Ultra-precision test probe for chip

By designing and adjusting the threaded sleeve and threaded groove connection, combined with the limiting device and flexible sector plate, the problem of the test probe's inability to adjust its size was solved, achieving high-precision and stable testing results, and adapting to the multi-stage requirements of the chip manufacturing process.

CN224328175UActive Publication Date: 2026-06-05DONGGUAN HAICHUANG HI-TECH ELECTRONIC TECHNOLOGY CO LTD

Patent Information

Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
DONGGUAN HAICHUANG HI-TECH ELECTRONIC TECHNOLOGY CO LTD
Filing Date
2025-05-07
Publication Date
2026-06-05

AI Technical Summary

Technical Problem

Existing chip test probes cannot adjust the size of the probe tip, which makes it impossible to meet the accuracy requirements at different test stages. Furthermore, they are prone to movement under vibration or impact, affecting test stability and accuracy.

Method used

The design employs a threaded sleeve and threaded groove connection, combined with adjustment components and limiting devices, to achieve up-and-down adjustment of the test probe, and uses a flexible sector plate to increase stability and sealing.

Benefits of technology

It achieves precise positioning of the test probe at the micrometer level, improves test accuracy and stability, ensures accurate signal transmission, identifies minute defects, adapts to high-frequency testing, and has durability.

✦ Generated by Eureka AI based on patent content.

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Abstract

The application relates to the technical field of test probes, in particular to a super-high-precision test probe for a chip, which comprises a test probe for detection and a needle tube outside the test probe, a threaded sleeve is fixedly arranged on the test probe, a threaded groove is arranged in the needle tube and is in threaded connection with the threaded sleeve, a through groove is arranged outside the needle tube, and an adjusting assembly for adjusting the up-down movement of the test probe is arranged on the test probe. In the application, the test probe is in threaded connection in the needle tube, the size of the up-down adjustment of the test probe can be freely controlled through the arrangement of the adjusting assembly, and therefore the above technical problems are solved.
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Description

Technical Field

[0001] This application relates to the field of test probe technology, and in particular to an ultra-high precision test probe for chips. Background Technology

[0002] Ultra-high precision test probes for chips are devices used to test integrated circuits (ICs), typically consisting of a probe tip, a probe tube, and a wire structure. They measure parameters such as electrical performance, power consumption, and signal response of the chip by contacting its pins, ensuring that the chip's quality and performance meet design requirements. These probes can be used at different stages of the chip manufacturing process, such as wafer testing and packaging testing, and can be automated on production lines, improving production efficiency. In existing technologies, the probe tip is inserted into the probe tube, requiring it to extend out for use. Currently, the probe tip is not adjustable and can only maintain a fixed size. Therefore, this application presents an ultra-high precision test probe with an adjustable probe tip after extension. Utility Model Content

[0003] To address the shortcomings of existing technologies, the purpose of this application is to provide an ultra-high precision test probe for chips to solve the technical problems mentioned in the background art.

[0004] The above-mentioned objective of this application is achieved through the following technical solution: an ultra-high precision test probe for chips, comprising a test probe for detection and a needle tube on the outside of the test probe, a threaded sleeve is fixedly provided on the test probe, a threaded groove is opened inside the needle tube and threadedly connected to the threaded sleeve, a through groove is opened on the outside of the needle tube, and an adjustment component is provided on the test probe for adjusting the up and down movement of the test probe.

[0005] By adopting the above technical solution, this application solves the above technical problem by threading the test probe into the needle tube and adjusting the size of the test probe by adjusting the component settings.

[0006] Furthermore, the adjustment assembly includes an adjustment ring disposed at the through slot, the adjustment ring being fixedly connected to the test probe, and a protrusion being fixedly disposed on the outer layer of the adjustment ring.

[0007] By adopting the above technical solution, during the adjustment process, the adjustment ring is rotated by friction protrusion, which in turn drives the test probe to rotate. The threaded sleeve allows it to be adjusted up and down inside the needle tube along with the threaded groove.

[0008] Furthermore, the protrusion is made of insulating rubber, and a limiting device is provided on the outer side of the protrusion.

[0009] Furthermore, the limiting device includes a locking plate disposed on one side of the through groove, the locking plate being rotatably connected to the needle tube, and a limiting block for engaging the protruding bracket being fixedly disposed on the inner side of the locking plate.

[0010] By adopting the above technical solution, after the adjustment is completed, the locking plate is rotated to make the limiting block and protrusion inside the locking plate engage, thereby restricting the rotation of the adjusting ring and achieving the purpose of limiting the position.

[0011] Furthermore, a miniature magnet is fixedly installed on the locking plate.

[0012] By adopting the above technical solution, the micro magnets can be used to stably connect the locking plate to the needle.

[0013] Furthermore, a pull-assist ring is fixedly provided on the outer side of the locking plate.

[0014] By adopting the above technical solution, it is easy to pull the locking plate when unlocking.

[0015] Furthermore, a plurality of flexible sector plates are fixedly disposed on the inner side of the bottom of the needle tube, and the flexible sector plates are evenly distributed on the inner side of the needle tube.

[0016] By adopting the above technical solution, the flexible sector plate can closely fit the outer side of the test probe, increasing the contact area between the needle tube and the test probe, thereby improving the stability of the contact. This design reduces the relative movement between the test probe and the needle tube caused by vibration or impact, ensuring the stability of the test probe during the testing process.

[0017] Flexible fan-shaped plates are evenly distributed inside the syringe, forming an effective sealing barrier to prevent external impurities or gases from entering the syringe and contaminating or interfering with the test probe. This design improves the sealing performance of the test probe, ensuring a clean and stable testing environment.

[0018] Furthermore, the flexible fan-shaped plate has two layers, which are staggered and distributed on the inside of the needle tube.

[0019] By adopting the above technical solution, the two staggered flexible fan-shaped plates can more comprehensively conform to the outer side of the test probe, increasing the contact area between the needle tube and the test probe. This design reduces the relative movement between the test probe and the needle tube caused by vibration or impact, ensuring the stability of the test probe during the testing process.

[0020] In summary, this application offers the following beneficial technical advantages: By connecting the threaded sleeve fixedly on the test probe to the threaded groove inside the needle tube, the test probe can be securely connected within the needle tube, while also facilitating vertical adjustment via an adjustment component. This design brings significant benefits. This solution improves testing accuracy, enabling the semiconductor probe station to achieve precise positioning at the micrometer level, ensuring accurate transmission of test signals to every test point on the chip, effectively identifying minute defects in the chip design, and improving product quality. As chip manufacturing processes shrink, this solution requires the probe to achieve accurate contact within the micrometer range, possess sufficient durability to withstand high-frequency testing operations, and meet high-precision testing requirements. Attached Figure Description

[0021] Figure 1 This is a schematic diagram of the overall structure in the embodiment;

[0022] Figure 2 yes Figure 1 Sectional view along section line AA;

[0023] Figure 3 This is a schematic diagram of the flexible sector plate structure in the embodiment.

[0024] Reference numerals: 1. Needle; 11. Locking plate; 12. Limiting block; 13. Miniature magnet; 14. Assist ring; 2. Test probe; 21. Adjusting ring; 22. Protrusion; 23. Threaded sleeve; 3. Flexible sector plate. Detailed Implementation

[0025] The present application will be further described in detail below with reference to the accompanying drawings.

[0026] Example, refer to Figure 1 A high-precision test probe for chips includes a test probe 2 for detection and a needle tube 1 on the outside of the test probe 2. A threaded sleeve 23 is fixedly disposed on the test probe 2. A threaded groove is formed inside the needle tube 1 that is threadedly connected to the threaded sleeve 23. A through groove is formed on the outside of the needle tube 1. An adjustment component for adjusting the vertical movement of the test probe 2 is provided on the test probe 2. In this application, by threading the test probe 2 into the needle tube 1 and by setting the adjustment component, the vertical adjustment dimension of the test probe 2 can be freely controlled, thereby solving the above-mentioned technical problems.

[0027] In this embodiment, refer to Figure 2 as well as Figure 3 The adjustment assembly includes an adjustment ring 21 disposed at the through groove, which is fixedly connected to the test probe 2. A protrusion 22 is fixedly disposed on the outer layer of the adjustment ring 21. During adjustment, the adjustment ring 21 is rotated by rubbing the protrusion 22, thereby causing the adjustment ring 21 to rotate and drive the test probe 2 to rotate. The threaded sleeve 23 allows it to be adjusted up and down inside the needle tube 1 along with the threaded groove.

[0028] In this embodiment, the protrusion 22 is made of insulating rubber, and a limiting device is provided on the outer side of the protrusion 22. The limiting device includes a locking plate 11 disposed on one side of the through groove, the locking plate 11 is rotatably connected to the needle tube, and a limiting block 12 that engages with the bracket of the protrusion 22 is fixedly disposed on the inner side of the locking plate 11.

[0029] After adjustment, by rotating the locking plate 11, the limiting block 12 and the protrusion 22 inside the locking plate 11 are engaged, thereby restricting the rotation of the adjusting ring 21 and achieving the purpose of limiting its movement.

[0030] In this embodiment, a miniature magnet 13 is fixedly disposed on the locking plate 11. The miniature magnet 13 allows the locking plate 11 to be stably connected to the needle tube 1.

[0031] In this embodiment, a pull-assisted ring 14 is fixedly provided on the outer side of the locking plate 11 to facilitate pulling the locking plate 11 when unlocking.

[0032] In this embodiment, multiple flexible sector-shaped plates 3 are fixedly disposed on the inner side of the bottom of the needle tube, with the flexible sector-shaped plates 3 evenly distributed on the inner side of the needle tube. The flexible sector-shaped plates 3 can closely fit the outer side of the test probe 2, increasing the contact area between the needle tube and the test probe 2, thereby improving the stability of the contact. This design reduces the relative movement between the test probe 2 and the needle tube caused by vibration or impact, ensuring the stability of the test probe 2 during the testing process.

[0033] The flexible fan-shaped plates 3 are evenly distributed on the inner side of the needle tube, forming an effective sealing barrier to prevent external impurities or gases from entering the needle tube and causing contamination or interference to the test probe 2. This design improves the sealing performance of the test probe 2, ensuring a pure and stable testing environment.

[0034] In this embodiment, the flexible sector plate 3 has two layers, which are staggered and distributed inside the needle tube. The two staggered flexible sector plates 3 can more fully conform to the outer side of the test probe 2, increasing the contact area between the needle tube and the test probe 2. This design reduces the relative movement between the test probe 2 and the needle tube caused by vibration or impact, ensuring the stability of the test probe 2 during the test process.

[0035] Specific implementation process: The threaded sleeve 23 fixedly installed on the test probe 2 is threadedly connected to the threaded groove opened inside the needle tube 1, so that the test probe 2 can be stably connected to the needle tube 1, and at the same time, it can be easily adjusted up and down by adjusting the assembly. The adjusting assembly includes an adjusting ring 21 set at the through groove, which is fixedly connected to the test probe 2. A protrusion 22 is fixedly set on the outer layer. By rubbing the protrusion 22 to rotate the adjusting ring 21, the test probe 2 can be driven to rotate, thereby realizing the up and down adjustment of the test probe 2 inside the needle tube 1. The protrusion 22 is made of insulating rubber and has a limiting device on the outside. The limiting device includes a locking plate 11 set on one side of the through groove, which is rotatably connected to the needle tube. A limiting block 12 is fixedly set on the inside to engage with the support of the protrusion 22. After the adjustment is completed, by rotating the locking plate 11, the limiting block 12 inside the locking plate 11 engages with the protrusion 22, thereby limiting the rotation of the adjusting ring 21 and achieving the purpose of limiting. A miniature magnet 13 is fixedly mounted on the locking plate 11, ensuring a stable connection between the locking plate 11 and the needle tube 1, preventing loosening. A pull-assist ring 14 is fixedly mounted on the outer side of the locking plate 11 for easy pulling during unlocking. Furthermore, multiple flexible fan-shaped plates 3 are fixedly mounted on the inner bottom of the needle tube. These flexible fan-shaped plates 3 are evenly and staggeredly distributed inside the needle tube, allowing them to closely conform to the outer side of the test probe 2, increasing the contact area between the needle tube and the test probe 2. This improves contact stability, reduces relative movement between the test probe 2 and the needle tube due to vibration or impact, ensures the stability of the test probe 2 during testing, and forms an effective sealing barrier to prevent external impurities or gases from entering the needle tube and contaminating or interfering with the test probe 2. This improves the sealing performance of the test probe 2 and ensures a clean and stable testing environment. In terms of usage, the test probe 2 is easy to install, adjust, lock, and unlock, and can stably measure parameters such as electrical performance, power consumption, and signal response. The embodiments described in this specific implementation are preferred embodiments of this application and are not intended to limit the scope of protection of this application. Therefore, all equivalent changes made in accordance with the structure, shape and principle of this application should be covered within the scope of protection of this application.

Claims

1. A high-precision test probe for chips, comprising a test probe (2) for detection and a needle tube (1) outside the test probe (2), characterized in that, The test probe (2) is fixedly provided with a threaded sleeve (23), the needle tube (1) has a threaded groove that is threadedly connected to the threaded sleeve (23) inside, the needle tube (1) has a through groove on the outside, and the test probe (2) is provided with an adjustment component for adjusting the up and down movement of the test probe (2).

2. The ultra-high precision test probe for chips according to claim 1, characterized in that, The adjustment assembly includes an adjustment ring (21) disposed at the through slot, the adjustment ring (21) being fixedly connected to the test probe (2), and a protrusion (22) being fixedly disposed on the outer layer of the adjustment ring (21).

3. The ultra-high precision test probe for chips according to claim 2, characterized in that, The protrusion (22) is made of insulating rubber, and a limiting device is provided on the outside of the protrusion (22).

4. The ultra-high precision test probe for chips according to claim 3, characterized in that, The limiting device includes a locking plate (11) disposed on one side of the through groove. The locking plate (11) is rotatably connected to the needle tube (1). A limiting block (12) for snapping the bracket of the protrusion (22) is fixedly disposed on the inner side of the locking plate (11).

5. The ultra-high precision test probe for chips according to claim 4, characterized in that, A miniature magnet (13) is fixedly installed on the locking plate (11).

6. The ultra-high precision test probe for chips according to claim 5, characterized in that, A pull-assist ring (14) is fixedly provided on the outer side of the locking plate (11).

7. The ultra-high precision test probe for chips according to claim 1, characterized in that, Multiple flexible fan-shaped plates (3) are fixedly arranged on the inner side of the bottom of the needle tube (1), and the flexible fan-shaped plates (3) are evenly distributed on the inner side of the needle tube (1).

8. The ultra-high precision test probe for chips according to claim 7, characterized in that, The flexible fan-shaped plate (3) has two layers, which are staggered and distributed inside the needle tube (1).