A thickness detection apparatus

Abstract

This utility model belongs to the field of semiconductor wafer technology, specifically a thickness detection device, including a platform, a control box, and a sensor. The control box is located on one side of the platform. A support frame is fixedly connected to the surface of the platform, and a fixture is fixedly connected to the side wall of the support frame. The inner surface of the fixture is fixedly connected to the surface of the sensor, and a probe is fixedly connected to the bottom of the sensor. Two slide rails are fixedly connected to the upper surface of the platform, and a cleaning device is provided on the upper surface of the moving base. The cleaning device includes a fixing block, which is located directly above the moving base. A moving frame is slidably connected to the surface of the fixing block, and a placement block is inserted into the inner wall of the moving frame. By setting up the entire device, products can be inspected. This device can quickly measure the thickness value of any point on the carrier. By recording the coordinates of the measurement point and the thickness value, the data is processed by software and presented graphically, allowing for a direct view of the entire product's status.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor wafer technology, specifically a thickness detection device. Background Technology

[0002] Semiconductor wafers are the basic material of the semiconductor industry. They are usually circular thin films made of high-purity single-crystal silicon. In order to meet the needs of semiconductor wafer product supply chain factories, more and more factories are now demanding stricter requirements on the thickness and flatness of grinding and polishing carrier products. Therefore, factory operators need to inspect the products, usually manually using dial indicators.

[0003] Regarding the aforementioned and existing related technologies: due to the use of contact measurement methods, scratches and abrasions may be caused to the product, and the detection accuracy is greatly affected by the operator; since the product is a circular thin sheet and is relatively large, the detection process is very time-consuming, and there is a problem of difficulty in matching the data of the detection points with the actual detection points during the recording of detection values; therefore, a thickness detection device is proposed to address the above problems. Utility Model Content

[0004] In order to overcome the shortcomings of the prior art, at least one technical problem raised in the background art is solved.

[0005] The technical solution adopted by this utility model to solve its technical problem is as follows: The thickness detection device of this utility model includes a platform, a control box, and a sensor. The control box is located on one side of the platform. A support frame is fixedly connected to the surface of the platform. A fixture is fixedly connected to the side wall of the support frame. The inner surface of the fixture is fixedly connected to the surface of the sensor. A probe is fixedly connected to the bottom end of the sensor. Two slide rails are fixedly connected to the upper surface of the platform. A movable seat is slidably connected to the surface of the two slide rails. Pushing the movable seat allows it to slide on the slide rail surface. After the movable seat moves the product to a suitable position, the sensor is activated so that the probe can detect the product. By setting up the entire device, it is possible to facilitate the detection of products of different specifications to a certain extent.

[0006] Preferably, a main motor is fixedly connected to the upper surface of the movable base, and two drive wheels are rotatably connected to the output end of the main motor. When the motor starts, the main motor drives the two drive wheels to rotate, and the motor is configured to drive the two drive wheels to rotate simultaneously.

[0007] Preferably, a platform is rotatably connected to the upper surface of the movable seat. The platform is located between two drive wheels. When using the platform, the product is placed on the surface of the platform. By setting the platform, the product can be easily driven to rotate, thereby facilitating the detection of different positions of the product.

[0008] Preferably, the upper surface of the movable seat is rotatably connected to two support wheels, which are located directly below the platform. When the platform rotates, the platform will drive the support wheels to rotate, thus providing support for the platform.

[0009] Preferably, a servo module is fixedly connected to the upper surface of the platform, and an auxiliary motor is fixedly connected to the side wall of the servo module. The surface of the servo module is fixedly connected to the bottom of the moving base. The servo module drives the moving base to move. By setting the auxiliary motor and the servo module, the moving base can be driven to move its position.

[0010] Preferably, a fixed frame is fixedly connected to the bottom of the platform, and multiple casters are fixedly connected to the bottom of the fixed frame. The fixed frame drives the casters to roll on the ground. By setting the fixed frame and the casters, the position of the platform can be easily adjusted.

[0011] Preferably, the upper surface of the movable seat is provided with a cleaning device, which includes a fixed block located directly above the movable seat. A movable frame is slidably connected to the surface of the fixed block, and a placement block is inserted into the inner wall of the movable frame. A cleaning brush is fixedly connected to the inner surface of the placement block, and the cleaning brush is located on the surface of the platform. The placement block drives the cleaning brush to move, and the cleaning brush adheres to the platform. When the platform rotates, it moves on the surface of the cleaning brush. By setting the fixed block, the movable frame, the placement block, and the cleaning brush, the platform can be cleaned.

[0012] Preferably, the inner walls of the movable frame and the placement block are threadedly connected with fixing pins, and the inner surface of the movable frame is rotatably connected with a threaded rod. The surface of the threaded rod is threadedly connected to the inner wall of the fixing block, and the inner wall of the fixing block and the inner wall of the movable seat are threadedly connected with multiple limiting pins. When it is necessary to adjust the position of the movable frame, the threaded rod is rotated to allow the threaded rod to rotate on the inner surface of the movable frame and the inner wall of the fixing block. The threaded rod drives the movable frame to slide on the surface of the fixing block. By setting the threaded rod, the position of the movable frame can be easily adjusted.

[0013] The advantages of this utility model are:

[0014] 1. When product testing is required, the fixture is installed on the support frame, and the product is placed on the platform. When the position of the platform needs to be adjusted, the auxiliary motor is started to drive the servo module. The servo module drives the moving seat to move, and the moving seat slides on the slide rail surface. After the moving seat moves to the appropriate position, the main motor is started to drive the two drive wheels to rotate. The two drive wheels drive the platform to rotate, and the platform rotates on the moving seat surface. The platform drives the support wheels to rotate. During testing, the sensor inside the fixture is activated by operating the control box. The sensor probe detects the product. When the position of the entire device needs to be adjusted, the fixture is pushed to move the platform. The fixture also drives the casters to roll on the ground. By setting up the entire device, the product can be tested. This device can quickly measure the thickness value of any point on the carrier. By recording the coordinates of the measurement point and the thickness value, the data is processed by software and presented graphically, allowing a direct view of the entire product's status. Because non-contact sensors are used for testing, the testing process will not damage the product.

[0015] 2. After the entire device has been used for a certain period of time, the testing is stopped. The fixed block is placed on the surface of the moving seat, and the limiting pin is rotated to the inner wall of the fixed block and the moving seat. Then, the placement block is inserted into the inner wall of the moving frame, and the fixed pin is rotated to the inner wall of the moving frame and the placement block. When the placement block moves, it will drive the cleaning brush to move. The cleaning brush is in contact with the platform, and then the platform is rotated. The platform rotates on the surface of the cleaning brush, and the dust or particles swept out during cleaning are collected and cleaned. When testing is required, the threaded rod is rotated to make the threaded rod rotate on the inner surface of the moving frame and the inner wall of the fixed block. The threaded rod drives the moving frame to move. After the moving frame moves to the appropriate position, the threaded rod is stopped. By setting the entire device, the contact parts of the platform, support wheel and drive wheel can be cleaned, reducing the impact of particulate matter residue on the rotation of the platform. Attached Figure Description

[0016] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0017] Figure 1 This is a three-dimensional structural diagram of a platform in a thickness detection device;

[0018] Figure 2 This is a side view of the platform structure in a thickness detection device.

[0019] Figure 3This is a top view of the stage in a thickness detection device.

[0020] Figure 4 This is a side view of the movable base in a thickness detection device.

[0021] Figure 5 In a thickness detection device Figure 4 A schematic diagram of the structure at point A.

[0022] In the diagram: 1. Platform; 2. Support frame; 3. Fixture; 4. Sensor; 5. Probe; 6. Slide rail; 7. Movable seat; 8. Support wheel; 9. Platform; 10. Main motor; 11. Drive wheel; 12. Auxiliary motor; 13. Fixture; 14. Casters; 15. Control box; 16. Cleaning device; 161. Fixing block; 162. Movable frame; 163. Placement block; 164. Cleaning brush; 165. Fixing pin; 166. Threaded rod; 167. Limit pin; 17. Servo module. Detailed Implementation

[0023] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the scope of protection of the present utility model.

[0024] Please see Figure 1-5 As shown, a thickness detection device includes a platform 1, a control box 15, and a sensor 4. The control box 15 is located on one side of the platform 1. A support frame 2 is fixedly connected to the surface of the platform 1, and a fixture 3 is fixedly connected to the side wall of the support frame 2. The inner surface of the fixture 3 is fixedly connected to the surface of the sensor 4, and a probe 5 is fixedly connected to the bottom end of the sensor 4. Two slide rails 6 are fixedly connected to the upper surface of the platform 1, and a movable seat 7 is slidably connected to the surfaces of the two slide rails 6. During operation, the sensor 4 is fixed to the inner wall of the fixture 3, and the fixture 3 is installed at a suitable position on the surface of the support frame 2. Then, the product is placed on the upper surface of the movable seat 7, and the movable seat 7 is pushed to slide on the surface of the slide rails 6. After the movable seat moves the product to a suitable position, the sensor 4 is activated so that the probe 5 can detect the product. By setting up the entire device, it is possible to facilitate the detection of products of different specifications to a certain extent.

[0025] The upper surface of the movable base 7 is fixedly connected to a main motor 10, and the output end of the main motor 10 is rotatably connected to two drive wheels 11. During operation, the main motor 10 drives the two drive wheels 11 to rotate, and the motor is configured to drive the two drive wheels 11 to rotate simultaneously.

[0026] The upper surface of the movable seat 7 is rotatably connected to a platform 9, which is located between two drive wheels 11. During operation, the drive wheels 11 drive the platform 9 to rotate, and the platform 9 rotates on the upper surface of the movable seat 7. When using the platform 9, the product is placed on the surface of the platform 9. By setting the platform 9, it is convenient to drive the product to rotate, thereby facilitating the detection of different positions of the product.

[0027] The upper surface of the movable seat 7 is rotatably connected to two support wheels 8, which are located directly below the platform 9. During operation, the platform 9 drives the support wheels 8 to rotate, and the support wheels 8 can support the platform 9.

[0028] A servo module 17 is fixedly connected to the upper surface of the platform 1, and an auxiliary motor 12 is fixedly connected to the side wall of the servo module 17. The surface of the servo module 17 is fixedly connected to the bottom of the moving seat 7. During operation, the auxiliary motor 12 drives the components inside the servo module 17, and the servo module 17 drives the moving seat 7 to move. By setting the auxiliary motor 12 and the servo module 17, the moving seat 7 can be driven to move its position.

[0029] The bottom end of the platform 1 is fixedly connected to a fixed frame 13, and the bottom end of the fixed frame 13 is fixedly connected to multiple casters 14. When working, pushing the fixed frame 13 causes the fixed frame 13 to move the platform 1, and the fixed frame 13 drives the casters 14 to roll on the ground. By setting the fixed frame 13 and the casters 14, the position of the platform 1 can be easily adjusted.

[0030] The upper surface of the movable seat 7 is provided with a cleaning device 16. The cleaning device 16 includes a fixed block 161, which is located directly above the movable seat 7. A movable frame 162 is slidably connected to the surface of the fixed block 161. A placement block 163 is inserted into the inner wall of the movable frame 162. A cleaning brush 164 is fixedly connected to the inner surface of the placement block 163. The cleaning brush 164 is located on the surface of the platform 9. During operation, the movable frame 162 is pushed to slide on the surface of the fixed block 161. The movable frame 162 drives the placement block 163 to move. The placement block 163 drives the cleaning brush 164 to move. The cleaning brush 164 is in contact with the platform 9. When the platform 9 rotates, it will move on the surface of the cleaning brush 164. By setting the fixed block 161, the movable frame 162, the placement block 163 and the cleaning brush 164, the platform 9 can be cleaned.

[0031] The inner walls of the movable frame 162 and the placement block 163 are threadedly connected with fixing pins 165. The inner surface of the movable frame 162 is rotatably connected with a threaded rod 166. The surface of the threaded rod 166 is threadedly connected to the inner wall of the fixing block 161. The inner wall of the fixing block 161 and the inner wall of the movable seat 7 are threadedly connected with multiple limiting pins 167. During operation, the fixing pins 165 are rotated to the inner walls of the movable frame 162 and the placement block 163. After the fixing block 161 is placed on the surface of the platform 9, the limiting pins 167 are rotated to the inner walls of the fixing block 161 and the movable seat 7. When it is necessary to adjust the position of the movable frame 162, the threaded rod 166 is rotated to allow the threaded rod 166 to rotate on the inner surface of the movable frame 162 and the inner wall of the fixing block 161. The threaded rod 166 drives the movable frame 162 to slide on the surface of the fixing block 161. By setting the threaded rod 166, the position of the movable frame 162 can be easily adjusted.

[0032] Working principle: When product testing is required, the fixture 3 is installed on the support frame 2, and the product is placed on the stage 9. When the position of the stage 9 needs to be adjusted, the auxiliary motor 12 is started to drive the servo module 17. The servo module 17 drives the moving seat 7 to move. The moving seat 7 slides on the surface of the slide rail 6. After the moving seat 7 moves to the appropriate position, the main motor 10 is started to drive the two drive wheels 11 to rotate. The two drive wheels 11 drive the stage 9 to rotate. The stage 9 rotates on the surface of the moving seat 7, and the stage 9 drives the support frame 2 to rotate. When the support wheel 8 rotates, the sensor 4 inside the fixture 3 is activated via the control box 15 during testing. The probe 5 of the sensor 4 then detects the product. When the position of the entire device needs to be adjusted, the fixing frame 13 is pushed, causing the platform 1 to move. The fixing frame 13 also causes the casters 14 to roll on the ground. By setting up the entire device, the product can be tested. This device can quickly measure the thickness value of any point on the carrier. By recording the coordinates and thickness values ​​of the measurement points, the data is processed by software and presented graphically, providing a clear view of the entire process. The product status; because a non-contact sensor 4 is used for detection, the detection process will not damage the product; after the entire equipment has been used for a certain period of time, the detection is stopped, the fixing block 161 is placed on the surface of the moving seat 7, and then the limit pin 167 is rotated to the inner wall of the fixing block 161 and the moving seat 7. Then the placement block 163 is inserted into the inner wall of the moving frame 162, and then the fixing pin 165 is rotated to the inner wall of the moving frame 162 and the placement block 163. When the placement block 163 moves, it will drive the cleaning brush 164 to move. The cleaning brush 164 is in contact with the platform 9, and then the loading is allowed to proceed. The platform 9 rotates, and the platform 9 rotates on the surface of the cleaning brush 164. During cleaning, it collects and cleans the dust or particles swept out. When testing is required, the threaded rod 166 is rotated to make the threaded rod 166 rotate on the inner surface of the moving frame 162 and the inner wall of the fixed block 161. The threaded rod 166 drives the moving frame 162 to move. After the moving frame 162 moves to the appropriate position, the threaded rod 166 stops rotating. By setting the entire device, the contact parts of the platform 9, the support wheel 8, and the drive wheel 11 can be cleaned, reducing the impact of particulate matter residue on the rotation of the platform 9.

[0033] In the description of this specification, references to terms such as "an embodiment," "example," "specific example," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of the present invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.

[0034] The foregoing has shown and described the basic principles, main features, and advantages of this utility model. Those skilled in the art should understand that this utility model is not limited to the above embodiments. The embodiments and descriptions in the specification are merely illustrative of the principles of this utility model. Various changes and modifications can be made to this utility model without departing from its spirit and scope, and all such changes and modifications fall within the scope of the claimed utility model.

Claims

1. A thickness detection device, comprising a platform (1), a control box (15), and a sensor (4), wherein the control box (15) is located on one side of the platform (1); characterized in that: A support frame (2) is fixedly connected to the surface of the platform (1), a fixture (3) is fixedly connected to the side wall of the support frame (2), the inner surface of the fixture (3) is fixedly connected to the surface of the sensor (4), a probe (5) is fixedly connected to the bottom end of the sensor (4), and two slide rails (6) are fixedly connected to the upper surface of the platform (1), and a movable seat (7) is slidably connected to the surface of the two slide rails (6).

2. The thickness detection device according to claim 1, characterized in that: The upper surface of the movable seat (7) is fixedly connected to a main motor (10), and the output end of the main motor (10) is rotatably connected to two drive wheels (11).

3. The thickness detection device according to claim 2, characterized in that: The upper surface of the movable seat (7) is rotatably connected to a platform (9), which is located between two drive wheels (11).

4. The thickness detection device according to claim 3, characterized in that: The upper surface of the movable seat (7) is rotatably connected to two support wheels (8), which are located directly below the platform (9).

5. The thickness detection device according to claim 1, characterized in that: A servo module (17) is fixedly connected to the upper surface of the platform (1), and an auxiliary motor (12) is fixedly connected to the side wall of the servo module (17). The surface of the servo module (17) is fixedly connected to the bottom of the moving base (7).

6. The thickness detection device according to claim 1, characterized in that: The bottom of the platform (1) is fixedly connected to a fixed frame (13), and the bottom of the fixed frame (13) is fixedly connected to multiple casters (14).

7. The thickness detection device according to claim 1, characterized in that: The upper surface of the movable seat (7) is provided with a cleaning device (16). The cleaning device (16) includes a fixing block (161). The fixing block (161) is located directly above the movable seat (7). A movable frame (162) is slidably connected to the surface of the fixing block (161). A placement block (163) is inserted into the inner wall of the movable frame (162). A cleaning brush (164) is fixedly connected to the inner surface of the placement block (163). The cleaning brush (164) is located on the surface of the platform (9).

8. A thickness detection device according to claim 7, characterized in that: The inner walls of the movable frame (162) and the placement block (163) are threadedly connected with fixing pins (165), the inner surface of the movable frame (162) is rotatably connected with a threaded rod (166), the surface of the threaded rod (166) is threadedly connected to the inner wall of the fixing block (161), and the inner wall of the fixing block (161) is threadedly connected to the inner wall of the movable seat (7) with multiple limiting pins (167).

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