mask

Abstract

This application provides a photomask, relating to the field of semiconductor packaging technology. The photomask has multiple patterned areas for designing patterned layers; each patterned area has a first electrostatic discharge (ESD) section. Separating areas are formed between the multiple patterned areas; each separating area has a second ESD section; the first and second ESD sections are respectively used to release static electricity on the photomask. This photomask has an ESD function, effectively preventing the accumulated charge energy in the photomask from damaging the patterned layers and preventing the photomask from being electrostatically broken down.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor packaging technology, and in particular to a mask. Background Technology

[0002] With the rapid development of the semiconductor industry, photolithography is typically used in wafer fabrication to transfer the designed circuit pattern layer completely and accurately onto the wafer. The general method involves forming a pattern layer on a photomask and then projecting the pattern layer onto the wafer using optical imaging principles. Because this process involves numerous moving mechanical parts, static electricity is easily generated. This static electricity affects the photomask, and the accumulated charge energy on the pattern layer on the photomask can cause electrostatic discharge (ESD) damage to the pattern layer. Utility Model Content

[0003] The purpose of this invention is to provide a mask that can effectively prevent the charge energy accumulated in the mask from damaging the pattern layer and prevent the mask from being electrostatically broken down.

[0004] This utility model provides a mask plate, which has multiple pattern areas for designing graphic layers; each pattern area has a first electrostatic discharge section.

[0005] A partition area is formed between the plurality of patterned areas; the partition area is provided with a second electrostatic discharge section;

[0006] The first electrostatic discharge section and the second electrostatic discharge section are respectively used to release the static electricity on the mask plate.

[0007] In an optional embodiment, the first electrostatic discharge portion is located at the corner of the patterned area.

[0008] In an optional embodiment, the partition region is uniformly distributed with a plurality of second electrostatic discharge sections.

[0009] In an optional embodiment, the first electrostatic discharge section and the second electrostatic discharge section are respectively made of metal materials.

[0010] In an optional embodiment, the first electrostatic discharge section and the second electrostatic discharge section are respectively made of metal rings or metal pillars.

[0011] In an optional embodiment, the mask plate has an outer frame around its edge, and the plurality of pattern areas are located within the area enclosed by the outer frame.

[0012] In an optional embodiment, the outer frame portion is provided with a positioning element.

[0013] In an optional implementation, the positioning element may be a positioning hole or a positioning post.

[0014] In an optional embodiment, the positioning hole includes a first positioning hole and a second positioning hole, wherein the first positioning hole and the second positioning hole have different cross-sectional shapes.

[0015] In an optional embodiment, the first positioning hole and the second positioning hole are located on opposite sides of the outer frame portion.

[0016] The mask provided by this utility model has the following advantages:

[0017] The mask provided in this embodiment of the utility model has a first electrostatic discharge part and a second electrostatic discharge part in the pattern area and the separation area of ​​the mask, respectively. It has an electrostatic discharge function, which can effectively prevent the charge energy accumulated in the mask from damaging the pattern layer and prevent the mask from being electrostatically broken down. Attached Figure Description

[0018] To more clearly illustrate the specific embodiments of this utility model or the technical solutions in the prior art, the drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this utility model. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0019] Figure 1 This is a schematic diagram of a first structure of a mask plate provided in an embodiment of the present utility model;

[0020] Figure 2 A schematic diagram of the structure of a single pattern area of ​​a mask provided in an embodiment of this utility model;

[0021] Figure 3 This is a schematic diagram of a second structure of the mask plate provided in an embodiment of the present invention.

[0022] Icons: 100-Mask plate; 110-Pattern area; 111-Graphic layer; 120-Separation area; 130-First electrostatic discharge section; 140-Second electrostatic discharge section; 150-Outer frame section; 151-First positioning hole; 152-Second positioning hole. Detailed Implementation

[0023] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, and not all embodiments. The components of the embodiments of this utility model described and shown in the accompanying drawings can generally be arranged and designed in various different configurations.

[0024] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the claimed invention, but merely to illustrate selected embodiments of the invention. All other embodiments obtained by those skilled in the art based on the embodiments of the present invention without inventive effort are within the scope of protection of the present invention.

[0025] It should be noted that similar labels and letters in the following figures indicate similar items. Therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.

[0026] In the description of this utility model, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship commonly used when the product of this utility model is in use. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model. In addition, the terms "first," "second," and "third," etc., are only used to distinguish descriptions and should not be construed as indicating or implying relative importance.

[0027] Furthermore, terms such as "horizontal," "vertical," and "sag" do not imply that components must be absolutely horizontal or suspended, but rather that they can be slightly tilted. For example, "horizontal" simply means that its direction is more horizontal relative to "vertical," and does not mean that the structure must be completely horizontal, but can be slightly tilted.

[0028] In the description of this utility model, it should also be noted that, unless otherwise explicitly specified and limited, the terms "set," "install," "connect," and "link" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0029] The following detailed description, in conjunction with the accompanying drawings, outlines some embodiments of the present invention. Unless otherwise specified, the following embodiments and features can be combined with each other.

[0030] Please combine Figure 1The mask 100 provided in this embodiment of the utility model has an electrostatic discharge function, which can effectively prevent the charge energy accumulated in the mask 100 from damaging the pattern layer 111 and prevent the mask 100 from being electrostatically broken down.

[0031] The mask 100 has multiple patterned areas 110 for designing patterned layers 111; each patterned area 110 has a first static discharge section 130. Separating areas 120 are formed between the multiple patterned areas 110; each separating area 120 has a second static discharge section 140. The first static discharge section 130 and the second static discharge section 140 are respectively used to release static electricity on the mask 100.

[0032] Optionally, the first electrostatic discharge section 130 and the second electrostatic discharge section 140 are respectively made of metal materials, including but not limited to conductive metal materials such as iron oxide, copper, silver, tin or gold.

[0033] It is understood that the pattern on the pattern layer 111 can be designed as any shape or path according to actual needs. The first electrostatic discharge section 130 is designed in the pattern area 110 of the mask 100, which can release the charge energy accumulated in the pattern layer 111 of the mask 100, reduce the damage caused by the charge energy accumulated in the mask 100 to the pattern layer 111, and prevent the pattern layer 111 from being electrostatically broken down.

[0034] Please combine Figure 2 Optionally, the first static discharge section 130 is located at a corner of the pattern area 110. Each pattern area 110 is provided with one or more first static discharge sections 130. For example, the first static discharge section 130 may be provided at any one corner or at any number of corners.

[0035] The second static discharge section 140 is designed in the partition area 120 of the mask plate 100, that is, between the adjacent pattern area 110 and the pattern area 110. It can release the static electricity in the partition area 120, prevent static electricity from breaking down the adjacent pattern layer 111, and protect the pattern layer 111.

[0036] Optionally, the partition region 120 has a plurality of second electrostatic discharge sections 140 evenly distributed. Of course, in some other embodiments, the plurality of second electrostatic discharge sections 140 may also be non-uniformly distributed, which is not specifically limited here.

[0037] Optionally, the first static discharge section 130 and the second static discharge section 140 may be metal rings or metal pillars, respectively. It is easy to understand that the first static discharge section 130 and the second static discharge section 140 may be hollow, solid, or perforated structures; no specific limitation is made here. The cross-sectional shape of the first static discharge section 130 and the second static discharge section 140 may be any shape, such as circular, semi-circular, elliptical, fan-shaped, crescent-shaped, triangular, quadrilateral, pentagonal, hexagonal, or octagonal.

[0038] Optionally, the photomask 100 has an outer frame 150 around its edge, and multiple pattern areas 110 are located within the area enclosed by the outer frame 150. The outer frame 150 and the photomask 100 can be integrally formed or separately connected. The material of the outer frame 150 includes, but is not limited to, any one or more of high-purity quartz glass, soda glass, and chromium layer.

[0039] Optionally, the outer frame portion 150 is provided with a positioning element. This facilitates the installation and positioning of the mask plate 100. The positioning element is at least one of a positioning hole and a positioning post. In this embodiment, a positioning hole is used as an example.

[0040] Optionally, the positioning holes include a first positioning hole 151 and a second positioning hole 152, with different cross-sectional shapes. This prevents the mask plate 100 from being installed in the wrong direction. For example, the first positioning hole 151 can be circular, and the second positioning hole 152 can be rectangular.

[0041] Optionally, the first positioning hole 151 and the second positioning hole 152 are located on opposite sides of the outer frame portion 150. In some other embodiments, the first positioning hole 151 and the second positioning hole 152 may also be provided on adjacent sides of the outer frame portion 150.

[0042] Please combine Figure 3 To prevent the mask plate 100 from being installed in the wrong direction, the number of positioning holes on both sides of the outer frame 150 can be designed to be different. For example, two first positioning holes 151 can be designed on one side and one second positioning hole 152 can be designed on the other side. Alternatively, two positioning holes can be designed on one side of the outer frame 150 and three positioning holes can be designed on the other side.

[0043] Alternatively, the positioning components on both sides of the outer frame 150 can be designed differently. For example, one side of the outer frame 150 can be designed with positioning holes, and the other side with positioning posts, which can achieve a similar technical effect. Here, "both sides" can be adjacent sides or opposite sides.

[0044] The number, structure, cross-sectional shape, and size of the positioning parts on the outer frame 150 can be flexibly designed according to the actual situation, and no specific limitations are made here.

[0045] The mask plate 100 provided in this embodiment of the present invention operates on the following principle:

[0046] The photomask 100 is divided into multiple pattern areas 110, of which four are shown in the figure. The pattern areas 110 are used to mount or design graphic layers 111, which can be designed and defined according to actual needs. Each pattern area 110 requires a first electrostatic discharge section 130. A second electrostatic discharge section 140 is also designed in the dividing areas between the pattern areas 110. Both the first and second electrostatic discharge sections 130 and 140 can perform electrostatic discharge, allowing the charge energy accumulated in the photomask 100 to be released through either the first or second electrostatic discharge section 130. This effectively releases the charge energy accumulated in the graphic layers 111 of the photomask 100, thereby reducing the damage and electrostatic breakdown caused by the accumulated charge energy in the photomask 100 to the graphic layers 111.

[0047] In summary, the mask plate 100 provided by this utility model has the following beneficial effects, including:

[0048] The mask 100 provided in this embodiment of the invention has a first electrostatic discharge section 130 and a second electrostatic discharge section 140 respectively provided in the pattern area 110 and the separation area 120 of the mask 100. These sections have an electrostatic discharge function, effectively preventing the accumulated charge energy in the mask 100 from damaging the pattern layer 111 and preventing the mask 100 from being electrostatically broken down. The first electrostatic discharge section 130 and the second electrostatic discharge section 140 are respectively made of metal rings and distributed in the pattern area 110 and the separation area 120 of the mask 100, preventing the pattern layer 111 from being affected by electrostatic interference and electrostatic breakdown damage, resulting in better electrostatic discharge performance. Furthermore, a positioning component is designed in the outer frame 150 to prevent reverse installation, improve installation efficiency, and enhance practicality.

[0049] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of this utility model, and are not intended to limit it. Although the utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some or all of the technical features. Any modifications, equivalent substitutions, improvements, etc., should be included within the protection scope of this utility model.

Claims

1. A photomask, characterized in that, The mask plate has multiple patterned areas, which are used to design graphic layers; each patterned area has a first electrostatic discharge section. A partition area is formed between the plurality of patterned areas; the partition area is provided with a second electrostatic discharge section; The first electrostatic discharge section and the second electrostatic discharge section are respectively used to release the static electricity on the mask plate.

2. The mask plate according to claim 1, characterized in that, The first electrostatic discharge section is located at the corner of the pattern area.

3. The mask plate according to claim 1, characterized in that, The partition area has multiple second electrostatic discharge sections evenly distributed thereon.

4. The mask plate according to claim 1, characterized in that, The first electrostatic discharge section and the second electrostatic discharge section are made of metal materials.

5. The mask plate according to claim 1, characterized in that, The first electrostatic discharge section and the second electrostatic discharge section are respectively made of metal rings or metal pillars.

6. The mask plate according to any one of claims 1 to 5, characterized in that, The mask plate has an outer frame around its edge, and the multiple pattern areas are all located within the area enclosed by the outer frame.

7. The mask plate according to claim 6, characterized in that, The outer frame is equipped with positioning components.

8. The mask plate according to claim 7, characterized in that, The positioning element adopts a positioning hole or a positioning post.

9. The mask plate according to claim 8, characterized in that, The positioning hole includes a first positioning hole and a second positioning hole, and the first positioning hole and the second positioning hole have different cross-sectional shapes.

10. The mask plate according to claim 9, characterized in that, The first positioning hole and the second positioning hole are located on opposite sides of the outer frame portion.

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