A substrate transport mechanism

Abstract

The utility model relates to the technical field of substrate transmission, concretely to a substrate transmission mechanism, including the big chamber of built -in lift base platform and with its communication is equipped with the small chamber of isolated plug -in valve, be equipped with the clamp jaw in the small chamber, the sliding path of this clamp jaw penetrates the valve mouth area of isolated plug -in valve, the linear drive mechanism is fixedly arranged on the outside wall of small chamber, and the execution end of this linear drive mechanism is connected with the transmission of clamp jaw. The utility model transmission mechanism adopts the compact design of magnetic coupling transmission subassembly and symmetric fork arm clamp jaw, compared with traditional production line equipment, especially adapts to the space limit demand of small -size magnetron sputtering experimental equipment, through the collaborative control of isolated plug -in valve and linear drive mechanism, only needs to be preset in the cavity lateral wall material taking and placing point position to complete the deployment, does not need to transform cavity main body structure, improves the compatibility and flexibility of experimental equipment reconstruction.

Description

Technical Field

[0001] This utility model relates to the field of substrate transmission technology, and in particular to a substrate transmission mechanism. Background Technology

[0002] In the field of vacuum coating, PVD and CVD production line equipment generally adopts carrier plate transfer technology to realize large-scale automated transfer of substrates. This technology uses a magnetic fluid sealed linear drive component in conjunction with a rigid carrier plate. Although it can ensure the smoothness of large carrier plate transfer and substrate stability, its structural design has limitations.

[0003] Existing transmission mechanisms require strong parallelism between the two cavity sidewalls of the magnetohydrodynamic (MHD) installation, and ensure the necessary space and thickness for installation. This generally does not meet the installation and usage requirements for non-rectangular cavity devices or other small experimental equipment. Utility Model Content

[0004] In view of this, the purpose of this utility model is to propose a substrate transmission mechanism to solve the problem that existing transmission mechanisms are not suitable for non-rectangular cavity devices or other small experimental devices.

[0005] To achieve the above objectives, this utility model provides a substrate transfer mechanism, comprising a large chamber with a built-in lifting base and a small chamber connected thereto with an isolation gate valve. The small chamber contains a gripper whose sliding path passes through the valve port area of ​​the isolation gate valve. A linear drive mechanism is fixedly mounted on the outer wall of the small chamber, and the actuator of the linear drive mechanism is connected to the gripper via a transmission connection. When the isolation gate valve is opened, the linear drive mechanism can drive the gripper to move horizontally to directly above the base in the large chamber. The base is equipped with a vertically lifting section, and the working stroke of the lifting section can push the substrate upwards from the gripper in the bearing position to the working plane.

[0006] In some alternative embodiments, the gripper includes a crossbeam connected to a direct drive mechanism, with a left fork arm fixed at one end and a right fork arm fixed at the other end. The bottom of the left and right fork arms are respectively provided with support plates for supporting the substrate.

[0007] In some optional embodiments, the linear drive mechanism includes a mounting ring fixed to the side wall of the small chamber, an outer rod fixedly connected to the side of the mounting ring away from the small chamber, and an inner rod slidably sleeved inside the outer rod; one end of the inner rod passes through the mounting ring and the side wall of the small chamber and is connected to the gripper, and the other end extends into the outer rod; the outer rod is provided with a magnetic coupling transmission assembly, which drives the inner rod to move axially along the outer rod through electromagnetic action, thereby moving the gripper horizontally to directly above the base in the large chamber.

[0008] In some optional embodiments, the magnetic coupling transmission assembly includes two sets of support frames mounted on the outer rod, with a lead screw rotatably connected between the two sets of support frames. One set of support frames is equipped with a drive motor that drives the lead screw to rotate. A slider is screwed onto the lead screw, and a limiting frame is provided on the lower side of the slider to restrict its rotation with the lead screw. The limiting frame is slidably sleeved on the outer rod. The slider is connected to the inner rod through a magnetic coupling connection assembly. When the drive motor drives the lead screw to rotate, the slider drives the inner rod to move linearly.

[0009] In some alternative embodiments, the lifting unit includes an electrically operated telescopic rod fixed to the bottom of the large chamber, with its top actuating end connected to the bottom of the base.

[0010] As can be seen from the above, the transmission mechanism of this patent adopts a compact design of magnetic coupling transmission components and symmetrical fork grippers, which is particularly suitable for the space constraints of small magnetron sputtering experimental equipment compared with traditional production line equipment. Through the coordinated control of the isolation gate valve and the linear drive mechanism, deployment can be completed by simply presetting the material pick-up and drop-off points on the side wall of the cavity, without modifying the main structure of the cavity, thus improving the compatibility and flexibility of experimental equipment modification. Attached Figure Description

[0011] To more clearly illustrate the technical solutions in one or more embodiments of this specification or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only one or more embodiments of this specification. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0012] Figure 1 This is a schematic diagram of the overall structure of this utility model;

[0013] Figure 2 This is a schematic diagram of the main structure of the magnetic coupling transmission assembly described in this utility model;

[0014] Figure 3 This is a top view of the magnetic coupling transmission assembly described in this utility model.

[0015] Figure 4 This is a schematic diagram of the clamping structure described in this utility model;

[0016] Figure 5 This is a schematic diagram of the internal structure of the large cavity described in this utility model.

[0017] The diagram is marked as follows:

[0018] 1. Linear drive mechanism; 11. Outer rod; 111. Inner rod; 12. Magnetic coupling transmission assembly; 121. Support frame; 122. Lead screw; 123. Motor; 124. Slider; 125. Limiting frame; 126. Magnetic coupling connection assembly; 13. Mounting ring; 14. Gripper; 141. Crossbeam; 142. Left fork arm; 143. Right fork arm; 144. Support plate; 2. Small chamber; 3. Isolation gate valve; 4. Large chamber; 5. Base; 51. Electric telescopic rod; 6. Base plate. Detailed Implementation

[0019] To make the objectives, technical solutions, and advantages of this utility model clearer, the present utility model will be further described in detail below with reference to specific embodiments and accompanying drawings.

[0020] It should be noted that, unless otherwise defined, the technical or scientific terms used in the embodiments of this utility model should have the ordinary meaning understood by one of ordinary skill in the art to which this disclosure pertains. The terms "first," "second," and similar terms used in this disclosure do not indicate any order, quantity, or importance, but are merely used to distinguish different components. Terms such as "comprising" or "including" mean that the element or object preceding the word encompasses the elements or objects listed following the word and their equivalents, without excluding other elements or objects. Terms such as "connected" or "linked" are not limited to physical or mechanical connections, but can include electrical connections, whether direct or indirect. Terms such as "upper," "lower," "left," and "right" are used only to indicate relative positional relationships; when the absolute position of the described object changes, the relative positional relationship may also change accordingly.

[0021] Please see Figures 1 to 5 As an embodiment of this utility model, a substrate transfer mechanism includes a large chamber 4 with a built-in lifting base 5 and a small chamber 2 connected to it and equipped with an isolation gate valve 3. The small chamber 2 is equipped with a gripper 14, the sliding path of which passes through the valve port area of ​​the isolation gate valve 3. A linear drive mechanism 1 is fixedly installed on the outer wall of the small chamber 2, and the execution end of the linear drive mechanism 1 is connected to the gripper 14 in a transmission manner. When the isolation gate valve 3 is opened, the linear drive mechanism 1 can drive the gripper 14 to move horizontally to the base 5 in the large chamber 4 directly above it. The base 5 is equipped with a vertically lifting part, and the working stroke of the lifting part can push the substrate 6 upward from the gripper 14 in the bearing position to the working plane.

[0022] In this embodiment, initially, the isolation gate valve 3 is closed, and the substrate 6 is manually placed into the gripper 14. When it is necessary to transfer to the large chamber 4, the linear drive mechanism 1 is activated, driving the gripper 14 through the open valve port of the isolation gate valve 3, and accurately transferring the substrate 6 to the top of the lifting platform 5 in the large chamber 4. At this time, the lifting part at the bottom of the lifting platform 5 is vertically lifted, so that the surface of the platform 5 contacts and lifts the substrate 6 upward. When the lifting height exceeds the support plate 144 of the gripper 14, the substrate 6 completely disengages from the gripper 14 and enters the working plane. After the transfer is completed, the lifting platform 5 is reset and lowered, the linear drive mechanism 1 reverses and drives the inner rod 111 to retract, driving the gripper 14 back to the small chamber 2 along the original path, and the isolation gate valve 3 is closed simultaneously.

[0023] Please see Figures 1 to 5 Optionally, the gripper 14 includes a crossbeam 141 connected to the direct drive mechanism. One end of the crossbeam 141 is fixed with a left fork arm 142 and the other end is fixed with a right fork arm 143. The bottom of the left fork arm 142 and the right fork arm 143 are respectively provided with support plates 144 for supporting the substrate 6.

[0024] The linear drive mechanism 1 includes a mounting ring 13 fixed to the side wall of the small chamber 2. An outer rod 11 is fixedly connected to the side of the mounting ring 13 away from the small chamber 2. An inner rod 111 is slidably sleeved inside the outer rod 11. One end of the inner rod 111 passes through the mounting ring 13 and the side wall of the small chamber 2 and is connected to the gripper 14. The other end extends into the outer rod 11. A magnetic coupling transmission assembly 12 is provided on the outer rod 11. The assembly drives the inner rod 111 to move axially along the outer rod 11 through electromagnetic action, thereby moving the gripper 14 horizontally to the position directly above the base 5 inside the large chamber 4.

[0025] When the linear drive mechanism 1 drives the crossbeam 141 to move along the horizontal axis, the left fork arm 142 and the right fork arm 143, which are fixed to both ends of the crossbeam 141, extend synchronously into the large chamber 4 until the substrate 6 is suspended directly above the lifting platform 5. At this time, the lifting part vertically lifts the platform 5, and the bottom surface of the substrate 6 contacts the surface of the platform 5 and continues to rise until it is freed from the constraint of the support plate 144 and enters the working plane. After the transmission is completed, the platform 5 descends and resets, the linear drive mechanism 1 pulls the crossbeam 141 in the opposite direction, and the gripper 14 retracts back into the small chamber 2 along the original path.

[0026] Please see Figures 1 to 5Optionally, the magnetic coupling transmission assembly 12 includes two sets of support frames 121 mounted on the outer rod 11. A lead screw 122 is rotatably arranged between the two sets of support frames 121. One set of support frames 121 is equipped with a drive motor 123 that drives the lead screw 122 to rotate. A slider 124 is screwed onto the lead screw 122. A limiting frame 125 is provided on the lower side of the slider 124 to restrict its rotation with the lead screw 122. The limiting frame 125 is slidably sleeved on the outer rod 11. The slider 124 is connected to the inner rod 111 through a magnetic coupling connection assembly 126. When the drive motor 123 drives the lead screw 122 to rotate, the slider 124 drives the inner rod 111 to move linearly.

[0027] When the drive motor 123 starts, it drives the lead screw 122 to rotate. The slider 124, which is screwed to the lead screw 122, is constrained by the limiting frame 125 fixed on the outer rod 11, forcing the slider 124 to move linearly along the axis of the lead screw 122. At this time, the magnetic coupler of the magnetic coupler assembly 126 fixed on the slider 124 and the magnetic coupler of the stator fixed at the end of the inner rod 111 generate electromagnetic coupling. The linear displacement of the slider 124 is converted into the synchronous axial movement of the inner rod 111 through non-contact magnetic force transmission. When the drive motor 123 rotates forward, the slider 124 moves along the lead screw 122 towards the small chamber 2, pushing the gripper 14 into the large chamber 4. When it rotates in reverse, it drives the inner rod 111 to retract.

[0028] Please see Figures 1 to 5 Optionally, the lifting unit includes an electric telescopic rod 51 fixed to the bottom of the large chamber 4, with its top actuating end connected to the bottom of the base 5.

[0029] Working principle: In the initial state of the substrate 6 transfer mechanism, the isolation gate valve 3 is closed to isolate the environment of the large and small chambers 2. The operator manually places the tray carrying the substrate 6 on the gripper 14 in the small chamber 2. When the transfer starts, the linear drive mechanism 1 drives the inner rod 111 to move axially through the magnetic coupling transmission component 12 in the outer rod 11, which drives the gripper 14 to pass through the valve port of the open isolation gate valve 3 and move the substrate 6 to the top of the lifting platform 5 of the large chamber 4. Subsequently, the electric telescopic rod 51 fixed to the bottom of the large chamber 4 vertically lifts the platform 5, so that the surface of the platform 5 contacts and lifts the substrate 6 upward. When the substrate 6 is lifted to the height where it is free from the constraint of the support plate 144 of the gripper 14, the gripper 14 retracts back into the small chamber 2 with the linear drive mechanism 1, and the isolation gate valve 3 closes synchronously to restore the pressure isolation between the chambers.

[0030] Those skilled in the art should understand that the discussion of any of the above embodiments is merely exemplary and is not intended to imply that the scope of this disclosure (including the claims) is limited to these examples; within the scope of this invention, the technical features of the above embodiments or different embodiments can also be combined, the steps can be implemented in any order, and there are many other variations of the different aspects of this invention as described above, which are not provided in the details for the sake of brevity.

[0031] The embodiments of this utility model are intended to cover all such substitutions, modifications, and variations that fall within the broad scope of the appended claims. Therefore, any omissions, modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this utility model should be included within the protection scope of this utility model.

Claims

1. A substrate transfer mechanism, comprising a large chamber (4) with a built-in lifting base (5) and a small chamber (2) connected thereto with an isolation gate valve (3), characterized in that: The small chamber (2) is provided with a gripper (14), the sliding path of which passes through the valve port area of ​​the isolation gate valve (3); a linear drive mechanism (1) is fixedly provided on the outer wall of the small chamber (2), and the execution end of the linear drive mechanism (1) is connected to the gripper (14) in a transmission manner; when the isolation gate valve (3) is opened, the linear drive mechanism (1) can drive the gripper (14) to move horizontally to the base (5) in the large chamber (4) directly above it. The base (5) is provided with a vertically lifting part, and the working stroke of the lifting part can push the substrate (6) from the gripper (14) in the bearing position upward to the working plane.

2. The substrate transmission mechanism according to claim 1, characterized in that, The gripper (14) includes a crossbeam (141) connected to the direct drive mechanism. One end of the crossbeam (141) is fixed with a left fork arm (142), and the other end is fixed with a right fork arm (143). The bottom of the left fork arm (142) and the right fork arm (143) are respectively provided with support plates (144) for supporting the substrate (6).

3. The substrate transmission mechanism according to claim 2, characterized in that, The linear drive mechanism (1) includes a mounting ring (13) fixed to the side wall of the small chamber (2). An outer rod (11) is fixedly connected to the side of the mounting ring (13) away from the small chamber (2). An inner rod (111) is slidably sleeved inside the outer rod (11). One end of the inner rod (111) passes through the mounting ring (13) and the side wall of the small chamber (2) and is connected to the gripper (14). The other end extends into the outer rod (11). A magnetic coupling transmission assembly (12) is provided on the outer rod (11), which drives the inner rod (111) to move axially along the outer rod (11) through electromagnetic action, thereby moving the gripper (14) horizontally to the base (5) directly above the large chamber (4).

4. The substrate transmission mechanism according to claim 3, characterized in that, The magnetic coupling transmission assembly (12) includes two sets of support frames (121) mounted on the outer rod (11). A lead screw (122) is rotatably arranged between the two sets of support frames (121). One set of support frames (121) is equipped with a drive motor (123) for driving the lead screw (122) to rotate. A slider (124) is screwed onto the lead screw (122). A limiting frame (125) is provided on the lower side of the slider (124) to restrict its rotation with the lead screw (122). The limiting frame (125) is slidably sleeved on the outer rod (11). The slider (124) is connected to the inner rod (111) through a magnetic coupling connection assembly (126). When the drive motor (123) drives the lead screw (122) to rotate, the slider (124) drives the inner rod (111) to move linearly.

5. The substrate transmission mechanism according to claim 1, characterized in that, The lifting unit includes an electric telescopic rod (51) fixed at the bottom of the large chamber (4), with its top actuating end connected to the bottom of the base (5).

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