A magnetic rod adjusting assembly for magnetron sputtering

Abstract

The utility model discloses a magnetic control sputtering is with magnetic bar adjusting assembly, including shell body and magnetic yoke subassembly, the shell body is towards the channel who has set up with magnetic yoke subassembly side corresponding, adjusting assembly includes servo motor, transmission assembly, nut, screw rod and mounting seat, the axis of servo motor with the axis of screw rod is perpendicular, the screw rod passes mounting seat and the channel is connected with magnetic yoke subassembly after, servo motor drives screw rod along its axial linear reciprocation through transmission assembly and nut, through setting adjusting assembly, adjusting assembly's output end action, drive magnetic yoke subassembly partial change and sputtering target surface's distance close or away, and then carry out the adjustment to partial magnetic field intensity, realize to sputtering target surface's coating thickness carries out real -time control, make the coating thickness of coating product tend to be consistent, to improve the quality of coating product.

Description

Technical Field

[0001] This utility model belongs to the field of magnetron sputtering technology, specifically relating to a magnetic rod adjustment component for magnetron sputtering. Background Technology

[0002] Physical vapor deposition (PVD) using sputtering has become a standard technique for customizing the properties of materials such as glass plates or other rigid or flexible materials. "Sputtering" refers to the projectile ejection of positively charged ions (typically argon ions) from a sputtering target. These positively charged ions are accelerated by an electric field directed at a negatively charged sputtering target. The positive ions are formed through impact ionization in a low-pressure gas phase. The ejected atoms bombard the substrate to be coated, forming a dense, well-adhered film. A drawback is the need to turn on the magnetron, requiring the vacuum to be removed for adjustment and then reapplied afterward. This is very time-consuming. One of the process challenges is the inclusion of a magnetic field generator within the sputtering target. Oriented towards the substrate, the magnetic field generator is typically kept stationary while the columnar sputtering target rotates in front of it. High-performance permanent magnets based on Fe-Nd-B or Co-Sm alloys are used to generate the magnetic field. Because the magnetic field component parallel to the sputtering target surface determines the range of electrons in the plasma, it is important to control this component along the length of the tube. Unfortunately, the magnetic flux density (in Tesla) of this component typically decreases at least with the square of the distance to the magnetic field generator, and is therefore very sensitive to the position of the magnetic field generator relative to the sputtering target surface. The distance between the sputtering target surface and the magnetic field generator must therefore be well controlled; otherwise, the plasma will exhibit localized intensity variations, which can correspondingly lead to non-uniform coating profiles on the substrate. Therefore, a power mechanism is needed to drive the magnetic rod to adjust its distance relative to the substrate. Summary of the Invention

[0003] The purpose of this invention is to provide a magnetic rod adjustment assembly for magnetron sputtering, which is intended to provide power for adjusting the magnetic rod.

[0004] To solve the above-mentioned technical problems, the objective of this invention is achieved as follows:

[0005] A magnetron sputtering rod adjustment assembly includes a housing and a yoke assembly. The housing has a channel facing the side where the yoke assembly is located. The adjustment assembly includes a servo motor, a transmission assembly, a nut, a lead screw, and a mounting base. The axis of the servo motor is perpendicular to the axis of the lead screw. The lead screw passes through the mounting base and the channel and is connected to the yoke assembly. The servo motor drives the lead screw to reciprocate linearly along its axial direction through the transmission assembly and the nut.

[0006] Based on the above solution and as a preferred embodiment of the above solution: the mounting base closes the channel.

[0007] Based on the above solution and as a preferred embodiment of the above solution: the nut is installed in the mounting hole in the middle of the mounting base, and a sealing element is provided between the mounting hole and the outer peripheral surface of the nut.

[0008] Based on the above scheme and as a preferred embodiment of the above scheme: the threaded hole on the nut that connects to the threaded section of the lead screw is a blind hole.

[0009] Based on the above scheme and as a preferred embodiment of the above scheme: the magnetic yoke assembly includes a connector, which is fixedly installed on the end face of the support plate facing the outer shell, and the connector is detachably connected to the lower end of the lead screw.

[0010] Based on the above scheme and as a preferred embodiment of the above scheme: the connector is provided with a mounting hole, the lead screw is inserted into the mounting hole, a pin passes through the connector and the lead screw from the side of the connector, and the pin is axially limited by an elastic lock.

[0011] The outstanding and beneficial technical effects of this invention compared to the prior art are: by setting an adjustment component, the output end of the adjustment component moves, causing the magnetic yoke component to locally change its distance from the sputtering target surface, thus adjusting the local magnetic field strength and realizing real-time control of the coating thickness on the sputtering target surface, making the coating thickness of the coated product tend to be uniform, thereby improving the quality of the coated product. Attached Figure Description

[0012] Figure 1 This is a partial sectional view of the overall structure of this utility model;

[0013] Figure 2 yes Figure 1 Enlarged view of a section in area III;

[0014] Figure 3 This is a schematic diagram of the magnetic yoke assembly structure;

[0015] Figure 4 yes Figure 3 Enlarged view of section V in the middle;

[0016] Figure 5 This is a 3D schematic diagram of the adjustment component structure; Detailed Implementation

[0017] To make the objectives, technical solutions, and advantages of this application clearer, the technical solutions in the embodiments will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the given embodiments, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0018] In the description of this application, it should be understood that the terms "upper" and "lower" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application.

[0019] In the description of this application, the terms "first," "second," etc., are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated.

[0020] Combination Figure 1-5As shown, this utility model discloses a magnetic rod adjustment assembly for magnetron sputtering, including a housing 11, a magnetic yoke assembly 20, and an adjustment assembly 50. The housing 11 is hollow, forming a receiving chamber, and has an opening at its upper end connecting the receiving chamber to the outside. The upper cover assembly includes multiple upper cover plates. After the adjustment assembly 50 and other components are installed inside the receiving chamber, the upper cover plates are fixedly installed at the opening of the housing 11, sealing the receiving chamber. The upper cover assembly seals the opening. By providing the upper opening, it is convenient to install the adjustment assembly and other components inside the receiving chamber. The upper cover assembly seals the opening, isolating it from the outside during magnetron sputtering and preventing water or other media from entering the receiving chamber and causing equipment damage. The magnetic yoke assembly 20 is located below the outer casing 11; it includes a support plate 21 and a magnetic rod body 22, with the magnetic rod body 22 fixedly mounted on the support plate 21. Alternatively, a magnet receiving cavity can be provided on the support plate 21, and several magnets can be arranged in the magnet receiving cavity according to the required magnetic field, and then the magnet receiving cavity can be closed to form the magnetic yoke assembly. Multiple adjustment components 50 are independently controlled and are arranged along the length of the magnetic yoke assembly 20 and located within the receiving cavity. The output end of each adjustment component 50 reciprocates vertically to the magnetic yoke assembly 20 and extends from the side wall of the receiving cavity towards the side where the magnetic yoke assembly 20 is located, hinged to the magnetic yoke assembly 20. By adjusting the output end of the adjustment component 50, the magnetic yoke assembly is locally pushed outward or pulled inward, so that the magnetic yoke assembly 20 will elastically deform within its elastic deformation range or within the range that its strength and shape can withstand. Since the magnetic field component parallel to the sputtering target surface determines the range of electrons in the plasma, it is important to control this component along the length of the tube. The magnetic flux density (in Tesla) typically decreases by at least the square of the distance to the magnetic field generator, making it highly sensitive to the position of the magnetic field generator relative to the sputtering target surface. In actual testing, a deformation of less than 4 mm in the magnetic rod is sufficient to meet practical requirements, thereby causing the magnetic yoke assembly 20 to partially or completely change its distance from the sputtering target surface. By setting multiple adjustment components with multiple connection points to the magnetic yoke assembly, the output of the adjustment components causes the corresponding magnetic yoke assembly to locally change its distance from the sputtering target surface, moving closer or further away. This adjusts the local magnetic field strength, enabling real-time online control of the coating thickness on the sputtering target surface. This ensures a more uniform coating thickness on the coated products, improving product quality without the need for vacuum removal, thus significantly increasing production efficiency.Specifically, in this embodiment, the adjustment component 50 includes a servo motor 51, a first bevel gear 53, a second bevel gear 54, a nut 52, and a lead screw 55. The first bevel gear 53 is fixedly mounted on the spindle of the servo motor 51, the second bevel gear 54 is fixedly connected to the nut 52, and the nut 52 is threaded onto the lead screw 55. The first bevel gear 53 and the second bevel gear 54 mesh with each other, so that the axis of the servo motor 51 is perpendicular to the axis of the lead screw 55. The mounting base 56 facilitates the installation of the adjustment component and also helps to seal the channel. It allows the output end of the adjustment component to move flexibly while maintaining a seal between the two. Furthermore, it facilitates easier disassembly and replacement when the seal ages or leaks. The perpendicular alignment of the servo motor and the lead screw axis significantly shortens the overall size of the adjustment component, making it easier to fit into a confined housing. Furthermore, in this preferred embodiment, the adjusting component 50 also includes a mounting base 56. A channel 112 is correspondingly provided on the side of the outer casing 11 facing the magnetic yoke component 20. The nut 53 is movably mounted on the mounting base 56, and its lead screw 55 extends downward from the center of the mounting base 56, passes through the channel 112, and connects to the magnetic yoke component 20. The mounting base 56 contacts the bottom surface of the accommodating chamber at the edge of the channel 112, and a sealing element is provided between the contact surfaces of the mounting base 56 and the edge of the channel 112, thereby achieving a seal between the mounting base 56 and the channel 112. The nut 52 is installed in the mounting hole in the center of the mounting base 56, and a sealing element, such as a skeleton oil seal, is provided between the mounting hole and the outer peripheral surface of the nut 52, forming a seal between the nut 52 and the mounting base 56. Of course, it should be noted that the threaded hole 521 on the nut 52 that connects to the threaded section 552 of the lead screw 55 is a blind hole. This design only needs to ensure a reliable seal between the outer circumferential surface of the nut 52 and the mounting base 56, without causing leakage between the lead screw 55 and the threaded hole. Furthermore, considering that the nut 52 can rotate flexibly and withstand a certain axial force, this embodiment preferably provides a combination of thrust bearings and angular contact bearings between the nut 52 and the upper end face of the mounting base 56 and / or the mounting hole; of course, it also includes necessary axial limiting components to limit any possible axial movement of the nut 52, such as... Figure 2 The limiting plate 57 shown is connected to the mounting base 56 and limits the axial movement of the nut 52. In this embodiment, the magnetic yoke assembly 20 includes a connector 23, which is fixedly mounted on the end face of the support plate 21 facing the outer casing, and is detachably connected to the lower end of the lead screw 55. Specifically, as shown... Figure 2 and Figure 4As shown, the connector 23 is provided with a mounting hole 231. The lead screw 55 is inserted into the mounting hole 231. A pin 553 passes through the connector 23 and the lead screw 55 from the side, and the pin 553 is axially limited by an elastic lock 554. The pin connection structure is simple and reliable, and disassembly and assembly are very convenient.

[0021] The above embodiments are merely preferred embodiments of the present invention and are not intended to limit the scope of protection of the present invention. Therefore, all equivalent changes made in accordance with the structure, shape, and principle of the present invention should be covered within the scope of protection of the present invention.

Claims

1. A magnetic rod adjustment assembly for magnetron sputtering, comprising a housing (11) and a magnetic yoke assembly (20), characterized in that: The outer casing (11) has a channel (112) facing the side where the magnetic yoke assembly (20) is located; the adjustment assembly (50) includes a servo motor (51), a transmission assembly, a nut (52), a lead screw (55) and a mounting base (56); the axis of the servo motor (51) is perpendicular to the axis of the lead screw (55), and the lead screw (55) passes through the mounting base (56) and the channel (112) and is connected to the magnetic yoke assembly (20); the servo motor (51) drives the lead screw (55) to reciprocate linearly along its axis through the transmission assembly and the nut (52).

2. The magnetic rod adjustment assembly for magnetron sputtering according to claim 1, characterized in that: The mounting base (56) closes the channel (112).

3. The magnetic rod adjustment assembly for magnetron sputtering according to claim 1, characterized in that: The nut (52) is installed in the mounting hole in the middle of the mounting base (56), and a sealing element is provided between the mounting hole and the outer peripheral surface of the nut (52).

4. The magnetic rod adjustment assembly for magnetron sputtering according to claim 3, characterized in that: The threaded hole (521) on the nut (52) that connects to the threaded section (552) of the lead screw (55) is a blind hole.

5. The magnetic rod adjustment assembly for magnetron sputtering according to claim 4, characterized in that: The magnetic yoke assembly (20) includes a connector (23), which is fixedly installed on the end face of the support plate (21) facing the outer shell (11), and the connector (23) is detachably connected to the lower end of the lead screw (55).

6. The magnetic rod adjustment assembly for magnetron sputtering according to claim 5, characterized in that: The connector (23) is provided with a mounting hole (231), the lead screw (55) is inserted into the mounting hole (231), a pin (553) passes through the connector (23) and the lead screw (55) from the side, and the pin (553) is axially limited by an elastic latch (554).

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