Target material ultrasonic cleaning tool

Abstract

The utility model relates to ultrasonic cleaning equipment technical field, concretely relates to a target material ultrasonic cleaning frock, including cleaning frame, the cleaning frame is installed in ultrasonic cleaning tank, the cleaning frame is rectangular, a plurality of groups of mounting brackets are installed in the middle equidistance of cleaning frame, and one end is provided with limit mechanism on mounting bracket, and limit mechanism is used for limiting target material, and the other end is provided with supporting mechanism on mounting bracket, and supporting mechanism is used for top material support to target material, and through limit mechanism and supporting mechanism, target material is positioned and placed, makes target material tilt and places, and the water of target material surface is convenient for quick loss after cleaning, improves the blowing area, and greatly improves the purging efficiency, improves production efficiency.

Description

Technical Field

[0001] This utility model relates to the field of ultrasonic cleaning equipment technology, and in particular to an ultrasonic cleaning fixture for target materials. Background Technology

[0002] In magnetron sputtering coating, ITO sputtering targets not only require high cleanliness of the coating equipment cavity, but also have equally stringent requirements for surface cleanliness. Therefore, to ensure the quality of the target during processing, appropriate cleaning treatment is usually required, and the cleaning of the target directly determines the surface cleanliness of the target.

[0003] When cleaning targets, cleaning fixtures are needed for placement. Existing fixtures use stainless steel frames with parallel nylon blocks embedded in them. The targets are placed horizontally on the stainless steel frames, and the nylon blocks on both sides limit the target's position. However, because the targets are placed horizontally, the residual moisture on the target surface after cleaning is not easy to drain. Even using automated equipment to blow dry the moisture on the target surface and in the gaps cannot quickly dry it. It is necessary to manually use an air gun to gradually blow along the target surface, which is time-consuming and labor-intensive, greatly reducing production efficiency and easily causing backplate oxidation, thus reducing product quality. Utility Model Content

[0004] In view of this, the purpose of this utility model is to propose an ultrasonic cleaning fixture for target materials to solve the problems of low production efficiency and product quality caused by blow-drying.

[0005] To achieve the above objectives, this utility model provides an ultrasonic cleaning fixture for a target material, including a cleaning frame installed in an ultrasonic cleaning tank. The cleaning frame is rectangular, and multiple mounting frames are installed at equal intervals in the middle of the cleaning frame. A limiting mechanism is provided at one end of the mounting frame to limit the target material, and a support mechanism is installed at the other end of the mounting frame to support the target material. The target material is positioned and placed by the limiting mechanism and the support mechanism.

[0006] A further improvement is that the limiting mechanism includes a limiting block with a snap-fit ​​groove, into which the end of the target material is inserted for limiting.

[0007] A further improvement is that a limiting plate is provided on one side of the snap-fit ​​groove, and the limiting plate and the side wall of the snap-fit ​​groove are connected by a spring.

[0008] A further improvement is that both the limiting block and the limiting plate are made of silicone with a hardness of 60; the limiting plate has an arc-shaped structure.

[0009] A further improvement is that the support mechanism includes a support base, which is slidably mounted on the mounting frame. A support frame is fixedly connected to the support base, and a nylon roller is mounted on the upper end of the support frame.

[0010] A further improvement is that a locking bolt is installed on the support base, and the support base is fixed to the mounting bracket by the locking bolt.

[0011] The beneficial effects of this utility model are as follows: By setting a limiting mechanism and a supporting mechanism for limiting and supporting the target material, one end of the target material is locked and limited by the snap-fit ​​groove on the limiting block, and the other end of the target material is supported by the support frame, so that the target material is placed at an angle on the cleaning rack. By placing the target material at an angle, after cleaning, the water on the surface of the target material can quickly flow and drip down along the slope, accelerating the loss of water on the surface of the target material. Furthermore, the subsequent automatic blowing equipment can blow along the slope, increasing the area blown by the air knife and greatly improving the blowing effect.

[0012] Nylon rollers are used for contact support from below. The nylon rollers can rotate without scratching the target surface and facilitate the placement of the target. The limiting blocks are made of silicone, which can maintain elasticity, make them more durable, and prevent damage to the target, thus improving the quality of the target. Attached Figure Description

[0013] To more clearly illustrate the technical solutions in this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only for this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0014] Figure 1 This is a schematic diagram of the cleaning rack structure according to an embodiment of the present utility model;

[0015] Figure 2 This is a schematic diagram of the mounting bracket structure according to an embodiment of the present utility model.

[0016] The diagram is marked as follows:

[0017] 1. Cleaning rack; 2. Mounting rack; 3. Limiting block; 4. Snap-fit ​​groove; 5. Limiting plate; 6. Spring; 7. Support base; 8. Support frame; 9. Nylon roller; 10. Locking bolt. Detailed Implementation

[0018] To make the objectives, technical solutions, and advantages of this utility model clearer, the present utility model will be further described in detail below with reference to specific embodiments.

[0019] It should be noted that, unless otherwise defined, the technical or scientific terms used in this utility model should have the ordinary meaning understood by one of ordinary skill in the art to which this utility model pertains. The terms "first," "second," and similar terms used in this utility model do not indicate any order, quantity, or importance, but are merely used to distinguish different components. Terms such as "comprising" or "including" mean that the element or object preceding the word encompasses the elements or objects listed following the word and their equivalents, without excluding other elements or objects. Terms such as "connected" or "linked" are not limited to physical or mechanical connections, but can include electrical connections, whether direct or indirect. Terms such as "upper," "lower," "left," and "right" are used only to indicate relative positional relationships; when the absolute position of the described object changes, the relative positional relationship may also change accordingly.

[0020] like Figure 1 , Figure 2 As shown, this embodiment provides an ultrasonic cleaning fixture for target materials, including a cleaning frame 1. The cleaning frame 1 is installed in the ultrasonic cleaning tank through a lifting mechanism, and the lifting mechanism drives the cleaning frame 1 to lift and clean. The cleaning frame 1 has a length of 4000mm and a width of 400mm, and is made of stainless steel square tubing with a thickness of 2.5mm and a diameter of 40mm*60mm.

[0021] The cleaning rack 1 is rectangular. Multiple sets of mounting racks 2 are installed at equal intervals in the middle of the cleaning rack 1. There are at least five sets of mounting racks 2. The mounting racks 2 are evenly distributed. A limiting mechanism is provided at one end of the mounting rack 2 to limit the target material. A support mechanism is provided at the other end of the mounting rack 2 to support the target material. The target material is positioned and placed by the limiting mechanism and the support mechanism.

[0022] The limiting mechanism includes a limiting block 3 with a locking groove 4. The end of the target material is inserted into the locking groove 4 for limiting. A limiting plate 5 is provided on one side of the locking groove 4. The limiting plate 5 has an arc-shaped structure. The limiting plate 5 and the side wall of the locking groove 4 are connected by a spring 6. After the target material is inserted into the locking groove 4, the limiting plate 5 clamps the target material through the action of the spring 6, reducing the gap between the target material and the locking groove 4, and further improving the stability of the target material engagement.

[0023] Both the limiting block 3 and the limiting plate 5 are made of silicone with a hardness of 60, which can maintain elasticity, make them more durable, and prevent scratches on the surface of the target material.

[0024] The support mechanism includes a support base 7, which is slidably mounted on the mounting frame 2. The position of the support base 7 can be adjusted by sliding on the mounting frame 2, allowing the target material to be tilted at different angles. A locking bolt 10 is installed on the support base 7. After the position is adjusted as needed, the support base 7 is fixed to the mounting frame 2 by the locking bolt 10. A support frame 8 is fixedly connected to the support base 7. A nylon roller 9 is installed on the upper end of the support frame 8. The upper end of the support frame 8 contacts and supports the target material through the nylon roller 9, effectively preventing scratches on the target material.

[0025] In use, adjust the distance between the support base 7 and the limiting block 3, and fix the support base 7 on the mounting frame 2 with the locking bolt 10. Place the target material on the mounting frame 2, insert one end of the target material into the snap-fit ​​groove 4 of the limiting block 3, and place the other end of the target material on the support frame 8. The support frame 8 contacts and supports the target material through the nylon roller 9 at the upper end, so that the target material is placed at an angle on the cleaning frame 1. The cleaning frame 1 extends into the cleaning tank for ultrasonic cleaning. After cleaning, the target material is removed from the cleaning tank, and the automatic blowing equipment blows along the inclined surface of the target material to improve the blowing efficiency.

[0026] Those skilled in the art should understand that the discussion of any of the above embodiments is merely exemplary and is not intended to imply that the scope of this utility model is limited to these examples; within the framework of this utility model, the technical features of the above embodiments or different embodiments can also be combined, the steps can be implemented in any order, and there are many other variations of the different aspects of this utility model as described above, which are not provided in the details for the sake of brevity. Any omissions, modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this utility model should be included within the protection scope of this utility model.

Claims

1. An ultrasonic cleaning fixture for a target material, comprising a cleaning rack (1) installed inside an ultrasonic cleaning tank, characterized in that, The cleaning rack (1) is rectangular. Multiple sets of mounting racks (2) are installed at equal intervals in the middle of the cleaning rack (1). A limiting mechanism is provided at one end of the mounting rack (2) to limit the target material. A support mechanism is installed at the other end of the mounting rack (2) to support the target material. The target material is positioned and placed by the limiting mechanism and the support mechanism.

2. The ultrasonic cleaning fixture for a target material according to claim 1, characterized in that, The limiting mechanism includes a limiting block (3), on which a snap-fit ​​groove (4) is provided, and the end of the target material is inserted into the snap-fit ​​groove (4) for limiting.

3. The ultrasonic cleaning fixture for a target material according to claim 2, characterized in that, A limiting plate (5) is provided on one side of the snap-fit ​​groove (4), and the limiting plate (5) and the side wall of the snap-fit ​​groove (4) are connected by a spring (6).

4. The ultrasonic cleaning fixture for a target material according to claim 3, characterized in that, Both the limiting block (3) and the limiting plate (5) are made of silicone with a hardness of 60; the limiting plate (5) has an arc-shaped structure.

5. The ultrasonic cleaning fixture for a target material according to claim 1, characterized in that, The support mechanism includes a support base (7), which is slidably mounted on the mounting frame (2). A support frame (8) is fixedly connected to the support base (7), and a nylon roller (9) is mounted on the upper end of the support frame (8).

6. The ultrasonic cleaning fixture for a target material according to claim 5, characterized in that, The support base (7) is equipped with locking bolts (10), and the support base (7) is fixed to the mounting bracket (2) by the locking bolts (10).

Images