A temperature and humidity protection device and system based on an LDI exposure machine
By designing a temperature and humidity protection device in the LDI exposure machine, the problem of equipment damage caused by abnormal temperature and humidity before startup is solved, and the stable operation of the equipment and protection of key components are achieved.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- HANGZHOU XINJUNZHE MICROELECTRONICS CO LTD
- Filing Date
- 2025-05-29
- Publication Date
- 2026-06-05
AI Technical Summary
Existing LDI exposure machines suffer from equipment damage and poor accuracy due to abnormal temperature and humidity before startup, and lack effective protection measures for key components.
Design a temperature and humidity protection device, including a temperature detection module, a control module, a start-up module, and a protection module. By acquiring temperature and humidity data in real time, the device switches operating modes to prevent temperature and humidity from exceeding the limits during equipment startup and operation.
It effectively protects LDI exposure machines from damage caused by excessive temperature and humidity, ensures stable equipment operation, and avoids damage to critical components.
Smart Images
Figure CN224328325U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of semiconductor technology, and in particular to a temperature and humidity protection device and system based on an LDI exposure machine. Background Technology
[0002] In existing technologies, abnormal temperature and humidity environments inside LDI exposure machines can cause PCB board deformation, leading to instability in the optical system of the LDI exposure machine, poor accuracy of the LDI exposure machine, and increased failure rate of electronic components in the LDI exposure machine.
[0003] Technicians mostly address these technical issues through temperature and humidity control. However, since these methods are primarily applicable to the exposure process, if the LDI exposure machine is already overheated or has condensation on its surface before startup, the power supply to the various working modules after startup could potentially damage electronic components or cause production abnormalities. Furthermore, because temperature and humidity control in LDI exposure machines mainly relies on environmental regulation to maintain internal environmental parameters, effective protective measures for critical components are lacking.
[0004] Therefore, there is an urgent need for a protection system for LDI exposure machines that can ensure the stability of startup and production processes and prevent damage caused by excessive temperature and humidity inside the equipment. Utility Model Content
[0005] The purpose of this invention is to provide a temperature and humidity protection device and system based on an LDI exposure machine. By setting temperature and humidity detection, the device protects the circuit during startup and production, effectively protecting the LDI exposure machine and preventing damage to critical equipment caused by excessive temperature and humidity inside the equipment.
[0006] In a first aspect, this utility model provides a temperature and humidity protection device based on an LDI exposure machine, comprising:
[0007] The system includes a temperature detection module, a control module, a startup module, and a protection module. The temperature detection module is connected to the control module. The control module is connected to the control terminals of both the startup module and the protection module. The startup module is also connected to the startup terminal of the LDI exposure machine. The protection module is also connected to the control terminal of the LDI exposure machine.
[0008] The temperature detection module is used to acquire the temperature and humidity data of the LDI exposure machine in real time. The temperature and humidity data includes the ambient temperature and humidity as well as the device temperature and humidity.
[0009] The control module includes multiple operating states, each corresponding to a different control signal. Based on temperature and humidity data, the control module sends the corresponding control signal to the start-up module and / or protection module to switch the operating mode of the LDI exposure machine.
[0010] Optionally, the temperature and humidity protection device also includes an early warning module, and the control module includes a start control component connected to the early warning module;
[0011] If the ambient temperature and humidity are less than or equal to the first preset temperature value, the start control component is in the first working state and sends a first control signal to the start module to start the LDI exposure machine.
[0012] If the ambient temperature and humidity exceed the first preset temperature value, the control component is activated to enter the second working state and sends a second control signal to the early warning module to issue a temperature warning.
[0013] Optionally, the temperature detection module includes a first ambient temperature and humidity probe and a first ambient temperature and humidity transmitter; the first ambient temperature and humidity probe is connected to the first ambient temperature and humidity transmitter.
[0014] The first ambient temperature and humidity probe is used to detect the temperature and humidity of the environment in which the LDI exposure machine is located;
[0015] When the ambient temperature and humidity are less than or equal to the first preset temperature value, the switching transistor in the first ambient temperature and humidity transmitter is turned on, sending a high-level signal to the start-up module to start the LDI exposure machine.
[0016] When the ambient temperature and humidity exceed the first preset temperature value, the switching transistor in the first ambient temperature and humidity transmitter is turned off, and a low-level signal is sent to the early warning module to provide a temperature warning.
[0017] Optionally, the control module also includes a laser control component.
[0018] When the LDI exposure machine is started, if the device temperature and humidity are greater than the second preset temperature value, the laser control component is in the third working state and sends a third control signal to the LDI exposure machine to stop the laser in the LDI exposure machine.
[0019] Optionally, the temperature detection module also includes an engine temperature and humidity detection probe and a second ambient temperature and humidity transmitter, with the engine temperature and humidity detection probe connected to the second ambient temperature and humidity transmitter.
[0020] Engine temperature and humidity detection probe is used to detect the device temperature and humidity of the LDI exposure machine to obtain the device temperature and humidity;
[0021] The second ambient temperature and humidity transmitter is used to send the device's temperature and humidity to the laser control component via a communication bus.
[0022] Optionally, the laser control component includes a PLC controller and a host computer; the engine temperature and humidity detection probe is connected to the second ambient temperature and humidity transmitter; the PLC controller is connected to the second ambient temperature and humidity transmitter and the host computer respectively.
[0023] When the LDI exposure machine is started, if the device temperature and humidity are greater than the second preset temperature value, the PLC controller enters the third working state and sends a third control signal to the host computer to shut down the laser in the LDI exposure machine.
[0024] Optionally, the LDI exposure machine includes a laser unit, and the host computer is connected to the laser unit via a communication bus;
[0025] When the PLC controller is in the third working state, the host computer sends a third control signal to the laser unit through the communication bus to shut down the laser unit.
[0026] Optionally, the temperature detection module also includes a second ambient temperature and humidity probe; the second ambient temperature and humidity probe is connected to a second ambient temperature and humidity transmitter;
[0027] The second ambient temperature and humidity probe is used to detect the temperature and humidity of the internal environment of the LDI exposure machine and obtain the internal ambient temperature and humidity.
[0028] The second ambient temperature and humidity transmitter is used to send the internal ambient temperature and humidity to the laser control component via the communication bus.
[0029] When the LDI exposure machine is started, if the internal ambient temperature and humidity are greater than the third preset temperature value, the laser control component is in the third working state and sends a third control signal to the LDI exposure machine to stop the laser in the LDI exposure machine from working.
[0030] Optionally, the start module includes: a three-phase AC contactor, a temperature and humidity over-limit indicator light, a temperature and humidity detection sensor, a temperature and humidity signal intermediate relay, an emergency stop switch, a system power start intermediate relay, a panel start button, and a panel stop button.
[0031] The first terminal of the temperature and humidity exceeding the limit indicator light is connected to the power supply, the first terminal of the normally closed contact in the temperature and humidity detection sensor, and the first terminal of the emergency stop switch; the second terminal of the temperature and humidity exceeding the limit indicator light is connected to the first terminal of the normally closed contact in the temperature and humidity signal intermediate relay; the second terminal of the normally closed contact in the temperature and humidity detection sensor is connected to the first terminal of the coil in the temperature and humidity signal intermediate relay; the normally closed contact in the temperature and humidity detection sensor is also connected in parallel with the normally open contact in the three-phase AC contactor; the second terminal of the emergency stop switch is connected to the first terminal of the normally open contact in the temperature and humidity signal intermediate relay; the second terminal of the normally open contact in the temperature and humidity signal intermediate relay... The first terminal is connected to the first terminal of the panel start button and the first terminal of the normally open contact in the three-phase AC contactor, respectively; the second terminal of the panel start button is connected to the first terminal of the panel stop button, the second terminal of the normally open contact in the three-phase AC contactor, and the first terminal of the contactor in the three-phase AC contactor; the second terminal of the panel stop button is connected to the first terminal of the coil in the system power start intermediate relay; the second terminal of the normally closed contact of the temperature and humidity signal intermediate relay, the second terminal of the coil of the temperature and humidity signal intermediate relay, the second terminal of the coil of the system power start intermediate relay, and the second terminal of the coil of the three-phase AC contactor are all grounded.
[0032] Secondly, this utility model also provides a temperature and humidity protection system based on an LDI exposure machine, including a power supply and the temperature and humidity protection device described in any of the first aspects above.
[0033] The temperature and humidity protection device and system based on an LDI exposure machine provided by this utility model have the following features:
[0034] Beneficial effects:
[0035] This application discloses a temperature and humidity protection device based on an LDI exposure machine, relating to the field of semiconductor technology. The device includes a temperature detection module, a control module, a startup module, and a protection module. The temperature detection module is connected to the control module. The control module is connected to the control terminals of both the startup module and the protection module. The startup module is also connected to the startup terminal of the LDI exposure machine. The protection module is also connected to the control terminal of the LDI exposure machine. The temperature detection module acquires real-time temperature and humidity data from the LDI exposure machine, including ambient temperature and humidity as well as device temperature and humidity. The control module includes multiple operating states, each corresponding to a different control signal. Based on the temperature and humidity data, the control module sends corresponding control signals to the startup module and / or the protection module to switch the operating mode of the LDI exposure machine. Therefore, this application can protect the LDI exposure machine during the circuit startup and production processes by setting temperature and humidity detection, effectively preventing damage to critical equipment caused by excessive temperature and humidity within the equipment. Attached Figure Description
[0036] To more clearly illustrate the specific embodiments of this utility model or the technical solutions in the prior art, the drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this utility model. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.
[0037] Figure 1 One of the structural schematic diagrams of the temperature and humidity protection device provided in the embodiments of this utility model;
[0038] Figure 2 A second schematic diagram of the temperature and humidity protection device provided in this embodiment of the utility model;
[0039] Figure 3 This is a schematic diagram of the temperature detection module in an embodiment of the present invention;
[0040] Figure 4 The third schematic diagram of the temperature and humidity protection device provided in the embodiment of this utility model;
[0041] Figure 5 Fourth schematic diagram of the temperature and humidity protection device provided in the embodiment of this utility model;
[0042] Figure 6 Fifth schematic diagram of the temperature and humidity protection device provided in the embodiments of this utility model;
[0043] Figure 7 Sixth schematic diagram of the temperature and humidity protection device provided in the embodiments of this utility model;
[0044] Figure 8 A schematic diagram of the circuit principle of the startup module provided in this embodiment of the utility model.
[0045] Icons: 10-Temperature and humidity protection device; 20-LDI exposure machine; 101-Temperature detection module; 102-Control module; 103-Startup module; 104-Protection module; 105-Early warning module; 201-Startup control component; 202-First ambient temperature and humidity probe; 203-First ambient temperature and humidity transmitter; 204-Laser control component; 205-Engine temperature and humidity detection probe; 206-Second ambient temperature and humidity transmitter; 207-PLC controller; 208-Host computer; 301-Integrated temperature and humidity probe; 302-Laser unit;
[0046] KM1 - Three-phase AC contactor; HL1 - Temperature and humidity exceeding limit indicator light; WS1 - Temperature and humidity detection sensor; KA2 - Temperature and humidity signal intermediate relay; SBT1 - Emergency stop switch; KA1 - System power start intermediate relay; SB1 - Panel start button; SB2 - Panel stop button. Detailed Implementation
[0047] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, and not all embodiments. The components of the embodiments of this utility model described and shown in the accompanying drawings can generally be arranged and designed in various different configurations.
[0048] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the claimed invention, but merely to illustrate selected embodiments of the invention. All other embodiments obtained by those skilled in the art based on the embodiments of the present invention without inventive effort are within the scope of protection of the present invention.
[0049] It should be noted that similar labels and letters in the following figures indicate similar items. Therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.
[0050] In the description of this utility model, it should be noted that the terms "first", "second", "third", etc. are used only for distinguishing descriptions and should not be construed as indicating or implying relative importance.
[0051] Furthermore, in the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "set" and "connection" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.
[0052] As described in the background section, current LDI exposure machines primarily monitor and control temperature and humidity during the exposure process. However, if the equipment overheats or experiences condensation on its surface before startup, powering on the various modules after startup could damage electronic components or cause production abnormalities. Furthermore, current temperature and humidity control in LDI exposure machines mainly focuses on environmental regulation, ensuring the internal environmental parameters of the exposure machine through temperature and humidity adjustments. However, effective measures are lacking for the protection of critical components.
[0053] Based on this, this embodiment provides a temperature and humidity protection solution that can overcome the above-mentioned technical problems.
[0054] The following detailed description, in conjunction with the accompanying drawings, outlines some embodiments of the present invention. Unless otherwise specified, the following embodiments and features can be combined with each other.
[0055] Please refer to Figure 1 , Figure 1 The diagram shows a temperature and humidity protection device based on an LDI exposure machine according to an embodiment of the present invention. The temperature and humidity protection device 10 includes: a temperature detection module 101, a control module 102, a start module 103, and a protection module 104.
[0056] The temperature detection module 101 is connected to the control module 102; the control module 102 is connected to the control terminal of the start module 103 and the control terminal of the protection module 104 respectively; the start module 103 is also connected to the start terminal of the LDI exposure machine 20; and the protection module 104 is also connected to the control terminal of the LDI exposure machine 20.
[0057] In this embodiment, the temperature detection module is used to acquire the temperature and humidity data of the LDI exposure machine in real time, such as the ambient temperature and humidity and the device temperature and humidity.
[0058] The control module includes multiple operating states, each corresponding to a different control signal. Based on temperature and humidity data, the control module sends the corresponding control signal to the start-up module and / or protection module to switch the operating mode of the LDI exposure machine.
[0059] Based on this, this embodiment includes a control module with multiple operating states. Based on temperature and humidity data, it sends different control signals to the startup module and / or protection module to achieve temperature and humidity detection and protection before and during operation after startup. For example, if the ambient temperature and humidity exceed the standard before startup, the control module adjusts the startup module's operating state to pause the startup of the LDI exposure machine. The LDI exposure machine can only operate normally when the ambient temperature and humidity are within normal range. As another example, after startup, the device temperature and humidity are monitored in real time. If the device temperature and humidity exceed the standard, the control module controls the operation of the laser source under the LDI exposure machine to ensure stable operation.
[0060] It should be noted that this embodiment does not limit the structure and connection relationship of the temperature and humidity protection device. For one possible implementation, please refer to... Figure 2 , Figure 2 This diagram shows another structural schematic of the temperature and humidity protection device in an embodiment of the present invention. In this embodiment, the temperature and humidity protection device 10 further includes an early warning module 105, and the control module 102 includes a start control component 201, which is connected to the early warning module 105 and the start module 103.
[0061] If the ambient temperature and humidity are less than or equal to the first preset temperature value, the start control component 201 is in the first working state and sends a first control signal to the start module 103 to start the LDI exposure machine 20.
[0062] If the ambient temperature and humidity exceed the first preset temperature value, the control component 201 is activated to enter the second working state and sends a second control signal to the warning module 105 to issue a temperature warning through the warning module 105.
[0063] Please refer to Figure 3 , Figure 3 The diagram shows the structure of the temperature detection module in this embodiment of the present invention. In this embodiment, the temperature detection module 101 includes a first ambient temperature and humidity probe 202 and a first ambient temperature and humidity transmitter 203; the first ambient temperature and humidity probe 202 is connected to the first ambient temperature and humidity transmitter 203.
[0064] The first ambient temperature and humidity probe 202 is used to detect the temperature and humidity of the environment in which the LDI exposure machine 20 is located.
[0065] When the ambient temperature and humidity are less than or equal to the first preset temperature value, the switching transistor in the first ambient temperature and humidity transmitter 203 is turned on, and a high-level signal is sent to the start-up module 103 to start the LDI exposure machine 20.
[0066] When the ambient temperature and humidity exceed the first preset temperature value, the switching transistor in the first ambient temperature and humidity transmitter 203 turns off, sending a low-level signal to the early warning module 105 to issue a temperature warning. At this time, the LDI exposure machine 20 does not start.
[0067] This embodiment does not limit the specific value of the first preset temperature value, and it can be set according to actual needs.
[0068] In one possible implementation, the first ambient temperature and humidity transmitter 203 in this embodiment may be a temperature and humidity transmitter with a relay output and an RS485 bus interface.
[0069] In another possible implementation, to reduce device costs, the first ambient temperature and humidity probe 202 and the first ambient temperature and humidity transmitter 203 can be integrated together in this embodiment, for example, a temperature and humidity probe integrated unit 301 can be used. This integrated unit 301 monitors the ambient temperature and humidity before and after power-on in real time, and then triggers a switch between the monitored ambient temperature and humidity and the subsequent startup module 103. When the ambient temperature and humidity are less than or equal to a first preset temperature value, the switch is activated, thus establishing a communication link with the startup module 103. In this embodiment, the first ambient temperature and humidity transmitter 203 or the integrated unit 301 can be connected to the subsequent startup module 103 via an RS485 bus.
[0070] In this embodiment, after the LDI exposure machine is started, to protect the engine components under the LDI exposure machine, please refer to... Figure 4 , Figure 4 This diagram shows another structural schematic of the temperature and humidity protection device in an embodiment of the present invention. In this embodiment, the control module 102 further includes a laser control component 204.
[0071] When the LDI exposure machine 20 is started, if the device temperature and humidity are greater than the second preset temperature value, the laser control component 204 is in the third working state and sends a third control signal to the LDI exposure machine 20 to stop the operation of the laser in the LDI exposure machine 20.
[0072] In this embodiment, please refer to Figure 5 , Figure 5 This diagram shows another structural schematic of the temperature and humidity protection device in an embodiment of the present invention. The temperature detection module 101 also includes an engine temperature and humidity detection probe 205 and a second ambient temperature and humidity transmitter 206. The engine temperature and humidity detection probe 205 is connected to the second ambient temperature and humidity transmitter 206.
[0073] In this embodiment, the engine temperature and humidity detection probe 205 is used to detect the device temperature and humidity of the LDI exposure machine 20, and obtain the device temperature and humidity.
[0074] The second ambient temperature and humidity transmitter 206 is used to send the device's temperature and humidity to the laser control component 204 via a communication bus.
[0075] Please also refer to Figure 6 , Figure 6 This diagram shows another structural schematic of the temperature and humidity protection device in an embodiment of the present invention. In this embodiment, the laser control component 204 includes a PLC controller 207 and a host computer 208; the engine temperature and humidity detection probe 205 is connected to the second ambient temperature and humidity transmitter 206; the PLC controller 207 is connected to the second ambient temperature and humidity transmitter 206 and the host computer 208 respectively.
[0076] In this embodiment, when the LDI exposure machine 20 is started, if the device temperature and humidity are greater than the second preset temperature value, the PLC controller 207 is in the third working state and sends a third control signal to the host computer 208 to shut down the operation of the laser in the LDI exposure machine 20.
[0077] Similar to the previous embodiment, in order to reduce device costs, the engine temperature and humidity detection probe 205 and the second ambient temperature and humidity transmitter 206 can be integrated together in this embodiment, for example, a temperature and humidity probe integrated unit can be used; at this time, the temperature and humidity probe integrated unit is also used to monitor the engine temperature and humidity, and then feed the engine temperature and humidity back to the PLC controller through the RS485 bus.
[0078] Please continue to refer to this. Figure 6 If the LDI exposure machine 20 includes a laser unit 302, the host computer 208 is connected to the laser unit 302 via a communication bus; when the PLC controller 207 is in the third working state, the host computer 208 sends a third control signal to the laser unit 302 via the communication bus to shut down the laser unit 302.
[0079] In one possible implementation, if the laser unit 302 includes multiple lasers, the laser control component 204 can be used to shut off the power supply to each laser or to adjust the operating state of each laser. For example, after the LDI exposure machine 20 is started, if the device temperature and humidity are greater than a second preset temperature value, the PLC controller 207 is in a third operating state and sends a third control signal to the host computer 208. The host computer 208 then shuts off the power supply to each laser, stopping the operation of the lasers in the LDI exposure machine 20, thus protecting the core component, the optical engine, from damage.
[0080] For another possible implementation, please refer to Figure 7 , Figure 7 This diagram illustrates another structural schematic of the temperature and humidity protection device in an embodiment of the present invention, including the aforementioned integrated temperature and humidity probe 301, PLC controller 207, host computer 208, second ambient temperature and humidity transmitter 206, and laser unit 302. The PLC controller 207 is connected to the integrated temperature and humidity probe 301 and the host computer 208; the host computer 208 is also connected to the second ambient temperature and humidity transmitter 206 and the laser unit 302.
[0081] Taking the temperature and humidity protection process after power-on as an example, in this embodiment, after the integrated temperature and humidity probe 301 is powered on, it monitors the ambient temperature and humidity and transmits the ambient temperature and humidity to the PLC controller 207 via the communication bus. Subsequently, the PLC controller 207 calls the internally integrated algorithm or hardware judgment structure to determine the status of the ambient temperature and humidity and feeds it back to the host computer 208 via ModbusTCP communication. Similarly, the host computer 208 will also receive the device temperature and humidity fed back by the second ambient temperature and humidity transmitter 206 in real time and determine the status of the device temperature and humidity so that if a certain warning value is exceeded, the laser unit 302 will be shut down to protect the optical engine.
[0082] Therefore, this embodiment detects the temperature and humidity environment of the LDI exposure machine before startup, ensuring that the LDI exposure machine can only start under normal temperature and humidity conditions, thus preventing damage caused by starting the LDI exposure machine in harsh environments. This compensates for the lack of environmental monitoring during startup, which only monitors temperature and humidity while the LDI exposure machine is running, providing greater protection. Simultaneously, during startup and operation, the temperature and humidity protection device monitors the ambient temperature and humidity and the temperature of the optical engine body in real time, taking protective actions if the device temperature, humidity, or ambient temperature exceeds the limit, preventing damage to the core components of the exposure machine due to overheating. This compensates for the losses caused by the environmental control system only adjusting the environment and failing to control the environment.
[0083] Please refer to Figure 8 , Figure 8 The circuit diagram of the start module in this embodiment is shown. The start module includes: a three-phase AC contactor KM1, a temperature and humidity exceeding the standard indicator light HL1, a temperature and humidity detection sensor WS1, a temperature and humidity signal intermediate relay KA2, an emergency stop switch SBT1, a system power start intermediate relay KA1, a panel start button SB1, and a panel stop button SB2.
[0084] The first terminal of the temperature and humidity exceeding the limit indicator light HL1 is connected to the power supply, the first terminal of the normally closed contact in the temperature and humidity detection sensor WS1, and the first terminal of the emergency stop switch SBT1; the second terminal of the temperature and humidity exceeding the limit indicator light HL1 is connected to the first terminal of the normally closed contact in the temperature and humidity signal intermediate relay KA2; the second terminal of the normally closed contact in the temperature and humidity detection sensor WS1 is connected to the first terminal of the coil in the temperature and humidity signal intermediate relay KA2; the normally closed contact of the temperature and humidity detection sensor WS1 is also connected in parallel with the normally open contact in the three-phase AC contactor KM1; the second terminal of the emergency stop switch SBT1 is connected to the first terminal of the normally open contact in the temperature and humidity signal intermediate relay KA2; the first terminal of the normally open contact of the temperature and humidity signal intermediate relay KA2... The two terminals are respectively connected to the first terminal of the panel start button SB1 and the first terminal of the normally open contact in the three-phase AC contactor KM1; the second terminal of the panel start button SB1 is connected to the first terminal of the panel stop button SB2, the second terminal of the normally open contact in the three-phase AC contactor KM1, and the first terminal of the contactor in the three-phase AC contactor KM1; the second terminal of the panel stop button SB2 is connected to the first terminal of the coil in the system power start intermediate relay KA1; the second terminal of the normally closed contact of the temperature and humidity signal intermediate relay KA2, the second terminal of the coil of the temperature and humidity signal intermediate relay KA2, the second terminal of the coil of the system power start intermediate relay KA1, and the second terminal of the coil of the three-phase AC contactor KM1 are all grounded.
[0085] In this embodiment, a three-phase AC contactor KM1 is installed in the three-phase main power supply circuit of the LDI exposure machine, and the normally open contact of the AC contactor controls the on / off state of the main power supply circuit. A temperature and humidity signal intermediate relay KA2 is installed in the power supply circuit of the control system of the LDI exposure machine, and the normally open contact of the temperature and humidity signal intermediate relay KA2 controls the on / off state of the power supply circuit of the control system in the LDI exposure machine.
[0086] The normally closed contacts of the temperature and humidity exceeding the standard indicator light HL1 and the temperature and humidity signal intermediate relay KA2 are connected to form the first circuit. The function of the first circuit is to indicate whether the temperature and humidity are abnormal. If abnormal, it can be indicated by the temperature and humidity exceeding the standard indicator light HL1.
[0087] The normally closed signal contact of the temperature and humidity sensor WS1 is connected to the coil of the intermediate temperature and humidity signal relay KA2 to form a second circuit. This second circuit can control the coil of the intermediate temperature and humidity signal relay KA2 through the signal feedback from the temperature and humidity sensor WS1, and further control the operation of the entire start-up circuit through the normally open contact of the intermediate temperature and humidity signal relay KA2. At the same time, the normally open contact of the three-phase AC contactor KM1 (i.e., the main power supply contactor) is connected in parallel with the normally closed contact of the intermediate temperature and humidity signal relay KA2, which can self-lock the second circuit after the LDI exposure machine starts normally.
[0088] The emergency stop button SBT1, the normally open contact of the temperature and humidity signal intermediate relay KA2, the panel start button SB1, the panel stop button SB2, and the system power start intermediate relay KA1 form a third circuit, which can control the start and stop of the LDI exposure machine when the ambient temperature and humidity are normal.
[0089] The contactor coil and normally open contacts of the three-phase AC contactor KM1 form a fourth circuit, which can connect the main power supply circuit of the equipment when the LDI exposure machine is started normally.
[0090] Secondly, this utility model also provides a temperature and humidity protection system based on an LDI exposure machine, including a power supply and the temperature and humidity protection device described in any of the first aspects above.
[0091] Based on this, this embodiment can protect the circuit startup process and production process by setting temperature and humidity detection, effectively protecting the LDI exposure machine and avoiding damage to critical equipment caused by excessive temperature and humidity inside the equipment.
[0092] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of this utility model, and are not intended to limit it. Although the utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some or all of the technical features therein. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of this utility model.
Claims
1. A temperature and humidity protection device based on an LDI exposure machine, characterized in that, include: The system includes a temperature detection module, a control module, a start-up module, and a protection module. The temperature detection module is connected to the control module. The control module is connected to the control terminal of the start-up module and the control terminal of the protection module. The start-up module is also connected to the start-up terminal of the LDI exposure machine. The protection module is also connected to the control terminal of the LDI exposure machine. The temperature detection module is used to acquire the temperature and humidity data of the LDI exposure machine in real time, and the temperature and humidity data includes the ambient temperature and humidity and the device temperature and humidity. The control module includes multiple operating states, each corresponding to a different control signal, to send the corresponding control signal to the start-up module and / or the protection module based on the temperature and humidity data, thereby switching the operating mode of the LDI exposure machine.
2. The temperature and humidity protection device according to claim 1, characterized in that, The temperature and humidity protection device further includes an early warning module, and the control module includes a start control component, which is connected to the early warning module. If the ambient temperature and humidity are less than or equal to the first preset temperature value, the start control component is in the first working state and sends a first control signal to the start module to start the LDI exposure machine; If the ambient temperature and humidity are greater than the first preset temperature value, the start control component is in the second working state and sends a second control signal to the early warning module to provide a temperature warning through the early warning module.
3. The temperature and humidity protection device according to claim 2, characterized in that, The temperature detection module includes a first ambient temperature and humidity probe and a first ambient temperature and humidity transmitter; the first ambient temperature and humidity probe is connected to the first ambient temperature and humidity transmitter. The first ambient temperature and humidity probe is used to detect the temperature and humidity of the environment in which the LDI exposure machine is located; When the ambient temperature and humidity are less than or equal to the first preset temperature value, the switching transistor in the first ambient temperature and humidity transmitter is turned on, and a high-level signal is sent to the start-up module to start the LDI exposure machine. When the ambient temperature and humidity exceed the first preset temperature value, the switching transistor in the first ambient temperature and humidity transmitter is turned off, and a low-level signal is sent to the early warning module to provide a temperature warning.
4. The temperature and humidity protection device according to claim 1 or 2, characterized in that, The control module also includes a laser control component. When the LDI exposure machine is started, if the temperature and humidity of the device are greater than the second preset temperature value, the laser control component is in the third working state and sends a third control signal to the LDI exposure machine to stop the operation of the laser in the LDI exposure machine.
5. The temperature and humidity protection device according to claim 4, characterized in that, The temperature detection module also includes an engine temperature and humidity detection probe and a second ambient temperature and humidity transmitter, wherein the engine temperature and humidity detection probe is connected to the second ambient temperature and humidity transmitter. The engine temperature and humidity detection probe is used to detect the device temperature and humidity of the LDI exposure machine to obtain the device temperature and humidity. The second ambient temperature and humidity transmitter is used to send the temperature and humidity of the device to the laser control component via a communication bus.
6. The temperature and humidity protection device according to claim 5, characterized in that, The laser control component includes a PLC controller and a host computer; the engine temperature and humidity detection probe is connected to the second ambient temperature and humidity transmitter; the PLC controller is connected to both the second ambient temperature and humidity transmitter and the host computer. When the LDI exposure machine is started, if the temperature and humidity of the device are greater than the second preset temperature value, the PLC controller is in the third working state and sends a third control signal to the host computer to shut down the operation of the laser in the LDI exposure machine.
7. The temperature and humidity protection device according to claim 6, characterized in that, The LDI exposure machine includes a laser unit, and the host computer is connected to the laser unit via a communication bus; When the PLC controller is in the third working state, the host computer sends a third control signal to the laser unit through the communication bus to shut down the laser unit.
8. The temperature and humidity protection device according to claim 5, characterized in that, The temperature detection module also includes a second ambient temperature and humidity probe; the second ambient temperature and humidity probe is connected to the second ambient temperature and humidity transmitter. The second ambient temperature and humidity probe is used to detect the temperature and humidity inside the LDI exposure machine to obtain the internal ambient temperature and humidity. The second ambient temperature and humidity transmitter is used to send the internal ambient temperature and humidity to the laser control component via a communication bus; When the LDI exposure machine is started, if the internal ambient temperature and humidity are greater than the third preset temperature value, the laser control component is in the third working state and sends a third control signal to the LDI exposure machine to stop the operation of the laser in the LDI exposure machine.
9. The temperature and humidity protection device according to claim 1, characterized in that, The start-up module includes: a three-phase AC contactor, a temperature and humidity exceeding the standard indicator light, a temperature and humidity detection sensor, a temperature and humidity signal intermediate relay, an emergency stop switch, a system power start intermediate relay, a panel start button, and a panel stop button; The first terminal of the temperature and humidity exceeding the limit indicator light is connected to the power supply, the first terminal of the normally closed contact in the temperature and humidity detection sensor, and the first terminal of the emergency stop switch; the second terminal of the temperature and humidity exceeding the limit indicator light is connected to the first terminal of the normally closed contact in the temperature and humidity signal intermediate relay; the second terminal of the normally closed contact in the temperature and humidity detection sensor is connected to the first terminal of the coil in the temperature and humidity signal intermediate relay; the normally closed contact of the temperature and humidity detection sensor is also connected in parallel with the normally open contact in the three-phase AC contactor; the second terminal of the emergency stop switch is connected to the first terminal of the normally open contact in the temperature and humidity signal intermediate relay; the first terminal of the normally open contact in the temperature and humidity signal intermediate relay... The two ends are respectively connected to the first end of the panel start button and the first end of the normally open contact in the three-phase AC contactor; the second end of the panel start button is connected to the first end of the panel stop button, the second end of the normally open contact in the three-phase AC contactor, and the first end of the contactor in the three-phase AC contactor; the second end of the panel stop button is connected to the first end of the coil in the system power start intermediate relay; the second end of the normally closed contact of the temperature and humidity signal intermediate relay, the second end of the coil of the temperature and humidity signal intermediate relay, the second end of the coil of the system power start intermediate relay, and the second end of the coil of the three-phase AC contactor are all grounded.
10. A temperature and humidity protection system based on an LDI exposure machine, characterized in that, It includes a power supply and the temperature and humidity protection device as described in any one of claims 1 to 9.