Nanoimprint demolding device

Abstract

The utility model relates to the technical field of imprint demolding, disclose a kind of nano imprint demolding device, including rack, mould, adsorption subassembly, lifting subassembly, gas blowing subassembly, mould is arranged in rack, adsorption subassembly is connected in the top of rack by lifting subassembly, and it is located above mould, adsorption subassembly is multiple and is arranged around the axis of product, lifting subassembly and adsorption subassembly one-to-one correspondence;Gas blowing subassembly is multiple, gas blowing subassembly is arranged around adsorption subassembly, and with the position of adsorption subassembly one-to-one correspondence, adsorption subassembly is used to adsorb the product located in mould, lifting subassembly is used to adjust adsorption subassembly lifting, to make the gap between product and mould, gas blowing subassembly is used to blow gas in gap, the utility model separates product and mould initially by lifting subassembly and adsorption subassembly, again by gas blowing subassembly to blow gas in gap, reduce demolding strength, to better protect product.

Description

Technical Field

[0001] This utility model relates to the field of embossing and demolding technology, specifically a nano-embossing and demolding device. Background Technology

[0002] Nanoimprint lithography, as a high-resolution and high-efficiency micro / nano fabrication method, has broad application prospects in semiconductors, optoelectronics, biosensors, and other fields. One of its core steps is to transfer micro / nano patterns onto a substrate material. After imprinting, the crucial follow-up step is to effectively demold the pattern to ensure its integrity and surface quality.

[0003] Chinese patent CN119376181A discloses a large-area nanoimprint demolding device, which mainly uses a vacuum suction cup assembly and a moving mechanism to control the demolding process. The advantage of this technology is that it provides uniform demolding force and maintains a constant soft film peeling angle. However, the above technical solution relies on purely mechanical separation force to overcome the adhesion between the template and the substrate. If the adhesion is strong, especially when the substrate is thin, even if the demolding force is uniform, adhesion may still cause structural damage or residue, thereby affecting the quality of the finished product and production efficiency.

[0004] Therefore, the technical problem to be solved by this application is how to effectively reduce the adhesion between the mold and the substrate and improve the safety of demolding. Utility Model Content

[0005] To solve the above-mentioned technical problems, this utility model provides a nano-imprint demolding device. This demolding device initially separates the product located in the mold by adsorbing the product with an adsorption component and lifting the adsorption component with a lifting component. Then, the air blowing component blows air into the gap between the product and the mold, and the gas enters the gap between the mold and the product, reducing the adhesion and demolding forces, avoiding cracking and fragmentation of the imprinted substrate, and better protecting the product. By repeatedly lifting and blowing air, the product is gradually demolded from the periphery to the center of the product.

[0006] The technical solution of this utility model is:

[0007] A nanoimprinting demolding device includes a frame, a mold, an adsorption component, a lifting component, and an air blowing component. The mold is disposed within the frame. The adsorption components are connected to the top of the frame via the lifting components and are located above the mold. Multiple adsorption components are arranged around the axis of the product, and the lifting components correspond one-to-one with the adsorption components. Multiple air blowing components are arranged around the adsorption components and correspond one-to-one with the positions of the adsorption components. The adsorption components are used to adsorb the product located within the mold. The lifting components are used to adjust the lifting and lowering of the adsorption components to create a gap between the product and the mold. The air blowing components are used to blow air into the gap.

[0008] Preferably, the lifting assembly includes a connecting rod, a locking component, and an adjusting component. The adsorption assembly is connected to one end of the connecting rod, which passes through the frame. Both the locking component and the adjusting component are screwed onto the connecting rod, with the locking component located below the frame and the adjusting component located above the frame. The locking component is used to lock the connecting rod onto the frame, and the adjusting component is used to adjust the lifting of the connecting rod to drive the adsorption assembly to lift.

[0009] Preferably, the connecting rod is threaded, the locking element is a first nut, and the adjusting element is a second nut. When the locking element is locked, the adjusting element can rotate to adjust the lifting and lowering of the connecting rod, thereby driving the adsorption assembly to lift and lower.

[0010] Preferably, the frame is provided with multiple slide rails, and there are multiple connecting rods, which correspond one-to-one with the multiple slide rails. The connecting rods are slidably connected in the slide rails and can slide along the length of the slide rails.

[0011] Preferably, there are 4 slide rails, which form a cross shape.

[0012] Preferably, the bottom of the frame is provided with an adsorption platform for adsorbing the mold.

[0013] Preferably, the adsorption platform is provided with multiple air intake slots, which are annular in shape. The multiple air intake slots include a first air intake slot, a second air intake slot, a third air intake slot, and a fourth air intake slot arranged coaxially and gradually expanding outward.

[0014] Preferably, the adsorption component is a vacuum suction cup, and the connecting rod is provided with an air pipe. One end of the air pipe is connected to an external air pump, and the other end is connected to the adsorption component.

[0015] Preferably, the air blowing assembly includes a fixing block and an air nozzle. The fixing block is hung on the frame, and an air blowing pipe is provided inside the fixing block. One end of the air blowing pipe is connected to an external air pump, and the other end is connected to the air nozzle.

[0016] One of the above-described technical solutions of this utility model has at least one of the following advantages or beneficial effects:

[0017] This invention uses an adsorption component to adsorb the product and a lifting component to lift the adsorption component, thus initially separating the product from the mold. Then, an air blowing component blows air into the gap created by the initial separation of the product and the mold. The gas enters the gap between the mold and the product, reducing adhesion and demolding forces, preventing cracking and fragmentation of the imprinted substrate, and better protecting the product. Through repeated lifting and air blowing, the product is gradually demolded from the periphery towards the center of the product. Attached Figure Description

[0018] Figure 1 This is a front view of Embodiment 1 of the present invention;

[0019] Figure 2 This is a schematic diagram of the adsorption component, lifting component, and slide rail of this utility model;

[0020] Figure 3 This is a schematic diagram of the adsorption platform of this utility model.

[0021] The reference numerals for each of the attached figures are as follows: 1. Frame; 2. Mold; 3. Adsorption assembly; 4. Lifting assembly; 5. Air blowing assembly; 11. Slide rail; 12. Adsorption platform; 41. Connecting rod; 42. Locking component; 43. Adjusting component; 51. Fixing block; 52. Air nozzle; 121. First air intake groove; 122. Second air intake groove; 123. Third air intake groove; 124. Fourth air intake groove; 411. Air passage pipe; 511. Air blowing pipe. Detailed Implementation

[0022] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0023] Example 1

[0024] Please see Figure 1-3 A nano-imprinting demolding device includes a frame 1, a mold 2, an adsorption component 3, a lifting component 4, and an air blowing component 5. The mold 2 is disposed inside the frame 1. The adsorption component 3 is connected to the top of the frame 1 via the lifting component 4 and is located above the mold 2. There are multiple adsorption components 3 arranged around the axis of the product. The lifting component 4 corresponds one-to-one with the adsorption component 3. There are multiple air blowing components 5 arranged around the adsorption component 3 and corresponding one-to-one with the position of the adsorption component 3. The adsorption component 3 is used to adsorb the product located inside the mold 2. The lifting component 4 is used to adjust the lifting and lowering of the adsorption component 3 to create a gap between the product and the mold 2. The air blowing component 5 is used to blow air into the gap.

[0025] In practical applications, the finished product of nanoimprinting is formed by pressing the substrate onto the mold 2 and then curing it with ultraviolet light. In this embodiment, the product refers to the finished product and the substrate. After curing, the product is located on the mold 2 and needs to be demolded. The operator can operate the adsorption component 3 to adsorb the product, mainly the substrate part. Then, the lifting component 4 is used to adjust the adsorption component 3 to rise, so that the finished part of the product is separated from the mold 2 for initial demolding. Next, the operator operates the blowing component 5 to blow air into the gap. The gas sprayed by the blowing component 5 enters the gap, thereby reducing the adhesion between the product and the mold 2. The finished part of the product will further separate from the mold 2. Compared with directly pulling the product to demold, the blowing component 5 can reduce the demolding force. Each time the preset height is lifted, the operator repeatedly operates the lifting component 4 and the blowing component 5, so that the finished part of the product is gradually demolded from the periphery to the center, which reduces the overall demolding force and avoids cracking of the product's substrate or fragmentation of the finished product, thus better protecting the product.

[0026] Preferably, the lifting assembly 4 includes a connecting rod 41, a locking member 42, and an adjusting member 43. The adsorption assembly 3 is connected to one end of the connecting rod 41. The connecting rod 41 passes through the frame 1. The locking member 42 and the adjusting member 43 are both screwed onto the connecting rod 41. The locking member 42 is located below the frame 1, and the adjusting member 43 is located above the frame 1. The locking member 42 is used to lock the connecting rod 41 onto the frame 1, and the adjusting member 43 is used to adjust the lifting and lowering of the connecting rod 41 to drive the adsorption assembly 3 to lift and lower.

[0027] With the above design, the staff can adjust the height of the connecting rod 41 on the frame 1 by adjusting the adjusting part 43. After adjustment, it is locked on the frame 1 by locking part 42. Specifically, in the initial state, the locking part 42 locks the connecting rod 41 on the frame 1. The staff can adjust the height of the connecting rod 41 by adjusting the adjusting part 43, thereby lifting the adsorption component 3 and causing the product to be initially separated from the mold 2.

[0028] Preferably, the connecting rod 41 is threaded, and both the locking member 42 and the adjusting member 43 are nuts. When the locking member 42 is locked, the adjusting member 43 can rotate to adjust the lifting and lowering of the connecting rod 41 to drive the adsorption assembly 3 to lift and lower.

[0029] In this embodiment, both the locking member 42 and the adjusting member 43 are nuts. The locking member 42 is located below the adjusting member 43. The locking member 42 can lock the connecting rod 41 onto the frame 1. When the adjusting member 43 is rotated, the connecting rod 41 will rise and fall relative to the frame 1, thereby adjusting the height position of the connecting rod 41 and driving the adsorption assembly 3 to rise and fall. In this way, it is convenient for the staff to operate the adjusting member 43 and the locking member 42.

[0030] Preferably, the frame 1 is provided with multiple slide rails 11, and there are multiple connecting rods 41, which correspond one-to-one with the multiple slide rails 11. The connecting rods 41 are slidably connected in the slide rails 11, and the connecting rods 41 can slide along the length direction of the slide rails 11.

[0031] In the above design, the operator can move the connecting rod 41 on the slide rail 11, which can be used for products of different sizes. The operator can also adjust the position of the adsorption component 3 to adsorb the product through the connecting rod 41, which allows the operator to use it more flexibly.

[0032] Preferably, there are 4 slide rails 11, and the 4 slide rails 11 form a cross shape.

[0033] In this embodiment, the cross-shaped slide rail 11 is integrally formed, which allows the connecting rod 41 to be adjusted in four directions and to be adsorbed from four right-angled positions. During demolding, the operator can lift a certain distance in each direction before lifting to the next height, thereby gradually lifting the adsorption component 3. This avoids excessive demolding force caused by a single lift, which could lead to cracking of the product base or breakage of the finished product, thus better protecting the product.

[0034] Preferably, the bottom of the frame 1 is provided with an adsorption platform 12, which is used to adsorb the mold 2.

[0035] Through the above design, the mold 2 can be fixed by the adsorption platform 12, thereby ensuring that the mold 2 is always on the frame 1 during the demolding process and improving the success rate of demolding.

[0036] Preferably, the adsorption platform 12 is provided with a plurality of air intake grooves, which are annular in shape. The plurality of air intake grooves include a first air intake groove 121, a second air intake groove 122, a third air intake groove 123, and a fourth air intake groove 124 arranged coaxially and gradually expanding outward.

[0037] In this embodiment, multiple suction grooves can adsorb molds 2 of different sizes. Specifically, the first suction groove 121, the second suction groove 122, the third suction groove 123, and the fourth suction groove 124 are used to adsorb molds 2 of increasing size.

[0038] Preferably, the adsorption component 3 is a vacuum suction cup, and the connecting rod 41 is provided with an air pipe 411. One end of the air pipe 411 is connected to an external air pump, and the other end is connected to the adsorption component 3.

[0039] In the above design, the ventilation pipe 411 connects the air pump and the adsorption component 3, so that when the air pump is working, the adsorption component 3 will adsorb the product, and when the height of the connecting rod 41 is adjusted, the adsorption component 3 will drive the product to rise and fall.

[0040] Preferably, the air blowing assembly 5 includes a fixing block 51 and an air nozzle 52. The fixing block 51 is hung on the frame 1. An air blowing pipe 511 is provided inside the fixing block 51. One end of the air blowing pipe 511 is connected to an external air pump, and the other end is connected to the air nozzle 52.

[0041] In this embodiment, the fixing block 51 can be hung on the top of the frame 1 or on the slide rail 11. When the fixing block 51 is hung on the slide rail 11, the fixing block 51 can slide along the length of the slide rail 11, thereby driving the air blowing pipe 511 to slide. Specifically, the air blowing pipe 511 is stuck in the fixing block 51. In specific operation, the operator holds the air nozzle 52 and aligns the air nozzle 52 with the gap of the initial separation to start the air pump, thereby further separating the product and the mold 2. Specifically, in order to facilitate the operation of the operator, the entire air blowing pipe 511 or the section of the air blowing pipe 511 near the air nozzle 52 can be made of flexible material.

[0042] Although embodiments of the present invention have been shown and described, those skilled in the art will understand that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the claims and their equivalents.

Claims

1. A nanoimprinting release device, comprising a frame, a mold, an adsorption component, a lifting component, and an air blowing component, wherein the mold is disposed within the frame, and the adsorption component is connected to the top of the frame via the lifting component and is located above the mold, characterized in that, The adsorption components are multiple and arranged around the axis of the product, and the lifting components correspond one-to-one with the adsorption components. The blowing assembly comprises multiple components, which are arranged around the adsorption assembly and correspond one-to-one with the position of the adsorption assembly. The adsorption assembly is used to adsorb the product located inside the mold. The lifting assembly is used to adjust the lifting and lowering of the adsorption assembly to create a gap between the product and the mold. The blowing assembly is used to blow air into the gap.

2. The nanoimprint demolding device according to claim 1, characterized in that, The lifting assembly includes a connecting rod, a locking component, and an adjusting component. The adsorption assembly is connected to one end of the connecting rod, which passes through the frame. The locking component and the adjusting component are both screwed onto the connecting rod, with the locking component located below the frame and the adjusting component located above the frame. The locking component is used to lock the connecting rod onto the frame, and the adjusting component is used to adjust the lifting of the connecting rod to drive the adsorption assembly to lift.

3. The nanoimprinting demolding device according to claim 2, characterized in that, The connecting rod is threaded, the locking element is a first nut, and the adjusting element is a second nut. When the locking element is locked, the adjusting element can rotate to adjust the lifting and lowering of the connecting rod to drive the adsorption assembly to lift and lower.

4. The nanoimprint demolding device according to claim 2, characterized in that, The frame is provided with multiple slide rails, and there are multiple connecting rods, each corresponding to one of the slide rails. The connecting rods are slidably connected in the slide rails and can slide along the length of the slide rails.

5. The nanoimprinting demolding device according to claim 4, characterized in that, The slide rails consist of four rails, which form a cross shape.

6. The nanoimprint demolding device according to claim 1, characterized in that, The bottom of the frame is equipped with an adsorption platform, which is used to adsorb the mold.

7. The nanoimprint demolding device according to claim 6, characterized in that, The adsorption platform is provided with multiple air intake slots, which are annular in shape. The multiple air intake slots include a first air intake slot, a second air intake slot, a third air intake slot, and a fourth air intake slot arranged coaxially and gradually expanding outward.

8. The nanoimprint demolding device according to claim 2, characterized in that, The adsorption component is a vacuum suction cup, and the connecting rod is provided with an air pipe. One end of the air pipe is connected to an external air pump, and the other end is connected to the adsorption component.

9. The nanoimprinting demolding device according to claim 1, characterized in that, The air blowing assembly includes a fixing block and an air nozzle. The fixing block is hung on the frame and has an air blowing pipe inside. One end of the air blowing pipe is connected to an external air pump, and the other end is connected to the air nozzle.

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