A planar electrode structure electric squib chip package clamp

Abstract

A planar electrode structure electric firework chip package clamp belongs to the technical field of electronic component packaging tooling. It comprises a bottom plate (5), a frame (6), a ceramic plug limiting plate (7), a blocking strip (8) and a three-dimensional lifting platform (9). The bottom surface of the bottom plate (5) is fixed on the fixed plane of the three-dimensional lifting platform (9), the frame (6) is fixed on the upper surface of the bottom plate (5), the ceramic plug limiting plate (7) is fixed in the frame (6), and the blocking strip (8) is fixed between the limiting grooves of the ceramic plug limiting plate (7). The three-dimensional lifting platform (9) is a three-dimensional adjustable device installed on the bonding machine workbench and matched with the bonding machine workbench. The problem that the ceramic plug is usually irregular in shape and is difficult to be fixed on the bonding machine workbench during the packaging process of the existing planar electrode structure electric firework chip is solved. The packaging efficiency and the packaging qualification rate are improved. It can be widely used in the field of ceramic plug packaging chip packaging.

Description

Technical Field

[0001] This utility model belongs to the field of electronic component packaging tooling technology, and more specifically to the field of electro-fired product chip packaging technology. In particular, it relates to a planar electrode structure electro-fired product chip packaging fixture. Background Technology

[0002] An electro-pyrotechnic chip is a disposable component that uses electrical energy to convert into heat energy and ignite gunpowder. Currently, electro-pyrotechnic chips, both domestically and internationally, are classified according to the material system of their ignition functional layer: mainly into three categories—metal film systems, energetic bridge systems, and semiconductor bridge systems. Electro-pyrotechnic chips offer advantages such as high safety, good ignition consistency, and high instantaneous ignition speed. The electrode structure of electro-pyrotechnic chips in metal film systems, energetic bridge systems, and semiconductor bridge systems is often made into a planar electrode structure.

[0003] Planar electrode structure electro-explosive chips cannot be used directly for two reasons. First, to achieve the ignition function of an electro-explosive, the ignition bridge area needs to be covered with gunpowder. This is usually done by encapsulating the electro-explosive within a ceramic plug (ceramic casing) and then pressing the gunpowder into the ceramic plug to cover the bridge area of ​​the chip. Second, planar electrode structure electro-explosive chips are difficult to electrically connect to a circuit. Typically, the chip is encapsulated within a ceramic plug, and the electrodes of the ceramic plug are electrically connected. Then, the electrodes of the ceramic plug are electrically connected to the circuit to ensure that the electrical signal in the circuit can be applied. The reasons for this are as follows: Firstly, the non-sparking performance (1A, 1W, 5min) is one of the most crucial indicators of an electro-pyrotechnic device. The quality of this performance depends on effective heat dissipation. However, standalone electro-pyrotechnic chips, due to their limited size, cannot achieve adequate heat dissipation. Therefore, the planar electrode structure of the electro-pyrotechnic chip must be encapsulated within a ceramic plug of a suitable size to form a ceramic plug assembly. The non-sparking performance is achieved through the heat dissipation provided by the ceramic plug. Secondly, ceramic plugs typically incorporate electrostatic discharge channels. To meet higher electrostatic discharge requirements, the planar electrode structure of the electro-pyrotechnic chip also needs to be encapsulated within a ceramic plug with an electrostatic discharge channel. For these reasons, encapsulating the electro-pyrotechnic chip within a ceramic plug is essential to realizing its functional requirements.

[0004] The typical process route for packaging EDM chips into ceramic plugs is as follows: ① Dispensing: Apply adhesive to the grooves of the ceramic plug using a dispensing process; ② Surface Mount and Curing: Bond the EDM chip to the grooves of the ceramic plug using a surface mount process, and then cure the adhesive; ③ Wire Bonding: Bond the two planar electrodes of the EDM to the two electrode pads inside the ceramic plug using wire bonding; ④ Coating with Silver Paste and Curing: Finally, coat the wire bonding with conductive adhesive and cure to complete the process of packaging the EDM into the ceramic plug.

[0005] In the processes of dispensing, surface mount curing, wire bonding, silver paste coating, and curing of electro-hydraulic chips encapsulated within ceramics, ceramic plugs need to be fixed in place. Although the bonding machine has a worktable, the ceramic plugs are typically irregularly shaped and have 2-4 electrodes, making their structure as follows... Figure 1-2 As shown, it is difficult to fix it to the worktable of the bonding machine.

[0006] Based on the above situation, there is an urgent need for a packaging fixture to fix ceramic plugs in order to achieve efficient packaging of electro-pyrotechnic devices with planar electrode structures inside ceramic plugs.

[0007] In view of the above, this utility model is hereby proposed. Summary of the Invention

[0008] The technical problem to be solved by this utility model is: to solve the problem that in the packaging process of existing planar electrode structure electro-fired products chips, the ceramic plug is usually irregular in shape and difficult to fix to the bonding machine worktable.

[0009] Therefore, this utility model provides a planar electrode structure electro-explosive chip packaging fixture, such as... Figure 3-11 As shown. Includes:

[0010] 5. Base plate, 6. Frame, 7. Ceramic plug limit plate, 8. Stop bar, 9. Three-dimensional lifting platform.

[0011] The bottom surface of the base plate 5 is fixed on the fixed plane of the three-dimensional lifting platform 9, the frame 6 is fixed on the upper surface of the base plate 5, the ceramic plug limiting plate 7 is fixed inside the frame 6, and the baffle 8 is fixed between the limiting grooves of the ceramic plug limiting plate 7.

[0012] The base plate 5 consists of a base plate body, horizontal threaded holes 501, and vertical threaded holes 502. The number, size, and position of the vertical threaded holes 502 match the fixing holes on the fixed plane of the three-dimensional lifting platform 9.

[0013] The frame 6 consists of a frame body and a horizontal threaded hole 601. The horizontal threaded hole 601 of the frame matches the horizontal threaded hole 501 of the base plate.

[0014] The ceramic plug limiting plate 7 consists of a ceramic plug limiting plate body, limiting grooves (701, 704), a limiting plate transverse threaded hole 702, and a limiting plate longitudinal threaded hole 703. The limiting grooves are either single-bridge limiting grooves 701 or double-bridge limiting grooves 704. The single-bridge limiting grooves 701 or double-bridge limiting grooves 704 are arranged in a matrix structure on the ceramic plug limiting plate body. The limiting plate transverse threaded hole 702 matches the transverse threaded hole 601 of the frame. The limiting groove consists of a limiting groove depth 70101 and a limiting groove through hole 70102. The limiting groove depth 70101 matches the ceramic plug, and the limiting groove through hole 70102 matches the electrode needle.

[0015] The baffle 8 is elongated and has threaded holes 801 at both ends. The baffle 8 is located between the limiting grooves of the matrix structure, and the threaded holes 801 of the baffle match the longitudinal threaded holes 703 of the limiting plate.

[0016] The three-dimensional lifting platform 9 is a three-dimensional adjustable device, installed on the bonding machine workbench and matched with the bonding machine workbench.

[0017] This novel chip packaging fixture features a simple structure, convenient operation, and suitability for batch packaging. During the processes of dispensing, bonding, wire bonding, silver paste coating, and curing of electro-hydraulic chips into ceramic, the ceramic plug needs to be fixed within this fixture, improving packaging efficiency and yield. The fixture is made entirely of metal, offering advantages such as high temperature resistance, minimal deformation, and reusability, and can fully meet usage requirements up to 300℃.

[0018] The size of the limiting groove in the ceramic plug limiting plate can be adjusted according to the size of the ceramic plug. It can be made into a limiting groove for a single-bridge ceramic plug or a limiting groove for a double-bridge ceramic plug. The ceramic plug limiting plate is replaceable and can be used for packaging ceramic plugs of different sizes and EDM chips.

[0019] The base adopts a three-axis lifting platform design and is connected to the base plate with screws. During processes such as chip mounting, silver paste coating, and curing, the three-axis lifting platform can be removed for easy manual operation; during wire bonding operations, the fixture body is connected to the three-axis lifting platform, and the "front", "back", "left", "right", "up" and "down" positions of the fixture can be adjusted according to the position of the product.

[0020] The baffle structure above the fixture body can press down the ceramic plug to prevent the bonding wire of the bonding machine from lifting the ceramic plug together during the gold wire bonding operation, thus affecting the gold wire bonding effect.

[0021] It can be widely used in the field of ceramic plug-packaged chips. Attached Figure Description

[0022] Figure 1 This is a schematic diagram of a single-bridge ceramic plug.

[0023] Figure 2 This is a schematic diagram of a double-bridge ceramic plug.

[0024] Figure 3 This is a schematic diagram showing the connection between the stop bar and the ceramic plug limiting plate.

[0025] Figure 4 This is a schematic diagram of the base plate.

[0026] Figure 5 This is a schematic diagram of the border.

[0027] Figure 6 A top view of the ceramic plug limiting plate for encapsulating a single-bridge ceramic plug.

[0028] Figure 7 A schematic diagram of the main structure of the ceramic plug limiting plate for encapsulating a single-bridge ceramic plug.

[0029] Figure 8 A top view of the ceramic plug limiting plate for encapsulating a dual-bridge ceramic plug.

[0030] Figure 9 A schematic diagram of the main structure of the ceramic plug limiting plate for encapsulating a dual-bridge ceramic plug.

[0031] Figure 10 This is a schematic diagram of a three-axis lifting platform.

[0032] Figure 11 This is a schematic diagram of the connection sequence of the packaging fixture.

[0033] In the diagram: 1 is a ceramic plug, 2 is a ceramic groove, 3 is an electrode needle, 4 is an electrode needle pad, 5 is a base plate, 501 is a horizontal threaded hole in the base plate, 502 is a vertical threaded hole in the base plate, 6 is a frame, 601 is a horizontal threaded hole in the frame, 7 is a ceramic plug limiting plate, 701 is a single-bridge limiting groove, 70101 is a deep groove in the limiting groove, 70102 is a through hole in the limiting groove, 702 is a horizontal threaded hole in the limiting plate, 703 is a vertical threaded hole in the limiting plate, 704 is a double-bridge limiting groove, 8 is a stop bar, 801 is a threaded hole in the stop bar, and 9 is a three-dimensional lifting platform. Detailed Implementation

[0034] like Figure 1-11 As shown, the specific implementation of the planar electrode structure electro-fired device chip packaging fixture is as follows:

[0035] The ceramic plug limiting plate can be made of stainless steel, aluminum alloy, titanium alloy, etc. The ceramic plug limiting plate is 90mm-100mm long, 50mm-60mm wide, and 5mm-10mm thick. It includes 50-150 circular ceramic plug limiting grooves, each consisting of a deep groove and circular through holes. The inner diameter of the deep groove is 50µm-100µm larger than the diameter of the ceramic plug, and the depth of the deep groove is the same as the ceramic height of the ceramic plug. The deep groove contains 2-4 circular through holes; single-bridge ceramic plugs have 2 circular through holes, and double-bridge ceramic plugs have 4 circular through holes. The diameter of the circular through holes is 40µm-60µm larger than the diameter of the electrode needle of the ceramic plug, and the center-to-center distance between the circular through holes is the same as the center-to-center distance between the electrode needles of the ceramic plug. The function of the limiting groove is to accommodate ceramic plugs of different diameters, heights, electrode needle diameters, and lengths, thus fixing the ceramic plugs in place. The ceramic plug limiting plate has 4-6 threaded holes on its side wall, which are used to connect the ceramic plug limiting plate to the frame with screws. The front of the ceramic plug limiting plate has 8-20 threaded holes for connecting to the stop bar with screws.

[0036] The frame can be made of stainless steel, aluminum alloy, titanium alloy, or other materials. The frame is a square frame with a thickness of approximately 3mm-4mm. The inner length of the frame is 20µm-50µm greater than the length of the ceramic plug limiting plate, and the inner width is 20µm-50µm greater than the width of the ceramic plug limiting plate. The height of the frame is 30mm-40mm. It includes 8-12 threaded holes, of which 4-6 are used to connect to the ceramic plug limiting plate with screws, thus functioning as the ceramic plug limiting plate. This structural design facilitates the replacement of ceramic plug limiting plates with different limiting grooves; the 4-6 threaded holes are used to connect to the base plate with screws.

[0037] The base plate can be made of stainless steel, aluminum alloy, titanium alloy, or other materials. Its length and width are the same as the ceramic plug limiting plate, and its thickness is 3mm-6mm. The sidewall includes 4-6 threaded holes for connecting the base plate to the frame using screws. The flat surface of the base plate also includes 4-6 threaded holes for connecting the base plate to the three-axis lifting platform using screws.

[0038] The three-axis lifting platform is connected to the base plate with screws, facilitating disassembly. The main function of the three-axis lifting platform is to connect to the base plate and control the forward, backward, left, right, up, and down movement of the fixture's main body. The up and down movement of the fixture body is suitable for bonding machine operations with different height requirements, and also facilitates the movement of the product's forward, backward, left, and right positions during bonding, dispensing, and mounting processes.

[0039] The stop bar can be made of stainless steel, aluminum alloy, titanium alloy, or other materials. Each end of the stop bar has a threaded hole, which connects to the threaded holes on the ceramic plug limiting plate via screws. The stop bar is 85mm-95mm long, 3mm-4mm wide, and 1mm-2mm thick. The function of the stop bar is to press against the edge of the ceramic plug, preventing the ceramic plug from being pulled out of the limiting groove by the bonding wire of the bonding machine during bonding operations, thus affecting the gold wire bonding effect. There are 5-10 stop bars on the ceramic plug limiting plate.

[0040] Example 1: Single-bridge ceramic plug encapsulation:

[0041] The ceramic stopper has a diameter of 4mm and a ceramic part height of 4mm. The ceramic stopper contains two electrodes with a diameter of 0.5mm and a length of approximately 26mm.

[0042] (1) The ceramic plug limiting plate is made of aluminum alloy. The ceramic plug limiting plate is approximately 100mm long, 50mm wide, and 5mm thick. The ceramic plug limiting plate includes 105 circular ceramic plug limiting grooves, which are composed of deep grooves and through holes. The inner diameter of the deep groove is 50µm larger than the diameter of the ceramic plug, and the depth of the deep groove is 4mm. There are two through holes in the deep groove. The diameter of the through holes is approximately 50µm larger than the diameter of the electrode needle of the ceramic plug. The center-to-center distance of the through holes is the same as the center-to-center distance of the electrode needle of the ceramic plug. The limiting groove serves to fix the ceramic plug. The left and right sidewalls of the ceramic plug limiting plate each have two threaded holes. The function of the threaded holes is to connect the ceramic plug limiting plate to the frame with screws. The front of the ceramic plug limiting plate has 12 threaded holes for connecting to the stop bar with screws.

[0043] (2) The frame is made of aluminum alloy and is a square frame with a thickness of 3mm. The inner length of the frame is 25µm longer than the length of the ceramic plug limiting plate, the inner width of the frame is 25µm wider than the width of the ceramic plug limiting plate, and the height of the frame is 30mm. It includes 8 threaded holes, of which 4 threaded holes are connected to the ceramic plug limiting plate with screws to fix the ceramic plug limiting plate; and 4 threaded holes are connected to the base plate with screws.

[0044] (3) The base plate is made of aluminum alloy. The length and width of the base plate are the same as the length and width of the ceramic plug limiting plate, and the thickness is 3mm. The side wall includes 4 threaded holes, which are used to connect the base plate to the frame through screws. The flat surface of the base plate includes 4 threaded holes, which are used to connect the base plate to the three-axis lifting platform through screws.

[0045] (4) The three-axis lifting platform can be connected to the base plate by screws and is easy to disassemble. The main function of the three-axis lifting platform is to connect to the base plate and control the "front", "back", "left", "right", "up" and "down" movement of the main body of the fixture. The "up" and "down" movement of the main body of the fixture is suitable for the gold wire bonding machine operation when packaging ceramic plugs of this embodiment, and is also convenient for moving the "front", "back", "left" and "right" positions of the product during bonding, dispensing, and mounting processes.

[0046] (5) The baffles are made of aluminum alloy, and there are 6 baffles on the ceramic plug limiting plate. Each baffle has a threaded hole at both ends, which is connected to the threaded hole on the ceramic plug limiting plate by screws. The baffles are 95mm long, 3.5mm wide, and 1mm thick. The function of the baffles is to press against the edge of the ceramic plug to prevent the ceramic plug from being pulled out of the limiting groove by the bonding wire of the bonding machine during the bonding operation, which would affect the gold wire bonding effect.

[0047] Example 2: Dual-bridge ceramic plug encapsulation:

[0048] The ceramic stopper has a diameter of 8mm, a ceramic part height of 4mm, and contains 4 electrodes, each with a diameter of 1mm and a length of 20mm.

[0049] (1) The ceramic plug limiting plate is made of aluminum alloy. The ceramic plug limiting plate is approximately 100mm long, 60mm wide, and 8mm thick. The ceramic plug limiting plate includes 55 round-hole ceramic plug limiting grooves, which are composed of deep grooves and round through holes. The inner diameter of the deep groove is 50µm larger than the diameter of the ceramic plug, and the depth of the deep groove is 4mm. The deep groove contains 4 round through holes, the diameter of which is 50µm larger than the diameter of the ceramic plug's electrode needle. The center-to-center distance of the round through holes is the same as that of the ceramic plug's electrode needle. The limiting grooves serve to fix the ceramic plug. The left and right sidewalls of the ceramic plug limiting plate each have 3 threaded holes. The function of the threaded holes is to connect the ceramic plug limiting plate to the frame with screws. The front of the ceramic plug limiting plate has 8 threaded holes for connecting to the stop bar with screws.

[0050] (2) The frame is made of aluminum alloy and is a square frame with a thickness of 3mm. The inner length of the frame is 25µm longer than the length of the ceramic plug limiting plate 1, and the inner width of the frame is 25µm wider than the width of the ceramic plug limiting plate. The height of the frame is 30mm. It includes 12 threaded holes, of which 6 threaded holes are connected to the clamping plate with screws to fix the clamping plate; and 6 threaded holes are connected to the base plate with screws.

[0051] (3) The base plate is made of aluminum alloy. The length and width of the base plate are the same as the length and width of the ceramic plug limiting plate, and the thickness is 3mm. The side wall includes 6 threaded holes, which are used to connect the base plate to the frame through screws. The flat surface of the base plate includes 6 threaded holes, which are used to connect the base plate to the three-axis lifting platform through screws.

[0052] (4) The three-axis lifting platform can be connected to the base plate by screws and is easy to disassemble. The main function of the three-axis lifting platform is to connect to the base plate and control the "front", "back", "left", "right", "up" and "down" movement of the main body of the fixture. The "up" and "down" movement of the main body of the fixture is suitable for the gold wire bonding machine operation when packaging ceramic plugs of this embodiment, and is also convenient for moving the "front", "back", "left" and "right" positions of the product during bonding, dispensing, and mounting processes.

[0053] (5) The baffle is made of aluminum alloy and there are 4 baffles on the ceramic plug limiting plate. Each baffle has a threaded hole at both ends, which is connected to the threaded hole on the ceramic plug limiting plate by screws. The baffle is 95mm long, 3mm wide and 1.2mm thick. The function of the baffle is to press on the edge of the ceramic plug to prevent the ceramic plug from being pulled out of the limiting groove by the bonding wire of the bonding machine during the bonding operation, which would affect the gold wire bonding effect.

[0054] Example 3: Chip Packaging Process:

[0055] (1) Place ceramic plugs: Place the ceramic plugs in the ceramic plug limiting groove of this fixture in sequence. The number of ceramic plugs placed depends on the number of ceramic plugs to be packaged. At this time, there is no need to install the stop bar.

[0056] (2) Dispensing: Using a dispensing machine, batch adhesive is dispensed into the grooves of the ceramic plugs placed in this fixture. During the dispensing operation, the position of this fixture can be controlled by moving the "forward", "backward", "left", and "right" positions of the three-axis lifting platform.

[0057] (3) Chip mounting and curing: Use tweezers or a vacuum pen to mount the electro-explosive chip with a planar electrode structure into the groove of the ceramic plug. During the mounting operation, the position of this fixture can be controlled by moving the "front", "back", "left" and "right" positions of the three-axis lifting platform; remove the three-axis lifting platform of this fixture and place the main body of this fixture in an oven to cure the adhesive.

[0058] (4) Gold Wire Bonding: Remove the main body of the fixture from the oven and connect the base plate of the fixture to the three-axis lifting platform. Adjust the "up" and "down" positions of the three-axis lifting platform to adjust the ceramic plug limiting plate of the fixture to a suitable height for bonding operations. Connect the stop bar to the ceramic plug limiting plate to press down on the ceramic plug and prevent the ceramic plug from being pulled out by the bonding wire during the bonding process, thus affecting the bonding operation. Perform batch bonding operations between the ceramic plug electrode pads in the ceramic plug limiting plate of the fixture and the two electrodes of the electro-hydraulic chip. The bonding wire can be gold wire, aluminum wire, etc. During the bonding operation, the position of the fixture can be controlled by moving the "forward", "backward", "left", and "right" positions of the three-axis lifting platform.

[0059] (5) Coating with silver paste and curing: Conductive silver paste is sequentially coated onto the bonding wires between the two electrode pads of the ceramic plug and the electrode of the electro-hydraulic chip using a dispensing process. During the coating operation, the position of this fixture can be controlled by moving the "forward", "backward", "left" and "right" positions of the three-axis lifting platform; the three-axis lifting platform of this fixture is then removed, and the main body of this fixture is placed in an oven to cure the conductive silver paste.

[0060] (6) Remove the encapsulated ceramic plug assembly for electro-fired devices: Remove the retaining bar and remove the encapsulated ceramic plug assembly for electro-fired devices from the fixture in sequence.

[0061] The above description is only a preferred embodiment of the present utility model and does not limit the patent scope of the present utility model. All ignition resistance performance tests conducted using the contents of the present utility model specification and drawings under the inventive concept of the present utility model are included within the patent protection scope of the present utility model.

Claims

1. A planar electrode structure electro-explosive chip packaging fixture, characterized in that: Includes base plate (5), frame (6), ceramic plug limiting plate (7), stop bar (8) and three-dimensional lifting platform (9); The bottom surface of the base plate (5) is fixed on the fixed plane of the three-dimensional lifting platform (9), the frame (6) is fixed on the upper surface of the base plate (5), the ceramic plug limiting plate (7) is fixed inside the frame (6), and the baffle (8) is fixed between the limiting grooves of the ceramic plug limiting plate (7). The base plate (5) consists of a base plate body, a base plate transverse threaded hole (501), and a base plate longitudinal threaded hole (502). The number, size, and position of the base plate longitudinal threaded holes (502) match the fixing holes on the fixing plane of the three-dimensional lifting platform (9). The frame (6) consists of a frame body and a frame horizontal threaded hole (601), and the frame horizontal threaded hole (601) matches the bottom plate horizontal threaded hole (501); The ceramic plug limiting plate (7) consists of a ceramic plug limiting plate body, limiting grooves (701, 704), a limiting plate transverse threaded hole (702), and a limiting plate longitudinal threaded hole (703). The limiting groove is divided into a single-bridge limiting groove (701) or a double-bridge limiting groove (704). The single-bridge limiting groove (701) or the double-bridge limiting groove (704) is arranged in a matrix structure on the ceramic plug limiting plate body. The limiting plate transverse threaded hole (702) matches the frame transverse threaded hole (601). The limiting groove consists of a limiting groove deep groove (70101) and a limiting groove through hole (70102). The limiting groove is matched with the ceramic plug by the limiting groove deep groove (70101), and the limiting groove through hole (70102) matches the electrode needle. The baffle (8) is long and has threaded holes 801 at both ends. The baffle (8) is located between the limiting grooves of the matrix structure. The threaded holes 801 of the baffle match the longitudinal threaded holes (703) of the limiting plate. The three-dimensional lifting platform (9) is a three-dimensional adjustable device, which is installed on the bonding machine workbench and is matched with the bonding machine workbench.

2. The planar electrode structure electro-explosive chip packaging fixture as described in claim 1, characterized in that: The ceramic plug limiting plate has a length of 90mm-100mm, a width of 50mm-60mm, and a thickness of 5mm-10mm; The ceramic plug limiting plate includes 50-150 circular ceramic plug limiting grooves, each groove consisting of a deep groove and a through hole. The inner diameter of the deep groove is 50-100 μm larger than the diameter of the ceramic plug, and the depth of the deep groove is the same as the ceramic height of the ceramic plug. The deep groove contains 2-4 through holes, the diameter of which is 40-60 μm larger than the diameter of the electrode needle of the ceramic plug, and the center-to-center distance between the through holes is the same as the center-to-center distance between the electrode needles of the ceramic plug. The ceramic plug limiting plate has 4-6 threaded holes on its side wall. The function of the threaded holes is to connect the ceramic plug limiting plate to the frame with screws. The ceramic plug limiting plate has 8-20 threaded holes on the front for connecting to the stop bar via screws.

3. The planar electrode structure electro-explosive chip packaging fixture as described in claim 2, characterized in that: The deep groove of a single-bridge ceramic plug has two through holes, while the deep groove of a double-bridge ceramic plug has four through holes.

4. The planar electrode structure electro-explosive chip packaging fixture as described in claim 1, characterized in that: The frame is a square frame with a thickness of 3mm-4mm. The inner length of the frame is 20um-50um longer than the length of the ceramic plug limiting plate, the inner width of the frame is 20um-50um longer than the width of the ceramic plug limiting plate, and the height of the frame is 30mm-40mm. The frame includes 8-12 threaded holes, of which 4-6 threaded holes are connected to the ceramic plug limiting plate by screws, and the other 4-6 threaded holes are connected to the base plate by screws.

5. The planar electrode structure electro-explosive chip packaging fixture as described in claim 1, characterized in that: The length and width of the base plate are the same as the length and width of the ceramic plug limiting plate, and the thickness is 3mm-6mm. The sidewall of the base plate includes 4-6 threaded holes for connecting the base plate to the frame with screws; The base plate has 4-6 threaded holes on its flat surface for connecting the base plate to the three-axis lifting platform with screws.

6. The planar electrode structure electro-explosive chip packaging fixture as described in claim 1, characterized in that: The three-axis lifting platform is connected to the base plate by screws.

7. The planar electrode structure electro-explosive chip packaging fixture as described in claim 1, characterized in that: The baffle is rectangular; Each end of the baffle has a threaded hole, which is connected to the threaded hole on the ceramic plug limiting plate by screws; The length of the baffle is 85mm-95mm, the width is 3mm-4mm, and the thickness is 1mm-2mm; The ceramic plug limiting plate has 5-10 retaining strips.

8. The planar electrode structure electro-explosive chip packaging fixture as described in claim 1, characterized in that: The ceramic plug limiting plate, frame, base plate and stop bar are made of stainless steel, aluminum alloy or titanium alloy.

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