A copper powder filtering box for cutting equipment

Abstract

The utility model discloses a copper powder filter box for cutting equipment concretely relates to the field of semiconductor manufacturing technology, including box, the box includes the casing, and the casing both sides are provided with water inlet pipe and drain pipe, and the casing is provided with the filter plate of vertical installation along the water flow direction, the casing is divided into filter chamber and drainage chamber by filter plate, and the water inlet pipe is linked together with filter chamber, and the water inlet pipe is provided with two at least, and is provided with separation mechanism in filter chamber, and the separation mechanism includes at least two separation box. The utility model discloses at least contains two water inlet pipes and the separation mechanism of corresponding number's separation box through the setting, cooperation can independently control the sewage interface of opening and closing, can filter copper powder and gather effectively to further avoid the copper powder plugging drain pipeline condition to happen, and also need not make the equipment stop running when cleaning separation box, significantly improve the equipment utilization rate, guarantee production efficiency.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor manufacturing technology, and more specifically, to a copper powder filter box for cutting equipment. Background Technology

[0002] In the field of semiconductor manufacturing technology, QFN and DFN are two common chip packaging forms, widely used in integrated circuit packaging. One of the key technologies in chip forming is cutting the packaged chip board into individual units.

[0003] During the cutting process, to prevent the cutting blade from overheating and affecting the cutting effect, cooling water is usually continuously used to cool the blade. At the same time, the copper powder removed from the chip is also discharged into the drain pipe along with the cooling water. After prolonged use, copper powder residue can easily clog the drain pipe, requiring workers to frequently use tools such as wire and drain cleaners to unclog the pipe. Each time the pipe needs to be unclogged, the production line equipment must be shut down, greatly reducing equipment uptime and seriously affecting production efficiency. Utility Model Content

[0004] The copper powder filter box for cutting equipment provided by this utility model aims to solve the following problem: In the existing whole board chip cutting process, the cooling water continuously sprayed to cool the cutting blade will discharge the copper powder cut from the chip into the drainage pipe. Over time, the drainage pipe is prone to blockage due to copper powder residue. As a result, the staff need to frequently use tools such as wire and drain cleaner to unclog the pipe, which greatly reduces the equipment uptime and seriously affects production efficiency.

[0005] To achieve the above objectives, the present invention provides the following technical solution: a copper powder filter box for cutting equipment, comprising: a box body, the box body including a shell, an inlet pipe and a drain pipe respectively provided on both sides of the shell, and a vertically installed filter plate arranged inside the shell along the water flow direction;

[0006] The housing is divided into a filter chamber and a drain chamber by a filter plate. The water inlet pipe is connected to the filter chamber and there are at least two water inlet pipes. The filter chamber is equipped with a separation mechanism, which includes at least two separation boxes. The separation boxes are located below the corresponding water inlet pipes and are adapted to the water inlet pipes. The separation box has a separation port on the side away from the water inlet pipe.

[0007] In a preferred embodiment, a number of speed reduction plates are arranged sequentially at the bottom of the separation box along the water flow direction, and a number of corrugated baffles are vertically arranged inside the separation box along the water flow direction.

[0008] In a preferred embodiment, a collection mechanism is provided inside the filter chamber. The collection mechanism includes at least two collection boxes located on the opposite side of the separation box and the filter plate. A collection port is provided on the side of the collection box near the separation box, and the collection port is adapted to the separation port. The collection box is made of a water-permeable material.

[0009] In a preferred embodiment, the inlet pipe and the outlet pipe are arranged diagonally opposite each other, with the inlet pipe located above the outlet pipe. The outlet pipe is connected to the outlet chamber, and a vent is provided on one side of the housing, with the vent located above the inlet pipe.

[0010] In a preferred embodiment, a cleaning hole is provided on one side of the housing, and a cover plate is provided on the top of the housing.

[0011] In a preferred embodiment, support components are provided at the four bottom corners of the housing, and the height of the support components is adjustable.

[0012] The beneficial effects of this utility model are as follows:

[0013] This utility model, by setting a separation mechanism that includes at least two water inlet pipes and a corresponding number of separation boxes, and in conjunction with a drain port that can be independently controlled to open and close, can effectively filter and collect copper powder, thereby avoiding the situation where copper powder clogs the drain pipe. Furthermore, the equipment does not need to be stopped when cleaning the separation box, which significantly improves the equipment utilization rate and ensures production efficiency.

[0014] This invention, by setting up a collection mechanism that includes collection boxes corresponding to the number of separation boxes, can further separate copper powder from silicon chips, effectively improving the purity of the collected copper powder, thus facilitating the subsequent recycling and reuse of copper powder and significantly reducing production costs. Attached Figure Description

[0015] Figure 1 This is a three-dimensional schematic diagram of the present invention.

[0016] Figure 2 This is a side view sectional structural diagram of the present invention.

[0017] Figure 3 This is a schematic diagram of the separation mechanism of this utility model.

[0018] Figure 4 This is a top-view cross-sectional structural diagram of the present invention.

[0019] The attached figures are labeled as follows: 1. Box body; 11. Shell; 12. Water inlet pipe; 13. Drain pipe; 14. Vent hole; 15. Cleaning hole; 16. Cover plate; 17. Support assembly; 2. Separation mechanism; 21. Separation box; 22. Corrugated partition; 23. Speed ​​reduction plate; 24. Separation port; 3. Collection mechanism; 31. Collection box; 32. Collection port; 4. Filter plate. Detailed Implementation

[0020] The present application will now be described in further detail with reference to the accompanying drawings. It should be noted that the following specific embodiments are only used to further illustrate the present application and should not be construed as limiting the scope of protection of the present application. Those skilled in the art can make some non-essential improvements and adjustments to the present application based on the above application content.

[0021] Refer to the instruction manual appendix Figures 1 to 4 A copper powder filter box for cutting equipment includes: a box body 1, the box body 1 includes a shell 11, a water inlet pipe 12 and a drain pipe 13 are respectively provided on both sides of the shell 11, and a vertically installed filter plate 4 is provided inside the shell 11 along the water flow direction;

[0022] The housing 11 is divided into a filter chamber and a drain chamber by a filter plate 4. The water inlet pipe 12 is connected to the filter chamber and at least two water inlet pipes 12 are provided. A separation mechanism 2 is provided in the filter chamber. The separation mechanism 2 includes at least two separation boxes 21. The separation box 21 is located below the corresponding water inlet pipe 12 and is adapted to the water inlet pipe 12. A separation port 24 is opened on the side of the separation box 21 away from the water inlet pipe 12.

[0023] It should be noted that since at least two water inlet pipes 12 are provided, the sewage pipe connected to the water inlet pipes 12 on the cutting equipment also needs to have at least two sewage outlets, and each sewage outlet can be independently controlled to open and close. This is a technology well known to those skilled in the art, and will not be described in detail in this embodiment.

[0024] Furthermore, when one of the separation boxes 21 or collection boxes 31 needs to be removed, there is no need to stop the equipment from running; simply close the drain port connected to the corresponding water inlet pipe 12.

[0025] In this embodiment, the specific implementation scenario is as follows: due to the high density of copper powder, when copper powder and cooling water are discharged into the separation box 21 together, the copper powder will gradually sink during the flow process. Finally, the cooling water is discharged from the separation port 24, while the copper powder will settle in the separation box 21, thereby completing the separation of copper powder and cooling water.

[0026] Refer to the instruction manual appendix Figure 3 and Figure 4In this embodiment, a number of deceleration plates 23 are arranged sequentially at the bottom of the separation box 21 along the water flow direction, and a number of corrugated baffles 22 are vertically arranged inside the separation box 21, with the corrugated baffles 22 arranged along the water flow direction.

[0027] It should be noted that the speed reducer 23 can be configured with a triangular cross-section or other similar shapes known to those skilled in the art, and the side of the speed reducer 23 facing the water inlet pipe 12 is perpendicular to the water flow direction of the water inlet pipe.

[0028] Furthermore, the corrugated baffle 22 can slow down the water flow speed and prolong the water flow time, thereby further improving the separation effect under the premise of the limited length of the separation box 21.

[0029] Refer to the instruction manual appendix Figure 2 and Figure 4 In this embodiment, a collection mechanism 3 is provided in the filter chamber. The collection mechanism 3 includes at least two collection boxes 31. The collection boxes 31 are located on the opposite side of the separation box 21 and the filter plate 4. A collection port 32 is provided on the side of the collection box 31 near the separation box 21. The collection port 32 is adapted to the separation port 24. The collection box 31 is made of a water-permeable material (capable of separating cooling water and silicon dust).

[0030] It should be noted that the dimensions of the separation box 21 and the collection box 31 can be adjusted according to the actual situation, and both the separation box 21 and the collection box 31 are equipped with detachable handles for easy handling by staff. The housing 11 has a support plate inside for placing the separation box 21 and the collection box 31.

[0031] Furthermore, during the dicing of common QFN and DFN chips, not only copper powder but also a significant amount of silicon shavings are generated. Both are mixed and discharged together in the cooling water. However, the density of copper is approximately 8.96 g / cm³. 3 The density of silicon is approximately 2.33 g / cm³. 3 The difference is significant. Therefore, when the cooling water is discharged into the separation box 21, the copper powder and silicon chips will separate into layers due to the density difference. The copper powder will settle down more quickly, while the silicon chips will remain suspended on the surface of the water flow and eventually be discharged from the separation port 24 into the collection box 31 for collection.

[0032] Refer to the instruction manual appendix Figure 1 and Figure 2 In this embodiment, the water inlet pipe 12 and the drain pipe 13 are arranged diagonally opposite each other. The water inlet pipe 12 is located above the drain pipe 13. The drain pipe 13 is connected to the drain cavity. A vent hole 14 is provided on one side of the housing 11, and the vent hole 14 is located above the water inlet pipe 12.

[0033] It should be noted that the vent 14 is designed to maintain a stable atmospheric pressure inside the housing 11, which facilitates the discharge of cooling water.

[0034] Refer to the instruction manual appendix Figure 1 and Figure 2 In this embodiment, a cleaning hole 15 is provided on one side of the housing 11, and a cover plate 16 is provided on the top of the housing 11.

[0035] It should be noted that the filter plate 4 and the housing 11 are detachably connected;

[0036] Furthermore, high-pressure water can be sprayed into the housing 11 through the cleaning hole 15, which facilitates cleaning of the inside of the housing 11.

[0037] Refer to the instruction manual appendix Figure 1 and Figure 2 In this embodiment, support components 17 are provided at the four bottom corners of the housing 11, and the height of the support components 17 is adjustable.

[0038] It should be noted that the support component 17 is a screw rod base or other devices with similar functions known to those skilled in the art, and will not be described in detail in this embodiment.

[0039] The embodiments described above are merely examples of several implementations of this utility model, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of this utility model patent. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this utility model, and these modifications and improvements all fall within the protection scope of this utility model.

Claims

1. A copper powder filter box for a cutting device, comprising: Box (1), the box (1) includes shell (11), the shell (11) is provided with water inlet pipe (12) and drain pipe (13) on both sides respectively, and a vertically installed filter plate (4) is provided inside the shell (11) along the water flow direction; The feature is that the housing (11) is divided into a filter chamber and a drain chamber by a filter plate (4), the water inlet pipe (12) is connected to the filter chamber, and at least two water inlet pipes (12) are provided. A separation mechanism (2) is provided in the filter chamber. The separation mechanism (2) includes at least two separation boxes (21). The separation box (21) is located below the corresponding water inlet pipe (12), and the separation box (21) is adapted to the water inlet pipe (12). A separation port (24) is opened on the side of the separation box (21) away from the water inlet pipe (12).

2. The copper powder filter box for cutting equipment according to claim 1, characterized in that, The bottom of the separation box (21) is provided with several deceleration plates (23) arranged in sequence along the water flow direction, and several corrugated baffles (22) are vertically arranged inside the separation box (21), the corrugated baffles (22) being arranged along the water flow direction.

3. A copper powder filter box for cutting equipment according to claim 2, characterized in that, The filter chamber is provided with a collection mechanism (3), which includes at least two collection boxes (31). The collection boxes (31) are located on the opposite side of the separation box (21) and the filter plate (4). The collection box (31) is provided with a collection port (32) on the side of the collection box (31) close to the separation box (21). The collection port (32) is adapted to the separation port (24). The collection box (31) is made of water-permeable material.

4. A copper powder filter box for a cutting device according to claim 3, characterized in that, The inlet pipe (12) and the drain pipe (13) are arranged diagonally opposite each other. The inlet pipe (12) is located above the drain pipe (13). The drain pipe (13) is connected to the drain cavity. A vent hole (14) is provided on one side of the housing (11), and the vent hole (14) is located above the inlet pipe (12).

5. A copper powder filter box for a cutting device according to claim 4, characterized in that, A cleaning hole (15) is provided on one side of the housing (11), and a cover plate (16) is provided on the top of the housing (11).

6. A copper powder filter box for a cutting device according to claim 5, characterized in that, The bottom four corners of the housing (11) are provided with support components (17), and the height of the support components (17) is adjustable.

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