High-temperature vacuum silicon carbide sintering furnace
By introducing components such as vacuum pumping components, graphite heating rods, and airflow guide plates into a high-temperature vacuum silicon carbide sintering furnace, the problems of unstable vacuum and low temperature control accuracy were solved, and efficient and stable silicon carbide sintering was achieved.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- SHAN DONG DING SHENG DIAN QI KE JI YOU XIAN GONG SI
- Filing Date
- 2025-09-05
- Publication Date
- 2026-06-05
AI Technical Summary
Existing high-temperature vacuum sintering furnaces suffer from unstable vacuum levels, low temperature control accuracy, and poor sealing performance, which affect the sintering quality and efficiency of silicon carbide.
By employing components such as vacuum pumping units, graphite heating rods, and airflow guide plates, combined with an external control system, precise control of vacuum level and temperature is achieved, ensuring uniform heating and sealing.
It improves the stability of the vacuum environment and the uniformity of temperature, enhances the purity and consistency of silicon carbide sintering, and reduces energy consumption and operational difficulty.
Smart Images
Figure CN224327560U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of silicon carbide sintering furnace technology, and in particular to a high-temperature vacuum silicon carbide sintering furnace. Background Technology
[0002] Silicon carbide ceramics are widely used in semiconductors, new energy, aerospace and other fields due to their high strength, high temperature resistance and corrosion resistance. The preparation process requires sintering in a high temperature vacuum sintering furnace. The sintering process must be carried out in a high temperature and high vacuum environment to avoid silicon carbide oxidation, reduce the influence of impurity gases and ensure product performance.
[0003] Existing high-temperature vacuum sintering furnaces suffer from unstable vacuum levels. The pumping system is prone to clogging of pipes due to volatile matter from materials, leading to a decrease in vacuum and affecting sintering quality. Temperature control accuracy is low, graphite heating rods are unevenly distributed, and the temperature gradient within the sintering chamber is large, easily causing uneven silicon carbide sintering. Sealing performance is poor, with air leakage easily occurring at the connection between the furnace door and the furnace body, making it impossible to maintain a long-term high-vacuum environment. These problems restrict the efficiency and product yield of silicon carbide sintering. Therefore, we propose a high-temperature vacuum silicon carbide sintering furnace. Utility Model Content
[0004] In view of this, this application provides a high-temperature vacuum silicon carbide sintering furnace, which aims to solve the above-mentioned technical problems.
[0005] To achieve the above objectives, the present invention adopts the following technical solution:
[0006] A high-temperature vacuum silicon carbide sintering furnace includes a furnace body main assembly. A vacuum pumping assembly is provided on the outer side of the furnace body main assembly, a high-temperature temperature control assembly is provided on the inner side of the furnace body main assembly, a material carrying assembly is provided at the bottom of the inner side of the furnace body main assembly, and a sealing furnace door assembly is provided on the front side of the furnace body main assembly. The vacuum pumping assembly and the high-temperature temperature control assembly are both electrically connected to an external control system.
[0007] Preferably, the main furnace body component includes a furnace shell, an insulation layer, and a sintering cavity. The insulation layer is fixedly attached to the outer wall of the furnace shell, the sintering cavity is formed on the inner side of the insulation layer, an air extraction hole is provided at the top of the furnace shell, a support base is fixedly installed on the outer side of the furnace shell, and an anti-slip pad is provided at the bottom of the support base.
[0008] Preferably, the vacuum pumping assembly includes a vacuum pump, a pumping pipe, and a vacuum valve. The vacuum pump is fixedly installed on the outside of the furnace shell. One end of the pumping pipe is connected to the input end of the vacuum pump, and the other end extends through the pumping hole into the sintering chamber. The vacuum valve is fixedly installed on the outside of the pumping pipe, and a filter screen is provided on the inside of the pumping pipe.
[0009] Preferably, the high-temperature temperature control component includes a graphite heating rod, a temperature sensor, and a heat insulation plate. The graphite heating rod is evenly distributed on the inner wall of the insulation layer and is arranged around the sintering cavity. The temperature sensor is fixedly installed on the inner wall of the sintering cavity, and the heat insulation plate is fixedly installed on the top of the sintering cavity. The graphite heating rod is made of graphite heating rod material.
[0010] Preferably, the material carrying assembly includes a support platform, a lifting column, and a high-temperature resistant pad. The lifting column is fixedly installed at the bottom of the sintering chamber, the support platform is fixedly installed at the top of the lifting column, and the high-temperature resistant pad is fixedly attached to the top of the support platform. The support platform is made of silicon carbide ceramic.
[0011] Preferably, the sealed furnace door assembly includes a furnace door body, a sealing ring, and a locking handle. The furnace door body is hinged to the front side of the furnace shell, the sealing ring is fixedly installed on the inner side of the furnace door body, the locking handle is fixedly installed on the outer side of the furnace door body, and the insulation layer is also fixedly installed on the furnace door body.
[0012] Preferably, a vacuum pressure gauge is fixedly installed on the outside of the exhaust pipe, the vacuum pressure gauge is connected to the inside of the sintering chamber, a soundproof cover is provided on the outside of the vacuum pump, and the inside of the soundproof cover is filled with soundproof cotton.
[0013] Preferably, an airflow guide plate is also fixedly installed on the inner wall of the sintering chamber, and the airflow guide plate is located between the graphite heating rod and the material carrying component.
[0014] Compared with the prior art, the beneficial effects of this utility model are as follows:
[0015] (1) The present invention provides a high-temperature vacuum silicon carbide sintering furnace. The vacuum pump extracts gas from the sintering chamber through the gas extraction pipe. The vacuum valve can precisely control the gas extraction rate. The vacuum pressure gauge monitors the vacuum level in the chamber in real time to ensure that a high vacuum environment is maintained. The filter screen can filter the volatiles of the material to avoid clogging the gas extraction pipe, solve the problem of unstable vacuum level in traditional furnaces, reduce the impact of impurity gases on silicon carbide sintering, and ensure the purity and performance of the product.
[0016] (2) The present invention provides a high-temperature vacuum silicon carbide sintering furnace with graphite heating rods distributed around the sintering cavity to provide uniform heat. Temperature sensors provide real-time feedback of the cavity temperature and, in conjunction with an external control system, precisely adjust the heating power to ensure that the temperature remains stable within the high-temperature sintering range. Airflow guide plates guide the uniform distribution of heat within the cavity, reduce the temperature gradient, and avoid excessive or insufficient local sintering of silicon carbide, thus solving the problem of low temperature control accuracy in traditional furnaces.
[0017] To make the above-mentioned objectives, features and advantages of this application more apparent and understandable, preferred embodiments are described below in detail with reference to the accompanying drawings. Attached Figure Description
[0018] Figure 1 This is a three-dimensional structural diagram of a high-temperature vacuum silicon carbide sintering furnace proposed in this utility model.
[0019] Figure 2 A schematic diagram of a three-dimensional view of a partial structure of a high-temperature vacuum silicon carbide sintering furnace according to an embodiment of this application is shown;
[0020] Figure 3 A schematic diagram showing a three-dimensional view of a portion of the structure of a material carrying assembly provided according to an embodiment of this application is shown;
[0021] Figure 4 This is a schematic diagram showing a three-dimensional cross-sectional view of a high-temperature vacuum silicon carbide sintering furnace according to an embodiment of this application.
[0022] Figure label:
[0023] 1. Furnace body main components; 11. Furnace shell; 12. Insulation layer; 13. Sintering chamber; 14. Evacuation port; 15. Support base; 16. Anti-slip pad; 2. Vacuum extraction components; 21. Vacuum pump; 22. Evacuation pipe; 23. Vacuum valve; 24. Filter screen; 25. Vacuum pressure gauge; 26. Sound insulation cover; 27. Sound insulation cotton; 3. High temperature control components; 31. Graphite heating rod; 32. Temperature sensor; 33. Heat insulation board; 34. Airflow guide plate; 4. Material carrying components; 41. Support platform; 42. Lifting support column; 43. High temperature resistant pad; 5. Sealing furnace door components; 51. Furnace door body; 52. Sealing ring; 53. Locking handle. Detailed Implementation
[0024] To further understand the invention content, features and effects of this utility model, the following embodiments are provided, and detailed descriptions are given below in conjunction with the accompanying drawings;
[0025] The structure of this utility model will now be described in detail with reference to the accompanying drawings.
[0026] refer to Figure 1-4 A high-temperature vacuum silicon carbide sintering furnace includes a furnace body main component 1, a vacuum pumping component 2 on the outside of the furnace body main component 1, a high-temperature temperature control component 3 on the inside of the furnace body main component 1, a material carrying component 4 on the bottom inside of the furnace body main component 1, and a sealing furnace door component 5 on the front of the furnace body main component 1. The vacuum pumping component 2 and the high-temperature temperature control component 3 are both electrically connected to an external control system.
[0027] In this embodiment, the main furnace body component 1 includes a furnace shell 11, a heat insulation layer 12, and a sintering cavity 13. The heat insulation layer 12 is fixedly attached to the outer wall of the furnace shell 11, and the sintering cavity 13 is formed on the inner side of the heat insulation layer 12. An air extraction hole 14 is provided on the top of the furnace shell 11, and a support base 15 is fixedly installed on the outer side of the furnace shell 11. An anti-slip pad 16 is provided on the bottom of the support base 15.
[0028] In this embodiment, the vacuum pumping assembly 2 includes a vacuum pump 21, a pumping pipe 22, and a vacuum valve 23. The vacuum pump 21 is fixedly installed on the outside of the furnace shell 11. One end of the pumping pipe 22 is connected to the input end of the vacuum pump 21, and the other end extends through the pumping hole 14 into the sintering chamber 13. The vacuum valve 23 is fixedly installed on the outside of the pumping pipe 22, and a filter screen 24 is provided on the inside of the pumping pipe 22. The vacuum pump 21 of the vacuum pumping assembly 2 extracts gas from the sintering chamber 13 through the pumping pipe 22. The vacuum valve 23 can precisely control the pumping rate. The vacuum pressure gauge 25 monitors the vacuum level in the chamber in real time to ensure that a high vacuum environment is maintained. The filter screen 24 can filter material volatiles to avoid clogging the pumping pipe, solve the problem of unstable vacuum level in traditional furnaces, reduce the impact of impurity gases on silicon carbide sintering, and ensure product purity and performance.
[0029] In this embodiment, the high-temperature temperature control component 3 includes a graphite heating rod 31, a temperature sensor 32, and a heat insulation plate 33. The graphite heating rod 31 is evenly distributed on the inner wall of the insulation layer 12 and is arranged around the sintering cavity 13. The temperature sensor 32 is fixedly installed on the inner wall of the sintering cavity 13, and the heat insulation plate 33 is fixedly installed on the top of the sintering cavity 13. The graphite heating rod 31 is made of graphite heating rod material. The graphite heating rod 31 of the high-temperature temperature control component 3 is distributed around the sintering cavity 13, which can provide uniform heat. The temperature sensor 32 provides real-time feedback on the temperature inside the cavity and, in conjunction with the external control system, precisely adjusts the heating power to ensure that the temperature is stable within the high-temperature sintering range.
[0030] In this embodiment, the material carrying component 4 includes a support platform 41, a lifting column 42, and a high-temperature resistant pad 43. The lifting column 42 is fixedly installed at the bottom of the sintering chamber 13, the support platform 41 is fixedly installed at the top of the lifting column 42, and the high-temperature resistant pad 43 is fixedly attached to the top of the support platform 41. The support platform 41 is made of silicon carbide ceramic. The support platform 41 of the material carrying component 4 is made of silicon carbide ceramic, which has strong high-temperature resistance and is not easily deformed after long-term use. The high-temperature resistant pad 43 prevents silicon carbide material from directly contacting the support platform and prevents adhesion. The lifting column 42 can adjust the height of the support platform to adapt to the sintering requirements of materials of different sizes, ensuring that the material is always in the temperature uniform area of the sintering chamber 13 and improving sintering consistency.
[0031] In this embodiment, the sealed furnace door assembly 5 includes a furnace door body 51, a sealing ring 52, and a locking handle 53. The furnace door body 51 is hinged to the front side of the furnace shell 11, the sealing ring 52 is fixedly installed on the inner side of the furnace door body 51, and the locking handle 53 is fixedly installed on the outer side of the furnace door body 51. The insulation layer 12 is also fixedly installed on the furnace door body 51. The sealing ring 52 of the sealed furnace door assembly 5 fits tightly against the furnace shell 11 and the furnace door body 51, and the locking handle 53 enhances the sealing pressure, which can effectively prevent air leakage. The insulation layer 12 on the furnace body assembly 1 cooperates with the heat insulation plate 33 to reduce heat loss in the sintering chamber 13 and reduce heating energy consumption. At the same time, the insulation layer 12 on the furnace door body 51 further enhances the insulation effect, adapts to the long-term high-temperature sintering requirements, and reduces energy waste.
[0032] In this embodiment, a vacuum pressure gauge 25 is also fixedly installed on the outside of the exhaust pipe 22. The vacuum pressure gauge 25 is connected to the inside of the sintering chamber 13. A soundproof cover 26 is provided on the outside of the vacuum pump 21, and the inside of the soundproof cover 26 is filled with sound insulation cotton 27. The soundproof cover 26 and sound insulation cotton 27 on the outside of the vacuum pump 21 reduce operating noise and improve the operating environment.
[0033] In this embodiment, an airflow guide plate 34 is also fixedly installed on the inner wall of the sintering chamber 13. The airflow guide plate 34 is located between the graphite heating rod 31 and the material carrying component 4. The airflow guide plate 34 guides the heat in the chamber to be evenly distributed, reduces the temperature gradient, avoids excessive or insufficient local sintering of silicon carbide, and solves the problem of low temperature control accuracy of traditional furnaces.
[0034] Specifically, the vacuum pump 21 of the vacuum pumping assembly 2 extracts gas from the sintering chamber 13 through the pumping pipe 22. The vacuum valve 23 can precisely control the pumping rate, and the vacuum pressure gauge 25 monitors the vacuum level in the chamber in real time to ensure that a high vacuum environment is maintained. The filter screen 24 can filter material volatiles to avoid clogging the pumping pipe, solve the problem of unstable vacuum level in traditional furnaces, reduce the impact of impurity gases on silicon carbide sintering, and ensure product purity and performance.
[0035] The graphite heating rods 31 of the high-temperature temperature control component 3 are distributed around the sintering cavity 13 to provide uniform heat. The temperature sensor 32 provides real-time feedback on the temperature inside the cavity and, together with the external control system, precisely adjusts the heating power to ensure that the temperature is stable in the high-temperature sintering range. The airflow guide plate 34 guides the heat inside the cavity to be evenly distributed, reduces the temperature gradient, and avoids excessive or insufficient local sintering of silicon carbide, thus solving the pain point of low temperature control accuracy in traditional furnaces.
[0036] The sealing ring 52 of the sealing furnace door assembly 5 fits tightly against the furnace shell 11 and the furnace door body 51, and the locking handle 53 enhances the sealing pressure, which can effectively prevent air leakage; the heat insulation layer 12 on the furnace body main assembly 1 works with the heat insulation plate 33 to reduce heat loss in the sintering chamber 13 and reduce heating energy consumption; at the same time, the heat insulation layer 12 on the furnace door body 51 further enhances the heat insulation effect, adapts to the long-term high-temperature sintering requirements, and reduces energy waste;
[0037] The support platform 41 of the material support component 4 is made of silicon carbide ceramic material, which has strong high temperature resistance and is not easily deformed after long-term use; the high temperature resistant pad 43 avoids direct contact between silicon carbide material and support platform to prevent adhesion; the lifting column 42 can adjust the height of support platform to adapt to the sintering requirements of materials of different sizes, ensuring that the material is always in the temperature uniform area of sintering chamber 13 and improving sintering consistency.
[0038] The soundproof cover 26 and soundproof cotton 27 on the outside of the vacuum pump 21 reduce operating noise and improve the operating environment; the anti-slip pad 16 of the support base 15 ensures that the furnace body is placed stably, avoids the impact of vibration on the connection stability of equipment components during sintering, and further improves the overall durability of the equipment.
[0039] Vacuum valve 23 and graphite heating rod 31 are linked to the external control system. Parameters such as vacuum degree, temperature and sintering time can be set with one button on the panel without frequent manual adjustment. The hinged design of the furnace door body 51 and the locking handle 53 facilitate quick opening and closing of the furnace door and loading and unloading of materials, which is suitable for the high-efficiency production needs of batch silicon carbide sintering and reduces the operating threshold.
[0040] It should be noted that although embodiments of the present invention have been shown and described, those skilled in the art will understand that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.
Claims
1. A high-temperature vacuum silicon carbide sintering furnace, characterized in that, include: The furnace body main component (1) is provided with a vacuum pumping component (2) on the outside of the furnace body main component (1), a high temperature control component (3) on the inside of the furnace body main component (1), a material carrying component (4) on the bottom inside of the furnace body main component (1), and a sealing furnace door component (5) on the front of the furnace body main component (1). The vacuum pumping component (2) and the high temperature control component (3) are both electrically connected to the external control system. The main body component (1) of the furnace includes a furnace shell (11), a heat insulation layer (12) and a sintering cavity (13). The heat insulation layer (12) is fixedly attached to the outer wall of the furnace shell (11). The sintering cavity (13) is formed on the inner side of the heat insulation layer (12). An air extraction hole (14) is provided on the top of the furnace shell (11). A support base (15) is fixedly installed on the outer side of the furnace shell (11). An anti-slip pad (16) is provided at the bottom of the support base (15). The vacuum pumping assembly (2) includes a vacuum pump (21), a pumping pipe (22), and a vacuum valve (23). The vacuum pump (21) is fixedly installed on the outside of the furnace shell (11). One end of the pumping pipe (22) is connected to the input end of the vacuum pump (21), and the other end extends through the pumping hole (14) into the sintering chamber (13). The vacuum valve (23) is fixedly installed on the outside of the pumping pipe (22). A filter screen (24) is provided on the inside of the pumping pipe (22). The high-temperature temperature control component (3) includes a graphite heating rod (31), a temperature sensor (32), and a heat insulation plate (33). The graphite heating rod (31) is evenly distributed on the inner wall of the heat insulation layer (12) and is arranged around the sintering cavity (13). The temperature sensor (32) is fixedly installed on the inner wall of the sintering cavity (13). The heat insulation plate (33) is fixedly installed on the top of the sintering cavity (13). The graphite heating rod (31) is made of graphite heating rod material.
2. The high-temperature vacuum silicon carbide sintering furnace according to claim 1, characterized in that, The material carrying component (4) includes a carrying platform (41), a lifting column (42), and a high-temperature resistant pad (43). The lifting column (42) is fixedly installed at the bottom of the sintering chamber (13), the carrying platform (41) is fixedly installed at the top of the lifting column (42), and the high-temperature resistant pad (43) is fixedly attached to the top of the carrying platform (41). The material of the carrying platform (41) is silicon carbide ceramic.
3. The high-temperature vacuum silicon carbide sintering furnace according to claim 1, characterized in that, The sealed furnace door assembly (5) includes a furnace door body (51), a sealing ring (52), and a locking handle (53). The furnace door body (51) is hinged to the front side of the furnace shell (11). The sealing ring (52) is fixedly installed on the inner side of the furnace door body (51). The locking handle (53) is fixedly installed on the outer side of the furnace door body (51). The insulation layer (12) is also fixedly installed on the furnace door body (51).
4. The high-temperature vacuum silicon carbide sintering furnace according to claim 1, characterized in that, A vacuum pressure gauge (25) is fixedly installed on the outside of the air extraction pipe (22). The vacuum pressure gauge (25) is connected to the inside of the sintering chamber (13). A soundproof cover (26) is provided on the outside of the vacuum pump (21). The inside of the soundproof cover (26) is filled with soundproof cotton (27).
5. The high-temperature vacuum silicon carbide sintering furnace according to claim 1, characterized in that, An airflow guide plate (34) is also fixedly installed on the inner wall of the sintering chamber (13), and the airflow guide plate (34) is located between the graphite heating rod (31) and the material carrying component (4).