Compound mechanical damping support device for UV light source

Abstract

The utility model provides a kind of compound mechanical damping support device of UV light source, belong to photoetching equipment technical field, including pedestal, UV light source and damping module, damping module includes connecting piece and support buffer, UV light source is connected to support buffer by connecting piece, support buffer is distributed around UV light source axis symmetry, support buffer is also connected to pedestal;Pedestal is installed with outer limit stop, UV light source is connected with inner limit stop, inner limit stop is located in the inside of outer limit stop, and inner limit stop is not connected with pedestal.This scheme is designed by multilevel damping structure, part of high-frequency impact generated by UV light source can be transmitted to outer limit stop by support buffer lag, so that inner limit stop and outer limit stop generate reverse force due to motion phase difference, and then self-cancelling, and through rubber ring absorption residual kinetic energy, dynamic constraint force field is created, without sensor or controller, active damping effect is realized.

Description

Technical Field

[0001] This utility model relates to the field of photolithography equipment technology, specifically to a composite mechanical vibration damping support device for a UV light source. Background Technology

[0002] Photolithography is a crucial step in semiconductor manufacturing, its main purpose being to precisely transfer designed circuit patterns onto silicon wafers. This process directly impacts chip performance, power consumption, and size. In photolithography equipment, a UV light source generates ultraviolet light of a specific wavelength to achieve high-precision pattern transfer.

[0003] However, for gas discharge UV light sources such as excimer lasers, high-voltage pulses are required for triggering during operation to generate sufficient energy in the gas between the electrodes to ionize it and form plasma. Once the gas is ionized, it undergoes rapid heating and expansion within nanoseconds, creating a transient state of high temperature and high pressure, which generates high-frequency impact forces. Although this process is very brief, it is enough to cause minute vibrations or deformations in the optical system, thus affecting exposure accuracy and leading to deviations in the final pattern. Utility Model Content

[0004] The purpose of this invention is to provide a composite mechanical vibration damping support device for a UV light source to solve the problems mentioned in the background art.

[0005] To achieve the above objectives, this utility model provides the following technical solution:

[0006] A composite mechanical vibration damping support device for a UV light source, comprising:

[0007] The base is used to support the UV light source;

[0008] UV light source;

[0009] The vibration damping module includes connectors and support buffers. The UV light source is connected to the support buffers through the connectors. The support buffers are symmetrically distributed around the axis of the UV light source and are also connected to the base.

[0010] An outer limiter is installed on the base, and an inner limiter is connected to the UV light source. The inner limiter is located inside the outer limiter and is not connected to the base.

[0011] Preferably, one end of the support buffer is fixedly installed on the bottom of the connector, and the other end is fixedly connected to the base.

[0012] Preferably, a side baffle is fixedly installed around the base, and the base and the side baffle form a hollow structure with an opening on one side.

[0013] Preferably, the UV light source is located inside the hollow structure formed by the base and the side baffle. One end of the support buffer is fixedly installed around the connector, and the other end is fixedly connected to the base through the side baffle.

[0014] Preferably, the UV light source is fixedly connected to the inner limiter via a fixed support rod.

[0015] Preferably, stress-limiting balls are fixedly installed at both ends of the fixed support rod to prevent cracking caused by stress concentration at the ends of the fixed support rod.

[0016] Preferably, the outer limiter is the outer end of the cross limiter, and the inner limiter is the inner end of the cross limiter.

[0017] Preferably, a rubber ring for cushioning is provided between the inner limiter and the outer limiter.

[0018] Preferably, the connector is a light source flange.

[0019] Preferably, the supporting buffer is a spring assembly.

[0020] The beneficial effects of the above-mentioned technical solution of this utility model are as follows:

[0021] This solution employs a multi-level vibration damping structure design, enabling a portion of the high-frequency impact generated by the UV light source to be delayed and transmitted to the outer limiter via a support buffer. This causes the inner and outer limiters to generate opposing forces due to their phase difference, thereby allowing the high-frequency impact energy continuously generated by the UV light source to self-cancel out. Furthermore, the residual kinetic energy is further absorbed by the rubber ring, creating a dynamic constraint force field. This achieves active damping without the need for sensors or controllers, thus reducing the impact of high-frequency impacts on the UV light source. Attached Figure Description

[0022] The above and other objects, features, and advantages of the present invention will become readily understood by reading the following detailed description of exemplary embodiments with reference to the accompanying drawings. In the drawings, several embodiments of the present invention are shown by way of example and not limitation, and like or corresponding reference numerals denote like or corresponding parts, wherein:

[0023] Figure 1 This is a schematic diagram of the overall structure of this utility model;

[0024] Figure 2 This is a schematic diagram of the internal structure of this utility model;

[0025] Figure 3 This is a partial top view of the structure of this utility model. Figure 1 ;

[0026] Figure 4 This is a partial top view of the structure of this utility model. Figure 2.

[0027] Explanation of reference numerals in the attached figures:

[0028] 11. Base; 12. Side baffle; 2. UV light source; 31. Connector; 32. Support and buffer; 33. Fixed support rod; 34. Stress limiting ball; 35. Inner limiter; 36. Outer limiter; 37. Rubber ring. Detailed Implementation

[0029] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Those skilled in the art should understand that the embodiments described below are only some, not all, of the embodiments disclosed. All other embodiments obtained by those skilled in the art based on the embodiments of the present utility model without creative effort are within the scope of protection of the present utility model.

[0030] To address the issue of decreased exposure accuracy caused by high-frequency impact forces generated during photolithography using gas discharge UV light sources such as excimer lasers due to high-temperature and high-pressure expansion, this solution provides a composite mechanical vibration damping support device for UV light sources.

[0031] In this scheme, when the UV light source 2 operates under high-voltage pulses, it generates high-frequency impacts, which directly drive the inner limiter 35 to swing via the fixed support rod 33. Simultaneously, the swing of the UV light source 2 compresses the spring assembly, and the spring assembly, while being compressed, drives the outer limiter 36 to swing via the base 11. Since the swing of the outer limiter 36 is achieved through the compression of the spring assembly, it lags behind the swing of the inner limiter 35. Due to the reciprocating nature of the swing process, there are opposing forces between the inner limiter 35 and the outer limiter 36, thus constraining their swings. The rubber ring 37 absorbs residual kinetic energy, reducing the impact of the high-frequency impact on the UV light source.

[0032] After introducing the basic principles of this utility model, various non-limiting embodiments of this utility model are described in detail below. Any quantity of elements in the accompanying drawings is for illustrative purposes only and not for limitation, and any naming is for distinction only and has no limiting meaning.

[0033] The principles and spirit of this utility model will be explained in detail below with reference to several representative embodiments.

[0034] Example 1

[0035] A composite mechanical vibration damping support device for a UV light source, such as Figure 1-4As shown, it includes a base 11, a UV light source 2, and a vibration damping module. The base supports the UV light source 2, and side baffles 12 are fixedly installed around the base 11. The base 11 and the side baffles 12 form a hollow structure with one side opening. The UV light source 2 is installed inside the hollow structure. The vibration damping module connects the base 11 and the UV light source 2 to buffer the high-frequency impacts generated during photolithography and maintain its stability.

[0036] The vibration damping module includes a connector 31 and a support buffer 32. The UV light source 2 is connected to the support buffer 32 through the connector 31. The support buffer 32 is symmetrically distributed around the axis of the UV light source 2. The support buffer 32 is also connected to the base 11.

[0037] Specifically, such as Figure 2 As shown, in this embodiment, the connector 31 is a light source flange, the support buffer 32 is a spring assembly, the UV light source 2 is fixedly installed inside the light source flange, one end of the spring assembly is fixedly installed around the UV light source 2 on the side of the light source flange, and the other end of the spring assembly is fixedly installed on the side baffle 12, so that the UV light source 2 is bufferedly connected to the base 11 through the light source flange, the spring assembly and the side baffle 12.

[0038] An outer limiter 36 is also fixedly installed on the base 11, and an inner limiter 35 is fixedly connected to the UV light source 2. The inner limiter 35 is located inside the outer limiter 36 and is not connected to the base 11.

[0039] Specifically, the bottom of the UV light source 2 is fixedly connected to the center of the inner limiter 35 via a fixed support rod 33. Stress limiting balls 34 are also fixedly installed at both ends of the fixed support rod 33. The stress limiting balls 34 are spheres made of metal or other high-strength materials and have no special structure. The stress limiting balls 34 are used to prevent stress concentration at the ends of the fixed support rod 33 (the connection between the fixed support rod 33 and the UV light source 2 and the inner limiter 35) from causing cracking.

[0040] like Figure 3 As shown, in this embodiment, the outer limiter 36 and the inner limiter 35 together form a cross-shaped limiter, wherein the outer limiter 36 is the outer end of the cross-shaped limiter, and the inner limiter 35 is the inner end of the cross-shaped limiter. In other embodiments, the outer limiter 36 and the inner limiter 35 can also be mutually cooperating circles (e.g., Figure 4(or other shapes). The outer limiter 36 is fixedly mounted on the base 11, and the center of the inner limiter 35 is fixedly connected to the UV light source 2 via a fixed support rod 33. The inner limiter 35 is not connected to the base 11, leaving a certain gap between them. A rubber ring 37 for buffering is also provided between the inner limiter 35 and the outer limiter 36. In other embodiments, the rubber ring 37 can also be fixedly mounted on the inside of the outer limiter 36 or fixedly mounted on the base 11. Furthermore, the axes of the outer limiter 36, rubber ring 37, inner limiter 35, fixed support rod 33, UV light source 2, and light source flange are the same, facilitating the maintenance of operational stability.

[0041] In this scheme, when the UV light source operates under high-voltage pulses, it generates high-frequency impacts, which directly drive the inner limiter 35 to swing via the fixed support rod 33. Simultaneously, the swing of the UV light source 2 compresses the spring assembly, and while the spring assembly is compressed, it drives the outer limiter 36 to swing via the base 11. Since the swing of the outer limiter 36 is achieved through the compression of the spring assembly, it lags behind the swing of the inner limiter 35. Due to the reciprocating nature of the swing process, there are opposing forces between the inner limiter 35 and the outer limiter 36, thus constraining their swings. The rubber ring 37 absorbs residual kinetic energy, reducing the impact of the high-frequency impact on the UV light source.

[0042] Example 2

[0043] Its main difference from Example 1 is:

[0044] In this embodiment, there are no side baffles fixedly installed around the base. One end of the support buffer is fixedly installed at the bottom of the connector, and the other end is directly fixedly connected to the base.

[0045] The above-described preferred embodiments of the present invention are provided for guidance, but it will be apparent to those skilled in the art that such embodiments are provided merely by way of example. Many modifications, alterations, and alternatives will arise in the mind and spirit of the present invention without departing from its intent. It should be understood that various alternatives to the embodiments of the present invention described herein may be employed in the practice of the present invention. The appended claims are intended to define the scope of protection of the present invention and therefore cover the modular compositions, equivalents, or alternatives within the scope of these claims.

Claims

1. A composite mechanical vibration damping support device for a UV light source, comprising: Base (11), base (11) is used to support UV light source (2); UV light source (2); The feature is that it also includes a vibration damping module, which includes a connector (31) and a support buffer (32). The UV light source (2) is connected to the support buffer (32) through the connector (31). The support buffer (32) is symmetrically distributed around the axis of the UV light source (2). The support buffer (32) is also connected to the base (11). An outer limiter (36) is installed on the base (11), and an inner limiter (35) is connected to the UV light source (2). The inner limiter (35) is located inside the outer limiter (36) and is not connected to the base (11).

2. The composite mechanical vibration damping support device for a UV light source according to claim 1, characterized in that: One end of the support buffer (32) is fixedly installed at the bottom of the connector (31), and the other end is fixedly connected to the base (11).

3. The composite mechanical vibration damping support device for a UV light source according to claim 1, characterized in that: A side baffle (12) is fixedly installed around the base (11), and the base (11) and the side baffle (12) form a hollow structure with an opening on one side.

4. The composite mechanical vibration damping support device for a UV light source according to claim 3, characterized in that: The UV light source (2) is located inside the hollow structure formed by the base (11) and the side baffle (12). One end of the support buffer (32) is fixedly installed around the connector (31), and the other end is fixedly connected to the base (11) through the side baffle (12).

5. The composite mechanical vibration damping support device for a UV light source according to claim 1, characterized in that: The UV light source (2) is fixedly connected to the inner limiter (35) via a fixed support rod (33).

6. The composite mechanical vibration damping support device for a UV light source according to claim 5, characterized in that: Stress-limiting balls (34) are fixedly installed at both ends of the fixed support rod (33). The stress-limiting balls (34) are used to prevent cracking caused by stress concentration at the ends of the fixed support rod (33).

7. The composite mechanical vibration damping support device for a UV light source according to claim 1, characterized in that: The outer limiter (36) is the outer end of the cross limiter, and the inner limiter (35) is the inner end of the cross limiter.

8. The composite mechanical vibration damping support device for a UV light source according to claim 7, characterized in that: A rubber ring (37) for cushioning is provided between the inner limiter (35) and the outer limiter (36).

9. The composite mechanical vibration damping support device for a UV light source according to claim 1, characterized in that: The connector (31) is a light source flange.

10. The composite mechanical vibration damping support device for a UV light source according to claim 1, characterized in that: The supporting buffer (32) is a spring assembly.

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