Multi-angle adjustable base for full-spectrum ellipsometer

Abstract

The utility model discloses a multi -angle adjustable base for full -spectrum ellipsometer, including base, the rear end of base is located with surveying appearance mount, the position of base upper end and located surveying appearance mount front end installs base main part, the base main part is located with base plate, the base plate surface is located with adsorption formula fixed support, surveying appearance mount front end is located with first full -spectrum surveying appearance, second full -spectrum surveying appearance and third full -spectrum surveying appearance in the position of outer ring, and the support frame is located between second full -spectrum surveying appearance and surveying appearance mount. The utility model discloses a multi -angle adjustable base for full -spectrum ellipsometer, adopt advanced rotary compensator measurement result, and there is no surveying dead angle problem, and the influence of the rough surface caused by the elimination polarized effect on the result can also be eliminated, and the multi -incident angle structure design has enhanced the flexibility of instrument measurement, and especially suitable for the measurement occasion of complex sample.

Description

Technical Field

[0001] This utility model relates to the field of full-spectrum ellipsometer technology, and in particular to a base for a multi-angle adjustable full-spectrum ellipsometer. Background Technology

[0002] A full-spectrum ellipsometer base is a support device used to place objects when the full-spectrum ellipsometer is working. The full-spectrum ellipsometer is based on a high-sensitivity detection unit and analysis software specifically designed for perovskite solar cells. It is used to measure and analyze the layer structure and physical parameters of multilayer nanofilms in the photovoltaic perovskite field. With the continuous development of technology, people have increasingly higher requirements for full-spectrum ellipsometer bases.

[0003] Existing full-spectrum ellipsometer bases have certain drawbacks. First, they do not allow for convenient and quick rotation and adjustment of the measurement components. Their structure is relatively simple, which can lead to measurement blind spots. The depolarization effect caused by rough surfaces can also affect the results, making them unsuitable for use. Furthermore, the instrument's measurement flexibility is poor, making it unsuitable for more complex samples, which negatively impacts practical applications. Therefore, we propose a multi-angle adjustable full-spectrum ellipsometer base. Utility Model Content

[0004] Technical problem solved: In view of the shortcomings of the existing technology, this utility model provides a multi-angle adjustable full-spectrum ellipsometer base. It adopts an advanced rotation compensator to measure the results, eliminating the problem of measurement dead angles and also eliminating the influence of depolarization effect caused by rough surfaces on the results. The multi-incident angle structure design enhances the flexibility of the instrument measurement, making it particularly suitable for measuring complex samples. It can effectively solve the problems in the background technology.

[0005] Technical Solution: To achieve the above objectives, the technical solution adopted by this utility model is as follows: a base for a multi-angle adjustable full-spectrum ellipsometer, comprising a base, a measuring instrument mounting seat positioned at the rear end of the base, a base body mounted on the upper end of the base and at the front end of the measuring instrument mounting seat, a base plate positioned on the base body, an adsorption-type fixing support positioned on the surface of the base plate, a first full-spectrum measuring instrument, a second full-spectrum measuring instrument, and a third full-spectrum measuring instrument arranged at the outer ring of the front end of the measuring instrument mounting seat, a support frame positioned between the second full-spectrum measuring instrument and the measuring instrument mounting seat, and quick-release supports positioned between the first full-spectrum measuring instrument, the third full-spectrum measuring instrument, and the measuring instrument mounting seat.

[0006] Preferably, a measuring rod is positioned at the lower end of the support frame, and a monitoring probe is positioned at the bottom of the measuring rod. The monitoring probe is located directly above the substrate, and measuring probes are provided at the ends of the first full-spectrum measuring instrument, the monitoring probe, and the third full-spectrum measuring instrument.

[0007] Preferably, a positioning pin is positioned between the quick-release support and the measuring instrument mounting base, a rotary motor is mounted on the quick-release support, a rotating shaft is connected between the rotary motor and the third full-spectrum measuring instrument, a quick-release plate is positioned between the rotating shaft and the third full-spectrum measuring instrument, a first bolt assembly is positioned between the quick-release plate and the third full-spectrum measuring instrument, and a second bolt assembly is positioned between the rotary motor and the quick-release support.

[0008] Preferably, the bottom of the measuring rod monitors the position directly above the substrate via a monitoring probe, and the first full-spectrum measuring instrument and the third full-spectrum measuring instrument monitor the positions diagonally above the sides of the substrate via measuring instrument probes.

[0009] Preferably, the rotary motor is fixed by a second bolt assembly, the rotary motor drives the rotating shaft and drives the third full-spectrum measuring instrument to rotate and adjust, and the quick-release plate is fixed to the third full-spectrum measuring instrument by a first bolt assembly.

[0010] Preferably, the base and the measuring instrument mounting base are fixed together by bolts, and the first full-spectrum measuring instrument, the second full-spectrum measuring instrument, and the third full-spectrum measuring instrument respectively detect various angles on the substrate.

[0011] Beneficial effects: Compared with the prior art, this utility model provides a multi-angle adjustable full-spectrum ellipsometer base, which has the following beneficial effects: This multi-angle adjustable full-spectrum ellipsometer base adopts an advanced rotation compensator to measure the results, eliminating the problem of measurement dead angles and also eliminating the influence of depolarization effect caused by rough surfaces on the results. The multi-incident angle structure design enhances the flexibility of instrument measurement, making it particularly suitable for measuring complex samples. The entire full-spectrum ellipsometer base has a simple structure, is easy to operate, and performs better than traditional methods. Attached Figure Description

[0012] Figure 1 This is a schematic diagram of the overall structure of a base for a multi-angle adjustable full-spectrum ellipsometer according to the present invention.

[0013] Figure 2 This is a structural schematic diagram of point A in the enlarged view of the base for a multi-angle adjustable full-spectrum ellipsometer according to this utility model.

[0014] Figure 3This is a schematic diagram of the rotating structure of the bottom of the third full-spectrum measuring instrument in the base of a multi-angle adjustable full-spectrum ellipsometer according to this utility model.

[0015] Figure 4 This is a magnified structural diagram of point B in the base of a multi-angle adjustable full-spectrum ellipsometer according to the present invention.

[0016] In the diagram: 1. Base; 2. Measuring instrument mounting base; 3. First full-spectrum measuring instrument; 4. Support frame; 5. Second full-spectrum measuring instrument; 6. Quick-release bracket; 7. Third full-spectrum measuring instrument; 8. Measuring instrument probe; 9. Adsorption-type fixing bracket; 10. Base body; 11. Base plate; 12. Measuring rod; 13. Monitoring probe; 14. Positioning pin; 15. Rotary motor; 16. Rotating shaft; 17. Quick-release plate; 18. First bolt assembly; 19. Second bolt assembly. Detailed Implementation

[0017] The technical solution of this utility model will be clearly and completely described below with reference to the accompanying drawings and specific embodiments. However, those skilled in the art will understand that the embodiments described below are only some embodiments of this utility model, not all embodiments, and are only used to illustrate this utility model, and should not be regarded as limiting the scope of this utility model. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of this utility model. Where specific conditions are not specified in the embodiments, conventional conditions or conditions recommended by the manufacturer shall be followed. Where the manufacturers of reagents or instruments are not specified, they are all conventional products that can be purchased commercially.

[0018] In the description of this utility model, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the accompanying drawings and are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0019] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0020] like Figure 1-4 As shown, a multi-angle adjustable full-spectrum ellipsometer base includes a base 1, a measuring instrument mounting base 2 positioned at the rear end of the base 1, a base body 10 mounted on the upper end of the base 1 and at the front end of the measuring instrument mounting base 2, a base plate 11 positioned on the base body 10, an adsorption-type fixing support 9 positioned on the surface of the base plate 11, a first full-spectrum measuring instrument 3, a second full-spectrum measuring instrument 5, and a third full-spectrum measuring instrument 7 positioned at the outer ring of the front end of the measuring instrument mounting base 2, a support frame 4 positioned between the second full-spectrum measuring instrument 5 and the measuring instrument mounting base 2, and quick-release supports 6 positioned between the first full-spectrum measuring instrument 3, the third full-spectrum measuring instrument 7, and the measuring instrument mounting base 2. The measurement results are obtained using an advanced rotation compensator, eliminating measurement dead angles and the influence of depolarization effects caused by rough surfaces. The multi-incident angle structure design enhances the flexibility of the instrument measurement, making it particularly suitable for measuring complex samples.

[0021] Furthermore, a measuring rod 12 is positioned at the lower end of the support frame 4, and a monitoring probe 13 is positioned at the bottom of the measuring rod 12. The monitoring probe 13 is located directly above the substrate 11. Measuring probes 8 are provided at the ends of the first full-spectrum measuring instrument 3, the monitoring probe 13, and the third full-spectrum measuring instrument 7.

[0022] Furthermore, a positioning pin 14 is positioned between the quick-release support 6 and the measuring instrument mounting base 2. A rotary motor 15 is mounted on the quick-release support 6. A rotating shaft 16 is connected between the rotary motor 15 and the third full-spectrum measuring instrument 7. A quick-release plate 17 is positioned between the rotating shaft 16 and the third full-spectrum measuring instrument 7. A first bolt assembly 18 is positioned between the quick-release plate 17 and the third full-spectrum measuring instrument 7. A second bolt assembly 19 is positioned between the rotary motor 15 and the quick-release support 6.

[0023] Furthermore, the bottom of the measuring rod 12 monitors the position directly above the substrate 11 through the monitoring probe 13, and the first full-spectrum measuring instrument 3 and the third full-spectrum measuring instrument 7 monitor the positions diagonally above the sides of the substrate 11 through the measuring instrument probe 8, respectively.

[0024] Furthermore, the rotary motor 15 is fixed by the second bolt assembly 19, the rotary motor 15 drives the rotating shaft 16 and drives the third full-spectrum measuring instrument 7 to rotate and adjust, and the quick-release plate 17 is fixed to the third full-spectrum measuring instrument 7 by the first bolt assembly 18.

[0025] Furthermore, the base 1 and the measuring instrument mounting base 2 are fixed together by bolts, and the first full-spectrum measuring instrument 3, the second full-spectrum measuring instrument 5, and the third full-spectrum measuring instrument 7 respectively detect various angles on the substrate 11.

[0026] Working principle: This utility model includes a base 1, a measuring instrument mounting base 2, a first full-spectrum measuring instrument 3, a support frame 4, a second full-spectrum measuring instrument 5, a quick-release support 6, a third full-spectrum measuring instrument 7, a measuring instrument probe 8, an adsorption-type fixed support 9, a base body 10, a base plate 11, a measuring rod 12, a monitoring probe 13, a positioning pin 14, a rotary motor 15, a rotating shaft 16, a quick-release plate 17, a first bolt assembly 18, and a second bolt assembly 19. It adopts an advanced rotary compensator to measure the results, eliminating the problem of measurement dead angles and also eliminating the influence of the depolarization effect caused by rough surfaces on the results. The multi-incident angle structure design enhances the flexibility of the instrument measurement, making it especially suitable for measuring complex samples.

[0027] It should be noted that, in this document, relational terms such as first and second (number one, number two), etc., are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Without further limitations, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes said element.

[0028] The foregoing has shown and described the basic principles, main features, and advantages of this utility model. Those skilled in the art should understand that this utility model is not limited to the above embodiments. The embodiments and descriptions in the specification are merely illustrative of the principles of this utility model. Various changes and modifications can be made to this utility model without departing from its spirit and scope, and all such changes and modifications fall within the scope of the claimed utility model.

Claims

1. A base for a multi-angle adjustable full-spectrum ellipsometer, comprising a base (1), characterized in that: The measuring instrument mounting base (2) is positioned at the rear end of the base (1). A base body (10) is installed at the upper end of the base (1) and at the front end of the measuring instrument mounting base (2). A base plate (11) is positioned on the base body (10). An adsorption type fixing support (9) is positioned on the surface of the base plate (11). A first full-spectrum measuring instrument (3), a second full-spectrum measuring instrument (5), and a third full-spectrum measuring instrument (7) are arranged at the outer ring position of the front end of the measuring instrument mounting base (2). A support frame (4) is positioned between the second full-spectrum measuring instrument (5) and the measuring instrument mounting base (2). A quick-release support (6) is positioned between the first full-spectrum measuring instrument (3), the third full-spectrum measuring instrument (7), and the measuring instrument mounting base (2).

2. The base for a multi-angle adjustable full-spectrum ellipsometer according to claim 1, characterized in that: The support frame (4) has a measuring rod (12) positioned at its lower end, and a monitoring probe (13) is positioned at the bottom of the measuring rod (12). The monitoring probe (13) is located directly above the substrate (11). The ends of the first full-spectrum measuring instrument (3), the monitoring probe (13), and the third full-spectrum measuring instrument (7) are all equipped with measuring instrument probes (8).

3. The base for a multi-angle adjustable full-spectrum ellipsometer according to claim 1, characterized in that: A positioning pin (14) is positioned between the quick-release bracket (6) and the measuring instrument mounting base (2). A rotary motor (15) is mounted on the quick-release bracket (6). A rotating shaft (16) is connected between the rotary motor (15) and the third full-spectrum measuring instrument (7). A quick-release plate (17) is positioned between the rotating shaft (16) and the third full-spectrum measuring instrument (7). A first bolt assembly (18) is positioned between the quick-release plate (17) and the third full-spectrum measuring instrument (7). A second bolt assembly (19) is positioned between the rotary motor (15) and the quick-release bracket (6).

4. The base for a multi-angle adjustable full-spectrum ellipsometer according to claim 2, characterized in that: The bottom of the measuring rod (12) monitors the position directly above the substrate (11) through the monitoring probe (13), and the first full-spectrum measuring instrument (3) and the third full-spectrum measuring instrument (7) monitor the positions diagonally above the sides of the substrate (11) through the measuring instrument probe (8).

5. The base for a multi-angle adjustable full-spectrum ellipsometer according to claim 3, characterized in that: The rotary motor (15) is fixed by the second bolt assembly (19). The rotary motor (15) drives the rotating shaft (16) and drives the third full-spectrum measuring instrument (7) to rotate and adjust. The quick-release plate (17) is fixed to the third full-spectrum measuring instrument (7) by the first bolt assembly (18).

6. The base for a multi-angle adjustable full-spectrum ellipsometer according to claim 1, characterized in that: The base (1) is fixed to the measuring instrument mounting base (2) by bolts. The first full-spectrum measuring instrument (3), the second full-spectrum measuring instrument (5), and the third full-spectrum measuring instrument (7) respectively detect various angles on the substrate (11).

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