Substrate carrier suitable for square substrates

Abstract

A substrate carrier suitable for square substrates includes a carrier body, a plurality of lateral support portions, at least one rear support portion, and a door panel. The carrier body has a bottom, a top relative to the bottom, two side walls surrounding the bottom and the top, and a rear wall located behind the bottom, the top, and the two side walls, and forms an opening at the front of the carrier body. The lateral support portions are located within the carrier body and are respectively disposed on the two side walls, and each lateral support portion has at least a plurality of support members arranged at intervals, and each support member has a protruding support flange and a guide block located between the support flange and the corner of the side wall. The rear support portion is located within the carrier body and is disposed on the rear wall, and the rear support portion has at least one connecting wall and a plurality of support protrusions integrally formed on the connecting wall and arranged at intervals, and each support protrusion is configured corresponding to the height position of each support flange. The door panel is assembled into the carrier body to close the opening at the front of the carrier body.

Description

Technical Field

[0001] This application relates to a storage container, and more particularly to a substrate carrier for storing semiconductor substrates for handling purposes and suitable for square substrates. Background Technology

[0002] In the current semiconductor industry, most substrates used are fragile or plate-shaped materials such as glass or silicon wafers. Therefore, during the manufacturing process, they usually need to be stored or transported using carriers such as cartridges, containers, or shipping boxes, depending on the needs of the manufacturing process.

[0003] However, most existing substrate carriers are used to load circular substrates. But when considering usable area, square substrates do have a larger area utilization rate, hence the demand for them. However, when existing substrate carriers load square substrates, all four sides of the square substrate will come into contact with the support parts of the carrier, which will increase the impact or wear on the substrate during assembly and transportation, and easily damage the square substrate.

[0004] In view of this, the applicant has devoted himself to research and applied theoretical principles to improve and solve the above-mentioned deficiencies, and finally proposed this application with a reasonable design that effectively improves the above-mentioned deficiencies. Utility Model Content

[0005] The main objective of this application is to provide a substrate carrier suitable for square substrates, which can reduce contact during assembly, while providing good positioning of the square substrate in the substrate carrier and preventing damage caused by shaking during transportation.

[0006] To achieve the above objectives, this application provides a substrate carrier suitable for square substrates, including a carrier body, a plurality of lateral support portions, at least one rear support portion, and a door panel; the carrier body has a bottom, a top relative to the bottom, two side walls surrounding the bottom and the top, and a rear wall located behind the bottom, the top, and the two side walls, and forms an opening at the front of the carrier body; the lateral support portions are located within the carrier body and are respectively disposed on the two side walls, and each lateral support portion has at least a plurality of support members arranged at intervals, and each support member has a protruding support flange and a guide block located between the support flange and the corner of the side wall; the rear support portion is located within the carrier body and is disposed on the rear wall, and the rear support portion has at least one connecting wall and a plurality of support protrusions integrally formed on the connecting wall and arranged at intervals, and each support protrusion is configured corresponding to the height position of each support flange; and the door panel is assembled on the carrier body to close the front opening of the carrier body.

[0007] In one embodiment, each of the lateral supports has a connecting plate that is erected and stacked on any of the side walls, and each of the support components is located on a surface of the connecting plate.

[0008] In one embodiment, the leading edge of the support flange of each lateral support portion has a gap to the leading edge of the guide block.

[0009] In one embodiment, each of the guide blocks of the lateral support portion has a guide ramp and guide surfaces formed at the front and rear ends of the guide ramp.

[0010] In one embodiment, the guide slope of each of the guide blocks of the lateral support portion has a long side connected to the sidewall and a short side connected to the support flange, both the long side and the short side being less than the length of the square substrate and at least 1 / 2 of the length of the square substrate.

[0011] In one embodiment, the height of the guide block is 1 / 3 to 2 / 3 of the distance between any two adjacent support flanges.

[0012] In one embodiment, the climbing surface and the supporting surface form an exterior angle, the exterior angle being 30 to 50 degrees.

[0013] In one embodiment, the exterior angle is 45 degrees.

[0014] In one embodiment, a groove is formed on the climbing surface, the groove having a thickness and for the square substrate to abut against.

[0015] In one embodiment, the rear support portion is formed by the rear wall being recessed from the outside into the carrier body to form at least one extension portion, and the rear support portion is located on the extension portion.

[0016] In one embodiment, the door panel has a door body and a front support portion disposed within the door body, and the front support portion has at least a plurality of elastic sheets for pushing against the square substrate.

[0017] In one embodiment, there are two rear-end support portions, and the leading edges of the two rear-end support portions are connected by an imaginary line, while the plurality of lateral support portions extend toward the rear wall to or beyond the imaginary line.

[0018] In one embodiment, the centerline of the square substrate faces upward on either side, and its lateral position with the elastic sheet on the front end support is 1 / 6 of the width of the square substrate, and its lateral position with each of the rear end supports is 1 / 6 to 1 / 3 of the width of the square substrate.

[0019] In one embodiment, the front support portion further includes a vertical frame portion assembled within the door body, and the elastic pieces are spaced apart on the vertical frame portion.

[0020] In one embodiment, each of the elastic sheet systems is shaped like a "V" facing one side. Attached Figure Description

[0021] In the accompanying drawings, unless otherwise specified, the same reference numerals throughout the various drawings denote the same or similar parts or elements. These drawings are not necessarily drawn to scale. It should be understood that these drawings depict only some embodiments disclosed in this application and should not be construed as limiting the scope of this application.

[0022] Figure 1 This is an exploded perspective view of this application.

[0023] Figure 2 According to Figure 1 Enlarged detail of Part A.

[0024] Figure 3 This is a three-dimensional schematic diagram of the lateral support section of this application.

[0025] Figure 4 This is an exploded view of the door panel of this application.

[0026] Figure 5 This is a side view of the process before the square substrate is placed in this application.

[0027] Figure 6 This is a partial schematic diagram showing the contact between any corner of the square substrate and the lateral support portion when the substrate is placed in this application.

[0028] Figure 7 This is a partial schematic diagram showing the lateral offset when the square substrate is placed in this application.

[0029] Figure 8 This is a partial schematic diagram showing the alignment of the square substrate when it is placed in this application.

[0030] Figure 9 This is a top-view schematic diagram of the square substrate of this application during the placement process.

[0031] Figure 10 This is a side view of the square substrate after it has been placed in this application.

[0032] Figure 11 According to Figure 10 A magnified view of part B and a partial schematic diagram of the square substrate climbing up to the rear.

[0033] Figure 12 According to Figure 10 Enlarged detail of part C.

[0034] Figure 13 This is a top view of the square substrate after it has been inserted.

[0035] Explanation of reference numerals in the attached figures:

[0036] 1: Vehicle body;

[0037] 10: Bottom;

[0038] 11: Top;

[0039] 12: Side wall;

[0040] 13: Posterior wall;

[0041] 2: Lateral support section;

[0042] 20: Connecting plate;

[0043] 21: Supporting components;

[0044] 210: Supporting flange;

[0045] 211: Guide block;

[0046] 211a: Guide slope;

[0047] 211b: Guiding surface;

[0048] 3: Backend Support Department;

[0049] 30: Connecting wall;

[0050] 31: Supports bumps;

[0051] 310: Supporting aspects;

[0052] 311: Climbing surface;

[0053] 312: Groove;

[0054] 32: Extension section;

[0055] 4: Door panel;

[0056] 40: Door body;

[0057] 41: Front-end Support Department;

[0058] 410: Erect frame;

[0059] 411: Elastic sheet;

[0060] 5: Square substrate. Detailed Implementation

[0061] To further disclose the features and technical content of this application, please refer to the following detailed description and accompanying drawings. However, the accompanying drawings are provided for reference and illustration only and are not intended to limit this application.

[0062] Please see Figure 1 and Figure 2 These are exploded perspective views of this application and... Figure 1 Enlarged detailed view of Part A. This application provides a substrate carrier suitable for square substrates, which mainly includes a carrier body 1, multiple lateral support parts 2, at least one rear support part 3, and a door panel 4, for assembling at least one of the square substrates 5; as shown Figure 13 As shown, the square substrate 5 has a width W and a length L, which are, for example, about 300x300mm. The square substrate 5 is prevented from shaking by the stable fixing provided by the carrier body 1 and the door panel 4 in the direction of its length L.

[0063] As mentioned above, Figure 1 and Figure 2 As shown, the carrier body 1 may have a bottom 10, a top 11 relative to the bottom 10, two side walls 12 surrounding the bottom 10 and the top 11, and a rear wall 13 located behind the bottom 10, the top 11, and the two side walls 12. An opening is formed in front of the carrier body 1 to allow one or more square substrates 5 to be inserted into the carrier body 1, and then the door panel 4 is used to close and store the inserted square substrates 5 (i.e., as shown in the diagram). Figure 10 (As shown).

[0064] like Figure 1 and Figure 3 As shown, each of the lateral support parts 2 is disposed within the vehicle body 1 and is erected on the two side walls 12 of the vehicle body 1. Figure 3 As shown, each of the lateral support portions 2 may have a connecting plate 20 erected and stacked on any side wall 12, and a plurality of support members 21 spaced apart from one surface of the connecting plate 20, and each support member 21 has a support flange 210 protruding from one surface of the connecting plate 20, and a guide block 211 located between the support flange 210 and the corner of the connecting plate 20 (or side wall 12); in other feasible embodiments, each support member 21 may also be spaced apart directly within any side wall 12.

[0065] Please see again Figure 1 and Figure 2 As shown, the rear support 3 is located inside the vehicle body 1 and on the rear wall 13 of the vehicle body 1. Figure 2As shown, the rear support part 3 has at least one connecting wall 30 and a plurality of support protrusions 31 integrally formed on the connecting wall 30 and arranged at intervals. Each support protrusion 31 is configured to correspond to the height position of each support flange 210, so that the square substrate 5 can be supported in the carrier body 1 at the same height by the two support flanges 210 and the support protrusions 31 at the same height.

[0066] like Figure 1 and Figure 4 As shown, the door panel 4 is assembled at the front opening of the carrier body 1, thereby closing the carrier body 1 to prevent the square substrate 5 stored inside from falling out, and further restricting the square substrate 5 stored inside the carrier body 1 from shaking during transportation, so as to reduce the damage to the square substrate 5. The door panel 4 has a door body 40 and a front support portion 41 provided in the door body 40. The front support portion 41 has a vertical frame portion 410 and a plurality of elastic pieces 411 arranged at intervals on the vertical frame portion 410. The vertical frame portion 410 is assembled in the door body 40, and each elastic piece 411 can be in a lateral "V" shape (i.e., like a V-shape). Figure 12 As shown), it is used to provide elastic thrust to the square substrate 5 placed inside the carrier body 1, so as to reliably press the square substrate 5 against the aforementioned rear support part 3 and prevent shaking during transportation.

[0067] Therefore, by means of the above-described structure, the substrate carrier applicable to square substrates of this application can be obtained.

[0068] Accordingly, Figure 5 and Figure 6 As shown, when the square substrate 5 is inserted through the opening at the front of the carrier body 1, this application can further reserve a gap d from the leading edge of the support flange 210 of either side of the support portion 2 to the leading edge of the guide block 211. The gap d can be approximately 20mm, for example, so that the two corners of the square substrate 5 can connect to the support flange 210 at the gap d when inserted, thereby facilitating the pushing of the square substrate 5 into the carrier body 1. For example... Figure 3 and Figure 6 As shown, since each guide block 211 of the lateral support portion 2 has a guide slope 211a and a guide surface 211b formed at the front and rear ends of the guide slope 211a; and in the embodiments described in this application, such as Figure 7 As shown, the height h of each guide block 211 is designed to occupy approximately 1 / 2 of the distance P between any two supporting flanges 210. Specifically, the height h of each guide block 211 can be 1 / 3 to 2 / 3 of the distance P. Therefore, when the square substrate 5 is pushed into the carrier body 1 by a robotic arm (not shown) or other means, if the square substrate 5 is not completely aligned upwards on either side and is biased to either side (as shown in the figure), Figure 7For example, if the square substrate 5 is biased to the right, the corner of that side can be adjusted by the guide surface 211b. The guide surface 211b can guide the biased side of the square substrate 5 onto the guide slope 211a, and then the guide slope 211a will place the biased side of the square substrate 5 flat on the support flange 210 (i.e., if the biased side is biased to the right). Figure 8 (As shown).

[0069] like Figure 9 As shown, by means of the design of the lateral support portion 2, the square substrate 5 can be smoothly placed into the carrier body 1 while minimizing contact with the side edges of the square substrate 5, as shown in the figure. Figure 10 or Figure 13 As shown. Further, as... Figure 13 As shown, the guide slope 211a of the guide block 211 of any side support 2 has a long side l1 connected to the connecting plate 20 (or side wall 12) and a short side l2 connected to the support flange 210. The long side l1 is larger than the short side l2, so there can be a larger guide surface 211b. Therefore, the guide surface 211b is not a simple chamfer, which can have a better guiding effect for the square substrate 5. The long side l1 or the short side l2 is smaller than the length L of the square substrate 5, or at least 1 / 2 of the length L of the square substrate 5.

[0070] Please see again Figures 10 to 12 As shown, when all the square base plates 5 are placed inside the carrier body 1, the aforementioned door panel 4 can be placed over the opening at the front of the carrier body 1. At this time, as... Figure 11 As shown, the side of each square substrate 5 facing the rear wall 13 of the carrier body 1 can be connected to the support protrusion 31 of the rear support portion 3. Specifically, each support protrusion 31 has a support surface 310 and a climbing surface 311 extending obliquely upward from the support surface 310. The climbing surface 311 and the support surface 310 form an outer angle α, which can be 30 to 50 degrees, preferably 45 degrees. The side of each square substrate 5 facing the rear wall 13 is stacked on the support surface 310, i.e. Figure 11 The square substrate 5 is shown in the dashed line state. Next, as shown... Figure 12 As shown, when the door panel 4 is closed, each elastic piece 411 of its front support part 41 can push each square substrate 5 with elastic force, thereby allowing each square substrate 5 to move as shown. Figure 11 As shown, the side of the square substrate 5 opposite to the rear wall 13 is positioned by lifting upwards along the climbing surface 311, with a lifting distance D and a lifting height H. The lifting distance D can be approximately 1.5 to 2.5 mm, and the lifting height H can be 2 mm or less. This allows the side of the square substrate 5 opposite to the rear wall 13 to be kept in a state where it does not contact the support flange 210 and the support surface 310. Furthermore, a groove 312 is formed on the climbing surface 311, and the groove 312 and... Figure 12 The elastic sheet 411 shown has a V-shaped groove with equal height, and the groove 312 has a thickness T. When the door panel 4 is closed, the side of the square base plate 5 opposite to the rear wall 13 can be pressed against the groove 312 to keep it from contacting the support flange 210 and the support surface 310 and thus lift it up.

[0071] Finally, as Figure 13 As shown, the size of the square substrate 5 mentioned in this application is 300x300mm. When the square substrate 5 is placed inside the carrier body 1, the center line C of the square substrate 5 faces upward on either side. The lateral position F1 between it and the elastic sheet 411 on the front support portion 41 of the door panel 4 can occupy about 1 / 6 of the width W of the square substrate 5. The lateral position F2 between it and each rear support portion 3 (in this embodiment, two rear support portions 3 are used as an example. The two rear support portions 3 can be recessed from the rear wall 13 from the outside into the carrier body 1 to form an extension portion 32, and the rear support portion 3 is located on the extension portion 32) can occupy 1 / 6 to 1 / 3 (about 50 to 100mm) of the width W of the square substrate 5, preferably 1 / 4 to 1 / 3 (about 75 to 100mm). Furthermore, the lateral position F1 is smaller than the lateral position F2, so that a state similar to three-point abutment can be formed to stabilize the square substrate 5 with minimal or minimal contact. In addition, the leading edges of the two rear support parts 3 are connected by an imaginary line S, and the plurality of lateral support parts 2 extend toward the rear wall 13 to or beyond the imaginary line S, so that the square substrate 5 can be more securely disposed in the carrier body 1, unlike the use of circular substrates.

[0072] In conclusion, this application is indeed a rare new creation, which can achieve the application purpose described in the above specification and solve the deficiencies of the prior art. Furthermore, due to its novelty and inventiveness, it fully meets the requirements for a new type of patent application. Therefore, this application is filed in accordance with the Patent Law to protect the applicant's rights.

[0073] However, the above description is only a preferred embodiment of this application and does not limit the scope of this application. Therefore, all equivalent structural changes made using the description and drawings of this application are also included in the scope of this application and are hereby stated.

Claims

1. A substrate carrier suitable for square substrates, for accommodating at least one square substrate, and comprising: The vehicle body has a bottom, a top relative to the bottom, two side walls surrounding the bottom and the top, and a rear wall located behind the bottom, the top and the two side walls, and forms an opening at the front of the vehicle body; Multiple lateral support portions are located within the vehicle body and are respectively disposed on the two side walls. Each lateral support portion has at least a plurality of support components arranged at intervals, and each support component has a protruding support flange and a guide block located between the support flange and the corner of the side wall. At least one rear support portion is located within the carrier body and disposed on the rear wall. The rear support portion has at least one connecting wall and a plurality of support protrusions integrally formed on the connecting wall and arranged at intervals, with each support protrusion configured corresponding to the height position of its respective support flange. A door panel is assembled onto the vehicle body to close the front opening of the vehicle body. Each of the support protrusions has a support surface and a climbing surface extending obliquely upward from the support surface. When the door panel closes the front opening of the vehicle body, it pushes against the square base plate, causing the side of the square base plate opposite to the rear wall to be raised along the climbing surface.

2. The substrate carrier suitable for square substrates according to claim 1, wherein, Each of the lateral support components has a connecting plate that is erected and stacked on any of the side walls, and each support component is located on a surface of the connecting plate.

3. The substrate carrier suitable for square substrates of claim 1, wherein, There is a gap between the leading edge of the support flange of each lateral support and the leading edge of the guide block.

4. The substrate carrier adapted for square substrates of claim 1, wherein, Each of the guide blocks of the lateral support has a guide slope and guide surfaces formed at the front and rear ends of the guide slope.

5. The substrate carrier adapted for square substrates of claim 4, wherein, The guide slope of each lateral support block has a long side connected to the sidewall and a short side connected to the support flange. Both the long side and the short side are less than the length of the square substrate and are at least 1 / 2 of the length of the square substrate.

6. The substrate carrier suitable for a square substrate according to any one of claims 1 to 5, wherein, The height of the guide block is 1 / 3 to 2 / 3 of the distance between any two adjacent support flanges.

7. The substrate carrier suitable for square substrates according to claim 1, wherein, The climbing surface and the supporting surface form an outer angle, which is 30 to 50 degrees.

8. The substrate carrier suitable for square substrates according to claim 7, wherein, The outer angle is 45 degrees.

9. The substrate carrier suitable for square substrates according to claim 1, wherein, A groove is formed on the climbing surface, the groove having a thickness and for the square substrate to abut against.

10. The substrate carrier suitable for square substrates according to claim 1, wherein, The rear support portion is formed by the rear wall being recessed from the outside into the carrier body to form at least one extension portion, and the rear support portion is located on the extension portion.

11. The substrate carrier suitable for square substrates according to claim 1, wherein, The door panel has a door body and a front support portion disposed within the door body, and the front support portion has at least a plurality of elastic pieces for pushing against the square substrate.

12. The substrate carrier suitable for a square substrate according to claim 11, wherein, The number of rear support parts is two, and the leading edges of the two rear support parts are connected by an imaginary line. The plurality of lateral support parts extend toward the rear wall to or beyond the imaginary line.

13. The substrate carrier suitable for a square substrate according to claim 12, wherein, The centerline of the square substrate points upward on either side, and its lateral position with the elastic sheet on the front end support is 1 / 6 of the width of the square substrate, and its lateral position with each of the rear end supports is 1 / 6 to 1 / 3 of the width of the square substrate.

14. The substrate carrier suitable for a square substrate according to claim 11, wherein, The front support section further includes a vertical frame section assembled within the door body, and the elastic pieces are spaced apart on the vertical frame section.

15. The substrate carrier suitable for a square substrate according to any one of claims 11 to 13, wherein, Each of these elastic sheet systems is shaped like a "V" facing one side.

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