Chip air suction gripping device

Abstract

The utility model provides chip air suction gripping device, including mobile base, the output of elevating cylinder is connected with support disc, one end of first swing arm is connected with second swing arm through inner slide rod, and the both sides of mounting seat all are provided with mounting arm rod, and the bottom of mounting arm rod is installed with sucking disc, the utility model discloses mobile base is provided with support disc and motor support, and the first swing arm and second swing arm are supported through support disc and motor support, two groups of sucking disc are fixed in second swing arm one end, can swing first swing arm and second swing arm through rotary motor, and then adjust the angle of sucking disc suction, and elevating cylinder drives first swing arm and second swing arm to rise, adjust the height of sucking disc, and push out cylinder can promote second swing arm, make second swing arm elongation, in this way, can make the sucking disc of second swing arm front end elongation, carry out adsorption gripping to the chip semi -finished product in the position of being far apart, and the whole gripping process is simple and efficient, and the flexibility is high.

Description

Technical Field

[0001] This utility model belongs to the field of chip processing technology and relates to a chip air suction gripping device. Background Technology

[0002] Integrated circuits are a way to miniaturize circuits in electronics and are often manufactured on the surface of semiconductor wafers. After multiple processing steps, the final product is called a chip. Chip production requires the cooperation of multiple different devices, including specialized gripping equipment. When gripping chips, the main focus is on processing the semi-finished wafers. Therefore, there is a need for a device specifically designed for gripping wafers. Summary of the Invention

[0003] The purpose of this invention is to provide a chip air suction gripping device to solve the problems mentioned in the background art.

[0004] The objective of this utility model can be achieved through the following technical solutions:

[0005] A chip pneumatic gripping device includes a movable base, a lifting cylinder, and a support rod. The lifting cylinder is located at the top center of the movable base, and its output end is connected to a support plate. A motor support is located on one side of the middle of the support plate, and a rotary motor is mounted on the top of the motor support. The output end of the rotary motor is connected to a rotating seat. A first swing arm is located on one side of the rotating seat, and one end of the first swing arm is connected to a second swing arm via an inner sliding rod. One end of the second swing arm is connected to a mounting base, and mounting arms are located on both sides of the mounting base. A suction cup is mounted at the bottom end of each mounting arm.

[0006] In the aforementioned chip air suction gripping device, side supports are provided on both sides of the top of the movable base. A support rod is movably fitted inside the side support, and the top end of the support rod is connected to the bottom of the support plate.

[0007] In the chip air suction gripping device described above, a guide groove is provided inside the support disk, and a roller is installed at one end of the first swing arm, with the roller sliding inside the guide groove.

[0008] In the chip air suction gripping device described above, a push cylinder is installed at one end of the first swing arm, and the output end of the push cylinder is connected to the end position of the second swing arm via a push rod.

[0009] In the aforementioned chip air suction gripping device, sliding plates are slidably provided at both ends of the mounting arm, and one end of the sliding plate is connected to one end of the mounting arm. A locking screw is provided at the top of the mounting arm, and the bottom end of the locking screw is pressed against the sliding plate inside the mounting arm.

[0010] In the chip air suction gripping device described above, a fixed seat is provided on the side of the rotating seat, and a limiting end is provided at one end of the first swing arm, and the limiting end is fixed inside the fixed seat.

[0011] Compared with existing technologies, the advantages of this novel chip air suction gripping device are:

[0012] The mobile base of this application is equipped with a support plate and a motor support. The support plate and motor support support the first and second swing arms. Two sets of suction cups are fixed to one end of the second swing arm. The first and second swing arms can be swung by rotating the motor, thereby adjusting the angle of suction cups. At the same time, the lifting cylinder drives the first and second swing arms to rise, adjusting the height of the suction cups. The push-out cylinder can push the second swing arm, causing it to extend. In this way, the suction cup at the front end of the second swing arm can be extended to adsorb and grasp chip semi-finished products located at a distance. The entire grasping process is simple, efficient, and highly flexible. Attached Figure Description

[0013] Figure 1 This is a schematic diagram of the structure of the chip air suction gripping device of this utility model.

[0014] Figure 2 This is a schematic diagram of the first swing arm structure of the chip air suction gripping device of this utility model.

[0015] Figure 3 This is a schematic diagram of the suction cup installation structure of the chip air suction gripping device of this utility model.

[0016] In the diagram, 1. Movable base; 2. Lifting cylinder; 3. Side support; 4. Support rod; 5. Support plate; 6. Guide groove; 7. Motor support; 8. Rotary motor; 9. First swing arm; 10. Second swing arm; 11. Suction cup; 12. Push-out cylinder; 13. Rotary seat; 14. Limiting end; 15. Inner slide rod; 16. Mounting seat; 17. Slide plate; 18. Mounting arm. Detailed Implementation

[0017] The following are specific embodiments of the present invention, which are described in conjunction with the accompanying drawings. However, the present invention is not limited to these embodiments.

[0018] The chip pneumatic gripping device includes a movable base 1, a lifting cylinder 2, and a support rod 4. The lifting cylinder 2 is located at the top center of the movable base 1. The output end of the lifting cylinder 2 is connected to a support plate 5. A motor support 7 is located on one side of the middle of the support plate 5. A rotary motor 8 is mounted on the top of the motor support 7. The output end of the rotary motor 8 is connected to a rotating seat 13. A first swing arm 9 is located on one side of the rotating seat 13. One end of the first swing arm 9 is connected to a second swing arm 10 via an inner slide rod 15. One end of the second swing arm 10 is connected to a mounting base 16. Mounting arms 18 are located on both sides of the mounting base 16. A suction cup 11 is mounted at the bottom of the mounting arms 18. The rotary motor 8 is a commercially available device known to those skilled in the art. Here, we are only using it without making any structural or functional improvements, and we will not elaborate further.

[0019] like Figure 1 , Figure 2 , Figure 3 As shown, the chip air suction gripping device of this utility model has side supports 3 on both sides of the top of the movable base 1. The side supports 3 are movably fitted with support rods 4 inside, and the top of the support rods 4 is connected to the bottom of the support plate 5.

[0020] like Figure 1 , Figure 2 , Figure 3 As shown, the chip air suction gripping device of this utility model has a guide groove 6 inside the support disk 5, and a roller is installed at one end of the first swing arm 9, and the roller slides inside the guide groove 6.

[0021] like Figure 1 , Figure 2 , Figure 3 As shown, the chip air suction gripping device of this utility model has a push-out cylinder 12 installed at one end of the first swing arm 9. The output end of the push-out cylinder 12 is connected to the end of the second swing arm 10 through a push rod. The push-out cylinder 12 is a well-known device that can be purchased directly from the market and is known to those skilled in the art. Here we are just using it and have not made any structural or functional improvements to it. We will not go into details here.

[0022] like Figure 1 , Figure 2 , Figure 3 As shown, the chip air suction gripping device of this utility model has sliding plates 17 at both ends of the mounting arm 18, and one end of the sliding plate 17 is connected to one end of the mounting arm 18. A locking screw is provided at the top of the mounting arm 18, and the bottom end of the locking screw is pressed against the sliding plate 17 inside the mounting arm 18. This structure can adjust the distance between the two suction cups 11 to adapt to wafers of different sizes.

[0023] like Figure 1 , Figure 2 , Figure 3 As shown, the chip air suction gripping device of this utility model has a fixed seat on the side of the rotating seat 13, and a limiting end 14 is provided at one end of the first swing arm 9, and the limiting end 14 is fixed inside the fixed seat.

[0024] This utility model relates to a chip pneumatic gripping device. When gripping a chip wafer, the movable base 1 of this application is installed on the guide rail of the wafer processing table. In this way, the movable base 1 can slide on the guide rail to adjust its lateral position. During processing, the rotary motor 8 is started, which drives the first swing arm 9 and the second swing arm 10 to swing, thereby adjusting the angle of the suction cup 11 at the front end of the second swing arm 10. At the same time, the lifting cylinder 2 is started, which drives the first swing arm 9 and the second swing arm 10 to rise, adjusting the height of the suction cup 11. During the entire operation, the second swing arm 10 can also be pushed by the push cylinder 12 to extend the second swing arm 10. This allows the suction cup 11 at the front end of the second swing arm 10 to extend and grip the chip semi-finished product located at a distance. The structural design of this application makes the entire wafer gripping process simple, efficient, and highly flexible.

[0025] Contents not described in detail herein are existing technologies known to those skilled in the art. The specific embodiments described herein are merely illustrative examples illustrating the spirit of this invention. Those skilled in the art to which this invention pertains may make various modifications or additions to the described specific embodiments or use similar methods to substitute them, without departing from the spirit of this invention or exceeding the scope defined by the appended claims.

Claims

1. A chip suction gripping device comprising a moving base (1), a lifting cylinder (2) and a supporting rod body (4), characterized in that, The top end of the mobile base (1) is provided with a lifting cylinder (2), the output end of the lifting cylinder (2) is connected with a support disc (5), the middle side of the support disc (5) is provided with a motor support (7), the top of the motor support (7) is installed with a rotary motor (8), the output end of the rotary motor (8) is connected with a rotary seat (13), one side of the rotary seat (13) is provided with a first swing arm (9), one end of the first swing arm (9) is connected with a second swing arm (10) through an inner slide rod (15), one end of the second swing arm (10) is connected with a mounting seat (16), the two sides of the mounting seat (16) are provided with mounting arm rods (18), and the bottom end of the mounting arm rod (18) is installed with a suction disc (11).

2. The chip air-suction gripping device according to claim 1, characterized by The top of the mobile base (1) is provided with side supports (3) on both sides, the inside of the side support (3) is movably sleeved with a support rod body (4), and the top end of the support rod body (4) is connected to the bottom position of the support disc (5).

3. The chip air-suction gripping device according to claim 1, wherein The inside of the support disc (5) is provided with a guide sliding groove (6), one end of the first swing arm (9) is installed with a roller, and the roller slides in the inside of the guide sliding groove (6).

4. The chip air-suction gripping device according to claim 1, wherein One end of the first swing arm (9) is installed with a push-out cylinder (12), the output end of the push-out cylinder (12) is connected to the end position of the second swing arm (10) through a push rod.

5. The chip air-suction gripping device according to claim 1, wherein The two ends of the mounting arm rod (18) are slidably provided with slide plates (17), one end of the slide plate (17) is connected with one end of the mounting arm rod (18), the top of the mounting arm rod (18) is provided with a locking screw, and the bottom end of the locking screw is pressed on the slide plate (17) in the inside of the mounting arm rod (18).

6. The chip air-suction gripping device according to claim 1, wherein The side of the rotary seat (13) is provided with a fixing seat, one end of the first swing arm (9) is provided with a limiting end (14), and the limiting end (14) is fixed in the inside of the fixing seat.

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