Visualizing fluid path observation window structure for semiconductor metrology equipment

Abstract

The utility model relates to semiconductor measuring equipment technical field, and disclose a kind of visual liquid path observation window structure for semiconductor measuring equipment, including outer interface, the surface center of outer interface is provided for installation mounting groove, the inside mounting frame of mounting groove, the surface fixed mounting of frame is used for the connecting bolt of connection, the cooperation of the positioning column of ring support plate surface and outer connecting ring, high transparent test mirror and the quick installation of other components are realized, operator only needs to install along positioning column with outer connecting ring, can quickly and accurately position each test mirror, ensure the accuracy of each component installation position, avoid the influence observation window performance due to installation deviation, sealing ring is encircled in the connecting place of each test mirror, prevent liquid or gas permeate between each test mirror, ensure the sealing between the multilayer test mirror structure inside observation window, prevent impurities from entering and affect observation effect, avoid test mirror damage due to gas or liquid permeation.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor measurement equipment technology, specifically to a visualization liquid path observation window structure for semiconductor measurement equipment. Background Technology

[0002] In the field of semiconductor metrology equipment, accurate monitoring of the liquid circuit system is crucial. As semiconductor manufacturing processes continue to develop towards refinement and high integration, the visualization requirements for metrology equipment are becoming increasingly stringent. In ship unloading machine scenarios, a large number of semiconductor metrology equipment need to be frequently loaded, unloaded, and transferred, which brings many challenges to the equipment's liquid circuit observation window.

[0003] Traditional visualization liquid circuit observation window structures are insufficient in terms of ease of installation. In the operating environment of ship unloaders, the equipment installation time is tight, and the installation process of each component of the traditional observation window is complicated, especially the installation of multi-layer test mirrors, which is difficult to quickly position, resulting in low installation efficiency and delaying the overall equipment deployment schedule. Moreover, if there is any deviation in the position of the components during the installation process, it can easily affect the sealing of the observation window and the observation effect, thereby affecting the accuracy of semiconductor measurement.

[0004] Sealing is also a major pain point for traditional observation windows. When the ship unloader is working, there may be bumps and vibrations, which will affect the sealing structure of the traditional observation window. If the sealing between the multiple layers of test mirrors inside the observation window is not good, external impurities can easily enter during equipment transfer, interfering with liquid path observation. At the same time, chemical reagents in the liquid path may also penetrate and corrode the test mirrors, shortening the service life of the observation window and increasing maintenance costs.

[0005] To address the aforementioned issues, we propose a visualization liquid path observation window structure for semiconductor measurement equipment. Utility Model Content

[0006] To address the shortcomings of existing technologies, this invention provides a visualization liquid path observation window structure for semiconductor measurement equipment, thus solving the aforementioned problems.

[0007] To achieve the above-mentioned objectives, this utility model provides the following technical solution: a visual liquid circuit observation window structure for semiconductor measurement equipment, including an external interface, a mounting groove for installation at the center of the surface of the external interface, an internal mounting frame in the mounting groove, a connecting bolt for connection fixedly installed on the outer side of the surface of the frame, the lower end of the connecting bolt penetrating the surface of the frame and connecting to the external interface, and further including:

[0008] The mounting component, installed at the center of the frame, is a structure used to secure the external connecting rings.

[0009] Preferably, a sealing groove for installation is provided at the connection between the external interface and the frame, and a sealing gasket for sealing is installed inside the sealing groove.

[0010] Preferably, a circular groove is provided at the center of the frame, a closed ring is provided in the upper half of the circular groove, the closed ring is flush with the frame, a scratch-resistant audition lens is provided at the lower end of the closed ring, a flexible audition lens is provided inside the circular groove corresponding to the lower end of the scratch-resistant audition lens, and a high-transparency audition lens is provided at the lower end of the flexible audition lens.

[0011] Preferably, the mounting assembly includes an outer connecting ring, fixing bolts, and a ring support plate. The outer connecting ring is fixedly installed on the outer side surface of the scratch-resistant trial lens, the flexible trial lens, and the high-transparency trial lens. The surface of the outer connecting ring is threaded with multiple fixing bolts for fixing. The lower end of the fixing bolt passes through multiple outer connecting rings and is connected to the ring support plate.

[0012] Preferably, the ring support plate is fixedly installed at the bottom of the inner end of the circular groove, and a plurality of LED lights for lighting are fixedly installed on the inner end surface of the ring support plate.

[0013] Preferably, a plurality of positioning posts for positioning are fixedly installed on the upper surface of the ring support plate, and positioning holes for positioning are installed on the surface of the outer connecting ring corresponding to the positions of the positioning posts.

[0014] Preferably, a sealing ring for sealing is installed between the plurality of outer connecting rings.

[0015] Compared with the prior art, this utility model provides a visualization liquid path observation window structure for semiconductor measurement equipment, which has the following beneficial effects:

[0016] 1. This semiconductor measurement equipment uses a visual liquid path observation window structure. The positioning posts on the surface of the ring support plate cooperate with the outer connecting ring to achieve rapid installation of high-transparency test lenses and other components. Operators only need to install the outer connecting ring along the positioning posts to quickly and accurately position each test lens, greatly improving installation efficiency. At the same time, it also ensures the accuracy of the installation position of each component, avoiding the impact of installation deviation on the performance of the observation window. The sealing ring surrounds the connection of each test lens to prevent liquid or gas from penetrating between the test lenses, ensuring the sealing between the multi-layer test lens structure inside the observation window, preventing impurities from entering and affecting the observation effect, and avoiding damage to the test lenses due to gas or liquid penetration.

[0017] 2. This semiconductor measurement device uses a visualization liquid path observation window structure. The high-transparency test lens is located at the innermost part, closest to the liquid path. Its high transparency allows for clear observation of minute details inside the liquid path, providing a precise observation field for semiconductor measurement and helping to improve the accuracy and reliability of the measurement. The good flexibility of the flexible test lens can effectively buffer the pressure impact generated in the liquid path, protect the high-transparency test lens, reduce the risk of damage to the high-transparency test lens caused by pressure impact, and ensure long-term stable observation effect. The scratch-resistant test lens is located at the outermost part to prevent damage to the surface of the internal test lens due to accidental collisions or scratches during daily use or equipment maintenance. When the light inside the liquid path is dim and affects observation, the LED light can be turned on through the equipment control system to provide sufficient illumination for the observation area. Attached Figure Description

[0018] Figure 1 This is a schematic diagram of the structure of this utility model;

[0019] Figure 2 This is a partial cross-sectional view of the present invention;

[0020] Figure 3 This is a schematic diagram of the installation components of this utility model.

[0021] In the diagram: 1. External interface; 2. Frame; 3. Connecting bolts; 4. Scratch-resistant test lens; 5. Mounting groove; 6. Sealing groove; 7. Sealing gasket; 8. Ring support plate; 9. LED light; 10. Flexible test lens; 11. High-transparency test lens; 12. Positioning post; 13. External connecting ring; 14. Fixing bolts; 15. Sealing ring; 16. Closing ring. Detailed Implementation

[0022] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0023] Please see Figure 1-3 A visualization liquid circuit observation window structure for semiconductor measurement equipment includes an external interface 1, a mounting groove 5 for installation at the center of the surface of the external interface 1, an internal mounting frame 2, a connecting bolt 3 for connection fixedly installed on the outer side of the surface of the frame 2, the lower end of the connecting bolt 3 penetrating the surface of the frame 2 and connecting to the external interface 1, and also includes a mounting component, a structure installed at the center of the frame 2 for fixing an external connecting ring 13, the frame 2 is installed inside the mounting groove 5, and the frame 2 is fixed to the external interface 1 by the connecting bolt 3.

[0024] Furthermore, a sealing groove 6 for installation is provided at the connection between the external interface 1 and the frame 2. A sealing gasket 7 for sealing is installed inside the sealing groove 6. The sealing gasket 7 prevents liquid in the liquid circuit from leaking from the connection and ensures the sealing of the entire observation window and the connection part of the equipment liquid circuit.

[0025] Furthermore, a circular groove is set in the center of the frame 2, and a closed ring 16 is set in the upper half of the circular groove. The closed ring 16 is flush with the frame 2. A scratch-resistant test lens 4 is set at the lower end of the closed ring 16. A flexible test lens 10 is set inside the circular groove corresponding to the lower end of the scratch-resistant test lens 4. A high-transparency test lens 11 is set at the lower end of the flexible test lens 10. The high-transparency test lens 11 is located at the innermost position close to the liquid path. It has high transparency and can clearly present the tiny details inside the liquid path, providing the operator with a basic field of view. The flexible test lens 10 has good flexibility and protects the high-transparency test lens 11 from the pressure impact generated in the liquid path. The scratch-resistant test lens 4 is located at the outermost position and can effectively prevent damage to the surface of the internal test lens due to accidental collision or scratch during daily use or equipment maintenance, ensuring a long-term stable observation effect. The three layers of test lenses work together.

[0026] Furthermore, the mounting components include an outer connecting ring 13, fixing bolts 14, and a ring support plate 8. The outer surface of the scratch-resistant test mirror 4, the flexible test mirror 10, and the high-transparency test mirror 11 are all fixedly mounted with an outer connecting ring 13. The surface of the outer connecting ring 13 is threaded with multiple fixing bolts 14 for fixing. The lower end of the fixing bolt 14 passes through multiple outer connecting rings 13 and connects to the ring support plate 8. The multiple outer connecting rings 13 and the ring support plate 8 are fixedly connected by the fixing bolts 14.

[0027] Furthermore, the ring support plate 8 is fixedly installed at the bottom of the inner end of the circular groove, and multiple LED lights 9 for lighting are fixedly installed on the inner end surface of the ring support plate 8. The LED lights 9 provide lighting assistance when the visibility is low.

[0028] Furthermore, multiple positioning posts 12 for positioning are fixedly installed on the upper surface of the ring support plate 8, and positioning holes for positioning are installed on the surface of the outer connecting ring 13 corresponding to the positions of the positioning posts 12. The positioning posts 13 position the multiple outer connecting rings 13.

[0029] Furthermore, sealing rings 15 are installed between the multiple outer connecting rings 13 for sealing. The sealing rings 15 surround the connection of each test lens to prevent liquid or gas from penetrating between the test lenses and ensure the airtightness between the multi-layer test lens structure inside the observation window.

[0030] Structural Description:

[0031] 1. External Interface: The external interface is a key structure for connecting the visual liquid circuit observation window of semiconductor measurement equipment to external equipment or air sources. It has a specific shape and the interface surface has suitable connection textures or slots to tightly connect with external pipes, air pressure regulating devices, etc. The external interface is firmly installed in a specific position of the frame through welding, threaded connection or other suitable fixing methods. It is usually the part of the frame that extends to the outside and is easy to connect with external equipment, becoming an important channel for the exchange of matter or energy between the observation window and the outside world.

[0032] 2. Frame: The frame is the main supporting structure of the observation window. It adopts a rectangular frame shape and is made of corrosion-resistant metal materials such as stainless steel or titanium alloy. The four sides of the frame are solid cuboids, which have sufficient strength and rigidity to withstand the internal pressure of the liquid circuit and possible external collisions and impacts. The inner edge of the frame is finely polished to ensure a tight fit with the scratch-resistant, flexible, and high-transparency test mirrors. The outer edge has multiple mounting holes for connecting bolts, protective cover mounting clips, and other structures. It plays a core role in the entire observation window structure, connecting and supporting it.

[0033] 3. Connecting Bolts: The connecting bolts are cylindrical with threads. They are mainly used to firmly connect the frame to the equipment's liquid pipeline. Through the pre-drilled mounting holes on the frame and the corresponding threaded holes on the equipment's liquid pipeline adapter interface, use a wrench or other tools to screw in the connecting bolts and tighten them gradually to make the frame and the equipment's liquid pipeline tightly fixed together. This ensures a stable connection between the entire observation window structure and the equipment's liquid pipeline and prevents the observation window from becoming loose or displaced during equipment operation.

[0034] 4. Scratch-resistant audition lens: The scratch-resistant audition lens is located on the outermost side of the observation window. It is rectangular and flat, with dimensions that precisely match the corresponding space inside the frame. Its thickness is determined according to actual protection needs and is generally moderate. The lens is made of materials with high hardness and wear resistance, such as special tempered glass or high-strength transparent plastic. It can effectively prevent damage to the surface of the internal audition lens due to accidental collisions or scratches during daily use or equipment maintenance. It provides reliable outer protection for the internal flexible and highly transparent audition lens, ensuring long-term stable observation results.

[0035] 5. Mounting groove: The mounting groove is located at the center of the surface of the equipment's liquid pipeline. It is a ring-shaped groove structure with an inner diameter that precisely matches the dimensions of the bottom edge of the frame. The depth and width are carefully designed so that the bottom edge of the frame can be precisely embedded in the mounting groove when the observation window is installed. This plays an important role in the initial positioning of the frame, ensuring the accuracy of the observation window's installation position and providing a good foundation for further fixing the frame with connecting bolts.

[0036] 6. Sealing Groove: The sealing groove is located at the connection between the equipment's liquid circuit pipeline and the frame. It is set around the connection and has a ring-shaped groove structure. Its depth and width are designed according to the size of the sealing gasket and the sealing requirements. It is used to install the sealing gasket. When the frame is installed on the equipment's liquid circuit pipeline by connecting bolts, the sealing gasket in the sealing groove is squeezed between the two to fill the gap and prevent the liquid in the liquid circuit from leaking from the connection. This ensures the sealing of the entire observation window and the connection part of the equipment's liquid circuit.

[0037] 7. Sealing gasket: The sealing gasket has a ring structure and is made of chemically resistant and highly elastic rubber or similar materials. The sealing gasket is installed in the sealing groove. When the frame is connected to the equipment's liquid pipeline, the sealing gasket is squeezed and deformed, tightly fitting the connection between the equipment's liquid pipeline and the frame, effectively preventing liquid leakage and ensuring the sealing of the connection between the observation window and the equipment's liquid pipeline, preventing adverse effects on equipment operation and the performance of the observation window due to liquid leakage.

[0038] 8. Ring support plate: The ring support plate is a ring-shaped plate structure, which is fixedly installed at the bottom of the central circular groove of the frame. Its material is usually high-strength metal or engineering plastic with sufficient load-bearing capacity. The main function of the ring support plate is to provide support and fixation foundation for multi-layer test lens structures such as anti-scratch test lens, flexible test lens, and high-transparency test lens, as well as external connecting rings. At the same time, its inner end surface is used to fix and install multiple LED lights, playing a key supporting and connecting role in the observation window structure.

[0039] 9. LED lights: LED lights are small lighting components. Multiple LED lights are evenly fixed on the surface of the inner end of the ring support plate. These LED lights are low-power, high-brightness types, such as common surface-mount LEDs. When the light inside the liquid circuit is dim and affects observation, the LED lights can be turned on through the equipment control system to provide sufficient lighting for the observation area, illuminate the inside of the liquid circuit, and enable the operator to observe the tiny details in the liquid circuit more clearly, enhance the observation effect, and improve the accuracy of semiconductor measurement work.

[0040] 10. Flexible Audition Lens: The flexible audition lens is located between the scratch-resistant audition lens and the high-transparency audition lens. It has a rectangular sheet structure, and its size matches the corresponding space inside the frame and other audition lenses. Its thickness is determined according to the actual buffering needs. Generally, it has good flexibility within a certain range. The audition lens is made of a flexible transparent polymer material, such as specially formulated silicone or polyurethane, which can effectively buffer the pressure impact generated in the buffer circuit, protect the high-transparency audition lens on the inside, reduce the risk of damage to the high-transparency audition lens caused by pressure impact, and ensure long-term stable observation effect.

[0041] 11. High-transparency test lens: The high-transparency test lens is located at the innermost part of the observation window, close to the liquid path. It is rectangular and flat, with dimensions that precisely match the corresponding space inside the frame. Its thickness is determined according to the actual observation needs and compressive strength requirements, and is generally within a suitable range. The test lens is made of optical glass or other highly transparent materials with extremely high transparency, which can clearly present the tiny details inside the liquid path, providing operators with a basic field of view and meeting the strict requirements of semiconductor measurement equipment for high-precision observation.

[0042] 12. Positioning Posts: The positioning posts are columnar structures that are fixedly installed on the upper surface of the ring support plate. The number, position, and height of the positioning posts are designed according to the positioning requirements of the outer connecting ring. The top shape is usually designed to facilitate the accurate insertion of the outer connecting ring, such as hemispherical or conical. When installing components such as anti-scratch test mirrors, flexible test mirrors, and high-transparency test mirrors, the outer connecting ring is installed along the positioning posts, which can quickly and accurately position each test mirror, greatly improving installation efficiency. At the same time, it ensures the accuracy of the installation position of each component and avoids affecting the performance of the observation window due to installation deviation.

[0043] 13. External connecting ring: The external connecting ring has a ring structure and is fixedly installed on the outer surface of the anti-scratch test lens, flexible test lens, and high transparency test lens respectively. The material of the external connecting ring is usually selected to be metal or high-strength plastic that is compatible with the frame, which has a certain strength and rigidity. Its surface has multiple threaded holes for connecting with the fixing bolts. The external connecting ring also has positioning holes corresponding to the positions of the positioning pins. During installation, the positioning pins and positioning holes are matched to achieve quick positioning and installation of each test lens. At the same time, the fixing bolts are connected to the ring support plate to firmly fix each test lens in the circular groove of the frame.

[0044] 14. Fixing Bolts: The fixing bolts are cylindrical with threads. They are mainly used to connect and fix the outer connecting ring to the ring support plate. The fixing bolts are screwed in through the threaded holes on the surface of the outer connecting ring. The lower end of the bolts passes through the corresponding threaded holes on the outer connecting ring and the ring support plate. The fixing bolts are tightened gradually to ensure that the scratch-resistant trial lens, flexible trial lens, and high-transparency trial lens are tightly fixed to the ring support plate through the outer connecting ring, thus ensuring the stability of the entire multi-layer trial lens structure.

[0045] 15. Sealing Ring: The sealing ring is a ring-shaped structure, made of rubber or similar materials that are chemically resistant and have good sealing performance. The sealing ring is installed around the connection of each test lens (scratch-resistant test lens, flexible test lens, high transparency test lens) to prevent liquid or gas from penetrating between the test lenses, ensuring the sealing between the multi-layer test lens structure inside the observation window, maintaining a good observation environment, preventing impurities from entering and affecting the observation effect, and avoiding damage to the test lens due to gas or liquid penetration;

[0046] 16. Sealing Ring: The sealing ring has a ring structure and is installed at the top opening of the central circular groove of the frame. It is tightly connected to the frame and is usually made of metal or high-strength plastic that is compatible with the frame. It has a certain strength and sealing performance. The main function of the sealing ring is to seal and protect the multi-layered audition lens structure such as the anti-scratch audition lens, flexible audition lens, and high-transparency audition lens, as well as other internal components inside the circular groove of the frame, to prevent external impurities from entering. At the same time, it enhances the stability of the circular groove structure of the frame to a certain extent.

[0047] Working principle: The frame 2 is installed in the mounting groove 5 set at the center of the surface of the equipment liquid pipeline 1. The mounting groove 5 serves to initially position the frame 2 and ensure the accuracy of the observation window installation position. The connecting bolt 3 passes through the frame 2 and connects to the equipment liquid pipeline 1 to further fix the frame 2 and ensure the stable connection between the entire observation window structure and the equipment liquid pipeline. At the connection between the equipment liquid pipeline 1 and the frame 2, a sealing groove 6 is set, and a sealing gasket 7 is installed in the sealing groove 6. When the frame 2 is installed on the equipment liquid pipeline 1 by the connecting bolt 3, the sealing gasket 7 is squeezed between the two to fill the gap and prevent the liquid in the liquid pipeline from leaking from the connection, ensuring the sealing of the entire observation window and the equipment liquid pipeline connection. The ring support plate 8 is fixedly installed at the bottom of the circular groove. The high transparency test lens 11 is installed inside the circular groove. The outer connecting ring 13 on the side of the high transparency test lens 11 is quickly installed along the positioning post 12 on the surface of the ring support 8. The sealing ring 15, flexible test lens 10, sealing ring 15, scratch-resistant test lens 4 and closing ring 16 are installed in sequence. A fixing bolt 14 is installed in the mounting hole on the surface of the sealing ring 16. The fixing bolt 14 passes through multiple test lenses and sealing rings 15 in sequence and connects to the ring support plate 8. The sealing rings 15 surround the connection of each test lens to prevent liquid or gas from seeping between the test lenses and ensure the sealing between the multi-layer test lens structure inside the observation window. The high-transparency test lens 11 is located on the innermost side near the liquid path. It has high transparency and can clearly present the tiny details inside the liquid path, providing the operator with a basic field of view. The flexible test lens 10 has good flexibility and protects the high-transparency test lens 11 from the pressure impact generated in the liquid path. The scratch-resistant test lens 4 is located on the outermost side and can effectively prevent damage to the surface of the internal test lens due to accidental collisions or scratches during daily use or equipment maintenance, ensuring a long-term stable observation effect. The three layers of test lenses work together to ensure the clarity and stability of the observation from different aspects. Multiple LED lights 9 are fixedly installed on the inner end surface of the ring support plate 8. When the light inside the liquid path is dim and affects the observation, the LED lights 9 can be turned on through the equipment control system.

[0048] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A visualization liquid path observation window structure for a semiconductor measurement device, comprising an external interface (1), a mounting groove (5) for mounting is provided at the center of the surface of the external interface (1), an internal mounting frame (2) of the mounting groove (5), a connecting bolt (3) for connection is fixedly mounted on the outer side of the surface of the frame (2), the lower end of the connecting bolt (3) penetrates the surface of the frame (2) and connects to the external interface (1), characterized in that, Also includes: The mounting component is installed at the center of the frame (2) and is a structure used to fix the external connecting ring (13).

2. The visualization liquid path observation window structure for a semiconductor measurement device according to claim 1, characterized in that: A sealing groove (6) for installation is provided at the connection between the external interface (1) and the frame (2), and a sealing gasket (7) for sealing is installed inside the sealing groove (6).

3. The visualization liquid path observation window structure for a semiconductor measurement device according to claim 1, characterized in that: A circular groove is provided in the center of the frame (2), and a closed ring (16) is provided in the upper half of the groove. The closed ring (16) is flush with the frame (2). A scratch-resistant trial lens (4) is provided at the lower end of the closed ring (16). A flexible trial lens (10) is provided inside the circular groove corresponding to the lower end of the scratch-resistant trial lens (4). A highly transparent trial lens (11) is provided at the lower end of the flexible trial lens (10).

4. The visualization liquid path observation window structure for a semiconductor measurement device according to claim 1, characterized in that: The mounting assembly includes an outer connecting ring (13), fixing bolts (14), and a ring support plate (8). The outer connecting ring (13) is fixedly installed on the outer side surface of the anti-scratch test lens (4), the flexible test lens (10), and the high transparency test lens (11). The surface of the outer connecting ring (13) is threaded with multiple fixing bolts (14) for fixing. The lower end of the fixing bolt (14) passes through multiple outer connecting rings (13) and is connected to the ring support plate (8).

5. The visualization liquid path observation window structure for a semiconductor measurement device according to claim 4, characterized in that: The ring support plate (8) is fixedly installed at the bottom of the inner end of the circular groove, and a number of LED lights (9) for lighting are fixedly installed on the inner end surface of the ring support plate (8).

6. The visualization liquid path observation window structure for a semiconductor measurement device according to claim 4, characterized in that: Multiple positioning posts (12) for positioning are fixedly installed on the upper surface of the ring support plate (8), and positioning holes for positioning are installed on the surface of the outer connecting ring (13) corresponding to the positions of the positioning posts (12).

7. The visualization liquid path observation window structure for a semiconductor measurement device according to claim 4, characterized in that: A sealing ring (15) for sealing is installed between the plurality of external connecting rings (13).

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