Loading port device, wafer cassette loading system and front-end loading system

Abstract

This invention provides a loading port device, a wafer cassette transport and loading system, and a front-end loading system. The loading port device includes a wafer loading apparatus and multiple beam sensors. The wafer loading apparatus includes a support platform and a transfer positioning frame. The transfer positioning frame is disposed on one side of the support platform in a first direction. The support platform is used to place the wafer cassette, and the transfer positioning frame is used to connect to the process equipment housing. The transfer positioning frame has a pick-and-place window. Each beam sensor includes a pair of transmitters and receivers spaced apart along a second direction on the transfer positioning frame. The receiver receives the beam emitted by the transmitter. The beam sensors are movably disposed along a third direction. During wafer inspection, at least a portion of each of the transmitters and receivers can extend into the wafer cassette through the pick-and-place window. Therefore, the loading port device of this invention has the advantage of high detection accuracy.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor processing technology, specifically to a loading port device and a wafer cassette transport and loading system and a front-end loading system having a loading port device. Background Technology

[0002] In semiconductor manufacturing plants, wafers typically need to be efficiently transferred and positioned between different process modules on the production line. Wafer transfer equipment, often called wafer cassettes, is usually installed in front of the wafer processing equipment, working in conjunction with robotic arms to pick up and place wafers. During this process, through-beam sensors are used to detect the placement and quantity of the wafers.

[0003] In related technologies, placing one of the transmitter and receiver inside a wafer cassette and the other on a movable support frame allows for the inspection of various wafer models. However, each time the wafer cassette is replaced, the receiver's position needs to be reinstalled or adjusted, increasing operational steps and time. Furthermore, the metal or other reflective materials inside the wafer cassette can cause beam reflection, resulting in low inspection accuracy. In addition, mechanical interference caused by the internal structure of the wafer cassette or movement of the support frame further reduces inspection accuracy. Utility Model Content

[0004] In view of this, the present invention aims to provide a loading port device, a wafer cassette loading system, and a front-end loading system to solve the problem of low detection accuracy caused by interference when the transmitter and receiver are set on different devices in the prior art.

[0005] This utility model provides a loading port device.

[0006] Another aspect of this invention provides a wafer cassette conveying and loading system.

[0007] This utility model also provides a front-end loading system.

[0008] The loading port device of this utility model embodiment includes a wafer loading device and multiple through-beam sensors.

[0009] The wafer loading device includes a support platform and a transfer positioning frame. The transfer positioning frame is disposed on one side of the support platform in a first direction. The support platform is used to place a wafer cassette, and the transfer positioning frame is used to connect to the process equipment housing. The transfer positioning frame has a pick-and-place window. Each of the through-beam sensors includes a pair of transmitters and receivers spaced apart along a second direction on the transfer positioning frame. The receivers receive through-beam light emitted by the transmitters. The through-beam sensors are movably disposed along a third direction. During wafer inspection, at least a portion of each of the transmitters and receivers can extend into the wafer cassette through the pick-and-place window. The transmitters and receivers are located on opposite sides of the wafer along the second direction to detect the wafer placement status based on changes in the emitted and received light by the through-beam sensors. The first direction, the second direction, and the third direction are orthogonal to each other.

[0010] The loading port device of this embodiment of the invention, by pairing the transmitter and receiver of the through-beam sensor and spaced apart along a second direction on the transfer positioning plate frame, avoids the sensor misalignment problem caused by mechanical interference when one of the transmitter and receiver is placed inside the wafer cassette or on the support platform. This loading port device of this embodiment of the invention mounts both the transmitter and receiver on the same outer frame, making it less susceptible to vibration or other external factors, thereby improving the reliability of the detection.

[0011] Meanwhile, the through-beam sensors mounted on the outer frame are easier to inspect, clean, and maintain daily, without the need to open or disassemble the wafer case, thus increasing the cost of through-beam sensor maintenance.

[0012] In addition, the sensors fixed to the outer frame reduce the possibility of physical interference with other moving parts. The sensors fixed to the outer frame can ensure the consistency and stability of the beam path and avoid the impact of changes in the internal environment of the wafer box (such as temperature and humidity fluctuations) on signal transmission.

[0013] Therefore, the loading port device of this utility model embodiment has the advantage of high detection accuracy.

[0014] In one embodiment, the reloading positioning plate frame includes a frame plate, a door opener, and a bracket. The frame plate is disposed on one side of the support platform in the first direction. The frame plate frame has a pick-up and put-down window. The door opener is movably disposed on the pick-up and put-down window to close and open the pick-up and put-down window. The bracket is movably disposed relative to the frame plate in both the first direction and the third direction. The transmitter and the receiver are spaced apart on the bracket in the second direction.

[0015] In some embodiments, the loading port device further includes a drive unit comprising a first drive unit, a mating block, a second drive unit, and a third drive unit. The first drive unit is connected to the support platform and is capable of driving the mating block to reciprocate along the third direction. The second and third drive units are both connected to the mating block. The second drive unit is connected to the door opener to drive the door opener to reciprocate along the first direction, and the third drive unit is connected to the bracket to drive the bracket to reciprocate along the first direction, thereby enabling at least a portion of each of the transmitter and the receiver to extend into and retract from the wafer cassette through the pick-and-place window.

[0016] In some embodiments, the door opener includes a box opening plate, a locking component, and a suction component. The box opening plate is closably disposed on the pick-up and drop-off window under the drive of the first driving member and the second driving member. The second driving member is connected to the box opening plate. The box opening plate and the suction component are disposed opposite to each other along the first direction, and the suction component is disposed opposite to the wafer cassette. The locking component passes through the suction component and can be inserted into the lock hole of the wafer cassette. The suction component can be attracted to the lid of the wafer cassette.

[0017] In some embodiments, the bracket includes a receiving frame and a main frame extending upward along the upper end of the receiving frame. The opening panel includes a support column and a window blocking panel. The window blocking panel is disposed at the upper end of the support column, and the lower end of the support column is connected to the second driving member. The outer wall surface of the window blocking panel has a clearance groove. A portion of the receiving frame can be accommodated in the clearance groove. The main frame surrounds the window blocking panel. The transmitter and the receiver are both disposed on the side of the main frame near the upper end.

[0018] In some embodiments, each pair of transmitters and receivers is symmetrically arranged along the central axis of the third direction of the pick-up and drop-off window, and the length of the transmitters and receivers in the outer pair is greater than the length of the transmitters and receivers in the inner pair;

[0019] In some embodiments, each pair of transmitters and receivers is movably mounted on the bracket along the second direction.

[0020] The wafer cassette loading system of this utility model includes a first wafer cassette and a loading port device according to any one of the above-described embodiments. The first wafer cassette is disposed on the support platform and is used to stack wafers at intervals along the third direction.

[0021] In some embodiments, the wafer cassette conveying and loading system further includes a second wafer cassette and an adapter plate, the adapter plate being disposed on the support platform, and the second wafer cassette being disposed on the support platform via the adapter plate.

[0022] The front-end loading system of this utility model embodiment includes a process equipment housing and a wafer cassette transport and loading system according to any one of the above claims. A process chamber is formed inside the process equipment housing, and a docking window is provided on the side plate of the process equipment housing. The transfer positioning plate frame is connected to the process equipment housing, and the pick-up and drop-off window and the docking window are arranged facing each other in the first direction.

[0023] In some embodiments, the process equipment housing has a plurality of positioning parts on the wall surface where the docking window is opened, the wafer loading equipment has a plurality of wafer loading equipment, the transfer positioning plate frames of the plurality of wafer loading equipment are detachably connected to the process equipment housing, each wafer loading equipment has a plurality of mating parts on the transfer positioning plate frame, and the plurality of mating parts and the plurality of positioning parts are connected one-to-one by a plurality of connectors. Attached Figure Description

[0024] Figure 1 This is a layout diagram of the front-end loading system according to an embodiment of this utility model.

[0025] Figure 2 This is a schematic diagram of the side wall of the process equipment housing according to an embodiment of the present invention.

[0026] Figure 3 This is a perspective view of the loading port device according to an embodiment of the present invention.

[0027] Figure 4 This is a front view of the loading port device according to an embodiment of the present invention.

[0028] Figure 5 This is a rear view of the loading port device according to an embodiment of the present invention.

[0029] Figure 6 This is a top view of the loading port device according to an embodiment of the present invention.

[0030] Figure 7 yes Figure 6 A cross-sectional view along line AA.

[0031] Figure 8 yes Figure 6 A cross-sectional view along line BB.

[0032] Figure 9 This is a perspective view of the door opener according to an embodiment of the present utility model.

[0033] Figure 10This is another perspective view of the door opener according to an embodiment of the present utility model.

[0034] Explanation of reference numerals in the attached figures:

[0035] Front-end loading system 1000;

[0036] Loading port device 100; process equipment housing 200; docking window 201; process chamber 202; positioning part 203;

[0037] Wafer loading equipment 1; support platform 11;

[0038] 12; 121; 1211; 1212; 1212;

[0039] Door opener 122; Box opener 1221; Lock unlocking assembly 1222; Adsorption assembly 1223;

[0040] 123 bracket; 1231 supporting frame; 1232 main frame; 1233 clearance groove;

[0041] Through-beam sensor 2; transmitter 21; receiver 22;

[0042] First driving component 31; mating block 32; second driving component 33; third driving component 34. Detailed Implementation

[0043] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present utility model. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments.

[0044] The following is for reference. Figures 1-10 The loading port device 100, wafer cassette conveying and loading system, and front-end loading system 1000 of this utility model embodiment will be described by way of example.

[0045] The loading port device 100 of this utility model embodiment includes a wafer loading device 1 and a plurality of through-beam sensors 2.

[0046] Wafer loading apparatus 1 includes a support stage 11 and a transfer positioning frame 12, the transfer positioning frame 12 being disposed on the support stage 11 in a first direction (e.g., Figure 3 On one side (shown in the front-back direction), a support platform 11 is used to place a wafer cassette, and a transfer positioning plate frame 12 is used to connect to the process equipment housing 200. The transfer positioning plate frame 12 has a pick-and-place window 1211; each through-beam sensor 2 includes a pair of sensors arranged along a second direction (e.g., in the front-back direction). Figure 3The transmitter 21 and receiver 22, positioned on the transfer positioning plate frame 12 in the left-right direction (as shown), receive the through-beam light emitted by the transmitter 21. The through-beam sensor 2 is positioned along a third direction (e.g., Figure 3 The transmitter 21 and receiver 22 are movably configured so that, during wafer inspection, at least a portion of each of them can extend into the wafer cassette through the pick-and-place window 1211, and the transmitter 21 and receiver 22 are located on opposite sides of the wafer along the second direction so as to detect the wafer placement state based on the changes in light emitted and received by the through-beam sensor 2. The first direction, the second direction and the third direction are orthogonally arranged in pairs.

[0047] The loading port device 100 of this embodiment of the invention arranges the transmitter 21 and receiver 22 of the through-beam sensor 2 in pairs, with the transmitter 21 and receiver 22 spaced apart along a second direction on the transfer positioning plate frame 12. This avoids the sensor misalignment problem caused by mechanical interference when one of the transmitter 21 or receiver 22 is placed inside the wafer cassette or on the support platform 11. Furthermore, by mounting the transmitter 21 and receiver 22 on the same outer frame, the loading port device 100 of this embodiment is less susceptible to vibration or other external factors, thereby improving the reliability of the detection.

[0048] Meanwhile, the through-beam sensor 2, mounted on the outer frame, is easier to inspect, clean, and maintain daily without having to open or disassemble the wafer case, thus increasing the maintenance cost of the through-beam sensor 2.

[0049] In addition, the sensors fixed to the outer frame reduce the possibility of physical interference with other moving parts. The sensors fixed to the outer frame can ensure the consistency and stability of the beam path and avoid the impact of changes in the internal environment of the wafer box (such as temperature and humidity fluctuations) on signal transmission.

[0050] Therefore, the loading port device 100 of this utility model embodiment has the advantage of high detection accuracy.

[0051] During wafer inspection, when no wafer passes between the transmitter 21 and receiver 22, the receiver 22 can reliably receive the light signal. However, once a wafer enters the path between the transmitter 21 and receiver 22, the light is blocked, preventing the receiver 22 from receiving a complete light signal. The wafer in the wafer cassette passes between the transmitter 21 and receiver 22 to block the through-beam light. At this point, the receiver 22 outputs a signal indicating "a wafer detected."

[0052] like Figures 3 to 8As shown, the transfer positioning plate frame 12 includes a frame plate 121, a door opener 122, and a bracket 123. The frame plate 121 is disposed on one side of the support platform 11 in the first direction (e.g., Figure 3 (As shown in the rear side), the frame plate 121 has a pick-up and put-out window 1211, the door opener 122 is openably and closably disposed on the pick-up and put-out window 1211 to close and open the pick-up and put-out window 1211, the bracket 123 is movably disposed relative to the frame plate 121 along a first direction and a third direction, and the transmitter 21 and the receiver 22 are spaced apart on the bracket 123 along a second direction.

[0053] The loading port device 100 of this embodiment is divided into a frame plate 121, a door opener 122, and a bracket 123 by a loading and positioning plate frame 12. The door opener 122 is closable on the pick-up and drop-off window 1211 to close and open the pick-up and drop-off window 1211. This forms an effective physical barrier between the process equipment housing 200 and the external environment during wafer loading, preventing dust, particulate matter, and other contaminants from entering the high-cleanliness process equipment, thereby helping to maintain the required ultra-clean environment within the process equipment. This, in turn, helps to improve the quality and yield of wafer processing.

[0054] like Figures 7 to 8 As shown, the loading port device 100 of this utility model embodiment further includes a driving component, which includes a first driving component 31, a mating block 32, a second driving component 33, and a third driving component 34. The first driving component 31 is connected to the support platform 11, and the first driving component 31 drives the mating block 32 to reciprocate along a third direction. The second driving component 33 and the third driving component 34 are both connected to the mating block 32. The second driving component 33 is connected to the door opener 122 to drive the door opener 122 to reciprocate along a first direction, and the third driving component 34 is connected to the bracket 123 to drive the bracket 123 to reciprocate along the first direction, so that at least a portion of each of the transmitter 21 and the receiver 22 can be inserted into and retracted from the wafer cassette through the pick-and-place window 1211. It can be understood that the second driving component 33 and the third driving component 34 can move up and down synchronously with the cooperation of the first driving component 31. The second driving component 33 and the third driving component 34 can drive the door opener 122 and the bracket 123 to move independently along the first direction, and can scan the wafers inside the wafer box after the wafer box is opened.

[0055] The loading port device 100 of this embodiment divides the driving components into a first driving component 31, a mating block 32, a second driving component 33, and a third driving component 34. The second driving component 33 and the third driving component 34 respectively drive the door opener 122 and the bracket 123 to move along a first direction. The bracket 123 moving along the first direction can drive at least a portion of each of the transmitter 21 and the receiver 22 to extend into and retract from the wafer cassette through the pick-and-place window 1211 to scan the wafer placement status and quantity. Therefore, the loading port device 100 of this embodiment has the advantage of a high degree of automation.

[0056] Optionally, the first driving member 31 and the mating block 32 can be threaded together. The first driving member 31 may include a screw, and the mating block 32 is provided with a screw hole structure. The second driving member 33 and the third driving member 34 can be cam structures. The rotation axis of the cam structure extends along the second direction, and the rotation of the cam pushes the bracket 123 and the door opener 122 to reciprocate along the first direction.

[0057] like Figure 9 and Figure 10 As shown, the door opener 122 includes an opening plate 1221, an unlocking component 1222, and an adsorption component 1223. The opening plate 1221 is movably and openably disposed on the pick-up and put-down window 1211 under the drive of the first driving member 31 and the second driving member 33. The second driving member 33 is connected to the opening plate 1221. The opening plate 1221 and the adsorption component 1223 are disposed opposite to each other along a first direction, and the adsorption component 1223 is disposed opposite to the wafer box. The unlocking component 1222 passes through the adsorption component 1223 and can be inserted into the lock hole of the wafer box. The adsorption component 1223 can be adsorbed with the lid of the wafer box.

[0058] The loading port device 100 of this embodiment divides the door opener 122 into an opening plate 1221, an unlocking component 1222, and an adsorption component 1223. Through the cooperation of these components, it can collaboratively handle various types of tasks, reducing the need for specialized equipment and saving equipment costs. Furthermore, it reduces the possibility of wafer contamination and damage caused by human or environmental factors. Consequently, it helps maintain high wafer quality and yield.

[0059] Specifically, the wafer pod includes a housing and a cover that snaps into the housing, and the cover has a locking hole. Currently, the most commonly used wafer pod is the front-opening unified pod (FOUP), with the cover and the adsorption assembly 1223 facing each other in the first direction.

[0060] like Figure 9 and Figure 10As shown, the bracket 123 includes a supporting frame 1231 and a main frame 1232 extending upward along the upper end of the supporting frame 1231. The opening plate 1221 includes a support column and a window blocking plate. The window blocking plate is disposed at the upper end of the support column, and the lower end of the support column is connected to the second driving member 33. The outer wall surface of the window blocking plate has a relief groove 1233. A part of the supporting frame 1231 can be accommodated in the relief groove 1233. The main frame 1232 surrounds the window blocking plate. The transmitter 21 and the receiver 22 are both disposed on the side of the main frame 1232 near the upper end.

[0061] The loading port device 100 of this utility model divides the bracket 123 into a receiving frame 1231 and a main frame 1232 connected to the receiving frame 1231. A part of the receiving frame 1231 is set in the clearance groove 1233 on the outer wall of the window blocking plate, which helps to reduce the interference of the opening plate 1221 on the bracket 123 in the first direction, and helps to achieve the fit between the bracket 123 and the transfer positioning plate frame 12, thereby saving the laying length of the through-beam sensor 2 and reducing the difficulty of laying the transmitter 21 and receiver 22.

[0062] Optionally, the main frame 1232 is also provided with a plurality of mounting rods extending along the first direction, and the transmitter 21 and the receiver 22 are respectively mounted on the mounting rods.

[0063] like Figure 9 and Figure 10 As shown, each pair of transmitters 21 and receivers 22 are symmetrically arranged along the central axis of the third direction along the pick-up and put-down window 1211, and the length of the pair of transmitters 21 and receivers 22 located on the outer side is greater than the length of the pair of transmitters 21 and receivers 22 located on the inner side.

[0064] The loading port device 100 of this embodiment of the invention facilitates matching wafer sizes by symmetrically arranging each pair of transmitters 21 and receivers 22 along the central axis of the pick-up and drop-off window 1211 in a third direction. This, in turn, is beneficial for miniaturization design of the device. Furthermore, by making the length of the outer pair of transmitters 21 and receivers 22 greater than the length of the inner pair, it is possible to detect wafers of different models. This, in turn, improves the applicability of the through-beam sensor 2.

[0065] For example, Figure 9 As shown, two pairs of through-beam sensors 2 are installed on the main frame 1232. The length of the mounting rod for the inner pair of through-beam sensors 2 is shorter than the length of the mounting rod for the outer pair of through-beam sensors 2. Therefore, when loading an 8-inch wafer, detection can be performed using the inner pair of through-beam sensors 2, and when loading a 12-inch wafer, detection can be performed using the outer pair of through-beam sensors 2.

[0066] Each pair of transmitters 21 and receivers 22 are movably mounted on the bracket 123 along the second direction.

[0067] The loading port device 100 of this embodiment of the invention has a transmitter 21 and a receiver 22 that are movably mounted on a bracket 123 along a second direction. This allows it to be applied to wafer cassettes of different sizes and types without requiring adjustment of the sensor position for each specific wafer cassette, thus enhancing the versatility and flexibility of the through-beam sensor 2.

[0068] The wafer cassette loading system of this utility model includes a first wafer cassette and a loading port device 100 according to any one of the above. The first wafer cassette is disposed on a support platform 11 and is used to stack wafers at intervals along a third direction.

[0069] Therefore, the wafer cassette conveying and loading system of this utility model has the advantage of improving detection accuracy.

[0070] The wafer cassette conveying and loading system of this utility model embodiment also includes a second wafer cassette and an adapter plate. The adapter plate is disposed on the support platform 11, and the second wafer cassette is disposed on the support platform 11 through the adapter plate.

[0071] The wafer cassette conveying and loading system of this utility model, through the provision of a second wafer cassette and an adapter plate, can detect wafers of different models, thereby improving the versatility of the wafer cassette conveying and loading system.

[0072] Optionally, casters may be provided at the bottom of the support platform 11 to facilitate the replacement of different loading port devices 100.

[0073] like Figure 1 and Figure 2 As shown, the front-end loading system 1000 of this utility model embodiment includes a process equipment housing 200 and a wafer cassette transport and loading system according to any one of the above. A process chamber 202 is formed inside the process equipment housing 200, and a docking window 201 is provided on the side plate of the process equipment housing 200. The transfer positioning plate frame 12 is connected to the process equipment housing 200, and the pick-up and drop-off window 1211 and the docking window 201 are arranged facing each other in a first direction.

[0074] Therefore, the front-end loading system 1000 of this utility model embodiment has the advantage of improving detection accuracy.

[0075] Optionally, such as Figure 1 and Figure 2As shown, the process equipment housing 200 has multiple positioning parts 203 on the wall surface where the docking window 201 is opened. The wafer loading equipment 1 has multiple positioning plates 12, and the transfer positioning plates 12 of the multiple wafer loading equipment 1 are detachably connected to the process equipment housing 200. Each transfer positioning plate 12 of the wafer loading equipment 1 has multiple mating parts 1212. The multiple mating parts 1212 and the multiple positioning parts 203 are connected one-to-one by connectors.

[0076] The front-end loading system 1000 of this embodiment of the invention detachably connects the wafer loading device 1 to the process equipment housing 200. When processing wafers of different sizes, different wafer loading devices 1 can be replaced to transfer wafers of different sizes. That is, it is not necessary to increase the size of the process equipment or increase the number of docking windows 201; only the wafer loading device 1 needs to be replaced. It is compatible with the docking capabilities of multiple models of wafer loading devices 1, thereby enabling the process equipment to handle wafers of various specifications. This not only helps to improve the overall versatility of the front-end loading system 1000, but also eliminates the need to replace process equipment or make complex adjustments. When market demand changes, the production line can be quickly adjusted to adapt to new product specifications, reducing downtime and improving response speed.

[0077] Furthermore, the docking window 201 is roughly rectangular, and multiple positioning parts 203 can be provided on both sides of the width direction of the docking window 201. For example, three positioning holes are provided on both sides of the width direction of the docking window 201, and three mating holes are provided on both sides of the width direction of the loading positioning plate frame. The multiple mating holes and the multiple positioning holes are fixed by falling on each other.

[0078] The above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Any modifications or equivalent substitutions made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

[0079] In the description of this utility model, it should be understood that the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc., indicating the orientation or positional relationship are based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this utility model and simplifying the description, and are not intended to indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model.

[0080] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this utility model, "a plurality of" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0081] In this utility model, unless otherwise explicitly specified and limited, the terms "installation," "connection," "joining," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection, an electrical connection, or a connection that allows communication between them; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components, unless otherwise explicitly limited. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0082] In this utility model, unless otherwise explicitly specified and limited, "above" or "below" the second feature can mean that the first feature is in direct contact with the second feature, or that the first feature is in indirect contact with the second feature through an intermediate medium. Furthermore, "above," "on top of," and "over" the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply that the first feature is at a lower horizontal level than the second feature.

[0083] In this utility model, the terms "one embodiment," "some embodiments," "example," "specific example," or "some examples," etc., refer to a specific feature, structure, material, or characteristic described in connection with that embodiment or example, which is included in at least one embodiment or example of this utility model. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples. Moreover, without contradiction, those skilled in the art can combine and integrate the different embodiments or examples described in this specification, as well as the features of different embodiments or examples.

[0084] Although embodiments of the present invention have been shown and described above, it is understood that the above embodiments are exemplary and should not be construed as limiting the present invention. Those skilled in the art can make changes, modifications, substitutions and variations to the above embodiments within the scope of the present invention.

Claims

1. A loading port device, characterized in that, include A wafer loading apparatus includes a support platform and a transfer positioning plate frame. The transfer positioning plate frame is disposed on one side of the support platform in a first direction. The support platform is used to place wafer cassettes. The transfer positioning plate frame is used to connect to the housing of the process equipment. The transfer positioning plate frame has a pick-and-place window. Multiple through-beam sensors, each including a transmitter and a receiver arranged in pairs along a second direction on the transfer positioning plate frame, the receiver receiving through-beam light emitted by the transmitter, the through-beam sensors being movably arranged along a third direction, and during wafer inspection, at least a portion of each of the transmitter and the receiver being able to extend into the wafer cassette through the pick-and-place window, the transmitter and the receiver being located on opposite sides of the wafer in the second direction, wherein the first direction, the second direction and the third direction are arranged orthogonally to each other.

2. The loading port device according to claim 1, characterized in that, The reloading positioning plate frame includes a frame plate, a door opener, and a bracket. The frame plate is disposed on one side of the support platform in the first direction. The frame plate frame has a pick-up and put-down window. The door opener is disposed on the pick-up and put-down window to close and open the pick-up and put-down window. The bracket is movably disposed relative to the frame plate in both the first direction and the third direction. The transmitter and the receiver are spaced apart on the bracket in the second direction.

3. The loading port device according to claim 2, characterized in that, It also includes a driving component, which includes a first driving component, a mating block, a second driving component, and a third driving component. The first driving component is connected to the support platform and can drive the mating block to reciprocate along the third direction. The second driving component and the third driving component are both connected to the mating block. The second driving component is connected to the door opener to drive the door opener to reciprocate along the first direction, and the third driving component is connected to the bracket to drive the bracket to reciprocate along the first direction, so that at least a portion of each of the transmitter and the receiver can extend into and retract from the wafer cassette through the pick-and-place window.

4. The loading port device according to claim 3, characterized in that, The door opener includes a box opening plate, a locking component, and a suction component. The box opening plate is movably disposed on the pick-up and put-down window under the drive of the first driving component and the second driving component. The second driving component is connected to the box opening plate. The box opening plate and the suction component are disposed opposite to each other along the first direction, and the suction component is disposed opposite to the wafer box. The locking component passes through the suction component and can be inserted into the lock hole of the wafer box. The suction component can be attracted to the lid of the wafer box.

5. The loading port device according to claim 4, characterized in that, The bracket includes a receiving frame and a main frame extending upward along the upper end of the receiving frame. The opening plate includes a support column and a window blocking plate. The window blocking plate is disposed at the upper end of the support column, and the lower end of the support column is connected to the second driving member. The outer wall surface of the window blocking plate has a clearance groove. A part of the receiving frame can be accommodated in the clearance groove. The main frame surrounds the window blocking plate. The transmitter and the receiver are both disposed on the side of the main frame near the upper end.

6. The loading port device according to claim 3, characterized in that, Each pair of transmitters and receivers is symmetrically arranged along the central axis of the third direction of the pick-up and drop-off window, and the length of the transmitters and receivers in the outer pair is greater than the length of the transmitters and receivers in the inner pair; And / or, each pair of transmitters and receivers is movably mounted on the bracket along the second direction.

7. A wafer cassette conveying and loading system, characterized in that, include The first wafer cassette and the loading port device according to any one of claims 1-6, wherein the first wafer cassette is disposed on the support platform and is used to stack wafers at intervals along the third direction.

8. The wafer cassette conveying and loading system according to claim 7, characterized in that, It also includes a second wafer cassette and an adapter plate, the adapter plate being disposed on the support platform, and the second wafer cassette being disposed on the support platform via the adapter plate.

9. A front-end loading system, characterized in that, include The process equipment housing and the wafer cassette transport and loading system according to any one of claims 7 or 8, wherein a process chamber is formed inside the process equipment housing, a docking window is provided on the side plate of the process equipment housing, the transfer positioning plate frame is connected to the process equipment housing, and the pick-up and drop-off window and the docking window are arranged facing each other in the first direction.

10. The front-end loading system according to claim 9, characterized in that, The process equipment housing has multiple positioning parts on the wall surface where the docking window is opened. The wafer loading equipment has multiple wafer loading equipment transfer positioning plate frames that are detachably connected to the process equipment housing. Each wafer loading equipment transfer positioning plate frame has multiple mating parts, and the multiple mating parts and multiple positioning parts are connected one-to-one by multiple connectors.

Images