatic layer is 85-115 nm.

6. A laser output window, characterized in that, include: The multilayer laser protection sheet as described in any one of claims 1 to 5 above.

7. The laser output window according to claim 6, characterized in that, The laser output window also includes a base plate and a pressure plate that are magnetically attracted to each other. The base plate and the pressure plate together form a light-transmitting accommodating space, and the multi-layer laser protective sheet is disposed in the light-transmitting accommodating space.

8. The laser output window according to claim 7, characterized in that, The base plate has a first through hole, and the pressure plate has a second through hole communicating with the first through hole; The base plate has a first groove on the side surface near the pressure plate; the pressure plate has a second groove on the side surface near the base plate, and the first groove and the second groove communicate to form the light-transmitting accommodating space.

9. The laser output window according to claim 7, characterized in that, The base plate includes a first sub-base plate and a second sub-base plate disposed on the first sub-base plate. The first sub-base plate has a first through hole, the second sub-base plate has a second through hole, and the pressure plate has a third through hole. The first through hole, the second through hole, and the third through hole are connected in sequence to form the light-transmitting accommodating space; the multilayer laser protection sheet is disposed in the second through hole, the cross-sectional area of ​​the first through hole and the third through hole are both smaller than the cross-sectional area of ​​the multilayer laser protection sheet, and the cross-sectional area of ​​the second through hole is greater than or equal to the cross-sectional area of ​​the multilayer laser protection sheet.

10. A laser, characterized in that, include: The laser body and the laser output window disposed on the output optical path of the laser body, wherein the laser output window is the laser output window as described in any one of claims 6 to 9.

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