A coating equipment convenient to clean
By applying a polytetrafluoroethylene (PTFE) anti-stick coating, an automatically adaptable workpiece fixing structure, a vacuum system, and safe and convenient devices to the coating equipment, the problems of unstable fixing and difficult cleaning in traditional coating equipment have been solved, achieving a high-quality, stable, and efficient coating process.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- 纳弧纳米(无锡)有限公司
- Filing Date
- 2025-06-20
- Publication Date
- 2026-06-05
AI Technical Summary
Traditional coating equipment is difficult to fix workpieces of different sizes, which makes them prone to shaking and displacement during the coating process, affecting the coating quality. It is also difficult to clean, and impurities and cross-contamination are likely to occur.
The use of a PTFE non-stick coating reduces deposit adhesion and facilitates cleaning; the structure of connecting frames, chutes, brackets, springs, clamps, and rubber pads automatically adapts to the size of the workpiece to ensure fixation; the vacuum system, heating device, and magnetron sputtering device achieve a stable coating environment and uniform coating; sealed doors and inlets/outlets ensure a vacuum environment; casters and brakes facilitate movement and fixation; transparent observation windows and status indicator lights enhance safety and ease of operation.
It improves coating quality and uniformity, simplifies the cleaning process, reduces downtime, extends equipment life, avoids safety hazards and impurity residue, and ensures the stability of the vacuum environment and the efficient operation of the equipment.
Smart Images
Figure CN224325403U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of coating equipment, specifically a coating equipment that is easy to clean. Background Technology
[0002] In modern industrial production, coating technology is widely used in many fields such as semiconductor manufacturing, optical device processing, automotive parts production, and decorative hardware.
[0003] Traditional coating equipment has a single method for fixing workpieces of different sizes, which makes it difficult to adapt to diverse needs. It is also prone to shaking and displacement during the coating process, which affects the coating quality. Utility Model Content
[0004] The present invention aims to provide a coating device that is easy to clean, so as to solve the problems mentioned in the background art.
[0005] To achieve the above objectives, this utility model provides the following technical solution:
[0006] A coating device that is easy to clean includes a main body. The main body is equipped with a vacuum system, a heating device, and a target assembly. The vacuum system includes a vacuum pump and a vacuum gauge. The heating device includes a heating wire and a temperature sensor. The target assembly includes a target and a magnetron sputtering device. The main body is hinged to a sealed door. The main body has an inlet and outlet. The sealed door and the inlet and outlet cooperate with each other. The sealed door is connected to a door handle lock, which cooperates with the main body. The main body is rotatably connected to a tray. The tray is connected to a rotating shaft, which is rotatably connected to the main body. The main body is connected to a stepper motor, and the output end of the stepper motor is connected to the rotating shaft. The tray is detachably connected to a connecting frame. The connecting frame has a sliding groove. A bracket is slidably connected to the side wall of the sliding groove. The bracket is connected to a spring, the other end of which is connected to the sliding groove. The bracket is connected to a clamping plate, and the clamping plate is connected to a rubber pad. The main body is coated with a polytetrafluoroethylene (PTFE) anti-stick coating.
[0007] Preferably, the connecting frame is connected to a mounting plate, the mounting plate is threadedly connected to a bolt, and the bolt is threadedly connected to the tray.
[0008] Preferably, the main body is hinged to an inspection door.
[0009] Preferably, the main body is rotatably connected to casters, and the casters are equipped with brakes.
[0010] Preferably, the main body is connected to a transparent observation window, which is made of high-temperature resistant tempered glass.
[0011] Preferably, the main body is connected to a controller and a status indicator light, and the stepper motor, magnetron sputtering device, vacuum pump, vacuum gauge, temperature sensor, heating wire and status indicator light are electrically connected to the controller.
[0012] The beneficial effects of this technical solution compared to existing technologies are as follows:
[0013] (1) This solution significantly reduces the adhesion between deposits and equipment surfaces by setting a polytetrafluoroethylene (PTFE) anti-stick coating, making it easier to wipe away residual coating material and facilitating cleaning by staff. It also has the characteristics of chemical stability and corrosion resistance, ensuring that the equipment is not corroded by chemical substances during the coating process and extending the service life of the equipment. By setting up structures such as connecting frames, slides, brackets, springs, clamps and rubber pads, the springs provide elastic clamping force for the clamps. When placing workpieces of different sizes, the clamps can slide along the slides under the drive of the brackets, automatically adapting to the size of the workpieces and fitting tightly. The rubber pads increase friction while preventing the clamps from damaging the workpiece surface, ensuring that the workpieces are firmly fixed during the coating process and avoiding problems such as uneven film thickness and surface defects caused by workpiece shaking and displacement, thus providing a basic guarantee for high-quality coating.
[0014] (2) By setting up a vacuum system, a heating device and a target assembly, the vacuum system can draw air from the inside of the main body to form the required vacuum environment. The vacuum gauge monitors and feeds back the vacuum data to the controller in real time to ensure that the coating is carried out under stable vacuum conditions and avoids air impurities from affecting the quality of the film. The heating device heats the inside of the main body through heating wires. The temperature sensor detects the temperature in real time and transmits the information to the controller to achieve precise temperature control, so that the coating process is in the optimal temperature range and the physical and chemical properties of the coating material are stable. Under the control of the controller, the magnetron sputtering device can precisely adjust the intensity and method of action on the target material, so that the target atoms or molecules can be uniformly released and deposited on the surface of the workpiece. At the same time, by setting up a stepper motor, a rotating shaft and a tray, the stepper motor precisely drives the tray to rotate. The speed and rotation angle can be flexibly adjusted by the controller to ensure that the workpiece is uniformly coated, effectively improving the uniformity, consistency and coating quality of the coating.
[0015] (3) By setting up mounting plates and bolts, the disassembly process is simple and quick, facilitating deep cleaning of components such as trays, connecting frames, internal slides, and brackets. This further eliminates cleaning dead corners, avoids the problems of impurity residue and cross-contamination caused by the difficulty in cleaning traditional equipment, greatly improves the cleaning efficiency and effect of the equipment, reduces downtime for cleaning, and increases equipment utilization.
[0016] (4) By setting up a sealed door and an inlet / outlet, the sealed door and the inlet / outlet are closely matched, and the door handle lock ensures that the sealed door is firmly locked to the main body. Combined with the main body structure design, it effectively prevents the entry of outside air and the leakage of internal gas, and maintains a stable vacuum coating environment.
[0017] (5) By setting universal wheels equipped with brake devices, the equipment can be moved to a suitable position and then fixed securely to prevent safety hazards caused by accidental slippage of the equipment.
[0018] (6) By setting a transparent observation window made of high-temperature resistant tempered glass, operators can observe the internal coating in real time and resist the high temperature during the coating process, thus avoiding safety accidents caused by glass breakage.
[0019] (7) By setting status indicator lights, the operating status of the equipment can be displayed in real time and intuitively, such as power on / off, equipment operation, fault alarm, etc., which makes it easy for operators to discover abnormalities in time and take measures to ensure the safe operation of the equipment. Attached Figure Description
[0020] Figure 1 This is a schematic diagram of the structure of this utility model;
[0021] Figure 2 A front sectional view of the tray provided by this utility model;
[0022] Figure 3 for Figure 2 Enlarged view of point A;
[0023] Reference numerals: 1. Main body; 2. Transparent observation window; 3. Inspection door; 4. Casters; 5. Status indicator light; 6. Controller; 7. Door handle lock; 8. Sealed door; 9. Entrance / exit; 10. Tray; 11. Stepper motor; 12. Shaft; 13. Slide rail; 14. Clamping plate; 15. Bolt; 16. Mounting plate; 17. Bracket; 18. Spring; 19. Connecting frame. Detailed Implementation
[0024] The present invention will now be described in further detail with reference to the accompanying drawings and embodiments:
[0025] like Figure 1-2The coating equipment shown includes a main body 1, which contains a vacuum system, a heating device, and a target assembly. The vacuum system includes a vacuum pump and a vacuum gauge. The vacuum pump is connected to the interior of the main body 1 through a pipe to extract air from the interior of the main body 1 to create a vacuum environment. The vacuum gauge is installed on the side wall of the main body 1 to monitor the internal vacuum level in real time and feed the data back to the controller 6. The heating device includes heating wires and a temperature sensor. The heating wires are evenly distributed on the inner wall of the main body 1 to heat the coating environment. The temperature sensor is installed inside the main body 1 to detect the temperature in real time and transmit the information to the controller 6 so that the controller 6 can adjust the power of the heating wires according to the set temperature. The target assembly includes a target and a magnetron sputtering device. The target is installed on the top of the inner wall of the main body 1, and the magnetron sputtering device is arranged around the target. During operation, the magnetron sputtering device causes atoms or molecules on the surface of the target to escape and deposit on the surface of the workpiece to form a coating. The main body 1 is hinged to two sealing doors 8 on both sides. The main body 1 has an inlet and outlet 9 on both sides. The two sealing doors 8 cooperate with the corresponding inlet and outlet 9. The two sealing doors 8 are connected to door handle locks 7. The two door handle locks 7 cooperate with the main body 1. The door handle locks 7 are existing technology and will not be described in detail here. The door handle locks 7 adopt a reliable mechanical locking mechanism to ensure that the sealing doors 8 are tightly fitted with the main body 1 and maintain the stability of the vacuum environment. A tray 10 is rotatably connected to the inner wall of the main body 1. A rotating shaft 12 is connected to the bottom of the tray 10, and the rotating shaft 12 is rotatably connected to the main body 1. A stepper motor 11 is connected to the inner wall of the bottom of the main body 1, and the output end of the stepper motor 11 is connected to the rotating shaft 12. Four connecting frames 19 are detachably connected to the top of the tray 10. Each connecting frame 19 has a slide groove 13. A bracket 17 is slidably connected to the side wall of each slide groove 13. Each bracket 17 is connected to a spring 18. The other end of each spring 18 is connected to the corresponding slide groove 13. The other end of each bracket 17 is connected to a clamping plate 14. The other end of each clamping plate 14 is connected to a rubber pad. The spring 18 provides elastic preload, allowing the clamping plate 14 to automatically adjust its position according to the workpiece size. The rubber pad increases friction and protects the workpiece surface. This allows workpieces of different specifications to be fixed without additional adjustments, improving operational convenience. The inner wall of the main body 1 is coated with a polytetrafluoroethylene non-stick coating.
[0026] like Figure 2 As shown, mounting plates 16 are connected to the bottom of both sides of the connecting frame 19, and each mounting plate 16 is threaded with a bolt 15, which is threaded to the tray 10. By tightening the bolts 15, the connecting frame 19 can be disassembled from the tray 10 for cleaning.
[0027] like Figure 1As shown, the lower part of the main body 1 is hinged to an inspection door 3, facilitating access for technicians to perform equipment maintenance and component replacement. Four symmetrically rotating casters 4 are connected to the bottom of the main body 1, each equipped with a brake, ensuring flexible movement and stable positioning to adapt to different production site requirements. A transparent observation window 2, made of high-temperature resistant tempered glass, is connected to the front of the main body 1, meeting the need for real-time observation of the process while effectively resisting high-temperature environments and ensuring operator safety. The main body 1 is connected to a controller 6 and status indicator lights 5. The stepper motor 11, magnetron sputtering device, vacuum pump, vacuum gauge, temperature sensor, heating wire, and status indicator lights 5 are electrically connected to the controller 6. Through preset programs, various parameters are automatically adjusted to achieve full automation of the coating process. The status indicator lights 5 provide intuitive feedback on the equipment's operating status, allowing operators to promptly grasp the equipment's working condition and quickly respond to abnormal situations.
[0028] The specific implementation process is as follows:
[0029] In use, the casters 4 at the bottom of the main body 1 are used to move the equipment to a suitable working position. The casters 4 are locked by the braking device to ensure the equipment remains stable during operation. The operator presets the coating process parameters through the controller 6, including the target vacuum level of the vacuum system, the temperature curve of the heating device, the sputtering power of the target assembly, and the rotation speed of the tray 10 driven by the stepper motor 11. At the same time, according to the characteristics of the workpiece to be processed, a suitable preset program or custom settings are selected. The sealing doors 8 on both sides of the main body 1 are opened, and the workpiece to be coated is placed on top of the tray 10. The spring 18 provides elastic preload, pushing the clamping plate 14 to automatically adapt to the workpiece size and clamp it. The rubber pad increases friction while protecting the workpiece surface, ensuring the workpiece is firmly fixed. After clamping, the sealing doors 8 are closed.
[0030] The vacuum pump is started, and air is extracted from the interior of the main body 1 through the pipeline to establish a vacuum environment. A vacuum gauge monitors the vacuum level inside the main body 1 in real time and feeds the data back to the controller 6. When the vacuum level reaches the preset target value, the vacuum pump stops working, and a suitable vacuum condition for coating is formed inside the main body 1. The heating wires are energized and evenly distributed on the inner wall of the main body 1 to heat the coating environment. The temperature sensor detects the temperature inside the main body 1 in real time and transmits the information to the controller 6. The controller 6 dynamically adjusts the power of the heating wires according to the preset temperature curve, so that the temperature gradually rises to the target temperature at a set rate and remains stable. When both the vacuum level and temperature reach the set conditions, the magnetron sputtering device is activated. The magnetron sputtering device, positioned around the target material, generates a magnetic field, causing atoms or molecules on the target surface to escape under the bombardment of high-energy particles. Simultaneously, the stepper motor 11 drives the rotating shaft 12, causing the tray 10 to rotate at a set speed, and the workpiece on the tray 10 rotates accordingly. The escaped target atoms or molecules are deposited on the surface of the workpiece in the vacuum environment, forming a uniform coating layer. Throughout the coating process, controller 6 continuously monitors the working status of each component and fine-tunes the relevant parameters based on real-time data to ensure the coating process proceeds stably.
[0031] After coating is completed, turn off the magnetron sputtering device, heating wire, and stepper motor 11. Since the inner wall of the main body 1 is coated with a polytetrafluoroethylene non-stick coating, most of the residual coating material adhering to the inner wall of the main body 1 can be easily wiped away. Loosen bolts 15 to disassemble the connecting frame 19, and thoroughly clean the connecting frame 19, slide 13, bracket 17, spring 18, clamp 14, and rubber pads to remove residual coating material and impurities.
[0032] The above descriptions are merely embodiments of this utility model. Commonly known technical solutions and / or characteristics are not described in detail here. It should be noted that those skilled in the art can make various modifications and improvements without departing from the technical solution of this utility model. These modifications and improvements should also be considered within the scope of protection of this utility model, and will not affect the effectiveness of the implementation of this utility model or the practicality of the patent. The scope of protection claimed in this application should be determined by the content of its claims, and the specific embodiments described in the specification can be used to interpret the content of the claims.
Claims
1. A coating device that is easy to clean, characterized in that: The device includes a main body (1), which is equipped with a vacuum system, a heating device, and a target assembly. The vacuum system includes a vacuum pump and a vacuum gauge. The heating device includes a heating wire and a temperature sensor. The target assembly includes a target and a magnetron sputtering device. The main body (1) is hinged to a sealing door (8). The main body (1) has an inlet and outlet (9). The sealing door (8) cooperates with the inlet and outlet (9). The sealing door (8) is connected to a door handle lock (7). The door handle lock (7) cooperates with the main body (1). The main body (1) is rotatably connected to a tray (10). The tray (10) is connected to a rotating shaft (12). The rotating shaft (12) is rotatably connected to the main body (1). The main body (1) is connected to a stepper motor (11). The output end of the stepper motor (11) is connected to the rotating shaft (12). The tray (10) is detachably connected to a connecting frame (19). The connecting frame (19) has a sliding groove (13). The side wall of the sliding groove (13) is slidably connected to a bracket (17). The bracket (17) is connected to a spring (18). The other end of the spring (18) is connected to the sliding groove (13). The bracket (17) is connected to a clamping plate (14). The clamping plate (14) is connected to a rubber pad. The main body (1) is coated with a polytetrafluoroethylene anti-stick coating.
2. The coating equipment for easy cleaning as described in claim 1, characterized in that: The connecting frame (19) is connected to a mounting plate (16), and the mounting plate (16) is threadedly connected to a bolt (15), which is threadedly connected to the tray (10).
3. The coating equipment for easy cleaning as described in claim 1, characterized in that: The main body (1) is hinged to an inspection door (3).
4. The coating equipment for easy cleaning as described in claim 1, characterized in that: The main body (1) is rotatably connected to a universal wheel (4), and the universal wheel (4) is equipped with a braking device.
5. The coating equipment for easy cleaning as described in claim 1, characterized in that: The main body (1) is connected to a transparent observation window (2), which is made of high-temperature resistant tempered glass.
6. The coating equipment for easy cleaning as described in claim 1, characterized in that: The main body (1) is connected to a controller (6), and the main body (1) is connected to a status indicator light (5). The stepper motor (11), magnetron sputtering device, vacuum pump, vacuum gauge, temperature sensor, heating wire and status indicator light (5) are electrically connected to the controller (6).