A device for uniform gas feeding for a vapor deposition furnace

Abstract

The utility model discloses a device of even gas admission for vapor deposition furnace, including the gas collecting cover of being located vapor deposition furnace inside, the gas collecting cover is by upper inverted funnel cover and the lower conical cover of being fixed at its bottom composition, the outside of lower conical cover even has a plurality of gas outlet holes, and the gas outlet hole on the inclined plane of lower conical cover is set down to lean, and the top of upper inverted funnel cover is out to the top of vapor deposition furnace and is connected with its fixedly, the inside of the top of upper inverted funnel cover is installed with even mix gas admission stirring mechanism. The utility model discloses through setting up a series of structures, is convenient for to the multicomponent gas automatic extraction and integrated scattering and blowing and double -step stirring mix of drawing into, through integrated drawing into and double -step stirring mix's mode, improves the mixing uniformity and efficiency of multicomponent gas, reduces the phenomenon that the reaction efficiency is low because the multicomponent gas mixes unevenly and causes to enter vapor deposition furnace, improves use effect and efficiency.

Description

Technical Field

[0001] This utility model relates to the field of vapor deposition furnace technology, specifically to a device for uniform gas intake in a vapor deposition furnace. Background Technology

[0002] In the process of densifying composite materials, chemical vapor deposition furnaces need to introduce carbon source gas, silane gas and other related reactive gases. At high temperatures above 1000℃, these gases are decomposed to generate carbon, silicon carbide and other substances, which are adsorbed into the porous preform, ultimately densifying the fiber braid to form carbon fiber reinforced composite materials.

[0003] In the existing technology, multi-component gases are directly injected into the vapor deposition furnace via a gas transfer pump and dispersed through a gas collection hood for reaction. For example, CN207452252U discloses a device for uniform gas intake in a vapor deposition furnace, including an intake pipe and a gas collection hood both located within the furnace. One end of the intake pipe is fixedly connected to the furnace's inlet, and the other end is fixedly connected to the gas collection hood. Multiple outlet holes are provided on the surface of the gas collection hood. When gas enters the gas collection hood through the intake pipe, it is then discharged into the furnace through the outlet holes. Using this device ensures that the various intake components are fully mixed within the gas collection hood and uniformly discharged from around the hood, ensuring temperature uniformity within the furnace and further guaranteeing the deposition effect.

[0004] The above-mentioned technology, through the design of a gas collection hood, utilizes its inverted funnel-shaped bottom and multiple evenly distributed gas outlets on the outer side. When a gas transfer pump supplies multi-component gases into the gas collection hood, the gases can be evenly dispersed and discharged into the deposition furnace through the multiple gas outlets. This dispersed discharge ensures the uniformity of temperature within the deposition furnace. However, in practical use, the following shortcomings exist:

[0005] The method of directly supplying multi-component gases into the gas collection hood for discharge cannot automatically and uniformly mix the multi-component gases during filling, resulting in a long gas mixing and reaction time after entering, thus reducing reaction efficiency. In view of this, this application proposes a uniform gas intake device for a vapor deposition furnace to solve the above-mentioned problems. Utility Model Content

[0006] The purpose of this invention is to provide a device for uniform gas intake in a vapor deposition furnace, so as to solve the problems mentioned in the background art.

[0007] To achieve the above objectives, the present invention provides the following technical solution: a device for uniform gas intake in a vapor deposition furnace, comprising a gas collecting hood located inside the vapor deposition furnace, the gas collecting hood being composed of an upper inverted funnel hood and a lower conical hood fixed at its bottom, the lower conical hood having a plurality of gas outlet holes uniformly opened on its outer side, the gas outlet holes located on the inclined surface of the lower conical hood being inclined downwards, and the top of the upper inverted funnel hood extending to the top of the vapor deposition furnace and being fixedly connected thereto;

[0008] A homogenizing and agitating mechanism is installed on the inner side of the top of the upper inverted funnel cover. The homogenizing and agitating mechanism includes:

[0009] The air intake pipe is connected to the inside of the top of the upper inverted funnel cover, and a connecting flange is fixedly connected to its outer top.

[0010] A one-way valve is fixedly installed on the top of the inside of the intake pipe, with its bottom being the outlet;

[0011] A rotary air-inducing and agitating dual-mixing component is fixedly installed inside the air intake pipe;

[0012] The rotary drive assembly is fixedly mounted on the rotary induced air stirring dual mixing assembly;

[0013] A variable frequency motor is fixedly installed on the right side of the air inlet pipe, and its output shaft is fixedly connected to the rotary drive assembly. The rotary drive assembly is used to drive the rotary induced gas stirring dual-mixing assembly to rotate when the variable frequency motor starts. The rotary induced gas stirring dual-mixing assembly rotates to automatically draw and stir the multi-component gas supplied from the top of the air inlet pipe through a one-way valve during rotation, and supplies it into the lower conical hood. The gas that is stirred and mixed evenly is discharged into the vapor deposition furnace through multiple air outlets.

[0014] Preferably, the air intake pipe is fixedly connected to the inner side of the top of the upper inverted funnel cover by welding.

[0015] Preferably, the air intake pipe is detachably connected to the inside of the top of the upper inverted funnel cover.

[0016] Preferably, the bottom outer side of the air intake pipe is in movable contact with the inner top of the upper inverted funnel cover. Threaded grooves are provided on both bottom sides of the air intake pipe, and a knob-type bolt is threaded into the threaded groove. Threaded holes are provided on both top sides of the upper inverted funnel cover, and the knob-type bolt is threaded into the corresponding threaded hole.

[0017] Preferably, the rotary air-induced agitation dual-mixing assembly includes a support ring, a rotating tube, a centrifugal impeller, and stirring blades. There are two support rings, which are fixedly fitted inside the air inlet pipe. The rotating tube is sealed and rotatably fitted inside the two support rings. The bottom end of the rotating tube is set as a sealing structure. There are multiple stirring blades, which are fixedly connected to the bottom outer side of the rotating tube. Multiple diffuser holes are opened on the outer side of the rotating tube. The diffuser holes and stirring blades are all located inside the lower conical cover. The centrifugal impeller is fixedly connected to the top of the rotating tube. Air inlet holes are opened on the top of the four sides of the rotating tube, located above the upper support ring.

[0018] Preferably, the rotary drive assembly includes a first bevel gear and a second bevel gear disposed between two support rings. The first bevel gear is fixedly sleeved on the rotary tube, and the second bevel gear meshes with the right side of the first bevel gear. The right side of the second bevel gear is fixedly connected to the left end of the output shaft of the variable frequency motor.

[0019] Preferably, a sealed bearing is fixedly sleeved inside the support ring, and the inner ring of the sealed bearing is fixedly sleeved with the outer side of the rotating tube.

[0020] Compared with the prior art, the beneficial effects of this utility model are:

[0021] 1. By combining the upper inverted funnel hood, lower conical hood, air outlet, rotating air-inducing and stirring dual-mixing component, rotary drive component and variable frequency motor, multi-component gas can be automatically drawn in and uniformly dispersed and mixed in two steps. Compared with directly charging multi-component gas, the method of uniformly drawing in and mixing in two steps obviously improves the mixing uniformity and efficiency of multi-component gas, reduces the phenomenon of low reaction efficiency caused by uneven mixing of multi-component gas entering the vapor deposition furnace, and improves the use effect and efficiency.

[0022] 2. The air inlet pipe, upper inverted funnel cover, threaded groove, threaded hole and knob bolt are designed to facilitate easy disassembly and assembly of the uniform mixing air inlet agitator and the upper inverted funnel cover. This allows the uniform mixing air inlet agitator to be replaced separately if it is damaged, further facilitating subsequent replacement and application.

[0023] This invention features a series of structures that facilitate the automatic extraction and integrated dispersion of multi-component gases, along with two-step mixing. By integrating the extraction and mixing, the uniformity and efficiency of the multi-component gas mixing are improved, reducing the phenomenon of low reaction efficiency caused by uneven mixing of multi-component gases entering the vapor deposition furnace, thus improving the performance and efficiency. Attached Figure Description

[0024] Figure 1 This is a schematic diagram of the structure of a uniform gas inlet device for a vapor deposition furnace according to Embodiment 1 of this utility model;

[0025] Figure 2This is a schematic diagram of the structure of a uniform gas inlet device for a vapor deposition furnace as proposed in Embodiment 1 of this utility model, installed on the vapor deposition furnace.

[0026] Figure 3 This is a schematic diagram of the front cross-sectional structure of a uniform gas inlet device for a vapor deposition furnace according to Embodiment 1 of this utility model.

[0027] Figure 4 for Figure 3 A magnified structural diagram of part A in the diagram;

[0028] Figure 5 This is a front cross-sectional view of a uniform gas inlet device for a vapor deposition furnace according to Embodiment 2 of this utility model.

[0029] In the diagram: 100, vapor deposition furnace; 1, upper inverted funnel hood; 101, knob bolt; 2, lower conical hood; 201, air outlet; 3, air inlet pipe; 301, one-way valve; 302, connecting flange; 303, support ring; 304, rotating pipe; 305, first bevel gear; 306, second bevel gear; 307, air inlet; 308, centrifugal impeller; 309, variable frequency motor; 310, diffuser hole; 311, stirring blade. Detailed Implementation

[0030] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0031] Example 1

[0032] like Figures 1 to 4 As shown in this embodiment, a uniform gas intake device for a vapor deposition furnace includes a gas collecting hood located inside the vapor deposition furnace 100. The gas collecting hood consists of an upper inverted funnel hood 1 and a lower conical hood 2 fixed to its bottom. The lower conical hood 2 has a plurality of gas outlet holes 201 evenly opened on its outer side. The gas outlet holes 201 located on the inclined surface of the lower conical hood 2 are inclined downward. The top of the upper inverted funnel hood 1 extends to the top of the vapor deposition furnace 100 and is fixedly connected thereto. The top of the vapor deposition furnace 100 has an installation through hole for the top of the upper inverted funnel hood 1 to pass through. The inner wall of the installation through hole is fixedly connected to the top of the outer side of the upper inverted funnel hood 1.

[0033] A homogenizing and agitating mechanism is installed on the inner side of the top of the upper inverted funnel cover 1. The homogenizing and agitating mechanism includes:

[0034] The air intake pipe 3 is connected to the inner side of the top of the upper inverted funnel cover 1, and a connecting flange 302 is fixedly connected to its outer top.

[0035] One-way valve 301 is fixedly installed on the top of the inner side of the intake pipe 3, and its bottom is the outlet;

[0036] A rotary air-inducing and agitating dual-mixing component is fixedly installed inside the air inlet pipe 3;

[0037] The rotary drive assembly is fixedly mounted on the rotary induced air stirring dual mixing assembly;

[0038] The variable frequency motor 309 is fixedly installed on the right side of the air inlet pipe 3, and its output shaft is fixedly connected to the rotary drive assembly. The rotary drive assembly is used to drive the rotary induced gas stirring dual mixing assembly to rotate when the variable frequency motor 309 starts. The rotary induced gas stirring dual mixing assembly rotates to automatically draw and stir the multi-component gas supplied to the top of the air inlet pipe 3 through the one-way valve 301 during rotation, and supplies it into the lower conical shroud 2. The gas that is stirred and mixed evenly is discharged into the vapor deposition furnace 100 through multiple air outlets 201.

[0039] It should be noted that the variable frequency motor 309 is electrically connected to the external drive power supply via wires. The variable frequency motor 309 is a small variable frequency motor, which can be controlled by installing a variable frequency controller so that personnel can flexibly adjust it according to different auxiliary air supply needs. The variable frequency motor 309 is preferably a Delta MS300 series motor, and the variable frequency controller is preferably a Delta VFD004L21A frequency converter. Both are commercially available matching products.

[0040] Furthermore, the intake pipe 3 is fixedly connected to the inner side of the top of the upper inverted funnel cover 1 by welding.

[0041] Furthermore, such as Figure 3 and 4 As shown, the rotary air-induced agitation dual-mixing assembly includes a support ring 303, a rotating pipe 304, a centrifugal impeller 308, and a stirring blade 311. There are two support rings 303, which are fixedly fitted inside the air inlet pipe 3. The rotating pipe 304 is sealed and rotated inside the two support rings 303. The bottom end of the rotating pipe 304 is set as a sealing structure. There are multiple stirring blades 311, which are fixedly connected to the bottom of the outer side of the rotating pipe 304. Multiple diffuser holes 310 are opened on the outer side of the rotating pipe 304. The diffuser holes 310 and the stirring blades 311 are all located inside the lower conical cover 2. The centrifugal impeller 308 is fixedly connected to the top of the rotating pipe 304. Air inlet holes 307 are opened on the top of the four sides of the rotating pipe 304 above the support rings 303 on the upper side.

[0042] In this embodiment, a sealed bearing is fixedly sleeved inside the support ring 303, and the inner ring of the sealed bearing is fixedly sleeved with the outer side of the rotating tube 304, which achieves the effect of sealing and rotating the rotating tube 304.

[0043] In this embodiment, the support ring 303, rotating pipe 304, centrifugal impeller 308, and stirring blade 311 work together. When the rotating pipe 304 rotates, it drives the centrifugal impeller 308 and stirring blade 311 to rotate. When the centrifugal impeller 308 rotates, it creates a suction force on the upper part, realizing automatic auxiliary suction of the multi-component gas supplied from the top of the intake pipe 3. When the centrifugal impeller 308 rotates, its own blades initially mix the multi-component gas. After the suction gas is discharged by the centrifugal impeller 308, it passes through four inlets. The gas enters the rotating tube 304 through the vent 307, and is then sprayed into the lower conical shroud 2 through multiple diffuser holes 310 that follow the rotation of the rotating tube 304. It is then mixed again by multiple rotating stirring blades 311, achieving the effect of automatic extraction and integrated diffusion and two-step mixing of multi-component gas. By integrating extraction and two-step mixing, the mixing uniformity of multi-component gas is improved, reducing the phenomenon of low reaction efficiency caused by uneven mixing of multi-component gas entering the vapor deposition furnace 100, and improving the use effect.

[0044] Furthermore, such as Figure 4 As shown, the rotary drive assembly includes a first bevel gear 305 and a second bevel gear 306 disposed between two support rings 303. The first bevel gear 305 is fixedly sleeved on the rotary tube 304, and the second bevel gear 306 meshes with the right side of the first bevel gear 305. The right side of the second bevel gear 306 is fixedly connected to the left end of the output shaft of the variable frequency motor 309.

[0045] In this embodiment, the first bevel gear 305 and the second bevel gear 306 cooperate, and the variable frequency motor 309 drives the second bevel gear 306 to rotate. The second bevel gear 306 drives the first bevel gear 305, which meshes with it, to rotate. The first bevel gear 305 drives the rotating tube 304 to rotate.

[0046] This embodiment facilitates the automatic extraction and integrated dispersion and two-step mixing of multi-component gases. By integrating the extraction and two-step mixing, the uniformity and efficiency of the multi-component gas mixing are improved, reducing the phenomenon of low reaction efficiency caused by uneven mixing of multi-component gases entering the vapor deposition furnace 100, thereby improving the performance and efficiency.

[0047] The usage method of this embodiment is as follows: When using the uniform gas intake device for the vapor deposition furnace, the variable frequency motor 309 drives the second bevel gear 306 to rotate. The second bevel gear 306 drives the rotating tube 304 to rotate through the first bevel gear 305 meshing with it. When the rotating tube 304 rotates, it drives the centrifugal impeller 308 and the stirring blades 311 to rotate. When the centrifugal impeller 308 rotates, it forms a suction force on the upper part, realizing the automatic auxiliary suction of the multi-component gas supplied through the top of the gas inlet pipe 3 via the one-way valve 301. When the centrifugal impeller 308 rotates, its own blades initially mix the multi-component gas. The sucked gas is then stirred by the centrifugal blades. After being discharged from wheel 308, the gas enters the rotating tube 304 through four air inlets 307, and then is sprayed into the lower conical shroud 2 through multiple diffuser holes 310 that follow the rotation of the rotating tube 304. It is then mixed again by multiple rotating stirring blades 311, and then sprayed into the vapor deposition furnace 100 through multiple air outlet holes 201. This achieves the effect of automatic extraction and integrated diffusion of multi-component gas and two-step mixing. By integrating extraction and two-step mixing, the uniformity and efficiency of multi-component gas mixing are improved, and the phenomenon of low reaction efficiency caused by uneven mixing of multi-component gas entering the vapor deposition furnace 100 is reduced, thereby improving the use effect and efficiency.

[0048] Example 2

[0049] like Figure 5 As shown, this embodiment differs from Embodiment 1 in that: the air intake pipe 3 is detachably connected to the inner side of the top of the upper inverted funnel cover 1, the bottom of the outer side of the air intake pipe 3 is in contact with the inner side of the top of the upper inverted funnel cover 1, threaded grooves are provided on both sides of the bottom of the air intake pipe 3, and a knob bolt 101 is threadedly screwed into the threaded grooves. Threaded holes are provided on both sides of the top of the upper inverted funnel cover 1, and the knob bolt 101 is threadedly screwed into the corresponding threaded hole.

[0050] It should be noted that the distance between the opposing ends of the two stirring blades 311 is smaller than the inner diameter of the top of the upper inverted funnel cover 1.

[0051] This embodiment allows for easy disassembly and assembly of the uniform mixing air intake agitator and the upper inverted funnel cover 1, so that the uniform mixing air intake agitator can be replaced separately if it is damaged in the future, further facilitating subsequent replacement and application.

[0052] The usage method of this embodiment is as follows: The difference from Embodiment 1 is that it also has the following functions: By using the provided threaded groove, threaded hole and knob bolt 101 to form a detachable threaded assembly of the air intake pipe 3 and the upper inverted funnel cover 1, when the knob bolt 101 is rotated in the opposite direction to make it move outward and separate from the corresponding threaded groove, the locking of the air intake pipe 3 is released, and the air intake pipe 3 can be pulled upward, so as to achieve the effect of convenient disassembly and assembly of the uniform mixing air intake agitator, so as to facilitate personnel to assemble and disassemble it. By making it detachable from the lower upper inverted funnel cover 1, the uniform mixing air intake agitator can be replaced separately when it is damaged, which further facilitates subsequent replacement applications.

[0053] Finally, it should be noted that the above description is merely a preferred embodiment of this utility model and is not intended to limit the utility model. Although the utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this utility model should be included within the protection scope of this utility model.

Claims

1. A device for uniform gas intake in a vapor deposition furnace, comprising a gas collecting hood located inside the vapor deposition furnace (100), characterized in that: The gas collection hood consists of an upper inverted funnel hood (1) and a lower conical hood (2) fixed at its bottom. The lower conical hood (2) has multiple gas outlet holes (201) evenly opened on its outer side. The gas outlet holes (201) located on the inclined surface of the lower conical hood (2) are inclined downward. The top of the upper inverted funnel hood (1) extends to the top of the vapor deposition furnace (100) and is fixedly connected to it. A uniform mixing and agitating mechanism is installed on the inner side of the top of the upper inverted funnel cover (1), the uniform mixing and agitating mechanism comprising: The air intake pipe (3) is connected to the inner side of the top of the upper inverted funnel cover (1), and a connecting flange (302) is fixedly connected to its outer top. A one-way valve (301) is fixedly installed on the top of the inner side of the intake pipe (3), and its bottom is the outlet; A rotating air-inducing and stirring dual-mixing component is fixedly installed inside the air inlet pipe (3); The rotary drive assembly is fixedly mounted on the rotary induced air stirring dual mixing assembly; The variable frequency motor (309) is fixedly installed on the right side of the air intake pipe (3), and its output shaft is fixedly connected to the rotary drive assembly.

2. The apparatus for uniform gas inlet in a vapor deposition furnace according to claim 1, characterized in that: The air intake pipe (3) is fixedly connected to the inside of the top of the upper inverted funnel cover (1) by welding.

3. The apparatus for uniform gas inlet in a vapor deposition furnace according to claim 1, characterized in that: The air intake pipe (3) is detachably connected to the inside of the top of the upper inverted funnel cover (1).

4. The device for uniform gas inlet in a vapor deposition furnace according to claim 3, characterized in that: The bottom outer side of the air intake pipe (3) is in contact with the inner top of the upper inverted funnel cover (1). Threaded grooves are provided on both sides of the bottom of the air intake pipe (3), and a knob bolt (101) is threaded into the threaded groove. Threaded holes are provided on both sides of the top of the upper inverted funnel cover (1), and the knob bolt (101) is threaded into the corresponding threaded hole.

5. The apparatus for uniform gas inlet in a vapor deposition furnace according to claim 1, characterized in that: The rotating air-induced agitation dual-mixing assembly includes a support ring (303), a rotating pipe (304), a centrifugal impeller (308), and a stirring blade (311). There are two support rings (303) which are fixedly fitted inside the air inlet pipe (3). The rotating pipe (304) is sealed and rotated inside the two support rings (303). The bottom end of the rotating pipe (304) is set as a sealing structure. There are multiple stirring blades (311) which are fixedly connected to the bottom of the outer side of the rotating pipe (304). Multiple diffuser holes (310) are opened on the outer side of the rotating pipe (304). The diffuser holes (310) and the stirring blades (311) are all located inside the lower conical cover (2). The centrifugal impeller (308) is fixedly connected to the top of the rotating pipe (304). Air inlet holes (307) are opened on the top of the four sides of the rotating pipe (304) above the support rings (303).

6. The apparatus for uniform gas inlet in a vapor deposition furnace according to claim 5, characterized in that: The rotary drive assembly includes a first bevel gear (305) and a second bevel gear (306) disposed between two support rings (303). The first bevel gear (305) is fixedly sleeved on the rotary tube (304), and the second bevel gear (306) meshes with the right side of the first bevel gear (305). The right side of the second bevel gear (306) is fixedly connected to the left end of the output shaft of the variable frequency motor (309).

7. The apparatus for uniform gas inlet in a vapor deposition furnace according to claim 5, characterized in that: A sealed bearing is fixedly fitted inside the support ring (303), and the inner ring of the sealed bearing is fixedly fitted to the outer side of the rotating tube (304).

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