A jig suitable for polycrystal detection

Abstract

The utility model discloses a tool suitable for polycrystal detection, including the installation base, the front side fixed mounting of installation base upper end has the support frame, the left side fixed mounting of support frame upper end has the rotary air cylinder, the output of rotary air cylinder fixed mounting has the blowing pipe groove, the rear end fixed mounting of blowing pipe groove has the clean gas port, the left side fixed connection of blowing pipe groove front end has the external gas hose, the rear side fixed mounting of installation base upper end has the dust collecting port, the utility model discloses through blowing pipe groove to the blocky polycrystal material of positioning clamping carries out the air blowing, sweeps the surface dust, and the rotary air cylinder controls clean gas port to keep certain angle of inclination in the working process, and can adjust the angle flexibly, and cooperate dust collecting port synchronous suction dust and dust removal treatment, so that the dust of sweeping can be captured by dust collecting box in time, optimize the dust suppression effect of equipment dust suppression mechanism, avoid dust impurity to adhere on the surface of blocky polycrystal material, be favorable to the accurate degree of blocky polycrystal material detection work.

Description

Technical Field

[0001] This utility model relates to the field of testing fixtures, and in particular to a fixture suitable for polycrystalline material testing. Background Technology

[0002] Polycrystalline testing is a systematic analytical technique for the crystal structure, physical properties, and defects of polycrystalline materials. It aims to assess material purity, crystal stability, and process adaptability. Essentially, polycrystalline testing uses interdisciplinary techniques to analyze the microstructure of materials, providing core quality control data for high-precision fields such as photovoltaics, semiconductors, and pharmaceuticals. Bulk polycrystalline materials are solids formed by tightly packed grains, with grain boundaries and stress concentration zones. Polycrystalline testing fixtures are specialized testing tools used in semiconductor or photovoltaic manufacturing processes for polycrystalline materials. Their core function is to achieve accurate detection of material physical properties, defect distribution, and process quality, including detecting grain boundary defects, internal cracks, and texture orientation.

[0003] Currently, the fixtures used for polycrystalline material testing have certain limitations during operation. The dust suppression effect on the fixtures is insufficient, which may further affect the accuracy of testing bulk polycrystalline materials due to dust and impurities.

[0004] Therefore, to address the above problems, a fixture with a highly efficient dust suppression structure suitable for polycrystalline detection can be designed. Utility Model Content

[0005] To overcome the problem that the dust suppression effect on the fixtures used for polycrystalline material testing is insufficient during operation, which may further affect the accuracy of polycrystalline material testing due to some dust and impurities.

[0006] The technical solution of this utility model is as follows: a fixture suitable for polycrystalline silicon detection includes a mounting base, a support frame fixedly mounted on the front side of the upper end of the mounting base, a rotary cylinder fixedly mounted on the left side of the upper end of the support frame, an air blowing pipe groove fixedly mounted on the output end of the rotary cylinder, a cleaning air port fixedly mounted on the rear end of the air blowing pipe groove, an external air supply hose fixedly connected to the left side of the front end of the air blowing pipe groove, a dust collection port fixedly mounted on the rear side of the upper end of the mounting base, a dust collection box fixedly mounted on the upper end of the mounting base next to the dust collection port, and a dust collection fan fixedly mounted inside the dust collection box. A filter bag is installed at the right end of the machine. A connecting pipe is fixedly connected to the rear end of the dust collection port. A guide rail housing is fixedly installed at the upper end of the mounting base. A drive motor is fixedly installed inside the guide rail housing. A double-threaded rod is fixedly installed at the output end of the drive motor. Moving blocks are set on both the left and right sides of the surface of the double-threaded rod. A connector is fixedly installed at the upper end of the moving block. The upper end of the connector extends to the outer side of the guide rail housing and is fixedly installed with a mounting shell. A pressure detection module is fixedly installed on the inner side of the mounting shell. A clamping plate is fixedly installed on the pressure detection module. A flexible pad is fixedly installed on the clamping plate.

[0007] Preferably, the drive motor can rotate the double-headed threaded rod, the moving blocks can move the mounting shells respectively, the clamping plate and flexible pad can fit and clamp the blocky polycrystalline material, the pressure detection module can detect the clamping pressure and synchronize the data to the device terminal, and when the set value of the program is reached, the drive motor is stopped in a timely and precise manner, the external air supply hose can input high-pressure nitrogen, the cleaning air port can be aimed at the blocky polycrystalline material to blow away surface dust, the rotary cylinder can control the cleaning air port to maintain a certain angle during operation and can flexibly adjust the angle, the dust suction fan can drive the air flow at the dust collection port, and the filter bag can conveniently filter and treat dust and impurities.

[0008] Preferably, a rotary cylinder is used to drive the air blowing pipe groove to rotate, the right end of the air blowing pipe groove is rotatably connected to the support frame, and the cleaning air ports are distributed at equal intervals.

[0009] Preferably, a protective net is fixedly installed inside the dust collection port, and the end of the connecting pipe away from the dust collection port extends into the dust collection box and is connected to the vacuum fan.

[0010] Preferably, the dust collection box has a ventilation slot on the right end, a connecting cover plate is detachably connected to the upper end of the dust collection box, and the filter bag is threadedly connected to the vacuum fan.

[0011] Preferably, the double-threaded rod is rotatably connected to the guide rail housing, the threads on the left and right sides of the double-threaded rod are in opposite directions, and the connector is slidably connected to the guide rail housing.

[0012] Preferably, the two movable blocks are threadedly connected to the left and right sides of the surface of the double-threaded rod, respectively, and the movable blocks are slidably connected to the guide rail housing.

[0013] Preferably, the drive motor is used to rotate the double-ended threaded rod, and the drive motor is electrically connected to the pressure detection module.

[0014] The beneficial effects of this utility model are:

[0015] 1. This fixture, suitable for polycrystalline material testing, uses an air blowing tube to blow air onto the positioned and clamped blocky polycrystalline material, sweeping away surface dust. A rotating cylinder controls the cleaning air port to maintain a certain angle during operation, and the angle can be flexibly adjusted. It works in conjunction with the dust collection port to simultaneously perform suction and dust collection, ensuring that the blown-away dust is captured by the dust collection box in a timely manner. This not only efficiently cleans dust and impurities from the blocky polycrystalline material but also suppresses dust and impurities in the surrounding space, preventing secondary adhesion of dust and impurities. It optimizes the dust suppression effect of the equipment's dust suppression mechanism, avoids dust and impurities adhering to the surface of the blocky polycrystalline material, and helps improve the accuracy of blocky polycrystalline material testing.

[0016] 2. This fixture, suitable for polycrystalline material testing, uses a drive motor and a double-ended threaded rod to ensure the centered positioning of the bulk polycrystalline material while clamping it. The pressure detection module can detect the clamping force in a timely and accurate manner. With the terminal program settings and flexible padding, it can achieve flexible clamping of the bulk polycrystalline material, precisely control the operation of the drive motor, ensure moderate clamping force, and avoid damage to the bulk polycrystalline material. Attached Figure Description

[0017] Figure 1 The diagram shown is a schematic representation of the overall structure of the fixture for polycrystalline material testing according to this utility model.

[0018] Figure 2 The diagram shown is a schematic of the gas blowing tube groove structure of the fixture for polycrystalline detection according to this utility model.

[0019] Figure 3 The diagram shown is a schematic representation of the dust collection box structure of the fixture for polycrystalline material testing according to this utility model.

[0020] Figure 4 The diagram shown is a schematic representation of the fixture guide rail housing structure suitable for polycrystalline material testing according to this utility model.

[0021] Figure 5 The diagram shown is a schematic diagram of the fixture clamping plate structure of this utility model, which is suitable for polycrystalline detection.

[0022] Explanation of reference numerals in the attached drawings: 1. Mounting base; 2. Support frame; 3. Rotary cylinder; 4. Air blowing pipe groove; 5. Cleaning air port; 6. External air supply hose; 7. Dust collection port; 8. Dust collection box; 9. Dust suction fan; 10. Filter bag; 11. Connecting pipe; 12. Guide rail housing; 13. Drive motor; 14. Double-ended threaded rod; 15. Moving block; 16. Connecting piece; 17. Mounting shell; 18. Pressure detection module; 19. Clamping plate; 20. Flexible pad; 21. Connecting cover plate. Detailed Implementation

[0023] The present invention will be further described below with reference to the accompanying drawings and embodiments.

[0024] Please see Figures 1-5 This utility model provides an embodiment: a fixture suitable for polycrystalline detection, including a mounting base 1, a support frame 2 fixedly mounted on the front side of the upper end of the mounting base 1, a rotary cylinder 3 fixedly mounted on the left side of the upper end of the support frame 2, an air blowing pipe groove 4 fixedly mounted on the output end of the rotary cylinder 3, a cleaning air port 5 fixedly mounted on the rear end of the air blowing pipe groove 4, an external air supply hose 6 fixedly connected to the left side of the front end of the air blowing pipe groove 4, a dust collection port 7 fixedly mounted on the rear side of the upper end of the mounting base 1, a dust collection box 8 fixedly mounted on the upper end of the mounting base 1 next to the dust collection port 7, a dust collection fan 9 fixedly mounted inside the dust collection box 8, a filter bag 10 provided on the right end of the dust collection fan 9, a connecting pipe 11 fixedly connected to the rear end of the dust collection port 7, and a guide rail housing 12 fixedly mounted on the upper end of the mounting base 1. A drive motor 13 is provided, and a double-headed threaded rod 14 is fixedly installed at the output end of the drive motor 13. Moving blocks 15 are provided on both the left and right sides of the surface of the double-headed threaded rod 14. A connector 16 is fixedly installed at the upper end of the moving block 15. The upper end of the connector 16 extends to the outer side of the guide rail housing 12 and is fixedly installed with a mounting shell 17. A pressure detection module 18 is fixedly installed on the inner side of the mounting shell 17. A clamping plate 19 is fixedly installed on the pressure detection module 18. A flexible pad 20 is fixedly installed on the clamping plate 19. The air blowing pipe groove 4, together with the adjustment component, blows air onto the positioning and clamping block polycrystalline material to blow away the surface dust. Simultaneously, the dust collection port 7 is used for suction and dust removal, so that the blown dust can be captured by the dust collection box 8 in time, optimizing the dust suppression effect of the equipment's dust suppression mechanism and preventing dust and impurities from adhering to the surface of the block polycrystalline material.

[0025] Please see Figures 1-3In this embodiment, the rotary cylinder 3 is used to drive the air blowing pipe groove 4 to rotate. The right end of the air blowing pipe groove 4 is rotatably connected to the support frame 2. The cleaning air ports 5 are evenly distributed. A protective net is fixedly installed inside the dust collection port 7. The end of the connecting pipe 11 away from the dust collection port 7 extends into the dust collection box 8 and is connected to the vacuum cleaner 9. A ventilation slot is opened at the right end of the dust collection box 8. A connecting cover plate 21 is detachably connected to the upper end of the dust collection box 8. The filter bag 10 is threadedly connected to the vacuum cleaner 9. High-pressure nitrogen is input through the external air supply hose 6 (the external air supply hose 6 is connected to the air blowing module). (Connected), the cleaning air port 5 can be aimed at the blocky polycrystalline material to blow away surface dust. The rotary cylinder 3 can control the cleaning air port 5 to maintain a certain angle during operation and can flexibly adjust the angle (the rotary cylinder 3 can be set as a driving component with similar functions, and each driving component is controlled and coordinated by the equipment system). The vacuum fan 9 can drive the airflow at the dust collection port 7 (the vacuum fan 9 can be set as a driving component with similar functions). The filter bag 10 can concentrate the dust and impurities in the air for filtration. The filter bag 10 is easy to disassemble, clean and replace.

[0026] Please see Figure 1 , Figure 4 and Figure 5 In this embodiment, the double-threaded rod 14 is rotatably connected to the guide rail housing 12, and the threads on the left and right sides of the double-threaded rod 14 are opposite in direction. The connector 16 is slidably connected to the guide rail housing 12. The two moving blocks 15 are respectively threaded to the left and right sides of the surface of the double-threaded rod 14. The moving blocks 15 are slidably connected to the guide rail housing 12. The drive motor 13 is used to drive the double-threaded rod 14 to rotate. The drive motor 13 is electrically connected to the pressure detection module 18. The drive motor 13 can drive the double-threaded rod 14 to rotate (the drive motor 13 can be set as a drive component with similar functions). The moving blocks 15 can drive the mounting shell 17 to move. The clamping plate 19 and the flexible pad 20 can fit and clamp the block polycrystalline material. The pressure detection module 18 can detect the clamping pressure and synchronize the data to the equipment terminal. When the set value of the program is reached, the drive motor 13 is controlled to stop in a timely and accurate manner (the detection fixture is equipped with a terminal system, which can receive the detection data of the pressure detection module 18 and control the drive motor 13 according to the program).

[0027] During operation, the blocky polycrystalline material is placed on the mounting base 1. The drive motor 13 drives the double-headed threaded rod 14 to rotate, causing the moving blocks 15 on both sides to move the mounting shell 17 towards the blocky polycrystalline material. The clamping plate 19 and the flexible pad 20 are used to clamp the blocky polycrystalline material. At the same time, the pressure detection module 18 detects the clamping pressure and synchronizes the data to the equipment terminal. When the set value of the program is reached, the drive motor 13 is stopped in a timely and precise manner to ensure that the clamping force is moderate. High-pressure nitrogen is introduced through the external air supply hose 6 so that the cleaning air port 5 is aimed at the blocky polycrystalline material to blow away the surface dust. The rotating cylinder 3 controls the cleaning air port 5 to maintain a certain angle during operation and can flexibly adjust the angle. With the help of the dust suction fan 9, the air at the dust collection port 7 is driven to concentrate the air with dust particles into the filter bag 10 for centralized filtration.

[0028] Through the above steps, the air blowing pipe 4, in conjunction with the adjusting components, blows air onto the blocky polycrystalline material being positioned and clamped, sweeping away surface dust. Simultaneously, the dust collection port 7 performs suction dust collection and removal, ensuring that the swept dust is captured by the dust collection box 8 in a timely manner. This optimizes the dust suppression effect of the equipment's dust suppression mechanism, preventing dust and impurities from adhering to the surface of the blocky polycrystalline material. This addresses the problem that the dust suppression effect on the fixtures used for polycrystalline material testing is insufficient during operation, which could further affect the accuracy of polycrystalline material testing due to some dust and impurities.

Claims

1. A fixture suitable for polycrystalline silicon testing, comprising a mounting base (1), characterized in that: A support frame (2) is fixedly installed on the front side of the upper end of the mounting base (1). A rotary cylinder (3) is fixedly installed on the left side of the upper end of the support frame (2). An air blowing pipe groove (4) is fixedly installed at the output end of the rotary cylinder (3). A cleaning air port (5) is fixedly installed at the rear end of the air blowing pipe groove (4). An external air supply hose (6) is fixedly connected to the left side of the front end of the air blowing pipe groove (4). A dust collection port (7) is fixedly installed on the rear side of the upper end of the mounting base (1). A dust collection box (8) is fixedly installed on the side of the dust collection port (7) at the upper end of the mounting base (1). A vacuum cleaner (9) is fixedly installed inside the dust collection box (8). A filter bag (10) is provided at the right end of the vacuum cleaner (9). A connecting pipe is fixedly connected to the rear end of the dust collection port (7). 11) A guide rail housing (12) is fixedly installed on the upper end of the mounting base (1). A drive motor (13) is fixedly installed inside the guide rail housing (12). A double-headed threaded rod (14) is fixedly installed at the output end of the drive motor (13). Moving blocks (15) are provided on both the left and right sides of the surface of the double-headed threaded rod (14). A connector (16) is fixedly installed on the upper end of the moving block (15). The upper end of the connector (16) extends to the outside of the guide rail housing (12) and a mounting shell (17) is fixedly installed. A pressure detection module (18) is fixedly installed on the inner side of the mounting shell (17). A clamping plate (19) is fixedly installed on the pressure detection module (18). A flexible pad (20) is fixedly installed on the clamping plate (19).

2. The fixture for polycrystalline material detection according to claim 1, characterized in that: The rotary cylinder (3) is used to drive the air blowing pipe groove (4) to adjust the rotation. The right end of the air blowing pipe groove (4) is rotatably connected to the support frame (2). The cleaning air ports (5) are distributed at equal intervals.

3. A fixture suitable for polycrystalline material detection according to claim 1, characterized in that: A protective net is fixedly installed inside the dust collection port (7), and the end of the connecting pipe (11) away from the dust collection port (7) extends into the dust collection box (8) and is connected to the dust suction fan (9).

4. A fixture suitable for polycrystalline material detection according to claim 3, characterized in that: The dust collection box (8) has a ventilation slot on the right end, and the upper end of the dust collection box (8) is detachably connected to a connecting cover plate (21). The filter bag (10) is threadedly connected to the vacuum cleaner (9).

5. A fixture suitable for polycrystalline material detection according to claim 1, characterized in that: The double-threaded rod (14) is rotatably connected to the guide rail housing (12). The threads on the left and right sides of the double-threaded rod (14) are opposite in direction. The connector (16) is slidably connected to the guide rail housing (12).

6. A fixture suitable for polycrystalline material detection according to claim 5, characterized in that: The two movable blocks (15) are respectively threaded to the left and right sides of the surface of the double-ended threaded rod (14), and the movable blocks (15) are slidably connected to the guide rail housing (12).

7. A fixture suitable for polycrystalline material detection according to claim 6, characterized in that: The drive motor (13) is used to drive the double-ended threaded rod (14) to rotate. The drive motor (13) is electrically connected to the pressure detection module (18).

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