An ultraviolet lithography lens easy to mass-produce
By employing a spherical lens design for ultraviolet lithography lenses, the manufacturing process is simplified, costs are reduced, mass production is easily achieved, and large-area exposure requirements are met while ensuring high resolution and imaging quality.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- TIANFU XINGLONG LAKE LAB
- Filing Date
- 2025-05-19
- Publication Date
- 2026-05-29
AI Technical Summary
Existing ultraviolet lithography lenses have complex structures, a large number of lenses, and are difficult to assemble and adjust, resulting in high manufacturing costs and making mass production difficult.
It adopts a spherical lens design with 19 lenses. Both the front and rear lens groups use different types of spherical lenses, including convex lenses, meniscus lenses, and biconvex lenses. The lenses have a constant curvature from the center to the edge, which simplifies the manufacturing process.
The manufacturing cost of the lens was reduced, making it easy to mass-produce while ensuring high resolution and image quality, meeting the needs of large-area exposure. The number of lens elements was reduced, which reduced the cumulative tolerance of lens assembly and ensured the imaging effect.
Smart Images
Figure CN224303928U_ABST
Abstract
Description
Technical Field
[0001] This application relates to the field of light imaging technology, specifically to an ultraviolet lithography lens that is easy to mass-produce. Background Technology
[0002] Ultraviolet (UV) lithography lenses are primarily used to transfer patterns from a chip onto a photosensitive photoresist layer for subsequent chemical etching or deposition steps. They are a key component of the photolithography process in semiconductor manufacturing, playing a crucial role in the success of chip production.
[0003] In existing technologies, lithography lenses have complex structures, require a large number of lenses to ensure performance, are difficult to assemble and adjust, have strict tolerances, and mostly use aspherical lenses, resulting in high manufacturing costs and making mass production difficult.
[0004] Therefore, there is an urgent need for a photolithography lens that, while ensuring the performance, has a moderate number of lenses, reduces the difficulty of processing, relaxes the assembly tolerance, and thus reduces the cost and makes it easy to mass-produce. Utility Model Content
[0005] This application provides an ultraviolet lithography lens that is easy to mass-produce, which can solve the above-mentioned technical problems.
[0006] In a first aspect, embodiments of this application provide an ultraviolet lithography lens that is easy to mass-produce, including a front lens group, an aperture, and a rear lens group, which are arranged sequentially from the object side to the image side.
[0007] The front lens group includes a first lens, a second lens, a third lens, a fourth lens, a fifth lens, a sixth lens, a seventh lens, and an eighth lens. The first lens is a convex lens, the second lens is a meniscus lens, the third lens is a biconvex lens, the fourth lens is a biconcave lens, the fifth lens is a biconcave lens, the sixth lens is a meniscus lens, the seventh lens is a meniscus lens, and the eighth lens is a biconvex lens.
[0008] The rear lens group includes the ninth, tenth, eleventh, twelfth, thirteenth, fourteenth, fifteenth, sixteenth, seventeenth, eighteenth, and nineteenth lenses. The ninth lens is a biconvex lens, the tenth lens is a biconvex lens, the eleventh lens is a biconcave lens, the twelfth lens is a biconcave lens, the thirteenth lens is a meniscus lens, the fourteenth lens is a biconvex lens, the fifteenth lens is a biconvex lens, the sixteenth lens is a biconvex lens, the seventeenth lens is a biconvex lens, the eighteenth lens is a biconcave lens, and the nineteenth lens is a biconvex lens.
[0009] According to the aforementioned embodiments of the first aspect of this application, all of the lenses described above are spherical lenses.
[0010] According to any of the foregoing embodiments of the first aspect of this application, the object side of the first lens is a plane;
[0011] The object side of the second, third, eighth, ninth, tenth, fourteenth, fifteenth, sixteenth, seventeenth, and nineteenth lenses is convex, and
[0012] The object side of the fourth, fifth, sixth, seventh, eleventh, twelfth, thirteenth, and eighteenth lenses is concave.
[0013] The image side of the first, third, sixth, seventh, eighth, ninth, tenth, thirteenth, fourteenth, fifteenth, sixteenth, seventeenth, and nineteenth lenses is convex.
[0014] The second, fourth, fifth, eleventh, twelfth, and eighteenth lenses all have concave images.
[0015] According to any of the foregoing embodiments of the first aspect of this application, the plane, image side: R (radius of curvature) is -150.4712777±5mm;
[0016] The object side of the second lens has a radius of 83.2055935±5mm, and the image side has a radius of 308.8522277±5mm.
[0017] The object side of the third lens has a radius of 1156.292874 ± 5 mm, and the image side has a radius of -313.9773069 ± 5 mm.
[0018] The fourth lens has an object-side radius (R) of -316.2786071±5mm and an image-side radius (R) of 49.51114022±5mm.
[0019] The object side of the fifth lens has a radius of -139.9860985±5mm, and the image side has a radius of 94.07377904±5mm.
[0020] The object side of the sixth lens has a radius of -53.77439381±5mm, and the image side has a radius of -69.71613164±5mm.
[0021] The object side of the seventh lens has a radius of -499.6324009±5mm, and the image side has a radius of -134.5978306±5mm.
[0022] The object side of the eighth lens has a radius of 296.7813235±5mm, and the image side has a radius of -380.5963906±5mm.
[0023] The object side of the ninth lens has a radius of 286.4457548 ± 5 mm, and the image side has a radius of -280.760153 ± 5 mm.
[0024] The object side of the tenth lens has a radius of 107.6153356 ± 5 mm, and the image side has a radius of -211.2803328 ± 5 mm.
[0025] The object side of the eleventh lens has a radius of -167.1876994±5mm, and the image side has a radius of 65.43121446±5mm.
[0026] The object side of the twelfth lens has a radius of -68.72730588±5mm, and the image side has a radius of 420.8948069±5mm.
[0027] The object side of the thirteenth lens has a radius of -254.8399644±5mm, and the image side has a radius of -99.7696204±5mm.
[0028] The object side of the fourteenth lens has a radius of 249.8538573±5mm, and the image side has a radius of -204.4736079±5mm.
[0029] The object side of the fifteenth lens has a radius of 184.0190303±5mm, and the image side has a radius of -429.0043941±5mm.
[0030] The object side of the sixteenth lens has a radius of 132.9263656 ± 5 mm, and the image side has a radius of -392.2447498 ± 5 mm.
[0031] The object side of the seventeenth lens has a radius of 86.29103373±5mm, and the image side has a radius of -260.4553726±5mm.
[0032] The object side of the eighteenth lens has a radius of -196.4251341±5mm, and the image side has a radius of 50±5mm.
[0033] The object side of the nineteenth lens has a radius of 55.68186867±5mm, and the image side has a radius of -539.0243422±5mm.
[0034] According to any of the foregoing embodiments of the first aspect of this application, the center thickness of the first lens is: 23.6221213±5mm;
[0035] The center thickness of the second lens is 26.40527943±5mm;
[0036] The center thickness of the third lens is 12.74662844±5mm;
[0037] The center thickness of the fourth lens is 10.5 ± 5 mm;
[0038] The center thickness of the fifth lens is 10.5 ± 5 mm;
[0039] The center thickness of the sixth lens is 19.98893621±5mm;
[0040] The center thickness of the seventh lens is 14.24027362±5mm;
[0041] The center thickness of the eighth lens is 14.6541334±5mm;
[0042] The center thickness of the ninth lens is 14.40783194±5mm;
[0043] The center thickness of the tenth lens is 17.63701713±5mm;
[0044] The center thickness of the eleventh lens is 10.5 ± 5 mm;
[0045] The center thickness of the twelfth lens is 10.5 ± 5 mm;
[0046] The center thickness of the thirteenth lens is 14.87311523±5mm;
[0047] The center thickness of the fourteenth lens is 18.25816129±5mm;
[0048] The center thickness of the fifteenth lens is 18.38908153±5mm;
[0049] The center thickness of the sixteenth lens is 20.93749343±5mm;
[0050] The center thickness of the seventeenth lens is 23.2010303±5mm;
[0051] The center thickness of the eighteenth lens is 10.5 ± 5 mm;
[0052] The center thickness of the nineteenth lens is 25±5mm.
[0053] According to any of the foregoing embodiments of the first aspect of this application, the refractive index n1 of the first lens is: 1.58≤n1≤1.60; the refractive index of the second lens is: 1.48≤n2≤1.50;
[0054] The refractive index of the third lens is: 1.48≤n3≤1.50;
[0055] The refractive index of the fourth lens is: 1.58≤n4≤1.60;
[0056] The refractive index of the fifth lens is: 1.58≤n5≤1.60;
[0057] The refractive index of the sixth lens is: 1.58≤n6≤1.60;
[0058] The refractive index of the seventh lens is: 1.58≤n7≤1.60;
[0059] The refractive index of the eighth lens is: 1.48 ≤ n8 ≤ 1.50;
[0060] The refractive index of the ninth lens is: 1.48≤n9≤1.50;
[0061] The refractive index of the tenth lens is: 1.48≤n 10 ≤1.50;
[0062] The refractive index of the eleventh lens is: 1.58≤n 11 ≤1.60;
[0063] The refractive index of the twelfth lens is: 1.48≤n 12 ≤1.50;
[0064] The refractive index of the thirteenth lens is: 1.48≤n 13 ≤1.50;
[0065] The refractive index of the fourteenth lens is: 1.48≤n 14 ≤1.50;
[0066] The refractive index of the fifteenth lens is: 1.48≤n 15 ≤1.50;
[0067] The refractive index of the sixteenth lens is: 1.48≤n 16 ≤1.50;
[0068] The refractive index of the seventeenth lens is: 1.48≤n 17 ≤1.50;
[0069] The refractive index of the eighteenth lens is: 1.58≤n 18 ≤1.60;
[0070] The refractive index of the nineteenth lens is: 1.48≤n19≤1.50.
[0071] The ultraviolet lithography lens of this application, which is easy to mass-produce, uses spherical lenses, has mature manufacturing technology, and a simple structure. It uses only 19 lenses, a relatively small number, resulting in lower cost and ease of mass production. Furthermore, it meets the requirements of large area, high numerical aperture, high resolution, low distortion, and low field curvature (5x magnification) 5X imaging, achieving an exposure field that satisfies large-area exposure. With a numerical aperture of 0.35, it can achieve a resolution of 0.7μm, effectively applicable to 700nm lithography processing. While ensuring image quality, it effectively reduces costs. Simultaneously, the reasonable optical power, curvature, and number of lenses effectively reduce cumulative tolerances in lens assembly, ensuring imaging performance. Attached Figure Description
[0072] Figure 1 This is a schematic diagram of the structure of an easily mass-producible ultraviolet lithography lens according to an embodiment of this application.
[0073] Figure 2 Aberration curves of an easily mass-producible ultraviolet lithography lens according to an embodiment of this application;
[0074] Figure 3 MTF plot of an easily mass-producible ultraviolet lithography lens according to an embodiment of this application at 1300 lp / mm;
[0075] Figure 4 Wavefront aberration (WTF) distribution of an easily mass-producible ultraviolet lithography lens according to an embodiment of this application;
[0076] Figure 5 This is a distortion plane distribution diagram of an easily mass-producible ultraviolet lithography lens according to an embodiment of this application.
[0077] Figure 6 A field curvature diagram of an easily mass-producible ultraviolet lithography lens according to an embodiment of this application;
[0078] Figure 7 An astigmatism image of an easily mass-producible ultraviolet lithography lens according to an embodiment of this application.
[0079] Figure label:
[0080] 1-First lens, 2-Second lens, 3-Third lens, 4-Fourth lens, 5-Fifth lens, 6-Sixth lens, 7-Seventh lens, 8-Eighth lens, 9-Ninth lens, 10-Tenth lens, 11-Eleventh lens, 12-Twelfth lens, 13-Thirteenth lens, 14-Fourteenth lens, 15-Fifteenth lens, 16-Sixteenth lens, 17-Seventeenth lens, 18-Eighteenth lens, 19-Nineteenth lens. Detailed Implementation
[0081] The features and exemplary embodiments of various aspects of this application will be described in detail below. To make the objectives, technical solutions, and advantages of this application clearer, the application will be further described in detail below with reference to the accompanying drawings and specific embodiments. It should be understood that the specific embodiments described herein are only intended to explain this application and not to limit it. For those skilled in the art, this application can be implemented without some of these specific details. The following description of the embodiments is merely to provide a better understanding of this application by illustrating examples.
[0082] Firstly, such as Figure 1 As shown in the illustration, this application provides an easily mass-producible ultraviolet lithography lens, including a front lens group, an aperture, and a rear lens group, which are arranged sequentially from the object side to the image side. This lithography lens transfers the pattern on the chip onto a photosensitive photoresist layer for subsequent chemical etching or deposition steps.
[0083] In this embodiment, to reduce manufacturing costs, all the lenses are spherical lenses. A spherical lens has a constant curvature from its center to its edge, and both refractive surfaces are spherical. Compared to aspherical lenses, spherical lenses are easier to process, thus resulting in lower manufacturing costs.
[0084] It should be understood that due to the spherical shape of the curved surface, spherical aberration is prone to occur, meaning that peripheral rays and central rays cannot converge at the same focal point, resulting in blurred and distorted images, which is especially noticeable in large-aperture lenses.
[0085] Therefore, in order to solve the above problems, in this embodiment, the front lens group includes a first lens, a second lens, a third lens, a fourth lens, a fifth lens, a sixth lens, a seventh lens, and an eighth lens. The first lens is a convex lens, the second lens is a meniscus lens, the third lens is a biconvex lens, the fourth lens is a biconcave lens, the fifth lens is a biconcave lens, the sixth lens is a meniscus lens, the seventh lens is a meniscus lens, and the eighth lens is a biconvex lens.
[0086] The rear lens group includes the ninth, tenth, eleventh, twelfth, thirteenth, fourteenth, fifteenth, sixteenth, seventeenth, eighteenth, and nineteenth lenses. The ninth lens is a biconvex lens, the tenth lens is a biconvex lens, the eleventh lens is a biconcave lens, the twelfth lens is a biconcave lens, the thirteenth lens is a meniscus lens, the fourteenth lens is a biconvex lens, the fifteenth lens is a biconvex lens, the sixteenth lens is a biconvex lens, the seventeenth lens is a biconvex lens, the eighteenth lens is a biconcave lens, and the nineteenth lens is a biconvex lens.
[0087] The object side of the first lens is a plane;
[0088] The object sides of the second, third, eighth, ninth, tenth, fourteenth, fifteenth, sixteenth, seventeenth, and nineteenth lenses are all convex, while the object sides of the fourth, fifth, sixth, seventh, eleventh, twelfth, thirteenth, and eighteenth lenses are all concave.
[0089] The image side of the first, third, sixth, seventh, eighth, ninth, tenth, thirteenth, fourteenth, fifteenth, sixteenth, seventeenth, and nineteenth lenses is convex.
[0090] The second, fourth, fifth, eleventh, twelfth, and eighteenth lenses all have concave images, resulting in an exposure field of view of 75mm × 75mm and a resolution of 700nm for the lithography objective.
[0091] Table 1 shows the parameters of the photolithography lens:
[0092]
[0093]
[0094]
[0095] Optical inspection was performed using the aforementioned photolithography lens to obtain... Figure 3 The MTF plot of the lithography objective lens at 1300 lp / mm shown represents the transfer function of the lithography lens, derived from... Figure 3 It can be seen that the above-mentioned lithography lens reaches the diffraction limit, with high exposure accuracy, high transmittance and low telecentricity.
[0096] Figure 2 The aberration curve is shown in the figure. The wavelength range is 362-368nm. As can be seen from the figure, the vertical chromatic aberration is small enough, and there is a slight axial chromatic aberration at the edge, which meets the performance requirements for optimization.
[0097] Figure 4 The image plane wavefront aberration (WTF) distribution is shown at the center reference wavelength of 365.2 nm. As can be seen from the figure, the maximum wavefront aberration is 0.03 and the minimum wavefront aberration is 0.02. The wavefront aberration is good and meets the microwave long range performance requirements of the lithography objective lens.
[0098] Figure 5 The image shows the distortion plane distribution. In the figure, the lens distortion is less than 53nm, the lens field curvature is less than 500nm, and the image distortion correction effect is good.
[0099] Figure 6The field curvature diagram shows that the lens astigmatism is less than 300nm, indicating a good correction effect.
[0100] The test results above show that the lithography lens proposed in this application uses spherical lenses, resulting in mature manufacturing technology and a simple structure. It uses only 19 lenses, a relatively small number, leading to lower costs and ease of mass production. Furthermore, it meets the requirements of large area, high numerical aperture, high resolution, low distortion, and low field curvature (5x magnification) 5X imaging, achieving an exposure field sufficient for large-area exposure. With a numerical aperture of 0.35, it can achieve a resolution of 0.7μm, effectively applicable to 700nm lithography. While ensuring image quality, it effectively reduces costs. Simultaneously, the reasonable optical power, curvature, and number of lenses effectively reduce cumulative tolerances in lens assembly, ensuring imaging performance.
Claims
1. A UV lithography lens that is easy to mass-produce, characterized in that: It includes a front lens group, an aperture stop, and a rear lens group, arranged sequentially from the object side to the image side; The front lens group includes a first lens, a second lens, a third lens, a fourth lens, a fifth lens, a sixth lens, a seventh lens, and an eighth lens. The first lens is a plano-convex lens, the second lens is a meniscus lens, the third lens is a biconvex lens, the fourth lens is a biconcave lens, the fifth lens is a biconcave lens, the sixth lens is a meniscus lens, the seventh lens is a meniscus lens, and the eighth lens is a biconvex lens. The rear lens group includes the ninth, tenth, eleventh, twelfth, thirteenth, fourteenth, fifteenth, sixteenth, seventeenth, eighteenth, and nineteenth lenses. The ninth lens is a biconvex lens, the tenth lens is a biconvex lens, the eleventh lens is a biconcave lens, the twelfth lens is a biconcave lens, the thirteenth lens is a meniscus lens, the fourteenth lens is a biconvex lens, the fifteenth lens is a biconvex lens, the sixteenth lens is a biconvex lens, the seventeenth lens is a biconvex lens, the eighteenth lens is a biconcave lens, and the nineteenth lens is a biconvex lens.
2. The easily mass-producible ultraviolet lithography lens according to claim 1, characterized in that: All of the above lenses are spherical lenses.
3. The easily mass-producible ultraviolet lithography lens according to claim 2, characterized in that: The object side of the first lens is a plane; The object side of the second, third, eighth, ninth, tenth, fourteenth, fifteenth, sixteenth, seventeenth, and nineteenth lenses is convex, and The object side of the fourth, fifth, sixth, seventh, eleventh, twelfth, thirteenth, and eighteenth lenses is concave. The image side of the first, third, sixth, seventh, eighth, ninth, tenth, thirteenth, fourteenth, fifteenth, sixteenth, seventeenth, and nineteenth lenses is convex. The second, fourth, fifth, eleventh, twelfth, and eighteenth lenses all have concave images.
4. The easily mass-producible ultraviolet lithography lens according to claim 3, characterized in that: The object side of the first lens is a plane, and the image side has a radius of curvature of -150.4712777±5mm. The object side of the second lens has a radius of 83.2055935±5mm, and the image side has a radius of 308.8522277±5mm. The object side of the third lens has a radius of 1156.292874 ± 5 mm, and the image side has a radius of -313.9773069 ± 5 mm. The fourth lens has an object-side radius (R) of -316.2786071±5mm and an image-side radius (R) of 49.51114022±5mm. The object side of the fifth lens has a radius of -139.9860985±5mm, and the image side has a radius of 94.07377904±5mm. The object side of the sixth lens has a radius of -53.77439381±5mm, and the image side has a radius of -69.71613164±5mm. The object side of the seventh lens has a radius of -499.6324009±5mm, and the image side has a radius of -134.5978306±5mm. The object side of the eighth lens has a radius of 296.7813235±5mm, and the image side has a radius of -380.5963906±5mm. The object side of the ninth lens has a radius of 286.4457548 ± 5 mm, and the image side has a radius of -280.760153 ± 5 mm. The object side of the tenth lens has a radius of 107.6153356 ± 5 mm, and the image side has a radius of -211.2803328 ± 5 mm. The object side of the eleventh lens has a radius of -167.1876994±5mm, and the image side has a radius of 65.43121446±5mm. The object side of the twelfth lens has a radius of -68.72730588±5mm, and the image side has a radius of 420.8948069±5mm. The object side of the thirteenth lens has a radius of -254.8399644±5mm, and the image side has a radius of -99.7696204±5mm. The object side of the fourteenth lens has a radius of 249.8538573±5mm, and the image side has a radius of -204.4736079±5mm. The object side of the fifteenth lens has a radius of 184.0190303±5mm, and the image side has a radius of -429.0043941±5mm. The object side of the sixteenth lens has a radius of 132.9263656 ± 5 mm, and the image side has a radius of -392.2447498 ± 5 mm. The object side of the seventeenth lens has a radius of 86.29103373±5mm, and the image side has a radius of -260.4553726±5mm. The object side of the eighteenth lens has a radius of -196.4251341±5mm, and the image side has a radius of 50±5mm. The object side of the nineteenth lens has a radius of 55.68186867±5mm, and the image side has a radius of -539.0243422±5mm.
5. The easily mass-producible ultraviolet lithography lens according to claim 4, characterized in that: The center thickness of the first lens is 23.6221213±5mm; The center thickness of the second lens is 26.40527943±5mm; The center thickness of the third lens is 12.74662844±5mm; The center thickness of the fourth lens is 10.5 ± 5 mm; The center thickness of the fifth lens is 10.5 ± 5 mm; The center thickness of the sixth lens is 19.98893621±5mm; The center thickness of the seventh lens is 14.24027362±5mm; The center thickness of the eighth lens is 14.6541334±5mm; The center thickness of the ninth lens is 14.40783194±5mm; The center thickness of the tenth lens is 17.63701713±5mm; The center thickness of the eleventh lens is 10.5 ± 5 mm; The center thickness of the twelfth lens is 10.5 ± 5 mm; The center thickness of the thirteenth lens is 14.87311523±5mm; The center thickness of the fourteenth lens is 18.25816129±5mm; The center thickness of the fifteenth lens is 18.38908153±5mm; The center thickness of the sixteenth lens is 20.93749343±5mm; The center thickness of the seventeenth lens is 23.2010303±5mm; The center thickness of the eighteenth lens is 10.5 ± 5 mm; The center thickness of the nineteenth lens is 25±5mm.
6. The easily mass-producible ultraviolet lithography lens according to claim 5, characterized in that: The refractive index n1 of the first lens is: 1.58 ≤ n1 ≤ 1.60; The refractive index of the second lens is: 1.48 ≤ n2 ≤ 1.50; The refractive index of the third lens is: 1.48 ≤ n3 ≤ 1.50; The refractive index of the fourth lens is: 1.58 ≤ n4 ≤ 1.60; The refractive index of the fifth lens is: 1.58 ≤ n5 ≤ 1.60; The refractive index of the sixth lens is: 1.58 ≤ n6 ≤ 1.60; The refractive index of the seventh lens is: 1.58 ≤ n7 ≤ 1.60; The refractive index of the eighth lens is: 1.48 ≤ n8 ≤ 1.50; The refractive index of the ninth lens is: 1.48 ≤ n9 ≤ 1.50; The refractive index of the tenth lens is: 1.48 ≤ n 10 ≤1.50; The refractive index of the eleventh lens is: 1.58 ≤ n 11 ≤1.60; The refractive index of the twelfth lens is: 1.48 ≤ n 12 ≤1.50; The refractive index of the thirteenth lens is: 1.48 ≤ n 13 ≤1.50; The refractive index of the fourteenth lens is: 1.48 ≤ n 14 ≤1.50; The refractive index of the fifteenth lens is: 1.48 ≤ n 15 ≤1.50; The refractive index of the sixteenth lens is: 1.48 ≤ n 16 ≤1.50; The refractive index of the seventeenth lens is: 1.48 ≤ n 17 ≤1.50; The refractive index of the eighteenth lens is: 1.58 ≤ n 18 ≤1.60; The refractive index of the nineteenth lens is: 1.48 ≤ n 19 ≤1.50.