Wafer temporary rescue storage device and wafer production line

Abstract

The utility model provides a kind of wafer temporary rescue storage device and wafer production line belong to semiconductor manufacturing field, wherein, the wafer temporary rescue storage device includes storage box and inflation assembly, storage box includes box main body and the tray of being located at the bottom of box main body;Inflation assembly includes inflation bottle and support pipe, inflation bottle is located at the side of box main body, for providing nitrogen, support pipe extends along up-down direction, support pipe one end is communicated with the exhaust port of inflation bottle, another segment is connected to the bottom of tray, and tray is provided with multiple air holes extending along up-down direction, multiple air holes are communicated with support pipe. Compared with prior art, the utility model is set by storage box and inflation bottle, solve the technical problem that additional power supply and inconvenient to use of existing wafer temporary storage device.

Description

Technical Field

[0001] This utility model belongs to the field of semiconductor manufacturing, and more specifically, it relates to a temporary wafer rescue storage device. This utility model also relates to a wafer production line equipped with the aforementioned temporary wafer rescue storage device. Background Technology

[0002] Chemical mechanical polishing (CMP) is a key technology for achieving wafer surface planarization in integrated circuit manufacturing. Unlike traditional purely mechanical or chemical polishing methods, CMP combines surface chemical action and mechanical abrasion to remove micron / nanoscale materials from the wafer surface, achieving a high degree (nanoscale) planarization effect and enabling subsequent photolithography processes. CMP technology combines mechanical and chemical polishing, offering significant advantages over other planarization techniques. It can not only perform localized treatment on the silicon wafer surface but also planarize the entire wafer surface, making it currently the only technology capable of achieving both global and local surface planarization.

[0003] In CMP processes, metal processing is frequently involved. When wafers are exposed to air, the metal undergoes oxidation, leading to product scrap. To prevent wafer scrap, engineers need to process the wafers and isolate them from oxygen as quickly as possible. Current methods have the following disadvantages: 1. Reliance on electrical energy: Existing technologies may require electrical power to operate, increasing energy consumption and environmental dependence. 2. Insufficient convenience: Lack of portable design, inflexible operation, and difficulty in quickly taking protective measures for the wafers, affecting processing efficiency. 3. Limited protection efficiency and effectiveness: The protection measures for wafers are inefficient, unable to effectively isolate oxygen, resulting in a high degree of metal oxidation on the wafer surface, making it difficult to effectively reduce product scrap rates. These disadvantages prompted this invention to improve wafer protection effectiveness through improvements such as no need for electrical energy and a portable design. Utility Model Content

[0004] The purpose of this invention is to provide a temporary storage device for wafer rescue, so as to solve the technical problems of existing temporary wafer storage devices requiring additional power and being inconvenient to use.

[0005] To achieve the above objectives, the technical solution adopted by this utility model is: to provide a temporary wafer rescue storage device, comprising:

[0006] A storage box, the storage box comprising a box body and a tray disposed at the bottom of the box body;

[0007] The inflation assembly includes an inflation cylinder and a support tube. The inflation cylinder is located on one side of the main body of the box and is used to provide nitrogen. The support tube extends in the vertical direction. One end of the support tube is connected to the exhaust port of the inflation cylinder, and the other end is connected to the bottom of the tray. The tray has multiple ventilation holes extending in the vertical direction, and all of the multiple ventilation holes are connected to the support tube.

[0008] In one feasible implementation, there are multiple support tubes, and each support tube is connected to multiple ventilation holes.

[0009] In one feasible implementation, the inflation assembly further includes a control valve and a first inflation line, the inflation cylinder is connected to the support pipe through the first inflation line, and the control valve is located in the first inflation line to control the opening and closing of the first inflation line.

[0010] In one feasible implementation, the temporary wafer rescue storage device further includes a mounting box, in which the gas cylinder is detachably disposed, the first gas filling pipeline and the control valve are both disposed in the mounting box, and the support pipe is disposed on the top of the mounting box.

[0011] In one feasible implementation, the top of the box body is provided with a cover plate, the surface of the cover plate is parallel to the horizontal direction, and the cover plate can move in the horizontal direction to open and close the box body.

[0012] In one feasible implementation, the mounting box is provided with handles on both sides for lifting the mounting box.

[0013] In one feasible implementation, the tray has an airflow channel inside, which connects the vent and the support tube.

[0014] In one feasible implementation, the upper surface of the tray is provided with a plurality of evenly arranged support protrusions, and the vent holes are located between adjacent support protrusions.

[0015] Compared with the prior art, the advantages of the temporary wafer salvage storage device provided by this utility model are as follows:

[0016] Firstly, during use, the aforementioned structure provides a sealed space, a tray to support the wafers, and an openable cover for easy access. The gas cylinder provides an inert nitrogen source, and the support tube serves as a gas delivery channel. Through the combination of these structures, the technical objective of accurately delivering nitrogen to the wafer storage area to create a protective atmosphere without the need for an external power source is achieved. This results in a highly portable device that effectively isolates and protects the wafers from oxygen, solving the technical problems of existing wafer storage boxes being inconvenient to carry, dependent on power supply, and prone to wafer oxidation due to insufficient oxygen isolation.

[0017] Secondly, by combining multiple support tubes with multiple vent holes connected to each other on the tray, nitrogen can diffuse upwards over a larger area and more evenly at the bottom of the tray, significantly improving the uniformity and consistency of nitrogen coverage on the wafer surface, eliminating gas dead zones, and solving the technical problem of insufficient gas coverage and high oxygen concentration in local areas of the wafer that may be caused by a single support tube supplying gas.

[0018] Furthermore, this utility model achieves the purpose of precisely adjusting or completely shutting off the flow rate of nitrogen from the filling cylinder to the support pipe through the cooperation of the first filling pipeline (connecting the filling cylinder and the support pipe) and the control valve (installed on the pipeline). This allows for on-demand control of nitrogen supply, avoidance of waste, and extension of the filling cylinder's service life. It helps to solve the technical problem that existing devices cannot conveniently adjust the nitrogen flow rate or stop the gas supply, resulting in unnecessary gas consumption.

[0019] Furthermore, the mounting box provides fixation and protection. The detachable gas cylinder serves as the core gas source, and the built-in gas supply control integrates the gas supply pipeline. This enables convenient replacement of the gas cylinder, compact integration of the gas supply control unit and the gas pipeline, and physical protection of the gas source and pipeline. As a result, the device achieves greater overall integrity, simpler maintenance (simply replace the cylinder), and easier portability and relocation. It solves the technical problems of exposed gas cylinders being easily damaged, cumbersome replacement operations, and scattered pipeline valves affecting portability.

[0020] Another objective of this invention is to provide a wafer production line, including the temporary wafer rescue storage device mentioned above.

[0021] Compared with the prior art, the wafer production line of this utility model has all the advantages of the above-mentioned temporary wafer rescue storage device. At the same time, this utility model also significantly improves the flexibility of the production line in dealing with emergencies, minimizes the risk of wafer exposure and oxidation during rescue, and ensures product yield. It solves the technical problem of the lack of a convenient, easy-to-use, power-free temporary wafer rescue storage solution that can provide sufficient inert gas protection in the production line. Attached Figure Description

[0022] To more clearly illustrate the technical solutions in the embodiments of this utility model, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort. In the drawings:

[0023] Figure 1 A side view schematic diagram of the temporary wafer rescue storage device provided by this utility model;

[0024] Figure 2 A top view schematic diagram of the temporary wafer rescue storage device provided by this utility model;

[0025] Figure 3 This is a schematic diagram showing the connection between the gas cylinder and the tray in the temporary wafer rescue storage device of this utility model.

[0026] In the picture:

[0027] 1. Storage box; 11. Box body; 12. Pallet; 121. Airflow channel; 122. Support protrusion; 123. Vent hole; 13. Cover plate;

[0028] 2. Inflation assembly; 21. Inflation cylinder; 22. Support tube; 23. First inflation line;

[0029] 3. Installation box. Detailed Implementation

[0030] It should be noted that, unless otherwise specified, the embodiments and features described in these embodiments can be combined with each other.

[0031] In the description of this utility model, it should be noted that if terms such as "upper", "lower", "inner", "back" or indicating orientation or positional relationship appear, they are based on the orientation or positional relationship shown in the accompanying drawings and are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0032] Furthermore, in the description of this utility model, unless otherwise explicitly defined, the terms "installation," "connection," "joining," and "connector" should be interpreted broadly. For example, a connection can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, or it can be a connection within two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model in light of the specific circumstances.

[0033] To make the technical problems, technical solutions, and beneficial effects of this utility model clearer, the present utility model will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the present utility model and are not intended to limit the present utility model.

[0034] Please refer to the following: Figures 1 to 3The present invention provides a temporary wafer storage device for emergency rescue. This temporary wafer storage device includes a storage box 1 and an inflation assembly 2. The storage box 1 includes a box body 11 and a tray 12 located at the bottom of the box body 11. The inflation assembly 2 includes an inflation cylinder 21 and a support tube 22. The inflation cylinder 21 is located on one side of the box body 11 and is used to provide nitrogen gas. The support tube 22 extends vertically, with one end connected to the exhaust port of the inflation cylinder 21 and the other end connected to the bottom of the tray 12. The tray 12 has multiple ventilation holes 123 extending vertically, all of which are connected to the support tube 22.

[0035] During use, the above structure provides a sealed space with the main body 11, a tray 12 to support the wafers, and an openable cover 13 for easy access. The gas cylinder 21 provides an inert nitrogen source, and the support tube 22 serves as a gas delivery channel. Through the cooperation of the above structures, the technical objective of accurately delivering nitrogen to the wafer storage area to form a protective atmosphere without the need for an external power source is achieved. This results in a highly portable device that effectively protects the wafers by isolating them from oxygen, thus solving the technical problems of existing wafer storage boxes being inconvenient to carry, dependent on power supply, and prone to wafer oxidation due to insufficient oxygen isolation.

[0036] In addition to the above-described embodiments, a preferred embodiment is proposed, wherein there are multiple support tubes 22, and each support tube 22 is connected to multiple vent holes 123. In this way, this embodiment, through the cooperation of multiple support tubes 22 (distributed at the bottom of the tray 12) and the multiple vent holes 123 connected to the tray 12 (forming a multi-point gas distribution network), allows nitrogen to form a larger coverage area at the bottom of the tray 12 and diffuse upwards more evenly. This significantly improves the uniformity and consistency of nitrogen coverage on the wafer surface, eliminates gas dead zones, and solves the technical problem of insufficient gas coverage and the presence of air impurities in local areas of the wafer that may be caused by a single support tube 22 supplying gas.

[0037] In one specific embodiment, the inflation assembly 2 further includes a control valve and a first inflation line 23. The inflation cylinder 21 is connected to the support pipe 22 through the first inflation line 23. The control valve is located in the first inflation line 23 and is used to control the opening and closing of the first inflation line 23. With this configuration, the flow rate of nitrogen from the inflation cylinder 21 to the support pipe 22 can be precisely adjusted or completely shut off by manually operating the control valve. This achieves the technical effects of controlling the nitrogen supply on demand, avoiding waste, extending the service life of the inflation cylinder 21, and improving operational flexibility. It solves the technical problem that existing devices cannot conveniently adjust the nitrogen flow rate or stop the gas supply, resulting in unnecessary gas consumption.

[0038] In one feasible embodiment, the temporary wafer rescue storage device also includes a mounting box 3. The gas cylinder 21 is detachably installed in the mounting box 3. The first gas filling pipeline 23 and the control valve are both installed in the mounting box 3. The support pipe 22 is installed on the top of the mounting box 3. With this configuration, this embodiment achieves convenient replacement of the gas cylinder 21, compact integration of the gas supply control unit and the gas delivery pipeline, and physical protection. This results in a stronger overall device, simpler maintenance (simply replace the cylinder), and more convenient carrying and movement. It solves the technical problems of the gas cylinder 21 being exposed and easily damaged, cumbersome replacement operation, and scattered pipelines and valves affecting portability.

[0039] In one feasible embodiment, a cover plate 13 is provided on the top of the main body 11 of the enclosure. The surface of the cover plate 13 is parallel to the horizontal direction, and the cover plate 13 can move in the horizontal direction to open and close the main body 11 of the enclosure. The cover plate 13 can be slid in the horizontal direction to quickly open or close the enclosure opening. The operation of storing and retrieving wafers is simple and fast. Moreover, the opening process occupies little space and does not easily disturb the surrounding environment. It will not cause too much interference to the gas inside the main body 11. This solves the technical problems of traditional top-hinged or complex hinged cover plates 13 having slow opening and closing action, occupying a lot of space, and causing rapid convection of gas inside and outside the main body 11.

[0040] In one feasible embodiment, the mounting box 3 is provided with handles on both sides for lifting the mounting box 3, providing the operator with a stable and ergonomic point of force application, so that the entire device (including the nitrogen cylinder) can be easily and safely lifted, carried and moved.

[0041] In one feasible embodiment, the tray 12 is provided with an air flow channel 121 inside. The air flow channel 121 is used to connect the vent hole 123 and the support tube 22. Through the cooperation of the air flow channel 121 (as a cavity type or multi-branch channel) inside the tray 12 with the support tube 22 (gas source inlet) and multiple vent holes 123 (gas outlet), nitrogen gas is collected and distributed inside the tray 12 and flows evenly to the upper surface of the tray 12 through the vent holes 123.

[0042] In one feasible embodiment, the upper surface of the tray 12 is provided with a plurality of evenly arranged support protrusions 122, and the vent holes 123 are located between adjacent support protrusions 122. In this way, through the cooperation of the evenly arranged support protrusions 122 (physically supporting the wafer) on the upper surface of the tray 12 and the vent holes 123 (releasing nitrogen gas) located between adjacent support protrusions 122, not only can the wafer be stably supported, but the outlet of the vent hole 123 can also be ensured not to be completely covered and blocked by the bottom surface of the wafer, forming a gas flow gap, so that nitrogen gas can smoothly overflow from the vent hole 123 and diffuse to the bottom surface of the wafer and the surrounding space, achieving effective gas protection on both sides of the wafer. At the same time, the support protrusions 122 also prevent the bottom surface of the wafer from directly contacting the tray surface of the tray 12, making it more convenient to pick up and put down the wafer on the tray 12.

[0043] In summary, compared with the prior art, the wafer temporary rescue storage device provided by this utility model, through the cooperation of the storage box 1 (the main body 11 provides a sealed space, the tray 12 carries the wafer, and the horizontally sliding cover 13 can be opened and closed quickly) and the gas filling component 2 (the gas cylinder 21 provides a power-free nitrogen source, the support tube 22 delivers gas, and the vent 123 releases nitrogen), combined with the control valve to precisely adjust the airflow, the installation box 3 integrating a detachable gas cylinder and handle to improve portability, the internal air flow channel 121 of the tray 12 to optimize distribution, and the support protrusion 122 to ensure smooth gas flow, constructs a power-free integrated nitrogen protection system. This achieves the purpose of portable storage and retrieval of wafers in temporary rescue and efficient isolation of oxygen. It achieves the technical effects of lightweight deployment, uniform gas coverage, and flexible and reliable operation, and completely solves the technical problems of existing wafer temporary storage boxes being inconvenient to carry, dependent on external power sources, and insufficient oxygen isolation leading to wafer oxidation. Furthermore, the distributed cooperation of multiple support tubes 22 and vent holes 123 improves gas uniformity, the gap cooperation between support protrusions 122 and vent holes 123 prevents wafers from clogging vents, and the structural cooperation between the mounting box 3 and the handle enables convenient overall movement, allowing the device to be quickly deployed as an emergency node in the wafer production line to maximize wafer salvage yield.

[0044] Based on the same inventive concept, this utility model also proposes a wafer production line, which includes the wafer temporary rescue storage device mentioned above.

[0045] Compared with the prior art, the wafer production line of this utility model has all the advantages of the above-mentioned temporary wafer rescue storage device. At the same time, this utility model also significantly improves the flexibility of the production line in dealing with emergencies, minimizes the risk of wafer exposure and oxidation during rescue, and ensures product yield. It solves the technical problem of the lack of a convenient, easy-to-use, power-free temporary wafer rescue storage solution that can provide sufficient inert gas protection in the production line.

[0046] The above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. A temporary storage device for wafer rescue, characterized in that, include: Storage box (1), the storage box (1) includes a box body (11) and a tray (12) disposed at the bottom of the box body (11), and the top of the box body (11) is provided with an openable and closable cover plate (13); The inflation assembly (2) includes an inflation bottle (21) and a support tube (22). The inflation bottle (21) is located on one side of the main body (11) of the box and is used to provide nitrogen. The support tube (22) extends in the vertical direction. One end of the support tube (22) is connected to the exhaust port of the inflation bottle (21), and the other end is connected to the bottom of the tray (12). The tray (12) has multiple ventilation holes (123) extending in the vertical direction, and all of the multiple ventilation holes (123) are connected to the support tube (22).

2. The wafer temporary rescue storage device as described in claim 1, characterized in that, There are multiple support tubes (22), and each support tube (22) is connected to multiple ventilation holes (123).

3. The temporary wafer salvage storage device as described in claim 1, characterized in that, The inflation assembly (2) further includes a control valve and a first inflation line (23). The inflation cylinder (21) is connected to the support pipe (22) through the first inflation line (23). The control valve is located in the first inflation line (23) and is used to control the opening and closing of the first inflation line (23).

4. The wafer temporary rescue storage device as described in claim 3, characterized in that, The temporary wafer rescue storage device also includes a mounting box (3), the gas cylinder (21) is detachably located in the mounting box (3), the first gas filling pipeline (23) and the control valve are both located in the mounting box (3), and the support pipe (22) is located on the top of the mounting box (3).

5. The temporary wafer rescue storage device as described in claim 1, characterized in that, The box body (11) is provided with a cover plate (13) on the top. The surface of the cover plate (13) is parallel to the horizontal direction, and the cover plate (13) can move in the horizontal direction to open and close the box body (11).

6. The temporary wafer salvage storage device as described in claim 4, characterized in that, The mounting box (3) is provided with handles on both sides for lifting the mounting box (3).

7. The temporary wafer salvage storage device as described in claim 1, characterized in that, The tray (12) is provided with an air channel (121) inside, which is used to connect the vent (123) and the support tube (22).

8. The temporary wafer salvage storage device as described in claim 7, characterized in that, The upper surface of the tray (12) is provided with a plurality of evenly arranged support protrusions (122), and the vent (123) is located between adjacent support protrusions (122).

9. A wafer production line, characterized in that, Includes a temporary storage device for wafer rescue as described in any one of claims 1 to 8.

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